CN219385338U - Pickling device for electroplating solution production for integrated circuits - Google Patents
Pickling device for electroplating solution production for integrated circuits Download PDFInfo
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- CN219385338U CN219385338U CN202320662169.8U CN202320662169U CN219385338U CN 219385338 U CN219385338 U CN 219385338U CN 202320662169 U CN202320662169 U CN 202320662169U CN 219385338 U CN219385338 U CN 219385338U
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- pickling
- subassembly
- integrated circuits
- electroplating solution
- assembly
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The utility model relates to the technical field of pickling devices, in particular to a pickling device for producing electroplating solution for an integrated circuit, which comprises a pickling component and a transmission component, wherein supporting frames which are uniformly distributed are arranged on two sides of the transmission component, the supporting frames are fixedly connected with the transmission component, the pickling component is arranged below the transmission component, a filter screen component is arranged in the pickling component and is in sliding connection with the pickling component, a limiting groove is formed in the transmission component, a sliding piece is arranged in the limiting groove, a conveying motor is arranged at one end of the transmission component, and the conveying motor is fixedly connected with the upper part of the transmission component; finally, the integrated circuit to be processed is fully contacted with pickling solution, so that the pickling efficiency is improved; finally, the oxide left by the pickling solution is cleaned, so that the cost for replacing the pickling solution is saved.
Description
Technical Field
The utility model relates to the technical field of acid pickling devices, in particular to an acid pickling device for producing electroplating solution for integrated circuits.
Background
The integrated circuit needs to be electroplated by using an electroplating solution after the production is finished so as to prevent oxidation, and a pickling device is used for pickling before electroplating; the acid cleaning is one of the indispensable procedures in the electroplating process, the three-phase electroplating is performed for seven-phase acid cleaning, and all the different base material plating parts are subjected to acid cleaning treatment before entering the electroplating solution, but the types or the concentrations of the treatment solutions are different, otherwise, the oxide film (oxide scale) on the surface of the workpiece cannot be completely removed, so that firm plating quality cannot be obtained, and even a plating cannot be obtained at all.
In the conventional acid pickling device for producing the electroplating solution for the integrated circuit, the acid pickling device is hoisted into the acid pickling tank for a period of time and then hoisted out, and the acid pickling process is basically kept still, so that the contact surface of an object and pickling solution is limited, and the acid pickling efficiency is reduced; meanwhile, rust or oxide skin is left after pickling, so that the pickling solution needs to be replaced regularly, and the cost is increased.
Disclosure of Invention
In order to solve the problems in the prior art, a pickling device for producing electroplating solution for integrated circuits is provided.
The specific technical scheme is as follows:
the utility model provides an integrated circuit is with electroplating solution production with pickling device, includes pickling subassembly and transmission subassembly, transmission subassembly's both sides are equipped with evenly distributed's support frame, support frame fixed connection transmission subassembly, transmission subassembly's below is equipped with pickling subassembly, pickling subassembly's inside is equipped with the filter screen subassembly, filter screen subassembly sliding connection pickling subassembly, transmission subassembly has seted up the limit groove, the inside of limit groove is equipped with the slider, transmission subassembly's one end is equipped with conveying motor, conveying motor fixed connection transmission subassembly's top.
Preferably, the output end of the conveying motor is movably connected with the conveying assembly in a penetrating mode, a conveying screw rod is arranged in the limiting groove, and the output end of the conveying motor is connected with one end of the conveying screw rod in a meshed mode.
Preferably, the conveying screw rod is movably connected with the transmission assembly, and the conveying screw rod is in threaded connection with the sliding piece.
Preferably, a servo motor is arranged on one side of the sliding piece, the servo motor is fixedly connected with the sliding piece, an electro-hydraulic cylinder is arranged above the sliding piece, and the output end of the servo motor is movably connected with the sliding piece in a penetrating mode.
Preferably, the electrohydraulic cylinder is fixedly connected with the sliding piece, the output end of the electrohydraulic cylinder is provided with a telescopic rod, the telescopic rod is in penetrating and movable connection with the sliding piece, and the telescopic rod is in meshed connection with the output end of the servo motor.
