CN117401654A - Purification equipment is used in production of electronic grade sulfuric acid - Google Patents
Purification equipment is used in production of electronic grade sulfuric acid Download PDFInfo
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- CN117401654A CN117401654A CN202311717666.4A CN202311717666A CN117401654A CN 117401654 A CN117401654 A CN 117401654A CN 202311717666 A CN202311717666 A CN 202311717666A CN 117401654 A CN117401654 A CN 117401654A
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- sulfuric acid
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- electronic grade
- sulfur trioxide
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 64
- 238000000746 purification Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 66
- 238000007872 degassing Methods 0.000 claims abstract description 17
- 238000001914 filtration Methods 0.000 claims abstract description 9
- 238000007789 sealing Methods 0.000 claims description 23
- 239000012528 membrane Substances 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 238000004321 preservation Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 claims description 2
- 230000007797 corrosion Effects 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 abstract description 122
- 239000007788 liquid Substances 0.000 abstract description 53
- 239000002131 composite material Substances 0.000 abstract description 20
- 238000003860 storage Methods 0.000 abstract description 6
- 230000003139 buffering effect Effects 0.000 abstract description 5
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 9
- 235000017491 Bambusa tulda Nutrition 0.000 description 9
- 241001330002 Bambuseae Species 0.000 description 9
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 9
- 239000011425 bamboo Substances 0.000 description 9
- 238000009413 insulation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/69—Sulfur trioxide; Sulfuric acid
- C01B17/90—Separation; Purification
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention relates to purification equipment for producing electronic grade sulfuric acid, which is applied to the field of inorganic chemistry, and comprises a gas-avoiding heating device, a filtering device and a rectifying device, wherein by the arrangement of the gas-avoiding heating device, the contact of sulfur trioxide liquid with air can be avoided to a great extent when the sulfur trioxide liquid is heated and evaporated, so that the purity of gaseous sulfur trioxide can be improved, the purity and quality of electronic grade sulfuric acid can be improved, and the suction force generated when a cylinder drives a composite heat conducting plate to move downwards can suck the sulfur trioxide liquid from a storage tank to a heating tank, so that a power element such as a pump is not required to be arranged for conveying sulfur trioxide, the equipment cost can be reduced to a certain extent, a pressure relief buffering component can prevent safety accidents caused by overlarge air pressure in the heating tank, and a degassing and avoiding component can further avoid the contact of the sulfur trioxide liquid with air, so that the purity and quality of electronic grade sulfuric acid can be further improved.
Description
Technical Field
The invention relates to purification equipment, in particular to purification equipment for producing electronic grade sulfuric acid, which is applied to the field of inorganic chemistry.
Background
The electronic grade sulfuric acid is also called high purity sulfuric acid and ultra-pure sulfuric acid, belongs to ultra-clean high purity reagent, is widely applied to the assembly and processing process of semiconductors and ultra-large scale integrated circuits, is mainly used for cleaning and etching silicon wafers, and can effectively remove impurity particles, inorganic residues and carbon deposits on the wafers.
The preparation of electronic grade sulfuric acid by using sulfur trioxide liquid is a common production method of electronic grade sulfuric acid in industry, and in the production process, the sulfur trioxide liquid is heated into gaseous sulfur trioxide, and then the gaseous sulfur trioxide is subjected to treatments such as filtration, rectification, absorption and the like.
When the sulfur trioxide liquid is heated, the sulfur trioxide liquid is inevitably contacted with air, and the purity of the sulfur trioxide is reduced by the air, so that the purity and quality of the produced electronic grade sulfuric acid are affected. Therefore, we propose a purification device for producing electronic grade sulfuric acid.
Disclosure of Invention
Aiming at the prior art, the technical problems to be solved by the invention are as follows: when the sulfur trioxide liquid is heated, the sulfur trioxide liquid is inevitably contacted with air, and the purity of the sulfur trioxide is reduced by the air, so that the purity and quality of the produced electronic grade sulfuric acid are affected.
