CN219328568U - Helium detection equipment for improving detection accuracy - Google Patents
Helium detection equipment for improving detection accuracy Download PDFInfo
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- CN219328568U CN219328568U CN202223553492.6U CN202223553492U CN219328568U CN 219328568 U CN219328568 U CN 219328568U CN 202223553492 U CN202223553492 U CN 202223553492U CN 219328568 U CN219328568 U CN 219328568U
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The utility model discloses helium detection equipment for improving detection precision, which is applied to industry and comprises a main pump unit, a maintenance pump unit, a vacuum box and a controller, wherein the main pump unit is connected with the vacuum box, the maintenance pump unit is connected with the vacuum box, the controller is connected with the main pump unit, the controller is connected with the maintenance pump unit, and the pumping speed of the maintenance pump unit is smaller than that of the main pump unit. The utility model has the beneficial effects that: the control shunt ratio is within an order of magnitude, so that the detection precision of helium detection equipment is greatly improved.
Description
Technical Field
The utility model relates to a vacuum helium detection technology, in particular to helium detection equipment capable of improving detection accuracy.
Background
Vacuum helium detection is a technique for detecting the leak of an analysis element in a vacuum environment by taking helium as a trace gas. The technology has the advantages of high sensitivity, wide application range, no toxicity, no harm and the like, and is gradually oriented to industries such as new energy, aerospace, automobiles and the like.
The common vacuum box helium detection system is provided with a set of evacuation pump set, a vacuum box and a forepump of the leak detector. The gas in the vacuum box is pumped out by the pump, and the pressure in the vacuum box is reduced to below 20Pa in a certain time, so that the vacuum box can be regarded as a quasi-vacuum state. In this state, the detection element in the vacuum box is filled with an appropriate helium gas and the leak detector is opened, and the gas therein is pumped out by the pump of the leak detector and analyzed. When the leak detector detects the leakage rate of an element in a vacuum box, the main pump group is normally operated to carry out in-box evacuation, meanwhile, the power and the pumping speed of the main pump group are far greater than those of a forepump of the leak detector, so that most of helium gas of the element leaked in the vacuum box can be pumped away by the main pump group, a small part of the helium gas can enter the leak detector and analyze the leakage rate of the element, thus the phenomenon of helium gas shunt is inevitably generated, namely the inherent characteristic of the helium detection equipment, namely the shunt ratio, the shunt ratio is a core parameter of the helium detection equipment, the value of the shunt ratio can directly influence the detection precision of the whole set of helium detection equipment, and the current shunt ratio of the helium detection equipment is more than one order of magnitude (10 times), even the shunt ratio can reach two orders of magnitude (100 times). Since the background value of helium detection equipment (vacuum box without element, leak rate of empty box detection) is limited, generally 10 -9 Pa.m 3 The leakage rate of the element is detectable at about-6 level with the shunt, but the leakage rate of the element is at-7 or-8 level, plus the inherent shunt ratio of the device is difficult to detect.
In order to improve the detection accuracy of helium detection equipment, a series of changes have been made to this in the prior art. If the pumping speed of the main pumping set is reduced, the error influence on the leak detector is reduced. When using helium test equipment, the evacuation pump is not complete and the time of the clock is long because of the small evacuation, exceeding the time clock of helium test or affecting the test accuracy.
Furthermore, the pumping speed of the pump of the leak detector is changed into larger pumping speed, but because the pumping speed of the molecular pump inside the leak detector and the caliber of the pipeline joint are fixed, the effect is only fixed, but the influence is small, the detection precision of the helium detection equipment is limited, and the pumping speed of the pump of the prior stage of the leak detector is also half the result of the work, even the influence is close to zero. Moreover, even if the errors are reduced to a minimum, that cost is not imaginable, and it is obviously not only necessary to increase the size of the leak detector and to replace the pipes with larger radius, but also to increase the number and the mass of the evacuation pumps.
The information disclosed in this background section is only for enhancement of understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information has been made as prior art that is well known to a person of ordinary skill in the art.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: how to solve the problem of insufficient detection precision of the existing helium detection equipment.
