CN219369540U

CN219369540U - Spectrum ellipsometry device

Info

Publication number: CN219369540U
Application number: CN202223363532.0U
Authority: CN
Inventors: 张正华; 雷家宝; 杨康; 徐铁虎; 魏俊; 张琪
Original assignee: Wuhan Eoptics Technology Co ltd
Current assignee: Wuhan Eoptics Technology Co ltd
Priority date: 2022-12-08
Filing date: 2022-12-08
Publication date: 2023-07-18
Anticipated expiration: 2032-12-08

Abstract

The utility model relates to the technical field of detection and measurement, and provides a spectrum ellipsometry device which comprises a frame, a sample stage, a three-dimensional moving assembly, a polarization assembly and a polarization detection assembly, wherein the frame is provided with a plurality of sample stages; the rack comprises a bottom plate and a bracket, and the bracket is arranged perpendicular to the bottom plate; the sample platform is arranged on the bottom plate through the three-dimensional moving assembly and is used for placing a sample to be detected; the three-dimensional moving assembly is used for driving the sample table to move in a three-dimensional direction; the polarization component and the polarization analysis component are both arranged on the bracket, the polarization component is used for emitting polarized light to the sample to be detected, and the polarization analysis component is used for detecting and analyzing the reflected light of the sample to be detected. The spectroscopic ellipsometry device provided by the utility model can not only adaptively adjust the specific position of the sample, but also improve the measurement accuracy; in addition, the modularized design of each component such as the polarizing component and the polarization detection component can quickly respond to the customization needs, reduces the design and assembly time, meets the diversified requirements, and reduces the production cost.

Description

Spectrum ellipsometry device

Technical Field

The utility model relates to the technical field of detection and measurement, in particular to a spectrum ellipsometry device.

Background

Ellipsometers are used to detect film thickness, optical constants, and material microstructure characteristics, and can measure samples including bulk materials, films, and multi-layer structures grown or deposited on planar substrates. Because the measuring environment does not need vacuum and non-contact and non-destructive properties to the sample, the ellipsometer is more and more widely used for rapid test and research of optical characteristics, structural characteristics, growth process and quality of materials such as dielectric, semiconductor, metal and organic matters, and the like, and the desktop type spectroscopic ellipsometer is widely applied to research, development and manufacturing in various fields at present.

However, in the prior art, most of the existing desktop spectroscopic ellipsometers are of fixed structures, and detection errors are very easy to generate when a sample or a device itself is displaced, so that the detection accuracy is low, and the applicable scene is relatively fixed. Along with the continuous expansion of application scenes and the personalized requirements under different use conditions, the existing fixed structure cannot meet the design requirements of users on low cost, high precision, short period and simple operation of equipment. Therefore, the utility model provides a novel desktop spectrum ellipsometry device to solve the technical problems.

Disclosure of Invention

Based on the expression, the utility model provides a spectrum ellipsometer to solve the problems that the spectrum ellipsometer in the prior art has limited detection precision and cannot adapt to personalized requirements.

The technical scheme for solving the technical problems is as follows:

the utility model provides a spectroscopic ellipsometry apparatus comprising: the device comprises a frame, a sample table, a three-dimensional moving assembly, a polarizing assembly and a polarization analysis assembly;

the rack comprises a bottom plate and a bracket, and the bracket is arranged perpendicular to the bottom plate;

the sample platform is arranged on the bottom plate through the three-dimensional moving assembly and is used for placing a sample to be detected;

the three-dimensional moving assembly is used for driving the sample table to move in a three-dimensional direction;

the polarization component and the polarization detection component are both arranged on the support, the polarization component is used for emitting polarized light to the sample to be detected, and the polarization detection component is used for detecting and analyzing reflected light of the sample to be detected.

On the basis of the technical scheme, the utility model can be improved as follows.

Further, the three-dimensional moving assembly comprises an X-axis driving piece, a Y-axis driving piece and a Z-axis driving piece;

the X-axis driving piece is arranged on the bottom plate, the Y-axis driving piece is arranged on the X-axis driving piece, and the Z-axis driving piece is arranged on the Y-axis driving piece;

the sample stage is connected with one end of the Z-axis driving piece, which is far away from the bottom plate.

Further, the bracket comprises a first connecting piece, a second connecting piece and a third connecting piece;

the first connecting piece and the second connecting piece are vertically connected with the bottom plate and are oppositely arranged;

and two ends of the third connecting piece are respectively connected with the first connecting piece and the second connecting piece and are arranged in parallel with the bottom plate.

Further, the polarizing component comprises an incident light source and a polarizing arm;

the incident light source is arranged on the first connecting piece, the polarizing arm is arranged on the third connecting piece, and the input end of the polarizing arm is connected with the output end of the incident light source through optical fibers.

Further, the incident light source is a deuterium halogen light source.

