CN219328158U - Clean environment humidity fine-adjustment device for semiconductor production process - Google Patents
Clean environment humidity fine-adjustment device for semiconductor production process Download PDFInfo
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- CN219328158U CN219328158U CN202223418747.8U CN202223418747U CN219328158U CN 219328158 U CN219328158 U CN 219328158U CN 202223418747 U CN202223418747 U CN 202223418747U CN 219328158 U CN219328158 U CN 219328158U
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Abstract
The utility model provides a clean environment humidity fine adjustment device for a semiconductor production process, which comprises the following components: an intake air filtering unit configured to filter intake air and supply the filtered air to the ultrasonic humidifier to serve as a medium for transporting vaporized water molecules; a water inlet filter unit configured to filter inlet water and provide filtered clean water to the ultrasonic humidifier; an ultrasonic humidifier configured to include an atomizing plate, generate high-humidity air by high-frequency oscillation of the atomizing plate, and supply the generated high-humidity air to an atomizing pipe; an atomizing tube configured to connect the ultrasonic humidifier with a humidification section of an air supply system of a fresh air system or a circulating air system; a high-precision humidity sensor configured to measure the relative humidity of the humidity control target area in real time to generate a control humidity adjustment control signal for controlling the amount of ultrasonic humidification.
Description
Technical Field
The utility model relates to a semiconductor processing technology, in particular to a clean environment humidity fine-adjustment device for a semiconductor production process.
Background
With the updating of semiconductor production technology, the manufacturing cost of production equipment is higher and higher, and the requirements on the production environment are correspondingly improved. In order to ensure smooth progress of semiconductor production, it is necessary to provide a precisely controlled humidity environment for a clean environment of semiconductor production.
The control requirement of the semiconductor production process on the environmental temperature and humidity is very high. Among them, controlling the ambient humidity is an important means for suppressing the generation of static electricity; too fast or too large humidity fluctuations also affect the yield level of the process production; the precision and the service life of some high-precision equipment are affected; and comfort of the body feel of the worker. The relative humidity is controlled at 50% ± 2.5% in a clean environment at 22 ℃ as is required in a typical semiconductor process.
In current production processes, humidification methods commonly employed in clean ambient air treatment systems are typically electrode type, electrothermal type, high pressure spray, and the like. However, in existing humidifier systems, consideration of the water quality and the change of the internal and external environments is insufficient; in addition, the humidity control accuracy of the humidification system to the environment is insufficient. Accordingly, there is a need for a clean environment humidity fine adjustment device for providing a precisely controlled humidity environment for a semiconductor manufacturing clean environment as an alternative or in addition to the original humidification system.
Disclosure of Invention
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, comprising: an intake air filtering unit configured to filter intake air and supply the filtered air to the ultrasonic humidifier using a pressure difference effect of an intake side and a humidifying section to serve as a medium for transporting vaporized water molecules; a water inlet filter unit configured to filter inlet water and provide filtered clean water to the ultrasonic humidifier to improve a maintenance period of the atomizing plate; an ultrasonic humidifier configured to include an atomizing plate, evaporate water molecules by high-frequency oscillation of the atomizing plate to mix with the filtered medium air, thereby generating high-humidity air, and supply the generated high-humidity air to the atomizing pipe; an atomizing pipe configured to connect the ultrasonic humidifier with a humidification section of an air supply system of a fresh air system or a circulating air system and to supply highly humid air into the air supply system of the fresh air system or the circulating air system, a high-precision humidity sensor configured to a humidity control target area in the fresh air system or the circulating air system and to measure relative humidity of the humidity control target area in real time to generate a control humidity adjustment control signal for controlling an ultrasonic humidification amount.
An aspect of the present utility model provides a clean environment humidity fine adjustment device for a semiconductor manufacturing process, which is configured to pass a portion of bypass air sucked from a fresh air static pressure tank in a fresh air system MAU through the clean environment humidity fine adjustment device in a use scenario including the fresh air system MAU, a high efficiency filter unit FFU and a dry coil DCC system, thereby providing vaporized water molecules to an atomizing pipe, and providing high humidity air to a humidifying section of the fresh air system through the atomizing pipe, wherein the high precision humidity sensor is configured to perform humidity real-time detection in a humidity control target area, and provide a control humidity adjustment signal.
