CN219342273U

CN219342273U - Workpiece hanging plate rotating cabin synchronous conveying manipulator for large vacuum coating machine

Info

Publication number: CN219342273U
Application number: CN202122118317.3U
Authority: CN
Inventors: 李志荣; 陈思; 李运俊
Original assignee: Guangdong Huicheng Vacuum Technology Co ltd
Current assignee: Guangdong Huicheng Vacuum Technology Co ltd
Priority date: 2021-09-03
Filing date: 2021-09-03
Publication date: 2023-07-14
Anticipated expiration: 2031-09-03

Abstract

A synchronous transport manipulator of work piece link plate revolving stage for large-scale vacuum coating machine, the main part includes: a central rotating shaft is supported between the top plate and the bottom plate, and an upper round gear, a middle round gear and a lower round gear are connected on the shaft; the motor is fixed on the top surface of the bottom plate, and the output shaft is connected with a driving circular gear which is meshed with the lower circular gear; two pairs of horizontal rack working arms are correspondingly arranged on the front wall and the rear wall of the support frame in a front-back manner and correspondingly arranged at the same time in an up-down manner, the tooth surfaces are inwards meshed with the upper two circular gears respectively, and the back surface is provided with a horizontal sliding rail and sliding block mechanism between the front wall and the rear wall of the support frame; the front wall working arm and the rear wall working arm respectively penetrate through left wall openings and right wall openings of the support frame; the upper and lower penetrating ends of the same side wall are hinged to the back of a swing claw plate and sleeved with a reset spring; the plate surface of the swing claw plate is provided with a hook, and one end of the bottom edge is provided with a horizontal guide bearing; the bottom plate of the supporting frame is also provided with an arc-shaped guide plate. The utility model has the advantages of simplified structure, low cost, convenient use and low failure rate.

Description

Workpiece hanging plate rotating cabin synchronous conveying manipulator for large vacuum coating machine

Technical Field

The utility model relates to a manipulator, in particular to a synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine.

Background

The technical development trend of vacuum coating equipment is to improve the productivity and efficiency and the quality and stability of the coated product. To improve productivity and efficiency, equipment design is larger and larger, loading capacity is larger and larger, single workpiece hanging tools are larger and heavier, and large workpiece hanging plates are adopted for single-sided plated products. The most basic requirement for improving the quality and stability of the film is to control the stable and unchanged film coating atmosphere in the cabin, namely to ensure that the residual gas in each cabin is reduced to the minimum and the consistency is kept unchanged, besides introducing new film coating technology and new technology. Therefore, the most effective means is to carry out coating and workpiece loading and unloading in vacuum without breaking vacuum in each compartment, so that each compartment is coated in the same vacuum environment, atmosphere in the compartment is not polluted by atmosphere due to breaking vacuum, and the consistency of residual atmosphere among compartments can be maintained, and the quality and consistency of the film layers are greatly improved.

Therefore, in recent years, the development of vacuum plating equipment has been increased in size and in number. When the multi-cabin configuration is carried out, the coating process cabin is always kept in a vacuum state, the coating process cabin is connected with the feeding cabin and the discharging cabin through vacuum valves, a workpiece is sent into the coating cabin from the feeding cabin under the vacuum state, and the workpiece is moved out to the discharging cabin under the vacuum state after the coating process is finished. On the one hand, the equipment is large in size, the number of hanging tools for hanging workpieces is large, the hanging tools are large in size, and the hanging tools after hanging the workpieces are heavy. The transfer of these hangers to the transfer pod under vacuum must be accomplished by a robot. In order to adapt to the development trend of the current vacuum coating equipment, a vacuum manipulator suitable for various purposes needs to be developed. Therefore, the multi-cabin type coating equipment is provided with a plurality of manipulators, and the equipment is complex and huge and has high manufacturing cost.

At present, a multi-cabin type coating machine is designed to separate a feeding cabin from a discharging cabin, a feeding moving frame and a discharging moving frame are needed respectively, and a plurality of manipulators are correspondingly adopted, so that the designed equipment has the advantages of complex structure, high manufacturing cost, inconvenient use and high failure rate.

Disclosure of Invention

The utility model aims to solve the technical problem of providing the workpiece hanging plate rotating cabin synchronous conveying manipulator for the large vacuum coating machine, which has the advantages of simplified structure, low manufacturing cost, convenient use and low failure rate.

The technical scheme adopted by the utility model is as follows:

a synchronous transport manipulator of work piece link plate revolving stage for large-scale vacuum coating machine, characterized by: adjacent coating process cabins 1 and transition cabins 4 are arranged in the vacuum coating machine, and a gate valve 2 is arranged between the transition cabins and the coating process cabins for separation; the manipulator comprises a coating machine cabin inner part serving as a manipulator main body and a coating machine cabin outer part for realizing integral lifting and rotation of the cabin inner part:

the cabin inner part of the coating machine comprises: a transporting manipulator support 17 of a polyhedral (simplified hexahedral) box-shaped structure for drawing convenience, wherein a vertical central rotating shaft 19 is rotatably supported between a top plate and a bottom plate at the middle position, and three circular gears 68 are sequentially connected with the central rotating shaft 19 from top to bottom through keys 22; a central rotating shaft motor 26 is fixed on the top surface of the bottom plate of the supporting frame 17, an output shaft is fixedly connected with the driving circular gear 23 through a connecting shaft 24, and the driving circular gear 23 is meshed with a lower circular gear 68; two pairs of horizontal rack working arms 14 are correspondingly arranged on the front wall and the rear wall of the box-type conveying manipulator support frame in a front-back mode and correspondingly arranged up and down at the same time, the tooth surfaces of the rack working arms are inwards meshed with the upper round gears 68 and the middle round gears 68 respectively, and a horizontal sliding rail and sliding block mechanism is arranged between the rack working arms and the front wall and the rear wall of the box-type conveying manipulator support frame at the back side of the rack working arms, so that the rack working arms can move left and right relative to the box-type conveying manipulator support frame; the right ends of the upper rack working arm and the lower rack working arm of the front wall respectively penetrate through the right wall opening of the box-shaped conveying manipulator support frame, the left end of the upper rack working arm and the lower rack working arm of the rear wall penetrate through the left wall opening of the box-shaped conveying manipulator support frame, and the upper penetrating end and the lower penetrating end of the same side wall are hinged on the vertical middle line of the back surface of a swing claw plate 10, so that the swing claw plate can swing relative to the upper rack working arm and the lower rack working arm, and a reset spring is sleeved at the hinge shaft to enable the swing claw plate 10 to be automatically reset at the position of the vertical working arm 14; the swing claw plate 10 is a vertical rectangular plate, hooks 12 corresponding to the workpiece hanging plate 8 are arranged near four corners on the plate surface, and one end of the bottom edge of the swing claw plate 10 is provided with a downward extending horizontal guide roller or bearing; the bottom plate of the supporting frame 17 is also provided with an arc-shaped guide plate 13 with a horizontal arc-shaped edge, and the position of the arc-shaped guide plate is arranged so that when the working arm 14 starts to extend forwards towards the transition rotating frame 18, the guide bearing 9 at the lower end of the swing claw plate 10 is attached to the bottommost part of the arc-shaped guide plate 13, and the guide bearing 9 climbs an arc-shaped slope along the arc-shaped edge of the arc-shaped guide plate in the process of extending forwards of the working arm 14, so that the swing claw plate 10 swings by a swinging angle through hinge rotation; the design of the arcuate edge is such that when the guide bearing 9 climbs to the arc-shaped roof, the swing claw plate 10 swings parallel to the direction of the working arm.