In order to solve the problems, the invention provides purification equipment for producing electronic grade sulfuric acid, which comprises an air-avoiding heating device, a filtering device and a rectifying device, wherein the filtering device is connected with the rectifying device, the air-avoiding heating device comprises a heating tank, the top end of the heating tank is communicated with a guide pipe, the left side and the right side of the guide pipe are respectively communicated with a liquid inlet pipe and an air outlet pipe, the air outlet pipe is positioned at the upper right side of the liquid inlet pipe, a liquid inlet electromagnetic valve is arranged on the liquid inlet pipe, an air outlet electromagnetic valve is arranged on the air outlet pipe, an air cylinder is fixedly arranged in the heating tank, an air vent is formed in the side wall of the heating tank, the top end of the air cylinder is fixedly connected with a composite thermal conductive plate matched with the heating tank, the composite thermal conductive plate is in sliding and sealing connection with the inner wall of the heating tank, the composite thermal conductive plate comprises a heat preservation bottom plate, an embedder middle plate and a thermal conductive top plate, the middle part of the embedder middle part of the middle plate is penetrated and embedded with a heater, the bottom end of the heat preservation bottom plate is fixedly connected with the output end of the air cylinder, the top end of the thermal conductive top plate abuts against the inner wall of the heating tank, and the heating top end of the heater abuts against the bottom end of the thermal conductive top plate.
In the purification equipment for producing the electronic grade sulfuric acid, the gas-avoiding heating device can avoid the contact of the sulfur trioxide liquid with the air to a great extent, so that the purity of gaseous sulfur trioxide can be effectively improved, and the purity and quality of the electronic grade sulfuric acid can be further effectively improved.
As a further improvement of the application, the heat-insulating bottom plate is made of heat-insulating materials, the embedder middle plate is made of high-temperature-resistant materials, the heat-conducting top plate is made of corrosion-resistant heat-conducting materials, and one end of the air outlet pipe, which is far away from the guide pipe, is connected with the filtering device.
As the further improvement of this application, keep away gas heating device still includes pressure release buffer assembly, and pressure release buffer assembly is including running through to inlay and establish the jar that lets out on heating jar top outer wall, and the bottom that lets out and slowly section of thick bamboo sets up to the opening form, is provided with the closing plate with its sliding seal connection in letting out slowly section of thick bamboo, fixedly connected with spring between closing plate and the top inner wall that lets out slowly section of thick bamboo.
As the further improvement of this application, the pressure feed button, the controller are pressed to pressure feed button in the pressure release section of thick bamboo, and pressure feed button is located the top of closing plate, and pressure feed button is connected with the controller electricity, and the controller is connected with the solenoid valve electricity of giving vent to anger, and pressure feed button is from reset formula button, and pressure release buffering subassembly can play a pressure release, cushioning effect.
As the further improvement of this application, the clamping lever of the top fixedly connected with L shape of closing plate, the fixed mounting has the fixture block on letting out the inner wall of a slow section of thick bamboo, and the fixture block is located the inboard of clamping lever, and fixture block offsets with the clamping lever, and solenoid valve, cylinder of giving vent to anger can play a restriction effect, under the prerequisite that does not hinder the upward movement of closing plate, prevents that the closing plate from removing to letting out slow section of thick bamboo outward.
As the further improvement of this application, the bottom of closing plate flushes with the bottom of letting out slow section of thick bamboo, and the top fixedly connected with linkage magnet of draw-in lever lets out and has the electro-magnet on the top inner wall of slow section of thick bamboo, can prevent to let out to slow the interior residual sulfur trioxide gas that has of section of thick bamboo.
As another improvement of this application, keep away gas heating device still includes and deaerates and increases keeps away the subassembly, deaerates and increases and keep away the subassembly and including setting up the supporting box on pipe top, is provided with the sliding block in the supporting box, and fixed mounting has electric telescopic handle in the supporting box, the top fixedly connected with electric telescopic handle of sliding block, offered the exhaust hole with pipe assorted on the sliding block, offered the venthole on the outer wall of supporting box, fixed mounting has the deaeration membrane with it on the inner wall of exhaust hole.
As a further improvement of the present application, the catheter penetrates through the bottom end outer wall of the supporting box and is fixedly connected with the same, the top end of the catheter is flush with the bottom end inner wall of the sliding plug block, the top end of the catheter is arranged to be in an opening shape, the sliding plug block is in sliding sealing connection with the bottom end inner wall of the supporting box, the exhaust hole is positioned on the left side of the catheter, the output end of the electric telescopic rod is fixedly connected with the linkage rod, and the contact of sulfur trioxide liquid and air can be further avoided.