Preferably, a hanging disc is arranged below the telescopic rod, and the hanging disc is fixedly connected with the telescopic rod.
Preferably, the filter screen assembly is provided with uniformly distributed linkage parts, and the linkage parts are fixedly connected with the filter screen assembly.
Preferably, the linkage part is connected through threads by a threaded rod, and the threaded rod is fixedly connected to the output end of the positive and negative motor.
Preferably, the positive and negative motor is fixedly connected with the inside of the pickling assembly, and the threaded rod is movably connected with the pickling assembly.
The technical scheme has the following advantages or beneficial effects:
1. through the transmission assembly who sets up, thereby it carries the feed screw to select to make its output to carry the motor operation, and then let the slider slide to transmission assembly directly over the limit within range of limit groove, thereby the electro-hydraulic jar operation makes the telescopic link down displacement this moment, the telescopic link meshes with servo motor's output when making the string put the dish to immerse transmission assembly inside, and then make servo motor operation can make the telescopic link rotate, so make string put the dish and carry the work piece of bottom to rotate, finally make the integrated circuit and the pickling solution fully contact of being processed, thereby improved pickling efficiency.
2. Through the pickling subassembly that sets up, after pickling integrated circuit, positive and negative motor operates to make the threaded rod rotatory take linkage portion and filter screen subassembly to reciprocate from top to bottom, thereby filter pickling subassembly inside pickling solution, finally make the oxide that has cleared up the pickling solution and leave, thereby saved the cost of changing the pickling solution.
Drawings
Embodiments of the present utility model will now be described more fully with reference to the accompanying drawings. The drawings, however, are for illustration and description only and are not intended as a definition of the limits of the utility model.
FIG. 1 is a schematic diagram of the overall structure of an acid cleaning device for producing electroplating solution for integrated circuits according to the present utility model;
FIG. 2 is a schematic diagram showing a transmission assembly of an acid cleaning apparatus for producing an electroplating solution for an integrated circuit and an object thereof according to the present utility model;
FIG. 3 is a schematic diagram of the sliding member and the internal structure of the pickling apparatus for producing electroplating solution for integrated circuits according to the present utility model;
fig. 4 is a schematic diagram of a pickling assembly and an object thereof of a pickling device for producing an electroplating solution for an integrated circuit according to the present utility model.
The above reference numerals denote: a pickling assembly 10; a screen assembly 11; a linkage part 12; a forward and reverse motor 13; a threaded rod 14; a transmission assembly 20; a support frame 21; defining a slot 22; a conveying motor 23; a conveying screw 24; a slider 25; a servo motor 26; an electro-hydraulic cylinder 27; a telescopic rod 28; a hanging plate 29.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.
The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
Referring to fig. 1-4, a pickling device for producing electroplating solution for integrated circuits comprises a pickling assembly 10 and a transmission assembly 20, wherein supporting frames 21 which are uniformly distributed are arranged on two sides of the transmission assembly 20, the supporting frames 21 are fixedly connected with the transmission assembly 20, the pickling assembly 10 is arranged below the transmission assembly 20, a filter screen assembly 11 is arranged inside the pickling assembly 10, the filter screen assembly 11 is in sliding connection with the pickling assembly 10, the transmission assembly 20 is provided with a limiting groove 22, a sliding piece 25 is arranged inside the limiting groove 22, one end of the transmission assembly 20 is provided with a conveying motor 23, and the conveying motor 23 is fixedly connected with the upper part of the transmission assembly 20; the exterior of the pickling assembly 10 is provided with a control assembly which is connected to each motor by a wire and operates it.
Further, the output end of the conveying motor 23 is movably connected with the transmission assembly 20 in a penetrating manner, a conveying screw 24 is arranged in the limiting groove 22, and the output end of the conveying motor 23 is connected with one end of the conveying screw 24 in a meshed manner; the output end of the conveying motor 23 is provided with a gear, so that the conveying screw 24 can rotate after the conveying motor 23 rotates, and the sliding piece 25 can slide.