The outer part of the cabin is a rotation and lifting and driving transmission device of the inner part of the cabin arranged below the bilge.

Preferably, the cabin exterior portion comprises: a through hole is formed in the position, corresponding to the central rotating shaft 19 in the inner part of the transition cabin 4, of the bottom plate, a vertical spline shaft sleeve mechanism is arranged outside the through hole, the spline shaft sleeve mechanism consists of a spline shaft and a spline shaft sleeve sleeved outside the spline shaft sleeve mechanism, the spline shaft and the spline shaft sleeve can move axially relatively but only rotate simultaneously, the spline shaft sleeve can be rotatably supported on the bottom surface of the bottom plate of the transition cabin 4, and a spline shaft sleeve rotary driving mechanism is further arranged on the bottom surface of the bottom plate of the transition cabin 4; the top end of the spline shaft is fixedly supported at the bottom of a supporting frame 17 at the inner part of the cabin, the bottom end of the spline shaft can relatively rotate and can only be supported at the upper end of a piston rod of a cylinder in an indirect manner in a vertically movable mode, and the cylinder is fixedly supported on the bottom surface of the bottom plate of the transition cabin 4.

The spline shaft sleeve is rotatably supported on the bottom surface of the bottom plate of the transition cabin 4 and has the structure that: a rotating sleeve 43 is sleeved outside the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism and is fixedly connected with the spline shaft sleeve 40, the rotating sleeve 43 is rotatably supported in an inner cavity of a tubular fixing seat 42 through a bearing, and the upper end of the fixing seat 42 is fixed below the bottom plate of the transition cabin.

The spline shaft sleeve rotary driving mechanism is as follows: the motor is arranged on the bottom surface of the bottom plate of the transition cabin 4, and the output of the motor is decelerated and then drives the spline shaft sleeve to rotate through the synchronous belt pulley transmission mechanism.

The spline shaft sleeve mechanism is a ball spline shaft sleeve mechanism and is an outsourcing piece, the middle part of the spline shaft is provided with a plurality of parallel axis shallow key grooves, the cross section of each key groove is in a very shallow circular arc shape of a rolling ball, and the depth of each key groove can accommodate a small ball crown of a ball; the spline shaft is sleeved with a shaft sleeve 40, which is formed by combining an upper sleeve and a lower sleeve which are symmetrical, the upper end surface of the upper sleeve is provided with an annular shoulder, the upper sleeve and the lower sleeve are also provided with corresponding key grooves at the key groove positions of the corresponding spline shaft 31, the section of the key groove is a large semicircular arc shape of the rolling balls except the very shallow circular arc shape, and the depth of the key groove can accommodate the rest parts of the balls; and the spline shaft and the two circular-arc key grooves on the shaft sleeve are folded to just embed the whole roller beads and can roll in the folding key grooves. Thus, the condition is prepared for the spline shaft to move up and down smoothly relative to the shaft sleeve, and the spline is moved up and down due to the transverse pushing of the roller balls in the key grooves when the shaft sleeve rotates. However, when the two rollers move up and down relatively, accumulation occurs when the roller ball rolls up and down due to the limitation of the length of the shaft sleeve, and an elliptical ring path is designed to allow the roller ball to roll circularly. Therefore, arc-shaped curved grooves are respectively excavated in the shaft sleeve on the same side of the upper end and the lower end of the shaft sleeve key groove, and the shaft sleeve key groove is connected with an axial key groove in a transitional manner to form a narrow oval groove. The cross sections of the parallel groove sections and the curved transition sections, namely the large diameter circles of the roller beads, can accommodate the whole roller beads. The key groove of the spline shaft is longer than the shaft sleeve, when the spline shaft moves upwards, the roller ball moves upwards to the notch of the transition curved groove at the upper end of the shaft sleeve, is forced to roll into the transition curved groove of the shaft sleeve, and sequentially enters the elliptical groove to roll circularly; and the lower end transition curved groove notch is also provided with a ball key groove which is used for supplementing balls from the outer sleeve groove to the spline shaft and the shaft sleeve to be folded. Similar operation will occur when the spline shaft moves down.

The coating process cabin is internally provided with: the process rotating frame 5 is a vertical polygonal column shell, is hung on a vertical rotating shaft of the process rotating frame with a driving mechanism, is provided with hooks capable of hooking workpiece hanging plates 8 on each side of the side surface of the column shell, is a vertical rectangular plate, and is provided with hook holes near four end corners;

the transition cabin is internally provided with:

a workpiece hanging plate transition rotating frame 18, which is provided with a plurality of pairs of upper and lower hanging rods 18-2 which radially extend out correspondingly at the upper part and the lower part of a vertical transition center rotating shaft 18-1 with a driving mechanism, wherein one side of the upper and lower hanging rods is provided with a hook 12 corresponding to a hook hole of the workpiece hanging plate 8;

the synchronous conveying manipulator of the workpiece hanging plate rotating cabin is used for moving and conveying the workpiece hanging plate 8 back and forth between the transition rotating frame 18 of the transition cabin and the process rotating frame 5 of the coating process cabin.

The workpiece hanging plate is a vertical rectangular hanging plate, four corners on the plate surface are provided with hanging hook holes, the front and rear surfaces of the hanging hook holes are respectively plugged by symmetrical hanging hook locking plates, the hanging hook locking plates are provided with hanging hook holes in the center, the hanging hook locking plates are in the shape of a lower circle, and the upper ends of the hanging hook locking plates are narrow slotted holes.

The beneficial effects are that: the utility model has only one transition cabin, which combines the original feeding moving rack and the discharging moving rack into one transition rotating rack, and the original need of adopting a plurality of manipulators is changed into one manipulator, and the previous manipulators usually operate according to a single action flow procedure, namely, taking out the workpiece hanging board from the workpiece hanging board rotating rack, transporting, indexing to face the inlet of the process cabin, extending into the process cabin, hanging the workpiece hanging board, taking out the plated workpiece hanging board again, exiting the process cabin, indexing to face the direction of the workpiece hanging board rotating rack, transporting and hanging the workpiece hanging board on the rotating rack. The utility model has lower efficiency in one-way process, one set of manipulator is provided with two sets of working arms for picking and placing the workpiece hanging plate, the two sets of working arms are reversely installed and act in reverse, one set of working arms stretches forwards to pick the workpiece hanging plate, and the other set of working arms stretches forwards in reverse to the process cabin to mount the workpiece hanging plate. One set of manipulator realizes the simultaneous picking and loading, then indexes 180 degrees, and the two sets of working arms exchange actions. The mechanical arm and the equipment of the workpiece hanging plate rotating frame matched with the mechanical arm have the advantages of simplified structure, low cost, convenient use, high power and low failure rate.

Drawings

The utility model is described in detail below with reference to the drawings and the detailed description.