An aspect of the present utility model provides a clean environment humidity fine adjustment device for a semiconductor production process, the clean environment humidity fine adjustment device being configured for use in a use scenario including a circulated air AHU system, an air inlet side of the clean environment humidity fine adjustment device being connected to an external environment through a filter screen; the atomization pipe is connected with the secondary return air pipe, and external air at the air inlet side is sucked through the negative pressure effect of the secondary return air pipe and passes through the ultrasonic humidifier, so that vaporized water molecules are provided to the atomization pipe; and high-humidity air is supplied to the secondary return air pipe or the humidifying section of the circulating air AHU system through the atomizing pipe, wherein the high-precision humidity sensor is configured in a humidity control target area for humidity real-time monitoring and providing a control humidity adjusting signal.
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, wherein the inlet water filtering unit includes a filter of 5um or less installed therein to supply inlet water to an ultrasonic humidifier or supply pure water or secondary RO water to the ultrasonic humidifier for preventing atomization hardening.
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, wherein the control humidity adjustment signal is fed back to the clean environment humidity fine adjustment apparatus, and the humidification amount of the ultrasonic humidifier is controlled according to a control range set by the clean environment humidity fine adjustment apparatus.
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, wherein when a measured control humidity adjustment control signal exceeds a first control threshold, an operation of an ultrasonic humidifier is stopped, and when the measured control humidity adjustment control signal is lower than a second control threshold, the operation of the ultrasonic humidifier is started.
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, in which when a measured control humidity adjustment control signal is within a first control range, the operating power of an ultrasonic humidifier is further reduced, thereby improving the accuracy of controlling the relative humidity of the environment of a target area.
An aspect of the present utility model provides a clean environment humidity fine adjustment apparatus for a semiconductor manufacturing process, in which an ultrasonic humidifier includes a main tank to which inlet water is supplied through filtration, and an atomization plate, and a water level in the main tank is controlled to be higher than a atomization plate water level detection sheet by 5mm through a level controller installed in the main tank, so as to achieve the best vaporization effect.
Drawings
FIG. 1 is a schematic diagram of a clean environment humidity fine adjustment device for use in a use scenario including a fresh air system MAU, a high efficiency filter unit FFU, and a dry coil DCC system according to an embodiment of the present utility model; and
FIG. 2 is a schematic diagram illustrating a clean environment humidity fine adjustment device for use in a usage scenario involving a circulated-air AHU system according to another embodiment of the present utility model.
Detailed Description
Before proceeding with the following detailed description, it may be advantageous to set forth definitions of certain words and phrases used throughout this patent document. The terms "coupled," "connected," and derivatives thereof, refer to any direct or indirect communication or connection between two or more elements, whether or not those elements are in physical contact with one another. The terms "transmit," "receive," and "communicate," and derivatives thereof, encompass both direct and indirect communication. The terms "include" and "comprise," as well as derivatives thereof, mean inclusion without limitation. The term "or" is inclusive, meaning and/or. The phrase "associated with … …" and its derivatives are intended to include, be included in, interconnect with, contain within … …, connect or connect with … …, couple or couple with … …, communicate with … …, mate, interleave, juxtapose, approximate, bind or bind with … …, have attributes, have relationships or have relationships with … …, etc. The term "controller" refers to any device, system, or portion thereof that controls at least one operation. Such a controller may be implemented in hardware, or a combination of hardware and software and/or firmware. The functionality associated with any particular controller may be centralized or distributed, whether locally or remotely. The phrase "at least one," when used with a list of items, means that different combinations of one or more of the listed items may be used, and that only one item in the list may be required. For example, "at least one of A, B, C" includes any one of the following combinations: A. b, C, A and B, A and C, B and C, A and B and C.
Definitions for other specific words and phrases are provided throughout this patent document. Those of ordinary skill in the art should understand that in many, if not most instances, such definitions apply to prior as well as future uses of such defined words and phrases.
In this patent document, the application combinations of modules and the division levels of sub-modules are for illustration only, and the application combinations of modules and the division levels of sub-modules may have different manners without departing from the scope of the disclosure.
The production process in the semiconductor industry generally has high requirements on environment, in particular on environment humidity. Too high, too low or too high fluctuation of the ambient humidity can adversely affect the accuracy of the equipment, the prevention and control of static electricity, the process and the reliability of the product. In addition, the air treatment system has the problems that the maintenance period of the humidifier is shortened, the humidification capacity is insufficient and the humidification efficiency is obviously reduced in long-term use.