As a further improvement supplement to the present application, the inner wall of the vent hole is fixedly provided with a supporting net matched with the vent hole, the supporting net is positioned above the degassing membrane, and the supporting net can prevent the degassing membrane from being deformed and damaged due to pressure.
In summary, the arrangement of the gas-avoiding heating device enables the contact between the sulfur trioxide liquid and the air to be avoided to a great extent in the process of heating and evaporating the sulfur trioxide liquid into gaseous sulfur trioxide, so that the purity of the gaseous sulfur trioxide can be effectively improved, the purity and quality of electronic grade sulfuric acid can be effectively improved, and the air cylinder drives the suction force generated when the composite heat conducting plate moves downwards, so that the sulfur trioxide liquid can be pumped into the heating tank from the storage tank, and a power element such as a pump is not required to be arranged for conveying the sulfur trioxide, so that the equipment cost can be reduced to a certain extent; through the arrangement of the pressure relief buffer component, the pressure relief buffer component can play a role in pressure relief and buffer, so that safety accidents caused by overlarge air pressure in the heating tank can be prevented, and leakage of sulfur trioxide can be prevented; through the setting of degasification increase and keep away the subassembly for can separate the air in original connecting tube, feed liquor pipe, the pipe, discharge, thereby can further avoid sulfur trioxide liquid and air contact, and then can further improve the purity of electronic grade sulfuric acid.
Drawings
Fig. 1 is a schematic perspective view of a gas-shielding heating device according to a first embodiment of the present application;
fig. 2 is a schematic front view of the gas-shielding heating device according to the first embodiment of the present application;
FIG. 3 is a schematic cross-sectional side view of a heating tank according to a first embodiment of the present application;
fig. 4 is a schematic cross-sectional view of a composite thermal conductance plate according to the first embodiment of the present application;
FIG. 5 is a schematic cross-sectional view of a catheter in a first embodiment of the present application;
FIG. 6 is a schematic cross-sectional view of a relief cylinder according to a first embodiment of the present application;
fig. 7 is a schematic perspective view of a gas-shielding heating device according to a second embodiment of the present application;
FIG. 8 is a schematic cross-sectional view of a support box in a second embodiment of the present application;
fig. 9 is an enlarged schematic view of the structure at a in fig. 8 of the present application.
The reference numerals in the figures illustrate:
101. a heating tank; 102. a conduit; 103. a liquid inlet pipe; 104. an air outlet pipe; 105. a liquid inlet electromagnetic valve; 106. an air outlet electromagnetic valve; 107. a cylinder; 108. a vent hole; 002. a composite thermal conductance plate; 201. a heat-insulating bottom plate; 202. a middle plate of the embedder; 203. a thermally conductive top plate; 204. a heater; 301. a release cylinder; 302. a sealing plate; 303. a spring; 304. a push button is pressed; 305. a controller; 306. a clamping rod; 307. a clamping block; 308. a linkage magnet; 309. an electromagnet; 401. a supporting box; 402. a sliding plug block; 403. an electric telescopic rod; 404. a linkage rod; 405. an exhaust hole; 406. an air outlet hole; 407. degassing membrane; 408. a support net.
Detailed Description
Two embodiments of the present application are described in detail below with reference to the accompanying drawings.
First embodiment:
fig. 1-6 show a purification device for producing electronic grade sulfuric acid, including keep away gas heating device, filter equipment, rectifying device is prior art, its specific structure is the well-known technique of skilled person, do not make in this and repeating, filter equipment is connected with rectifying device, keep away gas heating device includes heating jar 101, the top intercommunication of heating jar 101 has pipe 102, in this embodiment, the top of pipe 102 sets up to seal the form, the left and right sides of pipe 102 has feed liquor pipe 103, outlet duct 104 respectively to communicate, outlet duct 104 is located the upper right side of feed liquor pipe 103, be provided with feed liquor solenoid valve 105 on the feed liquor pipe 103, be provided with air outlet solenoid valve 106 on the outlet duct 104, fixedly installed cylinder 107 in the heating jar 101, set up air vent 108 on the lateral wall of heating jar 101, the top fixedly connected with and heating jar 101 assorted compound thermal conductance plate 002, compound thermal conductance plate 002 is connected with the inner wall sliding seal of heating jar 101, compound plate comprises by lower supreme fixed connection's bottom plate 201, inlay top plate 202, inlay top plate 203 are equipped with respectively, inlay top plate 203 and heat conduction end 203 are equipped with heat conduction end 203 and heat conduction end are made into heat insulation top plate material and are kept away from the top plate 101, the top end is kept away from the heat insulation top plate is made to the top plate is connected with heat insulation top plate 101, top plate is made to the heat insulation top plate is connected with heat insulation top plate is with heat insulation material is kept away from the top plate is heat insulation plate material is heat insulation plate's 101.