FIG. 1a is a schematic cross-sectional view of a component structure of an embodiment of the present utility model;

FIG. 1b is a schematic cross-sectional view of a part of the cabin interior of a synchronous transport robot according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a synchronous transport robot working arm retracted state;

FIG. 3 is a schematic view of the synchronous transport robot working arm extended state;

FIG. 4 is a schematic view of a rotation state of a working arm body of the synchronous transport robot;

FIG. 5a is a schematic front view of the workpiece strap of FIG. 1;

FIG. 5B is a cross-sectional view taken along line B-B of FIG. 5 a;

FIG. 5c is a cross-sectional view taken along line A-A of FIG. 5 a;

FIG. 5d is an enlarged partial schematic view of FIG. 5 c;

FIG. 6 is a partial top view of the synchronous transport robot arm assembly of FIG. 1;

FIG. 7 is an enlarged schematic top view of the synchronous transport robot III of FIG. 2 and its associated transition turret;

FIG. 8 is an enlarged schematic view of a top portion of a center spindle of the IV synchronous transport robot of FIG. 1;

FIG. 9 is a partial schematic view of the center spindle assembly of the V-sync transport robot of FIG. 1;

FIG. 10 is a partial schematic view of the swing claw plate rotating mechanism and the hooking workpiece hanging plate of the VII synchronous transport robot of FIG. 1;

FIG. 11 is a schematic view of the drive transmission for the overall rotation and lifting of the VI synchronous transport robot of FIG. 1.

In the drawings, the names of other parts are related with reference numerals:

a coating process cabin 1; a gate valve 2; a gate valve plate 3; a transition cabin 4; a process turret 5; a hook plate 6; a hook hole 6-1; a first socket head cap screw 7; a work hanging plate 8; a guide bearing 9; swing the claw plate 10; a spring 11; a hook 12; a guide plate 13; a rack work arm 14; a guide rail 15; a slider 16; a robot support 17; a transition turret 18; a transition turret shaft 18-1; a transition swivel mount hanging bar 18-2; a central rotation shaft 19; the center rotating shaft is propped against the upper plate 19-1; a first deep groove ball bearing 20; a top bearing cover 21; a flat key 22; a driving circular gear 23; a connecting shaft 24; a motor support column 25; a center spindle motor 26; a first bearing housing 27; a first planar ball bearing 28; a second deep groove ball bearing 29; a transition plate 30; a spline shaft 31 of the ball spline shaft sleeve mechanism; a gland 32; a seal seat 33; a skeleton oil seal 34; a first O-ring 35; a second O-ring 36; a third O-ring 37; a bottom lock plate 38; a first stop collar 39; a spline sleeve 40 of a ball spline sleeve mechanism; a third deep groove ball bearing 41; a fixing base 42; a rotating sleeve 43; a bottom lock cover 44; a second stop collar 45; a first synchronizing wheel 46; a second flat key 47; a timing belt 48; a second synchronizing wheel 49; a drive shaft 50; a speed reducer 51; a screw 52; a nut 53; a speed reducer lock plate 54; a fixing post 55; a spacer 56; a second motor 57; a second bearing seat 58; a second planar ball bearing 59; a fourth deep groove ball bearing 60; a bearing lock plate 61; a transition shaft 62; a cylinder 63; a cylinder support plate 64; a connecting post 65; a lock lever 66; a raising post 67; a circular gear 68; and a hinge shaft 69.

Detailed Description

Referring to fig. 1, a schematic cross-sectional view of an embodiment of the present utility model is shown showing the overall structure of a vacuum coater, a synchronized transport robot, and a cabin and turret associated with its transport workpiece hitch. In the left process cabin 1 of FIG. 1, a process rotating frame 5 is arranged, a workpiece hanging plate 8 is hung on the process rotating frame, a transition cabin 4 is arranged on the right side, a transition rotating frame 18 is arranged on the right side, and a workpiece hanging plate 8 is also hung on a hanging rod 18-2; a synchronous conveying manipulator II is arranged between the process cabin valve 2 and the transition rotary frame 18.

The mechanical arm is divided into an outer cabin part and an inner cabin part, an outer cabin part VI outside the cabin bottom plate is a rotating shaft and a power and transmission mechanism thereof, the inner cabin part is a mechanical arm main body, the mechanical arm main body is supported by a ball spline shaft outside the cabin, and the ball spline shaft penetrates through the cabin bottom plate, and comprises a mechanical structure and a power and transmission device for realizing the advancing and retreating rotation of a working arm to take and put a work piece hanging plate. The lifting rotating shaft outside the cabin is extended into the cabin to support the supporting frame 17 of the conveying manipulator, and the lifting rotating shaft outside the cabin can drive the supporting frame 17 to rotate and lift. The center of the bottom plate of the supporting frame 17 is rotatably connected with an upright central rotating shaft assembly V through a bearing seat, and the top end of the central rotating shaft is rotatably connected with the center of the top plate of the manipulator supporting frame 17 through a bearing assembly IV.

The lower part of the central rotating shaft is connected with a rotary driving assembly which comprises a central rotating shaft 19, a driving circular gear 23, a connecting shaft 24, a motor support column 25 and a central rotating shaft motor 26. The motor support column 25 is fixedly connected to a bottom plate in the manipulator support frame 17, the central rotating shaft motor 26 is fixed to a transverse plate of the motor support column 25, an output shaft of the central rotating shaft motor 26 is fixedly connected with the driving circular gear 23 through a connecting shaft 24, and the driving circular gear 23 is meshed with a lower circular gear 68 connected with a corresponding key on the central rotating shaft 19.

Fig. 1 also shows a transversely arranged rack working arm 14 associated with a vertical central rotating shaft 19, the front end of the working arm 14 is hinged with a swinging claw plate 10, the front of the swinging claw plate 10 is hooked with a workpiece hanging plate 8, the rear section of the working arm is a rack section, the other face of the working arm without teeth is provided with a sliding block 16 which is in sliding connection with a sliding rail 15, and the sliding rail 15 is fixed on a manipulator supporting frame 17. Fig. 1 shows vii a swing claw plate steering swing assembly.

Fig. 2 to 4 are plan views showing the working environment and three working states of the synchronous transport robot. Figure 2 shows the main configuration and structure within the process and transition cabins. The process cabin 1 is connected with the transition cabin 4, the middle gate valve 2 is separated, and the two cabins are communicated or separated by opening or closing the gate valve plate 3. The process cabin 1 is a film plating cabin, a process rotating frame 5 is arranged in the cabin, the process cabin is a polygonal rotatable vertical cage (the drawing is simplified to be a hexagon), each side is provided with a workpiece hanging plate I, the workpiece hanging plate I is hung on a hook 12 of the process rotating frame 5, and a workpiece to be plated is attached to the outer surface of the workpiece hanging plate 8. When the valve is closed, coating operation is carried out; when the valve is opened, the plated workpiece hanging plate I and the workpiece hanging plate I to be plated are taken out and hung. The transition cabin 4 is a turnover cabin, and is provided with a quincuncial transition rotating frame 18 for storing a workpiece hanging plate, and a rotating shaft 18-1 of the transition rotating frame drives the rotating frame to rotate. A plurality of groups of hanging rods 18-2 corresponding to the upper and lower parts are radially and transversely extended from the rotating shaft along the radius to be fixedly connected (six stations are simplified in the drawing), and hooks 12 are arranged on the front and rear parts of the upper hanging rod and the lower hanging rod. The upper hanging rod 8-2 and the lower hanging rod 8-2 of each station hang the workpiece hanging plate I in the same plate surface direction. After the valve of the process cabin 1 is closed, the cabin door of the transition cabin 4 can be opened, a workpiece hanging plate of a workpiece to be plated is hung on the transition rotary frame 18 from outside the cabin, or the plated workpiece hanging plate I is taken out of the cabin from the transition rotary frame 18.

