CN219324017U - Air purification and dust removal device for semiconductor clean factory building - Google Patents
Air purification and dust removal device for semiconductor clean factory building Download PDFInfo
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- CN219324017U CN219324017U CN202320106108.3U CN202320106108U CN219324017U CN 219324017 U CN219324017 U CN 219324017U CN 202320106108 U CN202320106108 U CN 202320106108U CN 219324017 U CN219324017 U CN 219324017U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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Abstract
The utility model relates to an air purifying and dust removing device of a semiconductor clean factory building, which structurally comprises a base with pulleys, wherein an equipment box and a water spraying and dust collecting mechanism are arranged on the base, the water spraying and dust collecting mechanism is connected with a water storage mechanism and a purifying mechanism in the equipment box through pipelines, the water spraying and dust collecting mechanism comprises a mounting plate with a fixed middle part and movable side plates which are rotatably connected with two sides of the mounting plate, the mounting plate and the movable side plates are provided with spray heads, the bottom of the movable side plates is provided with a dust hood, and a driving mechanism drives the movable side plates to rotate through screw rods. The utility model has the advantages that: the electric angle adjustment of the two movable side plates is realized during the dust removal and fall operation, the water spraying and dust fall of different angles of the spray head are realized, the effect of automatically adjusting the dust removal and the spray angle while the device moves is realized, and the range of dust removal and water spraying and dust fall is favorably improved; the dust hood rotates above the ground, so that dust collection can be performed on different positions of the ground by using the dust hood in the moving process of the dust collection device, and the dust collection range of the dust collection device is improved.
Description
Technical Field
The utility model relates to an air purifying and dedusting device for a semiconductor clean factory building, in particular to an air purifying and dedusting device for the semiconductor clean factory building applied to engineering construction in the electronic semiconductor industry, and belongs to the technical field of dedusting devices.
Background
In engineering construction of electronic semiconductor industry, a large amount of dust can be generated when a semiconductor clean factory building is constructed, dust fall and dust removal are needed, for example, an atomization vehicle can be used for dust removal, and the dust removal and water spray dust removal range of the atomization vehicle is a main technical index for influencing air quality.
CN214638976U discloses a high-efficient dust collector is used in clean factory building construction of semiconductor, in the in-service use, although first dust absorption board and second dust absorption board are all rotated through the surface of pivot and box and are connected, but do not set up the mechanism that carries out spacing and regulation to the angle of dust absorption board, need artifical manual regulation dust absorption board angle, just can adjust the dust removal of dust absorption board and spray the scope, use comparatively inconveniently, working strength is higher, can't realize automatic reciprocating adjustment.
Disclosure of Invention
The utility model provides an air purifying and dedusting device for a semiconductor clean factory building, which aims to overcome the defects in the prior art, realize electric adjustment of water spraying and dedusting angles, improve efficiency, reduce working strength and improve purifying and dedusting effects.
The technical solution of the utility model is as follows: the utility model provides a clean factory building air purification dust collector of semiconductor, its structure includes the base that the pulley is equipped with in both sides, base top surface both ends are equipped with equipment box and water spray dust absorption mechanism respectively, water spray dust absorption mechanism includes water spray mechanism and dust absorption mechanism, water spray mechanism and dust absorption mechanism link to each other with water storage mechanism and the purification mechanism in the equipment box through the pipeline respectively, water storage mechanism and purification mechanism separate from top to bottom and set up in the equipment box, water spray dust absorption mechanism includes the fixed mounting panel in centre and rotates the movable sideboard of connecting in the mounting panel both sides, all be equipped with the shower nozzle on mounting panel and the movable sideboard, the dust hood is established to movable sideboard bottom, be equipped with drive movable sideboard pivoted actuating mechanism in the equipment, actuating mechanism output fixed mounting lead screw drives movable sideboard through the lead screw and rotates can realize the electronic adjustment of water spray and dust absorption angle.
Preferably, for the concrete design of water spraying mechanism, water spraying mechanism include the straight second spray tube of vertical installation in mounting panel lateral surface center and install the first spray tube of rectangle at movable sideboard lateral surface edge, all evenly be equipped with a plurality of shower nozzles on first spray tube and the second spray tube, first spray tube and second spray tube are respectively through the water storage mechanism in the water conservancy diversion water pipe intercommunication equipment box at mounting panel and movable sideboard back, establish the reposition of redundant personnel box between water storage mechanism and the water conservancy diversion water pipe.