Further, the conveying screw 24 is movably connected with the transmission assembly 20, and the conveying screw 24 is in hole threading connection with the sliding piece 25; the slide 25 is provided with limiting members on both sides thereof so that the slide 25 and its object slide within the limits of the limiting grooves 22 while the servo motor 26 is fixed to one of the limiting members.
Further, a servo motor 26 is arranged on one side of the sliding piece 25, the servo motor 26 is fixedly connected with the sliding piece 25, an electro-hydraulic cylinder 27 is arranged above the sliding piece 25, and an output end of the servo motor 26 is in penetrating and movable connection with the sliding piece 25; the output end of the servo motor 26 is a screw rod, and the hole is movably connected with the sliding piece 25 and is used for being meshed with a gear of the telescopic rod 28 after the telescopic rod 28 moves downwards.
Further, the electrohydraulic cylinder 27 is fixedly connected with the sliding piece 25, the output end of the electrohydraulic cylinder 27 is provided with a telescopic rod 28, the telescopic rod 28 is penetrated through the movable connecting sliding piece 25, and the telescopic rod 28 is meshed with the output end of the servo motor 26; the telescopic rod 28 is composed of a gear and a vertical rod, and the gear and the vertical rod are fixedly connected, but the gear is movably connected to the output end of the electrohydraulic cylinder 27, so that the telescopic rod 28 can rotate with the hanging disc 29 after being meshed with a screw rod at the output end of the servo motor 26.
Further, a hanging disc 29 is arranged below the telescopic rod 28, and the hanging disc 29 is fixedly connected with the telescopic rod 28; the bottom of the catch tray 29 is provided with a catch for catching the workpiece of the integrated circuit so as to be immersed in the pickling solution inside the pickling assembly 10.
Further, the filter screen assembly 11 is provided with uniformly distributed linkage parts 12, and the linkage parts 12 are fixedly connected with the filter screen assembly 11; the inside of the pickling assembly 10 is used for placing pickling solution, a port is arranged on the outer wall of the pickling assembly 10 and used for injecting and discharging pickling solution into the pickling assembly, and meanwhile, a connecting end is also arranged on the outer wall and used for connecting the inside positive and negative motor 13 through a circuit; the filter screen assembly 11 is a common filter screen and is used for collecting washed oxide in pickling solution; the pickling assembly 10 is provided with a groove corresponding to the linkage part 12, and a limiting rod is arranged in the pickling assembly and used for limiting the sliding of the filter screen assembly 11.
Further, the linkage part 12 is connected by a threaded rod 14 through threads, and the threaded rod 14 is fixedly connected to the output end of the forward and reverse motor 13; after the forward and reverse motor 13 operates, the threaded rod 14 rotates, so that the linkage part 12 carries the filter screen assembly 11 to reciprocate up and down, and the pickling solution is filtered repeatedly, so that oxides in the pickling solution are removed.
Further, the front motor 13 is fixedly connected with the inside of the pickling assembly 10, and the threaded rod 14 is movably connected with the pickling assembly 10; both the reversible motor 13 and the threaded rod 14 are internal to the pickling assembly 10.
Working principle: when the device is used, through the arranged transmission assembly 20, when the transmission motor 23 operates to enable the output end of the transmission assembly to carry the transmission screw rod 24 to select, the sliding piece 25 slides to the position right above the transmission assembly 20 within the limit range of the limit groove 22, the electro-hydraulic cylinder 27 operates to enable the telescopic rod 28 to move downwards, the hanging disc 29 is immersed into the transmission assembly 20, the telescopic rod 28 is meshed with the output end of the servo motor 26, the servo motor 26 operates to enable the telescopic rod 28 to rotate, so that the hanging disc 29 rotates with a workpiece at the bottom, and finally the integrated circuit to be processed is fully contacted with pickling solution, so that the pickling efficiency is improved. Through the pickling subassembly 10 that sets up, after pickling integrated circuit, positive and negative motor 13 operates to make threaded rod 14 rotatory take linkage portion 12 and filter screen subassembly 11 to reciprocate from top to bottom, thereby filter pickling subassembly 10 inside pickling liquid, finally make the oxide that has cleared up the pickling liquid and leave, thereby saved the cost of changing the pickling liquid.