Further, the polarization-detecting component comprises a polarization-detecting arm and a spectrometer;

the polarization-maintaining arm is arranged on the third connecting piece, the spectrometer is arranged on the second connecting piece, and the output end of the polarization-maintaining arm is connected with the input end of the spectrometer through optical fibers.

Further, the spectrum ellipsometry device further comprises an angle-variable back plate;

the angle-changing back plate is connected to the third connecting piece;

the polarizing arm and the polarization-detecting arm are connected with the angle-variable back plate in an adjustable mode.

Further, the angle-changing back disc comprises a disc body, a first rotating arm and a second rotating arm;

the first rotating arm and the second rotating arm are arranged on the disc body in an included angle;

the polarizing arm is connected with the first radial arm, and the polarization-detecting arm is connected with the second radial arm.

Further, the included angle between the first radial arm and the second radial arm is adjustable, so as to adjust the included angle between the polarizing arm and the analyzer.

Further, the spectroscopic ellipsometry apparatus further comprises an auto-collimator;

the auto-collimator is connected to the tray body and arranged towards the sample stage; the auto-collimator is used for calibrating the optical deviation of the sample to be tested on the sample stage so as to carry out auxiliary debugging.

Compared with the prior art, the technical scheme of the application has the following beneficial technical effects:

according to the spectroscopic ellipsometry device, the rack, the sample table, the three-dimensional moving assembly, the polarizing assembly and the polarization detection assembly are arranged, the sample table is arranged on the bottom plate of the rack through the three-dimensional moving assembly, the sample table is used for placing a sample to be detected, the three-dimensional moving assembly can drive the sample table and the sample placed on the sample table to move in the three-dimensional direction, so that the position of the sample can be accurately adjusted, the sample can correspond to the polarizing assembly and the polarization detection assembly, the polarizing assembly can accurately irradiate polarized light on the sample to be detected, and the polarization detection assembly can accurately detect and analyze reflected light of the sample to be detected. Compared with the prior art, the spectroscopic ellipsometry device provided by the utility model can not only adaptively adjust the specific position of the sample, but also improve the measurement accuracy; in addition, the modularized design of each component such as the polarizing component and the polarization detection component can quickly respond to the customization needs, reduces the design and assembly time, meets the diversified requirements, and reduces the production cost.

Drawings

FIG. 1 is a schematic diagram of a spectroscopic ellipsometry apparatus according to an embodiment of the present utility model;

fig. 2 is a schematic structural diagram of an incident light source according to an embodiment of the present utility model;

FIG. 3 is a schematic structural diagram of a polarizer according to an embodiment of the present utility model;

fig. 4 is a schematic structural diagram of a rack according to an embodiment of the present utility model;

FIG. 5 is a schematic view of a sample stage and a Z-axis drive provided in an embodiment of the present utility model;

FIG. 6 is a schematic structural diagram of a deflection arm according to an embodiment of the present utility model;

fig. 7 is a schematic structural diagram of a variable angle back plate according to an embodiment of the present utility model;

FIG. 8 is a schematic structural diagram of a spectrometer according to an embodiment of the present utility model;

in the drawings, the list of components represented by the various numbers is as follows:

1. a frame; 11. a bottom plate; 12. a bracket; 121. a first connector; 122. a second connector; 123. a third connecting member;

2. a sample stage;

3. a three-dimensional moving assembly; 31. an X-axis driving member; 32. a Y-axis driving member; 33. a Z-axis driving member;

4. a polarizing assembly; 41. an incident light source; 42. a polarizing arm;

5. a polarization component; 51. a deflection arm; 52. a spectrometer;

6. a variable angle back plate; 61. a tray body; 62. a first radial arm; 63. a second radial arm;

7. an autocollimator.

Detailed Description

In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. Examples of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.

Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Embodiments of the present utility model will be described in further detail with reference to the accompanying drawings and examples, which are provided to illustrate the present utility model, but are not intended to limit the scope of the present utility model.

As shown in fig. 1 to 8, an embodiment of the present utility model provides a spectroscopic ellipsometry apparatus, including: the device comprises a frame 1, a sample stage 2, a three-dimensional moving assembly 3, a polarizing assembly 4 and a polarization analysis assembly 5.

The frame 1 comprises a bottom plate 11 and a bracket 12, and the bracket 12 is arranged perpendicular to the bottom plate 11.

The sample stage 2 is arranged on the bottom plate 11 through the three-dimensional moving assembly 3, and the sample stage 2 is used for placing a sample to be detected.

The three-dimensional moving component 3 is used for driving the sample stage 2 to move in three-dimensional directions.

The polarization component 4 and the polarization component 5 are both arranged on the bracket 12, the polarization component 4 is used for emitting polarized light to the sample to be detected, and the polarization component 5 is used for detecting and analyzing the reflected light of the sample to be detected.