Preferably, for the specific design of the dust collection mechanism, the dust collection mechanism comprises dust collection covers, the dust collection covers on two sides are respectively connected with a collecting box at one end of a dust collection conduit through corrugated dust collection pipes at the back sides of the movable side plates, and the other end of the dust collection conduit is communicated with a purifying mechanism in the equipment box.
Preferably, in order to realize the electric angle adjustment of the movable side plate, the driving mechanism comprises a driving motor arranged in the equipment box, the output end of the driving motor is connected with a screw rod, the screw rod penetrates through the side wall of the equipment box to extend to the outer side of the equipment box to rotate and connect with the back of the mounting plate, the screw rod is connected with a linkage block in a threaded manner, two sides of the linkage block are respectively connected with one end of a linkage pull rod in a rotating manner, and the other ends of the linkage pull rods on two sides are respectively connected with the back of the movable side plate in a rotating manner.
Preferably, for the concrete design of the water storage mechanism, the water storage mechanism comprises a water storage area, a water filling port is arranged on one side of the top of the water storage area, a water pump is arranged at one end in the water storage area, and the water pump is connected with a split box on the outer side face of the equipment box through a pipeline.
Preferably, for the specific design of purifying mechanism, purifying mechanism includes purifying box, and the dust absorption pipe other end is connected to purifying box one end, is equipped with the air filter screen in the purifying box, and purifying box keeps away from the other end of dust absorption pipe and passes through the air pump in the pipe connection purifying box outside, and it has the air outlet to open on the equipment box of air pump one side, and the filter screen is established to the air outlet inner wall.
The utility model has the advantages that: the device has reasonable structural design, realizes the electric angle adjustment of the two movable side plates during dust removal and dust falling operation by arranging the movable assembly consisting of the driving motor, the screw rod and the movable side plates, further realizes the water spraying and dust falling of the spray heads at different angles, realizes the effect of automatically adjusting the dust removal and the spray angle while moving, and is beneficial to improving the range of dust removal and water spraying and dust falling; the dust hood at the bottom of the movable side plate can rotate above the ground, so that dust collection is performed on different positions of the ground by using the dust hood in the moving process of the dust collection device, the automatic dust collection effect is achieved, and the dust collection range of the dust collection device is improved.
Drawings
FIG. 1 is a schematic view of an angle structure of an air cleaning and dust removing device for a semiconductor clean factory building.
Fig. 2 is a schematic view of another angle structure of the air cleaning and dust removing device for the semiconductor clean factory building.
FIG. 3 is a schematic view of the partial structure of the outside part of the equipment box of the air cleaning and dust removing device for the semiconductor clean factory building.
Fig. 4 is a schematic diagram of a side sectional structure of an equipment box of the air cleaning and dust removing device of the semiconductor clean factory building.
In the figure, a base is 1, an equipment box is 2, a mounting plate is 3, a movable side plate is 4, a first spraying pipe is 5, a second spraying pipe is 6, a spray head is 7, a driving motor is 8, a screw rod is 9, a linkage block is 10, a linkage pull rod is 11, a dust hood is 12, a dust collection pipe is 13, a corrugated dust collection pipe is 14, a water storage area is 15, a water pump is 16, a split box is 17, a guide water pipe is 18, an air pump is 19, a purifying box is 20, an air filter screen is 21, and an air outlet is 22.
Description of the embodiments
The present utility model will be described in further detail with reference to examples and embodiments.
As shown in fig. 1 and 2, the structure of the air purifying and dust removing device for the semiconductor clean factory building comprises a base 1 with pulleys on two sides, the device can be conveniently pushed, the two ends of the top surface of the base 1 are respectively provided with an equipment box 2 and a water spraying and dust collecting mechanism, the water spraying and dust collecting mechanism is connected with a water storage mechanism and a purifying mechanism in the equipment box 2 through pipelines, the water spraying and dust collecting mechanism comprises a middle fixed mounting plate 3 and a movable side plate 4 which is rotationally connected with the two sides of the mounting plate 3, the mounting plate 3 and the movable side plate 4 are both provided with spray heads 7, water can be sprayed at multiple angles, the bottom of the movable side plate 4 is provided with a dust collecting cover 12, dust collection to the ground can be realized, and a driving mechanism for driving the movable side plate 4 to rotate is arranged in the equipment box 2 without manually adjusting a spraying angle.
