CN219327997U - Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production - Google Patents
Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production Download PDFInfo
- Publication number
- CN219327997U CN219327997U CN202223584902.3U CN202223584902U CN219327997U CN 219327997 U CN219327997 U CN 219327997U CN 202223584902 U CN202223584902 U CN 202223584902U CN 219327997 U CN219327997 U CN 219327997U
- Authority
- CN
- China
- Prior art keywords
- gasifier
- liquid
- sulfur trioxide
- heat exchange
- sulfuric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 title claims abstract description 120
- 239000007788 liquid Substances 0.000 title claims abstract description 114
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000012535 impurity Substances 0.000 claims abstract description 16
- 239000006260 foam Substances 0.000 claims abstract description 9
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 2
- 238000002309 gasification Methods 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 11
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
The utility model belongs to the field of electronic grade sulfuric acid production equipment, and particularly relates to a sulfur trioxide liquid gasifier for electronic grade sulfuric acid production; the gasifier comprises a vertical gasifier main body, wherein two fixing plates are arranged in the gasifier main body, a plurality of heat exchange tubes and a plurality of exhaust tubes are also arranged in the gasifier main body, the heat exchange tubes and the exhaust tubes are arranged on the fixing plates along the vertical direction, and a foam remover and a secondary heating coil are also arranged in the gasifier main body; the upper part of the outer side of the gasifier is provided with a liquid inlet, sulfur trioxide liquid enters the heat exchange tube array through the liquid inlet, hot water passing through the outer wall of the heat exchange tube array is heated and gasified, enters the demister from bottom to top in the heat exchange tube array, and the impurity-removed gas is discharged through an exhaust port at the top of the gasifier; the demister blocks down impurities and gradually falls to the lower part of the gasifier, and the secondary heating gas enters the demister through the exhaust tube array and is finally discharged through the exhaust port. The utility model has the advantages that: small occupied area, low energy consumption and stable gasification process.
Description
Technical Field
The utility model belongs to the field of electronic grade sulfuric acid production equipment, and particularly relates to a sulfur trioxide liquid gasifier for electronic grade sulfuric acid production.
Background
The electronic grade sulfuric acid is also called high-purity sulfuric acid and ultra-purity sulfuric acid, belongs to an ultra-clean high-purity reagent, is an indispensable key basic chemical reagent in the development process of microelectronic technology, is widely applied to the microelectronic industries such as large-scale Integrated Circuits (ICs), semiconductors and the like at present, is used as cleaning and etching agents, and has good application prospect along with the high-speed development of the microelectronic industry, the current electronic grade sulfuric acid is increasingly required to be supplied in short supply.
Because the electronic grade sulfuric acid product has high purity, the purification process of the liquid sulfur trioxide is particularly critical as a production raw material of the electronic grade sulfuric acid, and the liquid sulfur trioxide is gasified and purified and enters a subsequent reaction production procedure in a gas state, wherein the state is required to be in a dry state, and the purity is required to be more than 99.999 percent.
Conventional sulfur trioxide gasifiers are generally of the horizontal or vertical lower liquid feed type, with the following drawbacks: 1. the occupied area is large; the horizontal floor space of the gasifier with the same gasification amount is 2/3 larger than the vertical floor space. 2. The horizontal gasifier is typically operated flooded, when the entire gasifier body is full of sulfur trioxide; in the gasification process, the part of sulfur trioxide needs to be integrally gasified to reach the gasification temperature, and the consumed heat is relatively large, so that energy waste is caused. 3. Because of the above-mentioned problem of large heat consumption, low-heat-value heat sources are not suitable, so that horizontal gasifiers generally select high-heat-value energy sources such as steam as heating sources, even high-pressure steam, and the boiling point of liquid sulfur trioxide is low (44.8 ℃), and when steam is used as the heating source, the gasification process is very unstable. 4. There are cases where there is a large amount of liquid sulfur trioxide in the gasifier, whether it is a horizontal gasifier or a vertical gasifier, and when there is a leak in the gasifier train, the sulfur trioxide reacts to give off a large amount of heat when it comes into contact with water or steam, which is certainly dangerous.