In addition, a synchronous workpiece conveying hanging plate manipulator II is also arranged in the transition cabin 4. It is located between the valve of the process cabin 2 and the transition rotating frame 8, one working arm 14 of the manipulator can extend into the process cabin 1 to hang or take out the work piece hanging plate 8, and the other working arm 14 can extend to the transition rotating frame 18 to pick up and put the upright work piece hanging plate 8.

Fig. 2 shows the working arm 14 retracted state, and the swing claw plates 10 at the front ends of the front and rear sets of upper and lower working arms 14 are in a normal state, both being perpendicular to the working arm 14. The swing claw plate 10 is a standing plate in which upper and lower points perpendicular to the center line are hinged to upper and lower working arms 14, and the swing claw plate 10 can swing laterally with respect to the working arms until it is parallel to the working arms. The hinge shaft is sleeved with a spring to enable the swing claw plate 10 to automatically reset the vertical working arm 14 to a normal position. In the retracted state, the lower guide bearing 9 of the swing claw plate 10 at the front end of the right working arm 14 is also shown to be close to the bottom end point of the arc-shaped guide plate 13.

Fig. 3 shows two sets of working arms of the synchronous conveying manipulator in an extended state. In the figure, the gate valve 3 is shown to be opened, the process cabin 1 is communicated with the transition cabin 4, the rear working arm 14 of the synchronous conveying manipulator II extends forwards through the valve 2 to reach the process rotating frame 5, the hook 12 on the swing claw plate 10 at the front end of the synchronous conveying manipulator is hooked on the hook hole 6-1 of the workpiece hanging plate 8 on the process rotating frame 5, the front working arm 14 extends forwards towards the transition rotating frame 18 in the opposite direction, the guide bearing 9 at the lower end of the front swing claw plate 10 is propped against the arc-shaped guide plate 13 at the beginning, the front working arm 14 extends forwards to the guide bearing 9 to climb the arc-shaped slope, the swing claw plate 10 is forced to swing to be parallel to the direction of the working arm when the guide bearing 9 climbs to the arc-shaped slope top, the corresponding station on the transition rotating frame 18 is also turned to be in the horizontal position, and the sealing hook 12 on the swing claw plate 10 is just hooked on the hook hole 6-1 of the hanging rod 18-2 on the station, and the workpiece hanging plate 8 can be taken out.

Fig. 4 is a diagram showing the overall rotation state of the synchronous transport manipulator, in which the front and rear working arms 14 have hung the workpiece hanging plate 8, that is, the swing claw plate 10 on the left working arm 14 in fig. 3 is hooked with the workpiece hanging plate 8 to retract, and the rear working arm 14 is withdrawn from the process chamber 1 to retract to the original position; when the swing claw plate 10 on the front working arm 14 is retracted after hanging the workpiece hanging plate 8, the guide bearing 9 on the swing claw plate 10 descends along the arc shape of the guide plate 13, so that the swing claw plate 10 returns to a vertical state from a state parallel to the working arm; after the front and rear arms 14 are reset, the synchronous transport robot ii is rotated clockwise by 90 degrees as a whole, which is the case shown in fig. 4. The manipulator ii will continue to rotate clockwise until 180 degrees and will return to the state of fig. 2, but the continued action is that the front and rear working arms 14 are mutually shifted in position, and the workpiece hanging plates 8 on the swing claw plates 10 are respectively hung on the empty stations of the process turret 1 and the transition turret 18.

Fig. 5 a-5 d are schematic views of the workpiece hanging plate of fig. 2, including three views, front elevation, side elevation and top elevation, showing the construction of the workpiece hanging plate. The structure is an upright rectangular plate, a hook hole is arranged near four corners of the upright rectangular plate, and a structure enlarged schematic diagram of the hook hole is attached in the figure. The drawing shows a hook hole structure, which comprises a hook plate 6, a first inner hexagon screw 7, a workpiece hook plate 8 and a hook hole 6-1. The hook plate 6 is a square thin plate, a hook hole 6-1 is dug in the center, the shape of the hook hole is a lower circle, the upper end of the hook hole is a narrowed slot hole, the hook plate is a through hole, and four corners of the hook plate 6 are provided with four first inner hexagon screws 7 for fixedly connecting the hook plate to a workpiece hanging plate 8. The workpiece hanging plate 8 is provided with corresponding through holes corresponding to the hanging holes 6-1, the other hanging plate 6 is arranged at the back of the workpiece hanging plate 8 and at the corresponding position of the hanging plate 6, and the size and the shape are the same as those of the hanging plate 6, namely the hanging holes 6-1 are arranged at the four corners of the front and the back of the workpiece hanging plate 8.

FIG. 6 is a partial top view of the synchronous transport robot arm assembly of FIG. 1. The work arm assembly structure for grabbing and conveying the workpiece hanging plate by the mechanical arm is shown, and the work arm assembly structure has the functions of front and rear work arms, synchronous action and picking and placing and conveying the workpiece hanging plate in the transition rotating frame 18 and the process rotating frame 5 respectively. The working arm assembly comprises a guide bearing 9, a swing claw plate 10, a spring 11, a hook 12, a guide plate 13, a rack working arm 14, a guide rail 15, a sliding block 16 and a circular gear 68. The circular gear 68 is fixedly sleeved on a central rotating shaft (not shown), the circular gear is dragged to rotate, two sides of the circular gear are meshed with the rack working arm 14, the working arm 14 is in a lath shape, a half section of the working arm is a rack, the other half section of the working arm is a light body, the front end of the light body section is hinged with the swing claw plate 10, a spring 11 is wound around a hinge shaft, and the swing claw plate 10 and the working arm 14 are maintained to be in a normal vertical state by the elasticity of the spring. The swing claw plate 10 is a vertical rectangular plate, hooks 12 are arranged near the upper, lower, front and rear four corners of the swing claw plate, a downward extending guide bearing 9 is arranged at one end of the bottom edge of the swing claw plate 10, and when the working arm is in a retracted state, the bottom point of the arc-shaped upward slope of the guide plate 13 is in front of the guide bearing 9 at the plate edge of the swing claw plate on the right side of the figure. Two sliding blocks 16 are embedded on the other side of the rack section of the working arm 14, and are sleeved on a sliding rail 15 which is arranged parallel to the working arm, and the sliding rail 15 is fixedly connected to the front wall and the rear wall of a manipulator supporting frame 17. When the circular gear 68 rotates counterclockwise, the rear working arm extends leftward and the front working arm extends rightward; when the circular gear 68 rotates clockwise, the rear working arm retracts to the right, and the front working arm retracts to the left.

Fig. 7 is an enlarged partial top view of the synchronous transport robot of fig. 3 and its associated transition turret showing the configuration of the transition turret 18 and the action of the right working arm extending forward to pick up the workpiece hitch. The transition rotating frame 18 is of a plum blossom-shaped structure, a plurality of pairs of hanging rods 18-2 are welded along the radial direction from the transition center rotating shaft 18-1, one station is matched with the pair of hanging rods 18-2 up and down, the upper and lower distances of the two hanging rods correspond to the upper and lower hook hole distances of the workpiece hanging plate, and hooks 12 are arranged at the positions of the hanging rods 18-2 corresponding to the hook holes 6-1 of the workpiece hanging plate 8.