The utility model solves the technical problems by the following technical means:
the helium detection equipment comprises a main pump unit, a maintenance pump unit, a vacuum box and a controller, wherein the main pump unit is connected with the vacuum box, the maintenance pump unit is connected with the vacuum box, the controller is connected with the main pump unit, the controller is connected with the maintenance pump unit, and the pumping speed of the maintenance pump unit is smaller than that of the main pump unit.
When the device is used, the element to be detected is placed in a vacuum box, and the vacuum box is sealed; and the system starts to draw gas in the vacuum box, tests the pressure in the vacuum box in real time, starts to close when the pressure in the vacuum box has fallen to 20Pa after a period of time, maintains the pump set to operate, and under the control of the controller, the main pump set and the maintenance pump set can operate sequentially, when the maintenance pump set maintains vacuum, the element leaks helium, then the leak detector is started to start detection, and the leak detector is stopped to finish detection, and the maintenance pump set is closed together. According to the utility model, the pump set is maintained in a vacuum state by changing when the vacuum is pumped, and the pumping speed of the pump set is maintained to be far smaller than that of the main pumping pump set and is close to that of the forepump of the leak detector, so that the pump set is maintained to be matched with the leak detector to be used when helium detection equipment is used for leak detection, the shunt ratio is controlled to be within one order of magnitude, and the detection precision of the helium detection equipment is greatly improved; the utility model is mainly applied to industry, and the common maintenance pump set is selected, so that the laboratory level is not required, and the industrial use cost is controlled.
Preferably, the maintenance pump set comprises at least two maintenance pumps connected in series.
Preferably, the maintenance pump group comprises a first maintenance pump and a second maintenance pump, wherein the first maintenance pump is connected with the second maintenance pump in series through a pipeline, and the second maintenance pump is connected with the vacuum box through a pipeline.
Preferably, the main pump group comprises at least three main pumps connected in series or in parallel.
Preferably, the main pump group comprises a first main pump, a second main pump and a third main pump, the first main pump and the second main pump are connected with the third main pump through pipelines, and the third main pump is connected with the vacuum box through the pipelines.
Preferably, the vacuum box further comprises a first support, the main pump group is connected to the first support, and the first support is located on one side of the vacuum box.
Preferably, the vacuum box further comprises a second bracket, wherein the maintenance pump set is connected to the second bracket, and the second bracket is positioned at one side of the vacuum box.
Preferably, the vacuum box is connected with a pressure gauge.
Preferably, the pumping speed of the main pumping unit is 50-100 times that of the maintenance pumping unit.
Preferably, the pumping speed of the main pumping unit is 800-1200 cubic meters/hour, and the pumping speed of the maintenance pumping unit is 10-20 cubic meters/hour.
The detection precision before the use is-6 grade, and the detection precision after the use reaches-7 grade, thereby improving the detection precision by one order of magnitude.
The utility model has the advantages that:
(1) When the device is used, the element to be detected is placed in a vacuum box, and the vacuum box is sealed; and the system starts to draw gas in the vacuum box, tests the pressure in the vacuum box in real time, starts to close when the pressure in the vacuum box has fallen to 20Pa after a period of time, maintains the pump set to operate, and under the control of the controller, the main pump set and the maintenance pump set can operate sequentially, when the maintenance pump set maintains vacuum, the element leaks helium, then the leak detector is started to start detection, and the leak detector is stopped to finish detection, and the maintenance pump set is closed together. According to the utility model, the pump set is maintained in a vacuum state by changing when the vacuum is pumped, and the pumping speed of the pump set is maintained to be far smaller than that of the main pumping pump set and is close to that of the forepump of the leak detector, so that the pump set is maintained to be matched with the leak detector to be used when helium detection equipment is used for leak detection, the shunt ratio is controlled to be within one order of magnitude, and the detection precision of the helium detection equipment is greatly improved; the utility model is mainly applied to industry, and a common maintenance pump set is selected, so that the laboratory level is not required, and the industrial use cost is controlled;
(2) By adding a set of maintenance pump group, the pumping speed of the main pumping pump is not required to be reduced, the vacuum state of the main pumping pump group pumping box reaching 20Pa is not influenced, and the detection beat is not influenced;
(3) The main pumping set is stopped, the maintenance pump set is used, so that the vacuum in the tank is maintained, the influence of the pumping pump on helium extraction of the leak detector is reduced, the detection precision before use is at the level of-6, the detection precision after use is at the level of-7, and the detection precision of one order of magnitude is improved.