Referring to fig. 1-5, the sulfur trioxide liquid is generally stored in a storage tank, the storage tank is connected with a liquid inlet pipe 103 by using a connecting pipe, a liquid inlet electromagnetic valve 105 is opened, then a cylinder 107 is started, the cylinder 107 drives a composite thermal conductive plate 002 to move downwards, the composite thermal conductive plate 002 moves downwards to generate a suction force, so that the sulfur trioxide liquid can be pumped into a heating tank 101, the sulfur trioxide liquid pumped into the heating tank 101 is positioned above the composite thermal conductive plate 002, the liquid inlet electromagnetic valve 105 is closed after a sufficient amount of the sulfur trioxide liquid is pumped, then a heater 204 is started, the sulfur trioxide liquid can be heated (the heat generated by the heater 204 can be transferred to the sulfur trioxide liquid through a thermal conductive top plate 203), and since no air exists between the composite thermal conductive plate 002 and the top end inner wall of the heating tank 101, therefore, the contact of the sulfur trioxide liquid with the air can be avoided to a great extent, after the sulfur trioxide liquid is heated and evaporated into sulfur trioxide gas, the air outlet electromagnetic valve 106 is opened, then the air cylinder 107 is started, the air cylinder 107 drives the composite heat conduction plate 002 to move upwards for resetting, the sulfur trioxide gas above the composite heat conduction plate 002 can be sent into the filtering device through the conduit 102 and the air outlet pipe 104, therefore, the arrangement of the air-avoiding heating device ensures that the air-avoiding heating device can avoid the contact of the sulfur trioxide liquid with the air to a great extent in the process of heating and evaporating the sulfur trioxide liquid into gaseous sulfur trioxide, thereby effectively improving the purity of the gaseous sulfur trioxide, further effectively improving the purity and quality of electronic grade sulfuric acid, and the air cylinder 107 drives the suction force generated when the composite heat conduction plate 002 moves downwards, so that the sulfur trioxide liquid can be pumped into the heating tank 101 from the storage tank, therefore, a power element such as a pump is not required to be arranged for conveying sulfur trioxide, and the equipment cost can be reduced to a certain extent.
Referring to fig. 3 and 6, the gas-avoiding heating device further includes a pressure relief buffer assembly, the pressure relief buffer assembly includes a pressure relief cylinder 301 inserted through an outer wall of a top end of the heating tank 101, a bottom end of the pressure relief cylinder 301 is provided with an opening, a sealing plate 302 in sliding sealing connection with the pressure relief cylinder 301 is provided in the pressure relief cylinder 301, a spring 303 is fixedly connected between the sealing plate 302 and an inner wall of a top end of the pressure relief cylinder 301, a pressure-feeding button 304 and a controller 305 are fixedly installed in the pressure relief cylinder 301, the pressure-feeding button 304 is located above the sealing plate 302, the pressure-feeding button 304 is electrically connected with the controller 305, the controller 305 is electrically connected with the gas-outlet electromagnetic valve 106, the pressure-feeding button 304 is a reset button, after heating is started, the air pressure in the heating tank 101 gradually increases, and when the air pressure increases to a certain extent, the sealing plate 302 moves upward under the action of the air pressure and contracts the spring 303, so that part of the sulfur trioxide gas can enter the release cylinder 301 to perform a pressure relief and buffering function, so as to prevent accidents caused by excessive air pressure in the heating tank 101, the sealing plate 302 continues to move upwards along with the continuous increase of the air pressure until the sealing plate 302 presses the trigger pressure feeding button 304, at this time, the pressure feeding button 304 sends a signal to the controller 305, after receiving the signal, the controller 305 opens the air outlet electromagnetic valve 106, so that the sulfur trioxide gas can flow to the filtering device, and further a great pressure relief can be performed, in addition, if the air outlet electromagnetic valve 106 is opened to perform pressure relief at first, because the heating tank 101 and the guide tube 102 are full of sulfur trioxide liquid, and the evaporation of the sulfur trioxide liquid is insufficient, some sulfur trioxide liquid may flow to the filtering device through the guide tube 102 and the air outlet tube 104, but the pressure relief and buffering are performed through the pressure relief buffering component first, after the sulfur trioxide liquid is relatively fully evaporated, the air outlet electromagnetic valve 106 is opened, so that the situation can be effectively avoided, after the air outlet electromagnetic valve 106 is opened, along with a large amount of sulfur trioxide gas discharged, the spring 303 can rebound to a certain extent, so that the sealing plate 302 is far away from the pressure feedback button 304, and the pressure feedback button 304 is reset, at the moment, the controller 305 can close the air outlet electromagnetic valve 106, and therefore, the pressure release buffer assembly can play a role in pressure release and buffer through the arrangement of the pressure release buffer assembly, thereby not only preventing safety accidents caused by overlarge air pressure in the heating tank 101, but also preventing sulfur trioxide leakage.