All the workpiece hanging plates 8 are hung along the same direction, the right working arm is shown to extend forwards into the position where the workpiece hanging plate is taken, referring to fig. 6, the working arm 14 is in a forwards extending state, the swing claw plate 10 at the front end of the front working arm 14 is perpendicular to the working arm 14, the guide bearing 9 at the plate end of the swing claw plate 10 is positioned at the bottom end of the arc slope of the guide plate 13, when the right working arm 14 extends forwards, the guide bearing 9 on the swing claw plate 10 at the front end of the right working arm climbs along the arc slope of the guide plate 13, the swing claw plate 10 on the front working arm 14 is forced to rotate by a swing angle through a hinge, and when the guide bearing 9 climbs to the arc slope top, the swing claw plate 10 swings to be parallel to the direction of the working arm. At this time, the swing claw plate 10 on the front working arm 14 just extends into the station of the transition rotary frame 18 where the workpiece hanging plate 8 is hung, and the transition rotary frame 18 rotates to rotate the corresponding hanging rod 18-2 to the horizontal position, and is correspondingly parallel to the swing claw plate 10, so that the workpiece hanging plate 8 on the hanging rod 18-2 can be conveniently taken out by the swing claw plate 10. After the right swing claw plate 10 takes out the workpiece hanging plate 8, the front working arm 14 is retracted, the guide bearing 9 at the lower end of the swing claw plate 10 descends along the arc slope of the guide plate 13, and the hinge and the spring function between the movable claw 10 and the working arm 14 enable the swing claw plate 10 to rotate anticlockwise from the direction parallel to the working arm, and when the guide bearing 9 on the swing claw plate 10 descends to the arc slope bottom, the swing claw plate 10 rotates and resets to the vertical position.

FIG. 8 is an enlarged view of a portion of the top structure of the center spindle of the IV synchronous transport robot of FIG. 1. It shows the structure of the movable connection at the top of the central rotating shaft 19, and the movable connection assembly at the top of the central rotating shaft comprises a central rotating shaft 19, a central rotating shaft top cover 19-1, a first deep groove ball bearing 20, a top bearing cover 21 and a manipulator support frame 17. The first deep groove ball bearing 20 is sleeved on the top end of the central rotating shaft 19, a central rotating shaft top cover 19-1 fastened by screws is propped at the shaft end of the central rotating shaft 19, the inner ring of the first deep groove ball bearing 20 is pressed on the ring edge of the top cover, the central rotating shaft 19 penetrates through a central hole on the top plate of the manipulator support frame to extend downwards, the bearing outer ring is pressed on the top bearing cover 21 and a boss around the central hole of the support frame 17, and the top bearing cover 21 is fixedly connected on a boss around the central hole of the support frame 17 by screws, so that the top of the central rotating shaft is movably connected.

Fig. 9 is a schematic view of the central spindle assembly of the v-sync transport robot of fig. 1, showing the structure of the central spindle assembly comprising a central spindle 19, three flat keys 22, and three circular gears 68. The central rotating shaft 19 is a vertical long shaft, a convex ring shoulder is arranged near the lower end of the shaft, a shaft top cover plate 19-1 is fixedly connected with the top of the upper end of the central rotating shaft by a screw, 3 circular gears 68 are fixedly arranged on the central rotating shaft 19 from top to bottom, the lowest circular gear 68 is fixedly connected with the central rotating shaft by a flat key, and is meshed with a driving circular gear 23 of the rotary driving assembly of the central rotating shaft 19 to drive the central rotating shaft 19 to rotate. The first and second circular gears 68 on the central shaft 19 are shown as being fixedly connected with the central shaft by the flat key 22, and the upper and lower circular gears 68 are respectively meshed with racks of the upper and lower working arms.

Fig. 10 is a partial schematic view of the swing claw plate rotating mechanism and the hooking workpiece hanging plate of the vii synchronous transport robot of fig. 1, which is a vertical sectional view, and is more clearly shown in combination with the above-mentioned plan view. The structure of the working arm hinged with the swing claw plate and the structure and relative position of the hook and the hook hole, and the structure and relative position of the guide bearing and the guide plate are shown in the figure. The structure for hinging the working arm and the swing claw plate comprises a rack working arm 14, a swing claw plate 10, a hinging shaft 69 and a spring 11. The front end of the working arm 14 is provided with a through hole opposite to the through hole of the board back protruding block of the swing claw board 10, the inserting hinge shaft 69 is hinged, the board surface of the swing claw board 10 is positioned at the normal position of the vertical working arm 14 by pulling the working arm 14 and the swing claw board 10 through a spring, the lower end of the swing claw board 10 is fixedly connected with a downward extending lock rod 66, the end of the lock rod 66 is fixedly connected with a guide bearing 9, the guide bearing is close to the guide board 13, the guide board 13 is fixedly connected with a high cushion column 67, and the high cushion column is welded on the bottom plate of the transition cabin 4. The guide plate 13 is horizontally arranged, the projection arc shape is bent from left to right in a overlook mode, when the working arm 14 is in a retreating state, the swing claw plate 10 is at a normal position, and the guide bearing 9 is close to the arc outsole edge of the guide plate 13. When the working arm 14 extends forwards, the guide bearing 9 leans against the arc line of the guide plate 13 and moves towards the arc top, so that the swing claw plate 10 turns around the hinge to be parallel to the working arm 14; when the working arm retreats, the swing claw plate 10 is dragged to hinge and retreat, the guide bearing 9 rolls along the guide plate 13 from the arc top to the arc bottom, the spring 11 drives the swing claw plate 10 to reversely overturn, and the swing claw plate is restored to be vertical to the working arm 14. In the figure, hooks 12 are arranged at four corners of the front surface of the swing claw plate 10 and are hooked in hook holes 6-1 of a workpiece hanging plate 8, the four corners of the workpiece hanging plate 8 are provided with the hook holes 6-1, each hole is provided with a front square hanging plate and a rear square hanging plate 6 which clamp the workpiece hanging plate 8, the four corners of the hanging plate 6 are fixedly connected with the workpiece hanging plate through screws 7, the centers of the hanging plate 6 are provided with the hook holes 6-1, the lower parts of the hanging plate are circular grooves, and the upper parts of the hanging plate are narrow grooves, and are through holes. The corresponding part of the workpiece hanging plate 8 is hollowed out. The drawing also shows that the work piece hanging plate 8 on the transition rotary frame 18 is hung at the hanging hole 6-1 by the hanging hook 12 of the transition rotary frame hanging rod 18-2.

FIG. 11 is a partial schematic view of the drive transmission for the overall rotation and lifting of the VI synchronous transport robot of FIG. 1. The synchronous conveying manipulator needs to realize the actions of integral rotation and lifting, is completed by connecting a lifting rotating shaft which extends out of the cabin into the cabin with a manipulator support frame, and is provided with a matched power and transmission device outside the cabin. The structure can be divided into a lifting rotating shaft assembly, a rotary driving assembly, a lifting driving assembly and a connecting manipulator support frame assembly.