The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.
Claims (9)
1. An acid cleaning device for producing electroplating solution for integrated circuits, which is characterized in that: including pickling subassembly (10) and transmission subassembly (20), the both sides of transmission subassembly (20) are equipped with evenly distributed's support frame (21), support frame (21) fixed connection transmission subassembly (20), the below of transmission subassembly (20) is equipped with pickling subassembly (10), the inside of pickling subassembly (10) is equipped with filter screen subassembly (11), filter screen subassembly (11) sliding connection pickling subassembly (10), inject groove (22) have been seted up to transmission subassembly (20), inject the inside of groove (22) and be equipped with slider (25), the one end of transmission subassembly (20) is equipped with transport motor (23), transport motor (23) fixed connection the top of transmission subassembly (20).
2. An electroplating solution production pickling apparatus for integrated circuits according to claim 1, wherein: the output end of the conveying motor (23) is movably connected with the conveying assembly (20) in a penetrating mode, a conveying screw rod (24) is arranged in the limiting groove (22), and the output end of the conveying motor (23) is connected with one end of the conveying screw rod (24) in a meshed mode.
3. An electroplating solution production pickling apparatus for integrated circuits according to claim 2, wherein: the conveying screw rod (24) is movably connected with the transmission assembly (20), and the conveying screw rod (24) is connected with the sliding piece (25) through a threaded mode.
4. A pickling apparatus for producing an electroplating solution for integrated circuits according to claim 3, wherein: one side of slider (25) is equipped with servo motor (26), servo motor (26) fixed connection slider (25), the top of slider (25) is equipped with electric pneumatic cylinder (27), the output of servo motor (26) is worn swing joint slider (25).
5. The pickling device for producing an electroplating solution for integrated circuits according to claim 4, wherein: the electro-hydraulic cylinder (27) is fixedly connected with the sliding part (25), a telescopic rod (28) is arranged at the output end of the electro-hydraulic cylinder (27), the telescopic rod (28) is movably connected with the sliding part (25) in a penetrating mode, and the telescopic rod (28) is connected with the output end of the servo motor (26) in a meshing mode.
6. The pickling device for producing an electroplating solution for integrated circuits according to claim 5, wherein: a hanging disc (29) is arranged below the telescopic rod (28), and the hanging disc (29) is fixedly connected with the telescopic rod (28).
7. An electroplating solution production pickling apparatus for integrated circuits according to claim 1, wherein: the filter screen assembly (11) is provided with evenly distributed linkage parts (12), and the linkage parts (12) are fixedly connected with the filter screen assembly (11).
8. The pickling device for producing an electroplating solution for integrated circuits according to claim 7, wherein: the linkage part (12) is connected through threads by a threaded rod (14), and the threaded rod (14) is fixedly connected to the output end of the forward and reverse motor (13).
9. The pickling device for producing an electroplating solution for integrated circuits according to claim 8, wherein: the positive and negative motor (13) is fixedly connected with the inside of the pickling assembly (10), and the threaded rod (14) is movably connected with the pickling assembly (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320662169.8U CN219385338U (en) | 2023-03-29 | 2023-03-29 | Pickling device for electroplating solution production for integrated circuits |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320662169.8U CN219385338U (en) | 2023-03-29 | 2023-03-29 | Pickling device for electroplating solution production for integrated circuits |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219385338U true CN219385338U (en) | 2023-07-21 |
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ID=87190568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320662169.8U Active CN219385338U (en) | 2023-03-29 | 2023-03-29 | Pickling device for electroplating solution production for integrated circuits |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219385338U (en) |
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2023
- 2023-03-29 CN CN202320662169.8U patent/CN219385338U/en active Active
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