In summary, how to provide a sulfur trioxide gasifier to solve the problems of large occupied area, high energy consumption, unstable gasification process and excessive liquid storage is a technical problem to be solved by the skilled person.
Disclosure of Invention
In order to solve the problems, the utility model provides a sulfur trioxide liquid gasifier for producing electronic grade sulfuric acid.
The technical scheme of the utility model is as follows: the sulfur trioxide liquid gasifier for producing electronic grade sulfuric acid comprises a vertical gasifier main body, wherein a plurality of groups of fixing plates are arranged in the gasifier main body, the plurality of groups of fixing plates are arranged in parallel along the vertical direction of the gasifier, a plurality of heat exchange tubes and a plurality of exhaust tubes are also arranged in the gasifier main body, the heat exchange tubes and the exhaust tubes are all arranged on the fixing plates in a penetrating manner along the vertical direction, a foam remover and a secondary heating coil are also arranged in the gasifier main body, the foam remover is arranged at the inner top of the gasifier, and the secondary heating coil is arranged at the inner lower part of the gasifier;
the upper part of the outer side of the gasifier is provided with a liquid inlet, sulfur trioxide liquid enters the heat exchange tube nest through the liquid inlet, after being heated by hot water on the outer wall of the heat exchange tube nest, the sulfur trioxide liquid is gasified and enters the demister from bottom to top in the heat exchange tube nest, and the gas after impurity removal is discharged through an exhaust port at the top of the gasifier; the demister blocks down impurities and gradually falls on the lower part of the gasifier, the impurities are heated by the secondary heating coil, and heated gas enters the demister through the exhaust tube and is finally discharged through the exhaust port.
Further, a liquid baffle is arranged in the gasifier main body and close to the liquid inlet, the liquid baffle is in an inverted L shape, one end of the liquid baffle is fixed on the inside of the gasifier, and a sulfur trioxide liquid inlet channel is formed between the other end of the liquid baffle and the fixed plate.
Further, the two fixing plates are respectively arranged along the radial direction of the gasifier in the vertical direction, and the two ends of the heat exchange tube array are respectively fixed through the two fixing plates; the two ends of the exhaust row pipe are also respectively fixed on the two fixing plates, and the height of the exhaust row pipe is Yu Huanre.
Furthermore, a triangular groove is formed in the pipe orifice at the top end of each heat exchange tube. And a triangular groove is formed in the pipe orifice at the top end of the heat exchange tube array, so that sulfur trioxide liquid can flow in conveniently.
Further, the demister is of a multilayer structure formed by a plurality of stainless steel wires, and intercepts sulfur trioxide gas containing impurities; the density of the demister of the stainless steel wire net is 128kg/m 3 The porosity is set at 98.32%, the specific surface area is 403 square meters/m 3 The height is 100-150mm.
Further, a temperature sensor A and a pressure sensor A are arranged on the upper portion of the outer side of the gasifier main body, and the temperature sensor A and the pressure sensor A are respectively arranged on the upper portion of the demister.
Further, be equipped with temperature sensor B in gasifier main part outside lower part, temperature sensor B sets up in the proximity secondary heating coil department, secondary heating coil is "S" setting, and the secondary heating coil outside still is equipped with the governing valve, governing valve and temperature sensor B interlock, through the temperature of temperature sensor B control secondary heating, realize temperature automatically regulated.
Further, be the raffinate collection department in the vaporizer main part bottom sets up the raffinate discharge port, the raffinate discharge port is connected vaporizer main part outside raffinate pipeline, is equipped with the ooff valve on the raffinate pipeline, closes on the raffinate collection department and sets up the liquid level gauge, the ooff valve with the liquid level gauge is interlocking, when the liquid level gauge detects to set up the liquid level, opens the ooff valve through the control system of interlocking, discharges the raffinate to the collection tank that sets up under the raffinate pipeline, after the raffinate is discharged, closes the ooff valve.
Furthermore, the upper part of the outer side of the gasifier main body is also provided with an emergency evacuation port, the emergency evacuation port is arranged between the demister and the top end of the heat exchange tube array, and the emergency evacuation port is connected with an emergency evacuation valve and then connected with the collecting tank through a pipeline.