Drawings
FIG. 1 is a schematic diagram of a helium detection apparatus for improving detection accuracy according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a helium detection apparatus for improving detection accuracy according to an embodiment of the present utility model;
reference numerals in the drawings:
1. a main pump group; 11. a first main pump; 12. a second main pump; 13. a third main pump;
2. maintaining a pump group; 21. a first maintenance pump; 22. a second maintenance pump;
3. a controller; 4. a first bracket; 5. a second bracket;
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions in the embodiments of the present utility model will be clearly and completely described in the following in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Embodiment one:
as shown in fig. 1, helium detection equipment for improving detection accuracy is applied to industry, and comprises a main pump unit 1, a maintenance pump unit 2, a vacuum box (not shown in the figure) and a controller 3; the main pump unit 1 is connected with the vacuum box, the maintenance pump unit 2 is connected with the vacuum box, the controller 3 is connected with the main pump unit 1, the controller 3 is connected with the maintenance pump unit 2, the pumping speed of the maintenance pump unit 2 is smaller than the pumping speed of the main pump unit 1, and the pumping speed of the maintenance pump unit 2 and the pumping speed close to the forepump of the leak detector are close.
The main pump group 1 comprises at least three main pumps connected in series or in parallel. In this embodiment, the main pump unit 1 includes a first main pump 11, a second main pump 12, and a third main pump 13, where the first main pump 11 and the second main pump 12 are all connected to the third main pump 13 through pipes, and the third main pump 13 is connected to the vacuum box through pipes.
The helium detection equipment for improving the detection accuracy further comprises a first support 4, wherein the main pumping unit 1 is connected to the first support 4, and the first support 4 is located on one side of the vacuum box. Specifically, the first support 4 is double-layered, the first main pump 11 and the second main pump 12 are located at the lower layer, and the third main pump 13 is located at the upper layer.
The maintenance pump group 2 comprises at least two maintenance pumps connected in series. In this embodiment, the maintenance pump unit 2 includes a first maintenance pump 21 and a second maintenance pump 22, where the first maintenance pump 21 and the second maintenance pump 22 are connected in series through a pipeline, and the second maintenance pump 22 is connected to the vacuum box through a pipeline.
The helium detection apparatus for improving the detection accuracy further comprises a second bracket 5, wherein the maintenance pump group 2 is connected to the second bracket 5, and the second bracket 5 is positioned at one side of the vacuum box. The second support 5 is a double-layer structure, the first maintenance pump 21 is located at the lower layer, and the second maintenance pump 22 is located at the upper layer.
The first bracket 4 and the second bracket 5 are both made of steel materials by welding, and the first bracket 4 and the second bracket 5 can be positioned on the same side of the vacuum box and can also be arranged on site to adjust positions.
And the vacuum box is connected with a pressure gauge for monitoring the pressure in the vacuum box.
The controller 3 is also connected to the support for controlling the start and stop of the main pump unit 1 and the maintenance pump unit 2.
When the embodiment is used, an operator starts a power supply, places the element to be detected in a vacuum box, and seals the vacuum box; the system opens the main pump group 1 again, starts to extract the gas in the vacuum box, tests the pressure in the vacuum box in real time, and after a period of time, when the pressure in the vacuum box has fallen to 20Pa, the main pump group 1 starts to be closed, maintains the pump group 2 to be ready for operation, and under the control of the controller 3, the main pump group 1 can work with the maintenance pump group 2 in turn, when the maintenance pump group 2 maintains vacuum, the component leaks helium, then starts the leak detector to start detection, waits until the leak detector finishes detection, maintains the pump group 2 to be closed together.
According to the embodiment, when the vacuum is pumped, the maintenance pump set 2 is changed to maintain the vacuum state, meanwhile, the pumping speed of the maintenance pump set 2 is far smaller than that of the main pumping pump set 1 and is close to that of the forepump of the leak detector, the maintenance pump set 2 is matched with the leak detector for use when helium detection equipment is used for detecting leak, helium pumped by the maintenance pump set 2 can be reduced, the control split ratio is within one order of magnitude, and the detection precision of the helium detection equipment is greatly improved.