The lifting rotating shaft assembly comprises a spline shaft 31 of a ball spline shaft sleeve mechanism, a gland 32, a sealing seat 33, a framework oil seal 34, a first O-shaped ring 35, a second O-shaped ring 36, a third O-shaped ring 37, a bottom locking plate 38, a first limiting sleeve 39, a spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, a third deep groove ball bearing 41, a fixed seat 42, a rotating sleeve 43, a bottom locking cover 44 and a second limiting sleeve 45. The lifting rotating shaft component structure is as follows: the fixed seat 42 is a sleeve with an end face annular shoulder, the inner cavity of the fixed seat is a stepped inner hole, the inner diameters of two ends of the fixed seat are large, and a section of raised step is arranged near the bottom end of the fixed seat; the bottom locking plate 38 is a circular plate with a middle through hole, the sleeve of the fixed seat 42 penetrates through the middle hole of the bottom locking plate 38, the annular shoulder of the fixed seat 42 is in sealing and fixing connection with the upper end face of the bottom locking plate 38 through the second O-shaped ring 36 by using a screw, the annular shoulder of the fixed seat 42 is sleeved into the through hole of the bottom plate of the transition cabin 4, the upper end face of the bottom locking plate 38 exceeds the annular shoulder part of the fixed seat 42, and the annular shoulder of the fixed seat is in sealing and fixing connection with the outer wall of the bottom plate of the transition cabin 4 through the third O-shaped ring 37. The lifting rotating shaft is a spline shaft 31 of a ball spline shaft sleeve mechanism, which is an outsourcing part, a plurality of parallel axis shallow key grooves are arranged in the middle of the spline shaft 31, the depth of a small ball crown can be accommodated, a spline shaft sleeve 40 of the ball spline shaft sleeve mechanism is sleeved outside the ball spline shaft, the spline shaft is formed by combining an upper sleeve and a lower sleeve which are symmetrical, the upper end surface of the upper sleeve is provided with an annular shoulder, the upper sleeve and the lower sleeve are also provided with corresponding key grooves at the positions corresponding to the key grooves of the ball spline shaft 31, and the other ball parts except the small ball crown can be accommodated, so that the spline shaft 31 and the two circular arc key grooves of the shaft sleeve 40 are just buried into the whole ball, and can roll in the folded key grooves. Thus, conditions are provided for smooth up-and-down movement of the spline shaft 31 relative to the sleeve 40, and secondly, the spline shaft 31 rotates with a shift due to the lateral pushing of the balls in the key grooves when the sleeve 40 rotates. However, when the two rollers move up and down relatively, accumulation occurs when the roller beads roll up and down due to the length limitation of the shaft sleeve 40, and an elliptical ring path is required to be designed to allow the roller beads to roll circularly. Therefore, on the same side of the upper and lower ends of the key slot of the shaft sleeve 40, arc-shaped curved slots are respectively excavated in the shaft sleeve 40, and the same axial key slot newly excavated in the shaft sleeve 40 is connected in a transitional manner to form a narrow oval slot. The cross sections of the parallel groove sections and the curved transition sections, namely the large diameter circles of the roller beads, can accommodate the whole roller beads. The spline groove of the spline shaft 31 is longer than the shaft sleeve 40, when the spline shaft 31 moves upwards, the rolling balls move upwards to the transition curved groove notch of the upper end of the shaft sleeve 40, are forced to roll into the transition curved groove of the shaft sleeve 40 and sequentially enter the elliptical groove to roll circularly, and the ball complementary to the ball from the groove of the outer sleeve 40 also enters the ball spline groove formed by the spline shaft 31 and the shaft sleeve 40 at the notch of the transition curved groove of the lower end. Similarly, spline shaft 31 moves downward and operates similarly.

The rotary sleeve 43 is fixedly sleeved outside the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, the upper sleeve end surface of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism is pressed on the upper annular shoulder of the rotary sleeve 43 in an annular manner, and the upper sleeve end surface is fixedly connected with the upper sleeve end surface by bolts; the end face annular shoulder of the lower sleeve of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism is fixedly connected with the lower end face of the rotary sleeve 43 by bolts, a third deep groove ball bearing 41 is sleeved outside the upper end part of the rotary sleeve 43, the upper end of the inner ring of the bearing abuts against the upper annular shoulder of the rotary sleeve 43, the bearing is sleeved in an upper stepped hole in the inner cavity of the fixed seat 42, the lower end of the outer ring of the bearing abuts against a boss of the inner cavity, and the upper end of the outer ring of the bearing is limited by a first limiting sleeve 39. The rotating sleeve 43 is sleeved with a third deep groove ball bearing 41 near the lower end part, and is sleeved in a lower stepped hole of the inner cavity of the fixed seat 42, the upper end surface of the outer ring of the rotating sleeve is propped against a boss of the inner cavity, the lower end surface of the outer ring of the rotating sleeve is limited by a bottom locking cover 44 fixedly connected with the fixed seat 42, and the lower end of the inner ring of the rotating sleeve is limited by a second limiting sleeve 45. The sealing seat 33 is sleeved into the upper end hole of the fixed seat 42, the upper end surface of the sealing seat 33 is provided with a convex ring shoulder, the convex ring shoulder is pressed on the upper end of the fixed seat 42, and the sealing seat is fixedly connected with the upper ring shoulder of the fixed seat 42 by a screw through the first O-shaped ring 35. The center of the seal seat 33 has a through hole, and the spline shaft 31 of the ball spline shaft mechanism extends out from the through hole into the chamber. A framework oil seal 34 is arranged between a spline shaft 31 of the ball spline shaft sleeve mechanism and the inner wall of the central hole for sealing, the lower end of the framework oil seal 34 is limited by an annular shoulder in the central hole of a sealing seat 33, and a gland 32 fixedly connected with the sealing seat 33 is arranged at the upper end of the framework oil seal 34 for compressing. The sealing seat 33 is sleeved into the lower end surface of the inner cavity part of the fixed seat 42 and abuts against the first limit sleeve 39.

The rotation driving assembly is a structure for dragging the rotation shaft of the lifting rotating shaft, and comprises a first synchronous wheel 46, a second flat key 47, a synchronous belt 48, a second synchronous wheel 49, a transmission shaft 50, a speed reducer 51, a screw 52, a nut 53, a speed reducer locking plate 54, a fixing column 55, a gasket 56 and a second motor 57. The rotating shaft of the second motor 57 is connected with the speed reducer 51, and the upper end surface of the speed reducer 51 is fixedly connected with the speed reducer locking plate 54. The fixed column 55 is welded on the outer wall of the bottom plate of the transition cabin 4, the upper end of the screw 52 is screwed into the fixed column 55 and then fixed by the nut 53, and the lower end of the screw 52 is fixedly connected with the 53 speed reducer locking plate 54 by the nut, so that the motor and the speed reducer box are fixed outside the bottom plate of the transition cabin. The transmission shaft 50 of the speed reducer 51 is connected with the second synchronizing wheel 49 in a downward extending manner, the second synchronizing wheel 49 rotates to drive the first synchronizing wheel 46 to rotate together through the synchronous belt 48, the first synchronizing wheel 46 is fixedly connected with the rotating sleeve 43 through the second flat key 47, and the rotating sleeve 43 is also dragged to rotate, so that the shaft sleeve 40 and the spline shaft 31 of the ball spline shaft sleeve mechanism are driven to rotate, and the manipulator is dragged to integrally rotate.