Referring to fig. 6, the top end of the sealing plate 302 is fixedly connected with an L-shaped clamping rod 306, a clamping block 307 is fixedly installed on the inner wall of the release cylinder 301, the clamping block 307 is located at the inner side of the clamping rod 306, the clamping block 307 abuts against the clamping rod 306, the air outlet electromagnetic valve 106 and the air cylinder 107 can play a limiting role, the sealing plate 302 is prevented from moving out of the release cylinder 301 on the premise of not interfering upward movement of the sealing plate 302, the bottom end of the sealing plate 302 is flush with the bottom end of the release cylinder 301, the top end of the clamping rod 306 is fixedly connected with a linkage magnet 308, an electromagnet 309 is fixedly installed on the inner wall of the top end of the release cylinder 301, after heating and evaporation are completed, the electromagnet 309 is electrified, and the electromagnet 309 and the linkage magnet 308 repel each other, so that the sealing plate 302 can move downwards for resetting, and residual sulfur trioxide gas in the release cylinder 301 can be prevented.
Second embodiment:
fig. 7-9 show a purifying device for producing electronic grade sulfuric acid, which is different from the first embodiment, the degassing and avoidance heating device further comprises a degassing and avoidance increasing component, the degassing and avoidance increasing component comprises a supporting box 401 arranged at the top end of the guide pipe 102, a sliding block 402 is arranged in the supporting box 401, an electric telescopic rod 403 is fixedly arranged in the supporting box 401, the top end of the sliding block 402 is fixedly connected with the electric telescopic rod 403, an exhaust hole 405 matched with the guide pipe 102 is arranged on the sliding block 402, an air outlet hole 406 is arranged on the outer wall of the supporting box 401, a degassing membrane 407 matched with the exhaust hole 405 is fixedly arranged on the inner wall of the exhaust hole 405, the guide pipe 102 penetrates through the outer wall of the bottom end of the supporting box 401 and is fixedly connected with the outer wall of the bottom end of the supporting box 401, the top end of the guide pipe 102 is flush with the inner wall of the bottom end of the sliding block 402, the top end of the guide pipe 102 is arranged as an opening, the sliding block 402 is in sliding and sealed connection with the inner wall of the bottom end of the supporting box 401, the exhaust hole 405 is positioned at the left side of the conduit 102, the output end of the electric telescopic rod 403 is fixedly connected with the linkage rod 404, when the gas-avoiding heating device is used for the first time, in the process of pumping sulfur trioxide liquid from the storage tank through the air cylinder 107 and the composite heat conducting plate 002, the liquid inlet electromagnetic valve 105 is firstly opened, the air cylinder 107 is started, the air cylinder 107 drives the composite heat conducting plate 002 to move downwards for a relatively small distance, thus the air in the connecting pipeline and the liquid inlet pipe 103 and a certain amount of sulfur trioxide liquid can be pumped into the heating tank 101 and the conduit 102, the liquid inlet electromagnetic valve 105 is closed, the electric telescopic rod 403 is started, the sliding plug block 402 is driven to move rightwards by the linkage rod 404 until the sliding plug block 402 moves to the right above the conduit 102, the air cylinder 107 is controlled, the air cylinder 107 drives the composite heat conducting plate 002 to move upwards, the sulfur trioxide liquid and air above the composite heat conducting plate 002 can be extruded, the air can be discharged to the outside of the supporting box 401 through the sliding plug block 402 and the air outlet hole 406, but the sulfur trioxide liquid can not pass through the degassing membrane 407, so that the air above the composite heat conducting plate 002 can be emptied, only the sulfur trioxide liquid is left, after the air is discharged, the electric telescopic rod 403 is controlled to drive the sliding plug block 402 to reset, then the liquid inlet electromagnetic valve 105 is opened and the air cylinder 107 is controlled, the air cylinder 107 drives the composite heat conducting plate 002 to move downwards, the sulfur trioxide liquid can be continuously extracted until a sufficient amount of sulfur trioxide liquid is extracted, and therefore, the air in the original connecting pipeline, the liquid inlet pipe 103 and the guide pipe 102 can be separated and discharged through the setting of the degassing and avoidance component, so that the contact of the sulfur trioxide liquid with the air can be further avoided, and the purity of electronic grade sulfuric acid can be further improved.