The helium detection equipment in this embodiment is mainly applied in industry, namely in the mill, the ordinary maintenance pump set 2 is selected, the laboratory level is not required, the Roots pump set with better performance can be selected for improving the detection precision in the laboratory, the corresponding cost can be improved, the helium detection equipment in this embodiment is applied in industry, the ordinary pump set is selected, and the industrial use cost can be controlled.
In this embodiment, by adding a set of maintenance pump set 2, the pumping speed of the main pumping set 1 does not need to be reduced, the vacuum state that the vacuum pumping box of the main pumping set 1 reaches 20Pa is not affected, and the detection beat is not affected. When the vacuum is pumped to 20Pa, a main pump with larger pumping speed is not used, a maintenance pump set 2 with smaller pumping speed is used, the detection precision before the use is at the level of minus 6, the detection precision after the use is at the level of minus 7, and the detection precision of one order of magnitude is improved.
Embodiment two:
in this embodiment, the pumping speed of the main pumping unit 1 is 50-100 times that of the maintenance pumping unit 2.
Specifically, the pumping speed of the main pumping unit 1 is 800-1200 cubic meters per hour, preferably the pumping speed of the main pumping unit 1 is 1000 cubic meters per hour, and the pumping speed of the maintenance pumping unit 2 is 10-20 cubic meters per hour, preferably the pumping speed of the maintenance pumping unit 2 is 16 cubic meters per hour.
The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (10)
1. The helium detection equipment is characterized by comprising a main pump unit, a maintenance pump unit, a vacuum box and a controller, wherein the main pump unit is connected with the vacuum box, the maintenance pump unit is connected with the vacuum box, the controller is connected with the main pump unit, the controller is connected with the maintenance pump unit, and the pumping speed of the maintenance pump unit is smaller than that of the main pump unit.
2. The helium detection apparatus of claim 1, wherein said maintenance pump set comprises at least two maintenance pumps connected in series.
3. The helium detection apparatus according to claim 2, wherein the maintenance pump unit comprises a first maintenance pump and a second maintenance pump, the first maintenance pump and the second maintenance pump being connected in series through a pipe, the second maintenance pump being connected to the vacuum tank through a pipe.
4. Helium detection apparatus according to claim 1, wherein said main pump group comprises at least three main pumps connected in series or in parallel.
5. The helium detection apparatus according to claim 4, wherein the main pump unit comprises a first main pump, a second main pump, and a third main pump, the first main pump and the second main pump are connected to the third main pump via a pipe, and the third main pump is connected to the vacuum box via a pipe.
6. The helium detection apparatus according to claim 1, further comprising a first bracket, wherein said main pump group is connected to said first bracket, and wherein said first bracket is located at one side of said vacuum box.
7. The helium detection apparatus according to claim 1, further comprising a second bracket, said maintenance pump set being connected to said second bracket, said second bracket being located on one side of said vacuum box.
8. Helium detection apparatus according to claim 1, wherein said vacuum box is connected to a pressure gauge.
9. Helium detection apparatus according to claim 1, wherein the pumping speed of said main pumping unit is 50-100 times the pumping speed of said maintenance pumping unit.
10. Helium detection apparatus according to claim 1, wherein the pumping speed of said main pumping unit is 800-1200 cubic meters per hour and the pumping speed of said maintenance pumping unit is 10-20 cubic meters per hour.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223553492.6U CN219328568U (en) | 2022-12-28 | 2022-12-28 | Helium detection equipment for improving detection accuracy |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223553492.6U CN219328568U (en) | 2022-12-28 | 2022-12-28 | Helium detection equipment for improving detection accuracy |
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| Publication Number | Publication Date |
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| CN219328568U true CN219328568U (en) | 2023-07-11 |
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| CN202223553492.6U Active CN219328568U (en) | 2022-12-28 | 2022-12-28 | Helium detection equipment for improving detection accuracy |
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- 2022-12-28 CN CN202223553492.6U patent/CN219328568U/en active Active
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