The lift driving assembly is a mechanism for driving the lift rotating shaft to lift, and comprises a second bearing seat 58, a second planar ball bearing 59, a fourth deep groove ball bearing 60, a bearing lock plate 61, a transition shaft 62, an air cylinder 63, an air cylinder supporting plate 64 and a connecting column 65. The lifting driving assembly has the following structure: the sleeve-shaped second bearing seat 58 with a downward opening is fixedly connected to the lower end face of the spline shaft 31 of the ball spline shaft sleeve mechanism by screws, the second bearing seat 58 is provided with two layers of ladder inner cavities, the inner diameter close to the opening is large, the inner cavity of the second plane ball bearing 59 close to the inner cavity is sleeved first, then the inner hole of the second plane ball bearing 59 is sleeved with the transition shaft 62, the annular shoulder of the transition shaft 62 is abutted against the inner ring of the second plane ball bearing 59, the fourth deep groove ball bearing 60 is sleeved into the space between the transition shaft 62 and the ladder inner cavity of the lower layer of the second bearing seat 58, the annular shoulder of the transition shaft 62 is abutted against the inner ring of the fourth deep groove ball bearing 60, the inner cavity step of the second bearing seat 58 is abutted against the outer ring of the fourth deep groove ball bearing, and the bearing lock plate 61 is fixedly connected with the opening end face of the second bearing seat 58 by screws. The piston rod of the cylinder 63 is fixedly connected with the lower end face of the transition shaft 62, the cylinder 63 is fixed on a cylinder supporting plate 64, the cylinder supporting plate 64 is fixedly connected with the lower ends of a front connecting column 65 and a rear connecting column 65, and the upper end of the front connecting column is fixedly connected with the outer wall of the transition cabin bottom plate. The cylinder piston pushes the piston rod to stretch up and down, so that the ball spline shaft is driven to lift up and down, and the manipulator is driven to lift up and down integrally.

The connecting manipulator support frame component is used for connecting the lifting rotating shaft with the manipulator support frame to transfer the rotation and lifting functions, and meanwhile, the function of independent rotation of the central rotating shaft of the manipulator is kept. The connecting manipulator support assembly comprises a manipulator support 17, a central rotating shaft 19, a first bearing seat 27, a first plane ball bearing 28, a second deep groove ball bearing 29, a transition plate 30 and a spline shaft 31 of a ball spline shaft sleeve mechanism. The structure is as follows: the upper end face of a spline shaft 31 of the ball spline shaft sleeve mechanism is fixedly connected with a transition plate 30 by a screw, the transition plate 30 is upwards and fixedly connected with the lower end face of a central boss of the manipulator support frame 17 by a screw, the upper end face of the central boss is upwards and fixedly connected with a first bearing seat 27 by a screw, the bearing seat is provided with a central through hole and a stepped inner cavity, and a central rotating shaft extends into the inner cavity of the first bearing seat 27 from the central through hole. The central rotating shaft 19 is sleeved into a first plane ball bearing 28, a first stepped hole in the inner cavity of the first bearing seat 27 is filled, the outer ring of the bearing is limited against the step of the inner cavity, then a second deep groove ball bearing 29 is sleeved into a second stepped hole, the upper end of the outer ring of the bearing is limited against the second step of the inner cavity, and the lower end of the outer ring of the bearing is limited against the boss of the manipulator support 17. The lifting rotating shaft and the central rotating shaft are shown to be separated in the figure, and the central rotating shaft can independently rotate by itself outside the lifting rotating shaft which follows the manipulator supporting frame.

Benefits of the utility model

(1) A transition cabin is adopted to replace a multi-cabin mode such as a feeding cabin, a discharging cabin and the like, so that vacuum space is saved;

(2) The hanging plate mode of synchronously taking, placing and conveying the working workpieces by adopting one set of mechanical arms replaces the multi-cabin multi-special mechanical hand working mode, so that the equipment structure is greatly simplified, the number of mechanical arms is reduced, the process steps and the operation are simplified, and the work efficiency is improved;

(3) The device has the advantages of simplified structure, simplified process action, improved reliability, low failure rate, low manufacturing cost of the device and low operation cost.

Claims

1. A synchronous transport manipulator of work piece link plate revolving stage for large-scale vacuum coating machine, characterized by: be equipped with adjacent coating film technology cabin (1) and transition cabin (4) in the vacuum coating machine, work piece link plate changes cabin synchronous transport manipulator including the cabin interior part and the cabin exterior part that realizes the whole lift pivoted of cabin interior part as the manipulator main part:

the intra-cabin portion includes: a hexahedral box-shaped conveying manipulator support frame (17), wherein a vertical central rotating shaft (19) is rotatably supported between a top plate and a bottom plate at the middle position, and three circular gears (68) are sequentially connected on the central rotating shaft from top to bottom; a central rotating shaft motor (26) is fixed on the top surface of the bottom plate of the conveying manipulator support frame, an output shaft is connected with a driving circular gear (23), and the driving circular gear is meshed with the circular gear below; two pairs of horizontal rack working arms (14) are correspondingly arranged on the front wall and the rear wall of the box-type conveying manipulator support frame in a front-back mode and correspondingly arranged at the same time in an up-down mode, tooth surfaces of the rack working arms are inwards meshed with the upper round gears and the middle round gears respectively, and a horizontal sliding rail sliding block mechanism is arranged between the rack working arms and the front wall and the rear wall of the box-type conveying manipulator support frame and enables the rack working arms to move left and right relative to the box-type conveying manipulator support frame; the right ends of the upper and lower rack working arms of the front wall respectively penetrate through the right wall opening of the box-shaped conveying manipulator support frame, and the left ends of the upper and lower rack working arms of the rear wall penetrate through the left wall opening of the box-shaped conveying manipulator support frame; the upper and lower penetrating ends of the same side wall are hinged on a vertical middle line of the back surface of a swing claw plate (10), so that the swing claw plate can swing relative to the upper and lower rack working arms; a reset spring is sleeved at the hinge shaft to enable the swing claw plate to be automatically reset to the position of the vertical working arm; the swing claw plate is a vertical rectangular plate, hooks (12) corresponding to the workpiece hanging plate are arranged near four corners on the plate surface of the swing claw plate, and one end of the bottom edge of the swing claw plate is provided with a downward extending horizontal guide roller or bearing (9); an arc-shaped guide plate (13) with a horizontal arc-shaped edge is further arranged on the bottom plate of the supporting frame of the conveying manipulator, and the position of the arc-shaped guide plate is arranged so that when the working arm starts to extend forwards towards the transition rotating frame, a guide bearing at the lower end of the swing claw plate sticks to the bottommost part of the arc-shaped guide plate, and the guide bearing climbs an arc-shaped slope along the arc-shaped edge of the arc-shaped guide plate in the process of extending forwards of the working arm, so that the swing claw plate rotates through a hinge shaft to swing by an angle; the design of the arc edge is that when the guide bearing climbs to the arc slope top, the swing claw plate swings to be parallel to the direction of the rack working arm.

2. The synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine according to claim 1, which is characterized in that: the extravehicular portion includes: the transition cabin bottom plate is provided with a through hole corresponding to the central rotating shaft of the cabin interior, a vertical spline shaft sleeve mechanism is arranged outside the through hole, the spline shaft sleeve mechanism consists of a spline shaft and a spline shaft sleeve sleeved outside the spline shaft sleeve mechanism, the spline shaft and the spline shaft sleeve can move axially relatively but only rotate simultaneously, the spline shaft sleeve can be rotatably supported on the bottom surface of the transition cabin bottom plate, and the bottom surface of the transition cabin bottom plate is also provided with a spline shaft sleeve rotary driving mechanism; the top end of the spline shaft is fixedly supported at the bottom of the supporting frame of the cabin interior part, the bottom end of the spline shaft can relatively rotate and can only be supported at the upper end of a piston rod of a cylinder in an indirect manner in a way of moving up and down at the same time, and the cylinder is fixedly supported on the bottom surface of the transition cabin bottom plate.