The water spraying and dust collecting mechanism comprises a water spraying mechanism and a dust collecting mechanism.
As shown in fig. 3, the water spraying mechanism comprises a linear second spraying pipe 6 vertically installed at the center of the outer side surface of the mounting plate 3 and a rectangular first spraying pipe 5 installed at the edge of the outer side surface of the movable side plate 4, a plurality of spray heads 7 are uniformly arranged on the first spraying pipe 5 and the second spraying pipe 6, the first spraying pipe 5 and the second spraying pipe 6 are respectively communicated with a water storage mechanism in the equipment box 2 through a diversion water pipe 18 at the back of the mounting plate 3 and the movable side plate 4, and a diversion box 17 is arranged between the water storage mechanism and the diversion water pipe 18. The water in the water storage mechanism is respectively delivered to the first spraying pipe 5 and the second spraying pipe 6 through the split box 17 by three independent diversion water pipes 18, and is sprayed by the spray head 7. The diversion pipe 18 is a hose, and does not affect the angle adjustment.
The dust collection mechanism comprises a dust collection cover 12, the dust collection covers 12 at two sides are respectively connected with a collecting box at one end of a dust collection conduit 13 through a corrugated dust collection pipe 14 at the back of the movable side plate 4, and the other end of the dust collection conduit 13 is communicated with a purification mechanism in the equipment box 2. The dust hood 12 sucks dust from the opposite surface, the dust is sucked into the purifying mechanism through the dust suction duct 13 by the corrugated dust suction pipe 14, and the corrugated dust suction pipe 14 is a hose, so that the angle adjustment is not influenced.
As shown in fig. 3 and 4, the driving mechanism comprises a driving motor 8 installed in the equipment box 2, the output end of the driving motor 8 is connected with a screw rod 9, the screw rod 9 penetrates through the side wall of the equipment box 2 to extend to the outer side of the equipment box 2 to be rotationally connected with the back of the mounting plate 3, a linkage block 10 is in threaded connection with the screw rod 9, two sides of the linkage block 10 are respectively rotationally connected with one end of a linkage pull rod 11, and the other ends of the linkage pull rods 11 on two sides are respectively rotationally connected with the back of the movable side plates 4 on two sides. The driving motor 8 can drive the linkage block 10 to move through the screw rod 9 in forward and reverse directions, and then the movable side plate 4 is driven to adjust the angle. The angle adjustment can realize the omnibearing of water spraying and the omnibearing of dust collection, the work of the driving motor 8 is preferably automatically carried out, the angle adjustment is continuously carried out, and the water spraying and dust collection area is improved.
As shown in fig. 4, the water storage mechanism and the purification mechanism are provided in the equipment box 2 at a vertically spaced apart position.
The water storage mechanism comprises a water storage area 15, a water filling port is arranged on one side of the top of the water storage area 15, a water pump 16 is arranged at one end in the water storage area 15, and the water pump 16 is connected with a split box 17 on the outer side face of the equipment box 2 through a pipeline. Water is added into the water storage area 15 through a water filling port, and is pumped out by a water pump 16, so that water is sprayed through a water spraying mechanism.
The purifying mechanism comprises a purifying box 20, one end of the purifying box 20 is connected with the other end of the dust collection pipe 13, an air filter screen 21 is arranged in the purifying box 20, the other end of the purifying box 20 far away from the dust collection pipe 13 is connected with an air pump 19 outside the purifying box 20 through a pipeline, an air outlet hole 22 is formed in the equipment box 2 on one side of the air pump 19, and the filter screen is arranged on the inner wall of the air outlet hole 22. The air pump 19 sucks air to enable dust to be sucked into the purifying box 20 through the dust suction conduit 13, and air is discharged from the air outlet hole 22 through the air filter screen 21, so that dust collection is realized.
According to the structure, when the dust collection device is actually used, firstly, the air pump 19 is started to suck air to the purification box 20, the dust collection cover 12 is sucked through the dust collection guide pipe 13 and the corrugated dust collection pipe 14, meanwhile, the driving motor 8 drives the screw rod 9 to rotate, the screw rod 9 drives the linkage block 10 to move, and then the linkage pull rod 11 is driven to rotate the movable side plate 4, so that the dust collection cover 12 is driven to perform dust collection operation on the ground of a factory building; after dust collection, the water pump 16 can be started to input the water in the water storage area 15 into the first spraying pipe 5 and the second spraying pipe 6 through the diversion box 17 and the diversion water pipe 18, and spray water and reduce dust on the factory building through the spray head 7.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.