In the current production process, the common humidification modes adopted by the clean environment air treatment system are generally wet film, electrode type, electric heating type, high-pressure spraying and the like, wherein the wet film humidifier has poor humidification capability, the electrode type has high humidification energy consumption and short service life, the electric heating type has high humidification energy consumption, and the high-pressure spraying humidification has the defects of high requirement on water quality, large spraying particle size and the like. The above-mentioned drawbacks tend to make the humidity fluctuation in the humidity control area large, and frequently touch the environmental control abnormality line, resulting in a decrease in production efficiency.
In order to solve the problems, the energy-saving and efficient ultrasonic humidifier is arranged in parallel at an original circulating air humidifying section, so that the original low-efficiency humidifier is replaced, or the humidifier is used as a supplement of an original humidifying system under the condition of insufficient humidifying capacity or insufficient precision, and finer control on a humidity environment is realized.
The ultrasonic humidification method is an isenthalpic humidification method, has the characteristics of low energy consumption, large humidification amount, high atomization efficiency, small particles and no condensation, and can effectively improve the humidification efficiency.
In addition, by using a high-sensitivity humidity sensor installed in the humidity control target area, the phenomenon real-time humidity condition can be accurately fed back to the humidifying system, thereby realizing accurate humidity control.
Fig. 1 is a schematic view of a clean environment humidity fine-adjustment apparatus according to an embodiment of the present utility model.
Referring to fig. 1, a clean environment humidity fine adjustment apparatus according to an embodiment of the present utility model includes: high accuracy humidity transducer, inlet air filter unit, ultrasonic humidifier, inlet water filter unit, atomizing pipe.
The clean environment humidity fine-adjustment device is used for a fresh air purification system comprising a fresh air system (MAU), a high-efficiency filter unit (FFU) and a Dry Cooling Coil (DCC), and the air purification system is a clean environment generation system with strict requirements on humidity control.
Referring to fig. 1, a first portion of the output of the fresh air static pressure tank is provided to a primary section filter of the fresh air system and a second portion thereof is provided to an intake air filter unit of the clean environment humidity fine adjustment device, using the pressure difference effect of the intake side and the humidification section.
The first part of the output of the fresh air static pressure box is mixed with humidified air which passes through the output of the atomizing pipe of the clean environment humidity fine-adjustment device through a primary section filter and a secondary section filter for air filtration, a preheating section formed by a preheating disk, a pre-cooling section formed by a first cold disk pipe and a humidifying section. The mixed gas then passes through a re-cooling section comprised of a second cold coil and a re-heating section comprised of a second hot coil. The temperature-regulated mixed gas is supplied to a sub-high efficiency stage filter for air filtration through a fan stage constituted by a fan, after which the filtered air is supplied to a blow-in static pressure tank. Wherein, according to an embodiment of the utility model, the primary section filter comprises a G4 panel filter and the intermediate section filter comprises an F6 intermediate bag filter. Wherein the humidification stage is humidified by means of a generally wet film, electrode, electrothermal, high pressure spray, etc. in accordance with embodiments of the present utility model.
The second part of the output of the fresh air static pressure box is provided into the ultrasonic humidifier through an air inlet filtering unit of the clean environment humidity fine adjusting device, wherein water in the ultrasonic humidifier is provided through an air inlet filtering unit, and the air inlet is provided for the ultrasonic humidifier through a filter below 5um installed in the water inlet filtering unit, so that pure water or RO water is provided for the ultrasonic humidifier. The output of the ultrasonic humidifier is connected with the atomizing tube such that air passing through the ultrasonic humidifier is provided into the fresh air system via the atomizing tube to mix with the first portion of gas output to the fresh air static pressure tank.
A high-precision humidity sensor (not shown) is configured at a representative location point of a humidity control target area of a clean environment to generate a control humidity adjustment control signal by analyzing the relative humidity of the area. For example, the high-accuracy humidity sensor may be disposed between the pre-cooling section and the humidification section, or may be disposed between the humidification section and the sub-cooling section, it being understood by those skilled in the art that the above-described locations are merely examples, which are not intended to limit the actual location of the high-accuracy humidity sensor. When the high-precision humidity sensor is configured at a representative position point of the humidity control target area, the relative humidity of the ambient air of the control target area can be measured more quickly and directly, and the relative humidity of the ambient air of the control target area can be controlled more accurately by quickly feeding back to the control system of the clean ambient humidity fine-adjustment device.