The beneficial effects of the utility model are as follows: according to the utility model, the gasifier is arranged vertically, so that the problem of large occupied area of the horizontal gasifier is solved;
the hot water is heated in the gasifier and controlled at 45 ℃, a high-temperature and high-pressure heating source is not needed, the thermodynamic energy consumption is low, hot water is adopted for heating, the sulfur trioxide liquid is subjected to heat exchange by being close to a heat exchange tube, the heat exchange efficiency is high, the whole gasification process is very stable, and the problem that the high-temperature and high-pressure heating source influences the gasification effect of the sulfur trioxide is avoided.
The liquid inlet is arranged at the upper part of the gasifier, the sulfur trioxide enters the heat exchange tube array of the gasifier from top to bottom under the action of gravity after passing through the liquid inlet channel, and the liquid in the heat exchange tube array is subjected to heat exchange and gasification by adhering the tube wall to the heat source outside the tube, so that the heat exchange tube always maintains a hollow state, and the problem of liquid storage is avoided.
The temperature sensor A and the pressure sensor A are respectively arranged on the upper part of the gasifier, so that each process value in the gasification process can be ensured to be accurate; the temperature sensor A is interlocked with a hot water flow regulating valve of the air inlet device, when the heat exchange tube array has leakage, hot water side pressure is larger than sulfur trioxide side pressure, hot water can enter the sulfur trioxide heat exchange tube array, and the two heat exchange tube arrays have exothermic reaction; the pressure and temperature of the gasifier are higher than the normal process range, and the gasifier needs emergency stop; at the moment, a liquid feeding valve can be closed, a liquid sulfur trioxide emergency emptying valve is opened, and materials are discharged into a collecting tank, so that the gasifier is further ensured not to store the materials; meanwhile, a hot water discharge valve arranged on the outer side of the gasifier can be opened to discharge hot water cleanly, the heat source supply of the gasifier is stopped, the over-temperature and over-pressure of the gasifier are avoided, the use safety of the gasifier equipment is improved, and the gasification effect of sulfur trioxide is also ensured.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of the secondary heating coil configuration of the present utility model;
FIG. 3 is an enlarged schematic view of the liquid inlet of the present utility model;
FIG. 4 is an enlarged schematic view of the heat exchange tube array at the top end A of the tube orifice of the heat exchange tube array of the present utility model;
in the figure:
1. liquid inlet 2, heat exchange tube array 3 and liquid baffle
4. Fixing plate 5, foam remover 6 and exhaust port
7a, a temperature sensor A7b, a pressure sensor A8 and a residual liquid collecting position
9. Secondary heating plate 10, exhaust pipe 11, and temperature sensor B
12. Regulating valve 13, residual liquid discharge port 14, on-off valve
15. Collection tank 16, feed valve 17, emergency evacuation valve
18. Hot water discharge valve 19 and level gauge
Detailed Description
The sulfur trioxide liquid gasifier for producing electronic grade sulfuric acid comprises a vertical gasifier main body, wherein two fixing plates 4 are arranged in the gasifier main body, the two fixing plates 4 are arranged in parallel along the vertical direction of the gasifier, a plurality of heat exchange tubes 2 and a plurality of exhaust tubes 10 are also arranged in the gasifier main body, the heat exchange tubes 2 and the exhaust tubes 10 are all arranged on the fixing plates 4 in a penetrating manner along the vertical direction, a foam remover 5 and a secondary heating coil 9 are also arranged in the gasifier main body, the foam remover 5 is arranged at the inner top of the gasifier, and the secondary heating coil 9 is arranged at the inner lower part of the gasifier;
the upper part of the outer side of the gasifier is provided with a liquid inlet 1, sulfur trioxide liquid enters the heat exchange tube nest 2 through the liquid inlet 1, after the hot water on the outer wall of the heat exchange tube nest 2 is heated, the sulfur trioxide liquid is gasified and enters the demister 5 from bottom to top in the heat exchange tube nest 2, and the gas after impurity removal is discharged through an exhaust port 6 at the top of the gasifier; the demister 5 blocks the impurities and gradually falls to the lower part of the gasifier, the impurities are heated by the secondary heating coil 9, and the heated gas enters the demister 5 through the exhaust pipe 10 and finally is discharged through the exhaust port 6.