Claims (6)
1. The utility model provides a clean factory building air purification dust collector of semiconductor, a serial communication port, base (1) including the both sides are equipped with the pulley, base (1) top surface both ends are equipped with equipment box (2) and water spray dust absorption mechanism respectively, water spray dust absorption mechanism includes water spray mechanism and dust absorption mechanism, water spray mechanism and dust absorption mechanism link to each other with water storage mechanism and purification mechanism in equipment box (2) through the pipeline respectively, water storage mechanism and purification mechanism separate from top to bottom and set up in equipment box (2), water spray dust absorption mechanism includes fixed mounting panel (3) in the middle and rotates movable sideboard (4) of connecting in mounting panel (3) both sides, all be equipped with shower nozzle (7) on mounting panel (3) and the movable sideboard (4), dust hood (12) are established to movable sideboard (4) bottom, be equipped with drive movable sideboard (4) pivoted actuating mechanism in equipment box (2).
2. The air purification and dust removal device for the semiconductor clean factory building of claim 1, wherein the water spraying mechanism comprises a linear second spraying pipe (6) vertically installed at the center of the outer side surface of the installation plate (3) and a rectangular first spraying pipe (5) installed at the edge of the outer side surface of the movable side plate (4), a plurality of spray heads (7) are uniformly arranged on the first spraying pipe (5) and the second spraying pipe (6), the first spraying pipe (5) and the second spraying pipe (6) are respectively communicated with a water storage mechanism in the equipment box (2) through a water guide pipe (18) at the back of the installation plate (3) and the movable side plate (4), and a split box (17) is arranged between the water storage mechanism and the water guide pipe (18).
3. The air purifying and dedusting device for the semiconductor clean factory building of claim 1, wherein the dust collection mechanism comprises dust collection covers (12), the dust collection covers (12) at two sides are respectively connected with a collecting box at one end of a dust collection duct (13) through corrugated dust collection pipes (14) at the back of the movable side plate (4), and the other end of the dust collection duct (13) is communicated with the purifying mechanism in the equipment box (2).
4. The air purification and dust removal device for the semiconductor clean factory building of claim 1, wherein the driving mechanism comprises a driving motor (8) arranged in the equipment box (2), an output end of the driving motor (8) is connected with a screw rod (9), the screw rod (9) penetrates through the side wall of the equipment box (2) to extend to the outer side of the equipment box (2) to be rotationally connected with the back of the mounting plate (3), a linkage block (10) is in threaded connection with the screw rod (9), two sides of the linkage block (10) are respectively rotationally connected with one end of a linkage pull rod (11), and the other ends of the two sides of the linkage pull rod (11) are respectively rotationally connected with the back of the two sides of the movable side plate (4).
5. The semiconductor clean factory building air purification and dust removal device according to claim 1, wherein the water storage mechanism comprises a water storage area (15), a water filling port is arranged on one side of the top of the water storage area (15), a water pump (16) is arranged at one end in the water storage area (15), and the water pump (16) is connected with a diversion box (17) on the outer side face of the equipment box (2) through a pipeline.
6. The air purification and dust removal device for the semiconductor clean factory building of claim 1, wherein the purification mechanism comprises a purification box (20), one end of the purification box (20) is connected with the other end of the dust collection pipe (13), an air filter screen (21) is arranged in the purification box (20), the other end of the purification box (20), far away from the dust collection pipe (13), is connected with an air pump (19) at the outer side of the purification box (20) through a pipeline, an air outlet hole (22) is formed in a device box (2) at one side of the air pump (19), and a filter screen is arranged on the inner wall of the air outlet hole (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320106108.3U CN219324017U (en) | 2023-02-03 | 2023-02-03 | Air purification and dust removal device for semiconductor clean factory building |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320106108.3U CN219324017U (en) | 2023-02-03 | 2023-02-03 | Air purification and dust removal device for semiconductor clean factory building |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219324017U true CN219324017U (en) | 2023-07-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320106108.3U Active CN219324017U (en) | 2023-02-03 | 2023-02-03 | Air purification and dust removal device for semiconductor clean factory building |
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| Country | Link |
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| CN (1) | CN219324017U (en) |
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2023
- 2023-02-03 CN CN202320106108.3U patent/CN219324017U/en active Active
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