Referring to fig. 9, a supporting net 408 is fixedly installed on the inner wall of the exhaust hole 405, the supporting net 408 is located above the degassing membrane 407, and the supporting net 408 can prevent the degassing membrane 407 from being deformed and damaged due to pressure.
The scope of protection of the above-described embodiments employed in the present application is not limited to the above-described embodiments, and various changes made by those skilled in the art without departing from the spirit of the present application are still within the scope of protection of the present invention.
Claims (9)
1. The utility model provides a production purification equipment for electronic grade sulfuric acid, includes keeps away gas heating device, filter equipment, rectifier unit, filter equipment is connected with rectifier unit, a serial communication port, keep away gas heating device includes heating jar (101), the top intercommunication of heating jar (101) has pipe (102), the left and right sides of pipe (102) communicate respectively has feed liquor pipe (103), outlet duct (104) are located the upper right side of feed liquor pipe (103), be provided with feed liquor solenoid valve (105) on feed liquor pipe (103), be provided with on outlet duct (104) and give vent to anger solenoid valve (106), fixed mounting has cylinder (107) in heating jar (101), set up air vent (108) on the lateral wall of heating jar (101), compound heat conduction plate (002) with heating jar (101) assorted top fixedly connected with, compound heat conduction plate (002) are connected with the inner wall sliding seal of heating jar (101), compound heat conduction plate (002) include by bottom plate (202), embedded bottom plate (201) in proper order, heat conduction plate (201) are embedded with heat conduction plate (201) and heat preservation top plate (201) are connected, the top end of the heat conduction top plate (203) is propped against the top end inner wall of the heating tank (101), and the heating end of the heater (204) is propped against the bottom end of the heat conduction top plate (203).
2. The purification device for producing electronic grade sulfuric acid according to claim 1, wherein the heat-insulating bottom plate (201) is made of heat-insulating material, the embedment middle plate (202) is made of high-temperature-resistant material, the heat-conducting top plate (203) is made of corrosion-resistant heat-conducting material, and one end of the air outlet pipe (104) far away from the guide pipe (102) is connected with the filtering device.
3. The purification device for producing electronic grade sulfuric acid according to claim 1, wherein the gas-avoiding heating device further comprises a pressure relief buffer assembly, the pressure relief buffer assembly comprises a pressure relief cylinder (301) which is embedded in the outer wall of the top end of the heating tank (101), the bottom end of the pressure relief cylinder (301) is arranged to be in an opening shape, a sealing plate (302) which is in sliding sealing connection with the pressure relief cylinder (301) is arranged in the pressure relief cylinder (301), and a spring (303) is fixedly connected between the sealing plate (302) and the inner wall of the top end of the pressure relief cylinder (301).
4. A purification device for producing electronic grade sulfuric acid according to claim 3, characterized in that a pressure-feed button (304) and a controller (305) are fixedly installed in the pressure release cylinder (301), the pressure-feed button (304) is located above the sealing plate (302), the pressure-feed button (304) is electrically connected with the controller (305), the controller (305) is electrically connected with the air outlet electromagnetic valve (106), and the pressure-feed button (304) is a self-resetting button.