The control humidity adjusting control signal is fed back to the clean environment humidity fine adjusting device, and the humidification amount of the ultrasonic humidifier is controlled according to the control range set by the adjusting system. For example, according to one embodiment of the present utility model, the operation of the ultrasonic humidifier may be stopped when the measured control humidity adjustment control signal exceeds a first control threshold, and the operation of the ultrasonic humidifier may be started when the measured control humidity adjustment control signal is below a second control threshold. According to another embodiment of the present utility model, when the measured control humidity adjustment control signal is within the first control range, the operating power of the ultrasonic humidifier may be stepwise reduced, thereby improving the accuracy of controlling the relative humidity of the target area environment.
According to an embodiment of the utility model, the ultrasonic humidifier is installed in parallel on the outside or above the "humidification section" of the fresh air system, and a power supply is laid.
According to the embodiment of the utility model, the fresh air static pressure box is connected to the clean environment humidity fine adjustment device through the perforated air connection pipe, and the G4 plate filter is adopted as an inlet air filtering unit in the middle so as to perform primary purification treatment on air entering the clean environment humidity fine adjustment device.
Pure water or RO water is supplied to the ultrasonic humidifier through the water inlet filter unit, in which the water inlet is supplied to the ultrasonic humidifier through a filter of 5um or less installed therein. The ultrasonic humidifier is configured to include a main tank, an atomizing plate, and an atomizing chamber. By the high-frequency oscillation of the atomizing plate, water molecules are vaporized to be mixed with the filtered medium air, thereby generating high-humidity air, and the generated high-humidity air is supplied to the atomizing pipe. The intake water is supplied into the main tank of the ultrasonic humidifier, and the water level in the main tank is controlled by a water level controller installed in the main tank so that the water level is higher than a predetermined first height, for example, so that it "submerges the atomizing plate by 5mm". Wherein the ultrasonic humidifier is configured to be connected to the atomizing tube through the atomizing chamber.
According to an embodiment of the present utility model, the atomizing pipe is configured to connect an air supply port (output port) of the ultrasonic humidifier and a fan section (negative pressure section) of the fresh air system MAU, and the circulating air of the MAU is utilized to send the humidified air into the air supply system of the environment through the atomizing pipe.
According to the embodiment of the utility model, when the clean environment humidity fine adjustment device is applied to the MAU system, the clean environment humidity fine adjustment device absorbs a small part of fresh air in the fresh air static pressure box by utilizing the pressure difference of the fresh air unit, and the atomized wet air is sucked into the fresh air system through the atomization pipe by the clean environment humidity fine adjustment device and finally dispersed to the humidity control area, so that the aim of improving the relative humidity of the whole clean environment is fulfilled.
Fig. 2 is a schematic view of a clean environment humidity fine adjustment device according to another embodiment of the present utility model.
Referring to fig. 2, a clean environment humidity fine adjustment apparatus according to an embodiment of the present utility model includes: high accuracy humidity transducer, inlet air filter unit, ultrasonic humidifier, inlet water filter unit, atomizing pipe.
The clean environment humidity fine-adjustment device is used for a circulating Air (AHU) air purification system comprising an air handling unit, wherein the circulating air purification system is a clean environment generation system with slightly higher humidity control requirements.
Referring to fig. 2, the return air static pressure tank is connected with a secondary return air pipe through an air valve, and the secondary return air pipe receives humidified air from an atomizing pipe of the clean environment humidity fine-adjustment device. Referring to fig. 2, a first portion of the humidified air provided from the clean ambient humidity fine conditioning unit is provided to the return air plenum through the damper and a second portion thereof is provided between the humidification stage and the fan stage in the circulated air system AHU.
The return air of the output of return air static pressure case mixes with the air through new trend governing valve to through being used for air filtration's first section filter, the table cold segment that comprises first cold coil pipe, and humidification section, mix with the second part that passes through clean environment humidity fine adjustment device output. The mixed gas is then supplied to a medium-efficiency stage filter for air filtration by a fan stage constituted by a fan, after which the filtered air is supplied to a blow-in static pressure tank. Wherein, according to an embodiment of the utility model, the primary section filter comprises a G4 panel filter and the intermediate section filter comprises an F6 intermediate bag filter. Wherein the humidification stage is humidified by means of a generally wet film, electrode, electrothermal, high pressure spray, etc. in accordance with embodiments of the present utility model.