Specifically, as shown in fig. 1, in the spectroscopic ellipsometry device provided by the embodiment of the utility model, by arranging the frame 1, the sample stage 2, the three-dimensional moving assembly 3, the polarizing assembly 4 and the polarization-detecting assembly 5, wherein the sample stage 2 is arranged on the bottom plate 11 of the frame 1 through the three-dimensional moving assembly 3, the sample stage 2 is used for placing a sample to be detected, and the three-dimensional moving assembly 3 can drive the sample stage 2 and the sample placed on the sample stage 2 to move in the three-dimensional direction, so that the position of the sample can be accurately adjusted, and the sample can correspond to the polarizing assembly 4 and the polarization-detecting assembly 5, thereby realizing focusing.

The polarization component 4 can accurately irradiate polarized light on the sample to be detected, and the polarization detection component 5 can accurately detect and analyze the reflected light of the sample to be detected.

Wherein, the frame 1 can be made of aluminum section bar or other metal materials to ensure the rigidity.

Compared with the prior art, the spectroscopic ellipsometry device provided by the embodiment of the utility model can not only adaptively adjust the specific position of the sample, but also improve the measurement accuracy; in addition, the modularized design of each component such as the polarizing component 4 and the polarization detection component 5 can quickly respond to the customization needs, reduces the design and assembly time, meets the diversified requirements, and reduces the production cost.

In an alternative embodiment, three-dimensional moving assembly 3 includes an X-axis drive 31, a Y-axis drive 32, and a Z-axis drive 33.

The X-axis driving member 31 is provided on the base plate 11, the Y-axis driving member 32 is provided on the X-axis driving member 31, and the Z-axis driving member 33 is provided on the Y-axis driving member 32.

Sample stage 2 is connected to the end of Z-axis drive 33 remote from base plate 11.

Specifically, as shown in fig. 4, the sample stage 2 is mounted on the base plate 11 on an XY-axis displacement stage, namely, an X-axis driving member 31 and a Y-axis driving member 32, so that the position movement in the XY-axis direction of the sample stage can be realized; as shown in fig. 1, a Z-axis driving member 33, that is, a height displacement member, is connected to the XY-axis displacement stage, and as shown in fig. 5, the sample stage 2 is disposed at the top end of the Z-axis driving member 33, and the Z-axis driving member 33 can adjust the position of the sample stage 2 above the height.

Through setting up X axle driving piece 31, Y axle driving piece 32 and Z axle driving piece 33, can accurate regulation wait to detect the sample in three-dimensional direction's ready position, put up suitable sample platform 2 according to the required degree of freedom of debugging and place in XY axle displacement bench, accomplish the measurement needs, and then improve the accuracy that detects.

In an alternative embodiment, as shown in fig. 4, the bracket 12 includes a first connector 121, a second connector 122, and a third connector 123.

The first connecting member 121 and the second connecting member 122 are vertically connected to the base plate 11 and are disposed opposite to each other. Both ends of the third connecting member 123 are connected to the first and second connecting members 121 and 122, respectively, and are disposed in parallel with the base plate 11. Namely, the first connecting piece 121, the second connecting piece 122 and the third connecting piece 123 form a U-shaped bracket 12 which is mutually vertical and is connected to the bottom plate 11, so as to provide mounting positions for the polarizer assembly 4 and the analyzer assembly 5.

Further, as shown in fig. 1 and 3, the polarizing assembly 4 includes an incident light source 41 and a polarizing arm 42.

The incident light source 41 is disposed on the first connecting member 121, the polarizing arm 42 is disposed on the third connecting member 123, and an input end of the polarizing arm 42 is connected to an output end of the incident light source 41 through an optical fiber.

Wherein the incident light source 41 is a deuterium halogen light source.

Specifically, the polarizer arm 42 is used to generate a light beam of known polarization from light emitted from a deuterium halogen light source through an optical fiber.

In an alternative embodiment, as shown in fig. 1 and 6, the analyzer assembly 5 includes an analyzer arm 51 and a spectrometer 52.

The analyzer arm 51 is disposed on the third connecting member 123, the spectrometer 52 is disposed on the second connecting member 122, and an output end of the analyzer arm 51 is connected with an input end of the spectrometer 52 through an optical fiber.

Specifically, the polarization-detecting arm 51 is used for detecting the polarization state of the outgoing beam after passing through the sample to be detected; the spectrometer 52 is used to analyze the outgoing light beam that is directed out through the optical fiber.

In addition, the polarization component 4 and the polarization analyzer 5 of the spectroscopic ellipsometry device are modularized, the light source module and the spectrometer 52 module are separated and connected to the two ends of the bracket 12 respectively, the weight of the polarization end and the polarization analyzer is reduced, the structural rigidity is increased, the measurement requirements under different wave bands can be rapidly realized by selecting different light sources and spectrometers 52, and the personalized requirements of the spectroscopic ellipsometry device are met.