Further, a liquid baffle 3 is arranged in the gasifier body and close to the liquid inlet 1, the liquid baffle 3 is in an inverted L shape, one end of the liquid baffle 3 is fixed on the inside of the gasifier, and a sulfur trioxide liquid inlet channel is formed between the other end and the fixed plate 4.
Further, the fixing plates 4 are respectively arranged along the radial direction of the gasifier in the vertical direction, and the two ends of the heat exchange tube array 2 are respectively fixed through the two fixing plates 4; two ends of the exhaust tube array 10 are also fixed on the two fixing plates 4, and the height of the exhaust tube array 10 is Yu Huanre and the height of the tube array 2 is equal to that of the tube array 2; and triangular grooves are formed in the pipe orifices at the top ends of the heat exchange tubes 2, so that sulfur trioxide liquid can flow in conveniently.
Further, the demister 5 is a multi-layer structure formed by a plurality of stainless steel wire meshes, and the multi-layer stainless steel wire meshes intercept sulfur trioxide gas containing impurities; the density of the demister 5 is 128kg/m 3 The porosity is set at 98.32%, the specific surface area is 403 square meters/m 3 The height is 100-150mm.
Further, the upper part of the outer side of the gasifier body is respectively provided with a temperature sensor A7a and a pressure sensor A7B, the lower part of the outer side of the gasifier body is provided with a temperature sensor B11, the temperature sensor B11 is arranged at a position close to the secondary heating coil 9, the secondary heating coil 9 is arranged in an S-shaped manner, the outer side of the secondary heating coil 9 is also provided with a regulating valve 12, and the regulating valve 12 is interlocked with the temperature sensor B11.
Further, the inner bottom of the gasifier body is provided with a residual liquid collecting part 8, a residual liquid discharging port 13 is arranged at the bottom end of the gasifier body, the residual liquid discharging port 13 is connected with a residual liquid pipeline on the outer side of the gasifier body, an on-off valve 14 is arranged on the residual liquid pipeline, a liquid level meter 19 is arranged close to the residual liquid collecting part 8, the on-off valve 14 is interlocked with the liquid level meter 19, when the liquid level meter 19 detects that the liquid level is set, the on-off valve 14 is opened through an interlocking control system, residual liquid is discharged into a collecting tank 15 arranged under the residual liquid pipeline, and after the residual liquid is discharged, the on-off valve 14 is closed.
Further, an emergency draining port is arranged at the upper part of the outer side of the gasifier body and is arranged between the demister 5 and the top end of the heat exchange tube nest 2, and the emergency draining port is connected with an emergency draining valve 17 and then is connected with a collecting tank 15 through a pipeline.
In actual use, hot water enters between two fixed plates 4 in the gasifier through the inlet tube, sulfur trioxide liquid also enters into the inlet channel through inlet 1, when the sulfur trioxide liquid height in the liquid channel exceeds heat exchange shell and tube top, sulfur trioxide liquid flows into heat exchange shell and tube 2, the hot water in the heat exchange shell and tube 2 outside sets up to 45 ℃, and heat exchange is carried out to sulfur trioxide liquid in the heat exchange shell and tube 2, sulfur trioxide gasification at this moment, gasified sulfur trioxide gas gradually enters into the demister 5 from bottom to top in the heat exchange shell and tube 2, other high boiling point impurities in liquid sulfur trioxide are intercepted by the demister adopting stainless steel wire gauze, then gradually flow into raffinate collection place 8 at the bottom of the gasifier through the action of gravity by the liquid state, impurity liquid falling into raffinate collection place 8 is heated through secondary heating coil 9, the temperature of secondary heating is stabilized at 45 ℃, and after impurity liquid gasification passes through the demister 5, enters into gasification top exhaust port 6.