The clean environment humidity fine adjustment device receives air through the inlet air filter unit and supplies it into the ultrasonic humidifier. For example, the air inlet side of the clean environment humidity fine adjustment device is connected to the external environment through a filter screen, but it should be understood by those skilled in the art that the scope of the present utility model is not limited to the above example, and that the filtered air may be provided by other filtering devices as a medium for transporting the vaporized water molecules. In addition, water in the ultrasonic humidifier is supplied through the water inlet filter unit, thereby supplying pure water or RO water to the ultrasonic humidifier. The output of the ultrasonic humidifier is connected with the atomizing tube such that air passing through the ultrasonic humidifier is provided to the secondary return air tube via the atomizing tube to provide humidified air for an air purification system including the AHU.
The high-precision humidity sensor is configured at a certain sampling point of a humidity control area of the clean environment, for example, the high-precision humidity sensor can be configured between a surface cooling section and a humidifying section or between the humidifying section and a fan section, and a control humidity adjustment control signal is generated by analyzing the relative humidity of the humidity control area of the clean environment. When the high-precision humidity sensor is configured at a representative position point of the humidity control target area, the relative humidity of the ambient air of the control target area can be measured more quickly and directly, and the relative humidity of the ambient air of the control target area can be controlled more accurately by quickly feeding back to the control system of the clean ambient humidity fine-adjustment device.
The control humidity adjusting control signal is fed back to the clean environment humidity fine adjusting device, and the humidification amount of the ultrasonic humidifier is controlled according to the control range set by the adjusting system. For example, according to one embodiment of the present utility model, the operation of the ultrasonic humidifier may be stopped when the measured control humidity adjustment control signal exceeds a first control threshold, and the operation of the ultrasonic humidifier may be started when the measured control humidity adjustment control signal is below a second control threshold. According to another embodiment of the present utility model, when the measured control humidity adjustment control signal is within the first control range, the operating power of the ultrasonic humidifier may be stepwise reduced, thereby improving the accuracy of controlling the relative humidity of the target area environment.
According to an embodiment of the present utility model, an ultrasonic humidifier is installed in parallel on the outside or above a "fan section" of an air handler of a circulating air system, and a power supply is applied.
According to the embodiment of the utility model, the G4 plate filter is adopted as an inlet air filtering unit of the clean environment humidity fine adjustment device, so that primary purification treatment is carried out on air entering the clean environment humidity fine adjustment device.
Pure water or RO water is supplied to the ultrasonic humidifier through the water inlet filter unit, in which the water inlet is supplied to the ultrasonic humidifier through a filter of 5um or less installed therein. The ultrasonic humidifier is configured to include a main tank, an atomizing plate, and an atomizing chamber. By the high-frequency oscillation of the atomizing plate, water molecules are vaporized to be mixed with the filtered medium air, thereby generating high-humidity air, and the generated high-humidity air is supplied to the atomizing pipe. The intake water is supplied into the main tank of the ultrasonic humidifier, and the water level in the main tank is controlled by a water level controller installed in the main tank so that the water level is higher than a predetermined first height, for example, so that it "submerges the atomizing plate by 5mm". Wherein the ultrasonic humidifier is configured to be connected to the atomizing tube through the atomizing chamber.
According to an embodiment of the utility model, the atomizing pipe is configured to be connected to the secondary return air pipe and to provide humidified air through the secondary return air pipe to the return air plenum and the humidification section of the AHU, respectively.
According to the embodiment of the utility model, when the clean environment humidity fine adjustment device is applied to the AHU system, the clean environment humidity fine adjustment device sucks the humidified air atomized by the humidifying system into the circulating air system by utilizing the suction force of the negative pressure of the circulating air return section and finally diffuses the humidified air into a humidity control target area so as to achieve the aim of improving the relative humidity of the whole clean environment. In addition, through the configuration of secondary return air pipe for the air of humidification can earlier mix with the air in the circulated air system, thereby more effectively control ambient humidity. In addition, by setting the high-precision humidity sensor, the humidifying efficiency and precision can be adjusted according to the system requirements.
According to the clean environment humidity fine adjustment device comprising the ultrasonic humidifier, the humidification efficiency of the air purification system can be improved, and the energy consumption is low. In addition, the humidity adjusting range of the clean environment humidity fine adjusting device is larger, and the environment humidity can be controlled with high precision by controlling the ultrasonic humidifier.
Although the present disclosure has been described with exemplary embodiments, various changes and modifications may be suggested to one skilled in the art. The disclosure is intended to embrace such alterations and modifications that fall within the scope of the appended claims.