3. The synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine according to claim 2, which is characterized in that: the spline shaft sleeve is rotatably supported on the bottom surface of the transition cabin bottom plate and comprises the following structures: a rotary sleeve (43) is sleeved outside the spline shaft sleeve (40) and fixedly connected with the spline shaft sleeve, the rotary sleeve is rotatably supported in an inner cavity of a tubular fixing seat (42) through a bearing, and the upper end of the fixing seat is fixed below the bottom plate of the transition cabin.

4. The synchronous transport manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine according to claim 3, wherein the synchronous transport manipulator is characterized in that: the spline shaft sleeve is rotatably supported on the bottom surface of the transition cabin bottom plate and has the structure that: the fixed seat (42) is a sleeve with an outer convex ring shoulder on the upper end surface, and the inner cavity is a stepped inner hole with two ends having large inner diameter and a section of convex ring step near the bottom end; the annular bottom locking plate (38) is sleeved outside the fixed seat, the annular shoulder of the fixed seat is in sealing and fixing connection with the upper end face of the bottom locking plate through a second O-shaped ring (36), the annular shoulder of the fixed seat is sleeved in the through hole of the bottom plate of the transition cabin, and the upper end face of the bottom locking plate exceeds the annular shoulder part of the fixed seat and is in sealing and fixing connection with the outer wall of the bottom plate of the transition cabin through a third O-shaped ring (37); the rotary sleeve (43) is sleeved outside the spline shaft sleeve (40), an outer convex ring shoulder of the upper end surface of the spline shaft sleeve is pressed on an upper ring shoulder of the rotary sleeve, and the upper convex ring shoulder and the upper ring shoulder are fixedly connected by screws; the end surface annular shoulder of the lower sleeve of the spline shaft sleeve is fixedly connected with the lower end surface of the rotary sleeve by a screw; the upper part of the rotary sleeve is sleeved with a deep groove ball bearing, the upper end of the inner ring of the bearing is propped against the upper annular shoulder of the rotary sleeve, the bearing is sleeved in an upper stepped hole of the inner cavity of the fixed seat, the lower end of the outer ring of the bearing is propped against the convex ring of the inner cavity, and the upper end of the outer ring of the bearing is limited by a first limiting sleeve (39); the rotating sleeve is also sleeved with a deep groove ball bearing close to the lower end part and is sleeved in a lower stepped hole of the inner cavity of the fixed seat, the upper end surface of the outer ring of the rotating sleeve is propped against the convex ring of the inner cavity, the lower end surface of the outer ring of the rotating sleeve is limited by a bottom locking cover (44) fixedly connected with the fixed seat, and the lower end of the inner ring of the rotating sleeve is limited by a second limiting sleeve (45); an annular sealing seat (33) is sleeved into the upper end hole of the fixed seat, the upper end surface of the sealing seat is provided with a convex ring shoulder, the convex ring shoulder is pressed on the upper end of the fixed seat, and the sealing seat is fixedly connected with the upper ring shoulder of the fixed seat by a screw through a first O-shaped ring (35); the spline shaft 31 of the ball spline shaft sleeve mechanism penetrates through the central through hole of the sealing seat and extends into the cabin; a framework oil seal (34) is arranged between a spline shaft (31) of the ball spline shaft sleeve mechanism and the inner wall of a central hole of the sealing seat for sealing, the lower end of the framework oil seal is limited by an annular shoulder in the central hole of the sealing seat (33), and a gland (32) fixedly connected with the sealing seat is arranged at the upper end of the framework oil seal for compressing; the lower end surface of the inner cavity part of the sealing seat sleeved into the fixing seat is abutted against the first limit sleeve (39).

5. The synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine according to claim 3 or 4, wherein the synchronous conveying manipulator is characterized in that: the bottom end of the spline shaft can relatively rotate but can only move up and down simultaneously and is indirectly supported at the upper end of a piston rod of a cylinder, and the structure is as follows: a sleeve-shaped second bearing seat (58) with a downward opening is fixedly connected to the lower end face of a spline shaft (31) of the ball spline shaft sleeve mechanism by a screw, the second bearing seat is provided with two layers of ladder inner cavities, the inner diameter close to the opening is large, a second plane ball bearing (59) is arranged in the inner cavity of the second bearing seat, the inner hole of the second plane ball bearing is sleeved with a transition shaft (62), the annular shoulder arranged on the transition shaft is propped against the inner ring of the second plane ball bearing, a fourth deep groove ball bearing (60) is sleeved into the space between the transition shaft and the lower layer ladder inner cavity of the second bearing seat, the transition collar shoulder is propped against the inner ring of the fourth deep groove ball bearing, the inner cavity step of the second bearing seat is propped against the outer ring of the second bearing seat, and a bearing locking plate (61) is fixedly connected with the end face of the opening of the second bearing seat by the screw; the piston rod of the air cylinder (63) is fixedly connected with the lower end surface of the transition shaft.

6. The synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine according to claim 5, wherein the synchronous conveying manipulator is characterized in that: the spline shaft sleeve rotary driving mechanism is as follows: the bottom surface of the transition cabin bottom plate is provided with a motor, and the output of the motor is decelerated and then drives the spline shaft sleeve to rotate through the belt pulley transmission mechanism.

7. The synchronous conveying manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine as claimed in claim 6, wherein the synchronous conveying manipulator is characterized in that: the structure of the vertical center rotating shaft (19) rotatably supported between the top plate and the bottom plate at the middle position of the conveying manipulator support frame (17) is as follows: the first deep groove ball bearing (20) is sleeved at the top end of the central rotating shaft, a central rotating shaft top cover (19-1) fastened by screws is arranged on the top end of the central rotating shaft, the annular edge of the top cover presses the inner ring of the first deep groove ball bearing, the central rotating shaft penetrates through a central hole on the top plate of the manipulator support frame to extend downwards, the top bearing cover (21) and a boss around the central hole of the support frame press the bearing outer ring up and down, and the top bearing cover is fixedly connected to a boss around the central hole of the support frame by screws, so that the top of the central rotating shaft is movably connected.

8. The synchronous transport manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine as recited in claim 7, wherein the synchronous transport manipulator is characterized in that: the upper end face of a spline shaft (31) of the ball spline shaft sleeve mechanism is fixedly connected with a transition plate (30) by a screw, the transition plate is upwards and fixedly connected with the lower end face of a central hole boss of a manipulator support frame by a screw, the upper end face of the central hole boss is upwards and fixedly connected with a first bearing seat (27) by a screw, the bearing seat is provided with a central through hole and a stepped inner cavity, and a central rotating shaft extends into the inner cavity of the first bearing seat from the central through hole; the central rotating shaft is sleeved into a first plane ball bearing (28) firstly, a first stepped hole in the inner cavity of the first bearing seat is arranged, the outer ring of the bearing is limited against the step of the inner cavity, then a second deep groove ball bearing (29) is sleeved into a second stepped hole, the upper end of the outer ring of the bearing is limited against the second step of the inner cavity, and the lower end of the outer ring of the bearing is limited against the boss of the support frame of the manipulator.

9. The synchronous transport manipulator for a workpiece hanging plate rotating cabin of a large vacuum coating machine as claimed in claim 8, wherein the synchronous transport manipulator is characterized in that: the workpiece hanging plate is a vertical rectangular hanging plate, four corners on the plate surface are provided with hanging hook holes, the front and rear surfaces of the hanging hook holes are respectively plugged by symmetrical hanging hook locking plates, the hanging hook locking plates are provided with hanging hook holes in the center, the hanging hook locking plates are in the shape of a lower circle, and the upper ends of the hanging hook locking plates are narrow slotted holes.