5. The purification device for producing electronic grade sulfuric acid according to claim 4, wherein the top end of the sealing plate (302) is fixedly connected with an L-shaped clamping rod (306), a clamping block (307) is fixedly installed on the inner wall of the release cylinder (301), the clamping block (307) is located on the inner side of the clamping rod (306), and the clamping block (307) abuts against the clamping rod (306).
6. The purification device for producing electronic grade sulfuric acid according to claim 5, wherein the bottom end of the sealing plate (302) is flush with the bottom end of the release cylinder (301), the top end of the clamping rod (306) is fixedly connected with a linkage magnet (308), and an electromagnet (309) is fixedly installed on the inner wall of the top end of the release cylinder (301).
7. The purification device for producing electronic grade sulfuric acid according to claim 1, wherein the gas-avoiding heating device further comprises a degassing and avoidance component, the degassing and avoidance component comprises a supporting box (401) arranged at the top end of the guide pipe (102), a sliding block (402) is arranged in the supporting box (401), an electric telescopic rod (403) is fixedly arranged in the supporting box (401), the top end of the sliding block (402) is fixedly connected with the electric telescopic rod (403), an exhaust hole (405) matched with the guide pipe (102) is formed in the sliding block (402), an air outlet hole (406) is formed in the outer wall of the supporting box (401), and a degassing membrane (407) matched with the exhaust hole (405) is fixedly arranged on the inner wall of the exhaust hole (405).
8. The purification device for producing electronic grade sulfuric acid according to claim 7, wherein the guide pipe (102) penetrates through the outer wall of the bottom end of the supporting box (401) and is fixedly connected with the guide pipe, the top end of the guide pipe (102) is flush with the inner wall of the bottom end of the sliding block (402), the top end of the guide pipe (102) is arranged to be in an opening shape, the sliding block (402) is in sliding sealing connection with the inner wall of the bottom end of the supporting box (401), the exhaust hole (405) is located on the left side of the guide pipe (102), and the output end of the electric telescopic rod (403) is fixedly connected with the linkage rod (404).
9. The purification device for producing electronic grade sulfuric acid according to claim 8, wherein a supporting net (408) matched with the exhaust hole (405) is fixedly arranged on the inner wall of the exhaust hole, and the supporting net (408) is positioned above the degassing membrane (407).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311717666.4A CN117401654A (en) | 2023-12-14 | 2023-12-14 | Purification equipment is used in production of electronic grade sulfuric acid |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311717666.4A CN117401654A (en) | 2023-12-14 | 2023-12-14 | Purification equipment is used in production of electronic grade sulfuric acid |
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| CN117401654A true CN117401654A (en) | 2024-01-16 |
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| CN202311717666.4A Pending CN117401654A (en) | 2023-12-14 | 2023-12-14 | Purification equipment is used in production of electronic grade sulfuric acid |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110217761A (en) * | 2019-05-27 | 2019-09-10 | 江西鑫光电子科技有限公司 | A kind of Production method of electronic-grade sulphuric acid |
| CN113546437A (en) * | 2021-08-10 | 2021-10-26 | 联仕(昆山)化学材料有限公司 | Electronic-grade sulfuric acid production system and production process |
| CN218106749U (en) * | 2022-07-11 | 2022-12-23 | 江西鑫光电子科技有限公司 | Low-temperature evaporation, purification and absorption device for electronic-grade sulfuric acid |
| CN219327997U (en) * | 2022-12-31 | 2023-07-11 | 天津环渤新材料有限公司 | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production |
-
2023
- 2023-12-14 CN CN202311717666.4A patent/CN117401654A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110217761A (en) * | 2019-05-27 | 2019-09-10 | 江西鑫光电子科技有限公司 | A kind of Production method of electronic-grade sulphuric acid |
| CN113546437A (en) * | 2021-08-10 | 2021-10-26 | 联仕(昆山)化学材料有限公司 | Electronic-grade sulfuric acid production system and production process |
| CN218106749U (en) * | 2022-07-11 | 2022-12-23 | 江西鑫光电子科技有限公司 | Low-temperature evaporation, purification and absorption device for electronic-grade sulfuric acid |
| CN219327997U (en) * | 2022-12-31 | 2023-07-11 | 天津环渤新材料有限公司 | Sulfur trioxide liquid gasifier for electronic grade sulfuric acid production |
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