Any description of the present utility model should not be construed as implying that any particular element, step, or function is a necessary element to be included in the scope of the claims. The scope of patented subject matter is defined only by the claims.
Claims (8)
1. A clean environment humidity fine adjustment device for a semiconductor production process, comprising:
an intake air filtering unit configured to filter intake air and supply the filtered air to the ultrasonic humidifier using a pressure difference effect of an intake side and a humidifying section to serve as a medium for transporting vaporized water molecules;
a water inlet filter unit configured to filter inlet water and provide filtered clean water to the ultrasonic humidifier to improve a maintenance period of the atomizing plate;
an ultrasonic humidifier configured to include an atomizing plate, evaporate water molecules by high-frequency oscillation of the atomizing plate to mix with the filtered medium air, thereby generating high-humidity air, and supply the generated high-humidity air to the atomizing pipe;
an atomizing pipe configured to connect the ultrasonic humidifier with a humidification section of an air supply system of a fresh air system or a circulated air system, and to supply highly humid air into the air supply system of the fresh air system or the circulated air system; and
and the high-precision humidity sensor is configured in a humidity control target area in the fresh air system or the circulating air system, and measures the relative humidity of the humidity control target area in real time to generate a control humidity adjustment control signal for controlling the ultrasonic humidification amount.
2. The clean environment humidity fine adjustment device according to claim 1, wherein the clean environment humidity fine adjustment device is configured to be used in a use scene including a fresh air system MAU, a high efficiency filter unit FFU and a dry coil DCC system, a part of bypass air sucked from a fresh air static pressure tank in the fresh air system MAU passes through the clean environment humidity fine adjustment device so as to supply vaporized water molecules to an atomizing pipe, and high humidity air is supplied to a humidifying section of the fresh air system through the atomizing pipe, and the high precision humidity sensor is configured in a humidity control target area for performing humidity real-time detection to provide a control humidity adjustment signal.
3. The clean environment humidity fine adjustment device of claim 1, wherein the clean environment humidity fine adjustment device is configured for use in a use scenario comprising a circulated-air AHU system, an air intake side of the clean environment humidity fine adjustment device being connected to an external environment through a filter screen; the atomization pipe is connected with the secondary return air pipe, and external air at the air inlet side is sucked through the negative pressure effect of the secondary return air pipe and passes through the ultrasonic humidifier, so that vaporized water molecules are provided to the atomization pipe; and high-humidity air is supplied to the secondary return air pipe or the humidifying section of the circulating air AHU system through the atomizing pipe, and the high-precision humidity sensor is configured in a humidity control target area to perform humidity real-time monitoring and provide a control humidity adjusting signal.
4. The apparatus according to claim 1, wherein the inlet water filtering unit includes a filter of 5um or less installed therein to supply inlet water to the ultrasonic humidifier or supply pure water or secondary RO water to the ultrasonic humidifier for preventing the atomization from being contaminated.
5. A clean environment humidity fine adjustment device according to claim 2 or 3, wherein the control humidity adjustment signal is fed back to the clean environment humidity fine adjustment device, and the humidification amount of the ultrasonic humidifier is controlled according to the control range set by the clean environment humidity fine adjustment device.
6. The fine clean environment humidity adjustment device of claim 5, wherein the operation of the ultrasonic humidifier is stopped when the measured control humidity adjustment control signal exceeds a first control threshold, and the operation of the ultrasonic humidifier is started when the measured control humidity adjustment control signal is below a second control threshold.
7. The fine clean environment humidity adjusting apparatus according to claim 5, wherein when the measured control humidity adjusting control signal is within the first control range, the operating power of the ultrasonic humidifier is further reduced, thereby improving the accuracy of controlling the relative humidity of the environment of the target area.
8. The apparatus according to claim 1, wherein the ultrasonic humidifier comprises a main tank and an atomizing plate, the inlet water is supplied to the main tank through filtration, and the water level in the main tank is controlled to be higher than the atomizing plate water level detecting sheet by 5mm by a level controller installed in the main tank.
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| CN202223418747.8U CN219328158U (en) | 2022-12-20 | 2022-12-20 | Clean environment humidity fine-adjustment device for semiconductor production process |
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| CN202223418747.8U CN219328158U (en) | 2022-12-20 | 2022-12-20 | Clean environment humidity fine-adjustment device for semiconductor production process |
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