In an alternative embodiment, as shown in fig. 1, the spectroscopic ellipsometry apparatus further comprises a variable angle back plate 6.

The angle-changing back plate 6 is connected to the third connecting piece 123; the polarizing arm 42 and the analyzing arm 51 are connected with the angle-variable back plate 6 in an angle-adjustable way.

As shown in fig. 7, the angle-changing back plate 6 includes a plate body 61, a first arm 62, and a second arm 63.

The first radial arm 62 and the second radial arm 63 are disposed on the disc 61 at an angle.

The polarizing arm 42 is connected to a first arm 62, and the analyzer arm 51 is connected to a second arm 63.

Specifically, the disc body 61 of the angle-changing back disc 6 is connected with the double-rotation arm through the sliding bearing, and the high-precision angle-changing requirement can be realized by arranging the sliding bearing on the angle-changing back disc 6; and adopt the spring pin to realize the accurate location of different angles, realize high accuracy angle position demand through the spring pin.

The first radial arms 62 and the second radial arms 63 are symmetrically arranged, i.e. are respectively distributed on the left side and the right side of the disc body 61, and the included angle of the first radial arms 62 and the second radial arms 63 is adjustable, so that the adjustment of the included angle of the polarizing arm 42 and the polarizing arm 51 is realized.

In an alternative embodiment, as shown in fig. 1 and 8, the spectroscopic ellipsometry apparatus further comprises an auto-collimator 7.

The autocollimator 7 is connected to the tray 61 and is arranged towards the sample stage 2; the autocollimator 7 is used for calibrating the optical deviation of the sample to be tested on the sample stage 2 for auxiliary debugging.

The specific use method of the spectrum ellipsometry device in actual operation is as follows:

firstly, horizontally placing a frame 1 to enable a bottom plate 11 of the frame to be in a horizontal state and a bracket 12 to be in a vertical state;

secondly, fixing the angle-changing back plate 6 at the middle position of a third connecting piece 123 of the frame 1 by using screws and an angle seat, and fixing the polarizing arm 42 and the polarization-detecting arm 51 on a first rotating arm 62 and a second rotating arm 63 of the angle-changing back plate 6 respectively from the inner side by using screws;

thirdly, fixing the deuterium halogen light source on the first connecting piece 121 of the frame 1 through a sliding block nut, and connecting the deuterium halogen light source with the polarizing arm 42 through an optical fiber;

fourthly, fixing the spectrometer 52 on the second connecting piece 122 of the frame 1 through a sliding block nut, and connecting the spectrometer 52 with the polarization-detecting arm 51 through optical fibers;

and fifthly, installing an auto-collimator 7 at the middle position of the angle-changing back plate 6, debugging the device, and performing auxiliary debugging by using the auto-collimator 7 in the debugging process.

Finally, the deuterium halogen light source emits incident light, the incident light is transmitted to the polarizing arm 42 through the optical fiber, the polarizing arm 42 generates a light beam with a known polarization state, the light beam is reflected by the sample to be detected to form reflected light, the polarization detecting arm 51 detects the reflected light emitted after passing through the sample to be detected, and the spectrometer 52 further analyzes the emitted light beam led out through the optical fiber.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A spectroscopic ellipsometry apparatus comprising: the device comprises a frame, a sample table, a three-dimensional moving assembly, a polarizing assembly and a polarization analysis assembly;

2. The spectroscopic ellipsometry apparatus of claim 1, wherein the three-dimensional movement assembly comprises an X-axis drive, a Y-axis drive, and a Z-axis drive;

3. The spectroscopic ellipsometry apparatus of claim 1, wherein the bracket comprises a first connector, a second connector, and a third connector;

4. A spectroscopic ellipsometry apparatus according to claim 3, wherein the polarizing assembly comprises an incident light source and a polarizing arm;

5. The spectroscopic ellipsometry apparatus of claim 4, wherein the incident light source is a deuterium halogen light source.

6. The spectroscopic ellipsometry apparatus of claim 4, wherein the analyzer assembly comprises an analyzer arm and a spectrometer;

7. The spectroscopic ellipsometry apparatus of claim 6, further comprising a variable angle back plate;

the angle-changing back plate is connected to the third connecting piece;

8. The spectroscopic ellipsometry apparatus of claim 7, wherein the variable angle back plate comprises a plate body, a first radial arm, and a second radial arm;

9. The spectroscopic ellipsometry apparatus of claim 8, wherein an included angle of the first radial arm and the second radial arm is adjustable to adjust an included angle of the polarizing arm and the analyzer arm.

10. The spectroscopic ellipsometry apparatus of claim 8, further comprising an auto-collimator;