When the liquid level of the residual liquid collecting part 8 reaches the set value of the liquid level meter 19, the residual liquid needs to be discharged in time, and the control system opens the switch valve 14 to discharge the residual liquid into the collecting tank 15.
When the heat exchange tube nest 2 has leakage, hot water side pressure is larger than sulfur trioxide side pressure, hot water can enter the sulfur trioxide heat exchange tube nest 2, and exothermic reaction occurs between the hot water side pressure and the sulfur trioxide side pressure; the pressure and temperature of the gasifier are higher than the normal process numerical range, and the gasifier needs emergency stop; at the moment, the liquid supply valve 16 can be closed, the liquid sulfur trioxide emergency evacuation valve 17 is opened, and the sulfur trioxide liquid is discharged into the collecting tank 15, so that no materials are stored in the gasifier; meanwhile, the hot water discharge valve 18 arranged outside the gasifier is also opened to discharge the hot water cleanly, the heat source supply of the gasifier is stopped, the overtemperature and overpressure of the gasifier are avoided, the use safety of the gasifier equipment is improved, and the gasification effect of sulfur trioxide is also ensured.
The foregoing describes one embodiment of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.
Claims (9)
1. The sulfur trioxide liquid gasifier for producing electronic grade sulfuric acid is characterized in that: the gasifier comprises a vertical gasifier body, wherein a plurality of groups of fixing plates are arranged in the gasifier body and are arranged in parallel along the vertical direction of the gasifier, a plurality of heat exchange tubes and a plurality of exhaust tubes are also arranged in the gasifier body, the heat exchange tubes and the exhaust tubes are all arranged on the fixing plates in a penetrating manner along the vertical direction, a foam remover and a secondary heating coil are also arranged in the gasifier body, the foam remover is arranged at the inner top of the gasifier, and the secondary heating coil is arranged at the inner lower part of the gasifier;
the upper part of the outer side of the gasifier is provided with a liquid inlet, sulfur trioxide liquid enters the heat exchange tube nest through the liquid inlet, after being heated by hot water on the outer wall of the heat exchange tube nest, the sulfur trioxide liquid is gasified and enters the demister from bottom to top in the heat exchange tube nest, and the gas after impurity removal is discharged through an exhaust port at the top of the gasifier; the demister blocks down impurities and gradually falls on the lower part of the gasifier, the impurities are heated by the secondary heating coil, and heated gas enters the demister through the exhaust tube and is finally discharged through the exhaust port.
2. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: the gasifier is characterized in that a liquid baffle is arranged in the gasifier body and close to the liquid inlet, the liquid baffle is in an inverted L shape, one end of the liquid baffle is fixed on the inside of the gasifier, and a sulfur trioxide liquid inlet channel is formed between the other end of the liquid baffle and the fixed plate.
3. A sulfur trioxide liquid gasifier for electronic grade sulfuric acid production according to claim 2, characterized in that: the two fixing plates are respectively arranged along the radial direction of the gasifier in the vertical direction, and the two ends of the heat exchange tube array are respectively fixed through the two fixing plates; the two ends of the exhaust row pipe are also respectively fixed on the two fixing plates, and the height of the exhaust row pipe is Yu Huanre.
4. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: and a triangular groove is formed in the pipe orifice at the top end of each heat exchange tube.
5. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: the foam remover is of a multilayer structure formed by a plurality of stainless steel wires, and intercepts sulfur trioxide gas containing impurities; the density of the demister of the stainless steel wire net is 128kg/m 3 The porosity is set at 98.32%, the specific surface area is 403 square meters/m 3 The height is 100-150mm.
6. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: the upper part of the outer side of the gasifier main body is provided with a temperature sensor A and a pressure sensor A, and the temperature sensor A and the pressure sensor A are respectively provided with the upper part of the demister.
7. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: the gasifier is characterized in that a temperature sensor B is arranged at the lower part of the outer side of the gasifier main body, the temperature sensor B is arranged close to the secondary heating coil, the secondary heating coil is arranged in an S-shaped mode, a regulating valve is further arranged on the outer side of the secondary heating coil, the regulating valve is interlocked with the temperature sensor B, and the temperature of secondary heating is controlled through the temperature sensor B, so that automatic temperature regulation is achieved.
8. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 1, wherein: the gasifier is characterized in that the bottom in the gasifier main body is a residual liquid collecting position, a residual liquid discharging port is formed in the bottom of the gasifier main body, the residual liquid discharging port is connected with a residual liquid pipeline on the outer side of the gasifier main body, a switching valve is arranged on the residual liquid pipeline, a liquid level meter is arranged close to the residual liquid collecting position, the switching valve is interlocked with the liquid level meter, when the liquid level meter detects that a liquid level is set, the switching valve is opened through an interlocked control system, and residual liquid is discharged into a collecting tank arranged below the residual liquid pipeline.
9. The sulfur trioxide liquid gasifier for electronic grade sulfuric acid production of claim 8, wherein: the gasifier is characterized in that an emergency emptying port is further formed in the upper portion of the outer side of the gasifier body, the emergency emptying port is arranged between the demister and the top end of the heat exchange tube, and the emergency emptying port is connected with an emergency emptying valve and then connected with the collecting tank through a pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223584902.3U CN219327997U (en) | 2022-12-31 | 2022-12-31 | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223584902.3U CN219327997U (en) | 2022-12-31 | 2022-12-31 | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219327997U true CN219327997U (en) | 2023-07-11 |
Family
ID=87064869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223584902.3U Active CN219327997U (en) | 2022-12-31 | 2022-12-31 | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219327997U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117401654A (en) * | 2023-12-14 | 2024-01-16 | 联仕新材料(苏州)股份有限公司 | Purification equipment is used in production of electronic grade sulfuric acid |
-
2022
- 2022-12-31 CN CN202223584902.3U patent/CN219327997U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117401654A (en) * | 2023-12-14 | 2024-01-16 | 联仕新材料(苏州)股份有限公司 | Purification equipment is used in production of electronic grade sulfuric acid |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN219327997U (en) | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production | |
| CN102522127A (en) | Passive containment thermal conduction system | |
| CN214734505U (en) | Hydrogen production system | |
| CN203437109U (en) | Full radial direction steam raising type sulfur-resisting conversion reactor | |
| CN105879790A (en) | Novel HPPO reactor | |
| KR20130023134A (en) | Exchanger-reactor for the production of hydrogen with an integrated steam generation bundle | |
| CN202719583U (en) | Reaction heat recovery device of coal-derived natural gas | |
| CN104593084B (en) | Gazogene | |
| CN208871581U (en) | A kind of mini type high temperature off-gas recovery waste heat steam boiler | |
| CN113083164A (en) | Isothermal transformation reactor with built-in vaporization chamber | |
| CN111154516A (en) | Cooling and deslagging system for coal ash | |
| CN206381978U (en) | A kind of sulfonating reaction workshop film sulfonation reactor | |
| CN205833122U (en) | A kind of HPPO novel reactor | |
| CN202247463U (en) | Multi-functional energy-saving steam generation device | |
| CN111607433B (en) | Cooling and deslagging method for coal ash | |
| CN212746407U (en) | Steam generator device | |
| CN206014411U (en) | Chlorine dioxide generator | |
| CN219036584U (en) | Steam boiler system | |
| CN109696928A (en) | A kind of reacting furnace heat recovery chamber tank level control system and method | |
| CN214225781U (en) | Water bath temperature control device for battery internalization | |
| US20230411658A1 (en) | Solid oxide fuel cell system and steam generator thereof | |
| CN207713397U (en) | A kind of reformation gas heating system | |
| CN207362166U (en) | A kind of final stage is using isothermal reactor without circulation methanation system | |
| CN212999234U (en) | Improved liquid distributor for graphite falling film absorber | |
| CN205435696U (en) | Novel high temperature resistant integrated reactor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A liquid gasifier for electronic grade sulfuric acid production using sulfur trioxide Effective date of registration: 20240102 Granted publication date: 20230711 Pledgee: Qilu Bank Co.,Ltd. Tianjin Nankai Branch Pledgor: Tianjin Huanbo New Material Co.,Ltd. Registration number: Y2023980075773 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |