CN219311056U

CN219311056U - Silicon chip soft injury machine

Info

Publication number: CN219311056U
Application number: CN202223275144.7U
Authority: CN
Inventors: 沈继明; 汤志刚
Original assignee: Shanghai Jiuxuan Machinery Equipment Co ltd
Current assignee: Shanghai Jiuxuan Machinery Equipment Co ltd
Priority date: 2022-12-07
Filing date: 2022-12-07
Publication date: 2023-07-07
Anticipated expiration: 2032-12-07

Abstract

The utility model relates to the technical field of wet sand blasting and discloses a silicon wafer soft damage machine which comprises a workbench, wherein the bottom end of the workbench is fixedly connected with a supporting underframe, the top end of the workbench is fixedly connected with a sand blasting frame, the top end of the sand blasting frame is fixedly connected with a storage box, one side of the top end of the workbench is movably connected with a conveying belt, one side of the workbench is fixedly connected with a cleaning box, the top end of the inner surface of the sand blasting frame is fixedly connected with a guide rail, the bottom end of the guide rail is movably connected with a spray head, the bottom end of the inner surface of the cleaning box is movably connected with a stress spring, the inner surface of the stress spring is fixedly connected with a fixed rod, and the top end of the fixed rod is fixedly connected with a tray.

Description

Silicon chip soft injury machine

Technical Field

The utility model relates to the technical field of wet sand blasting, in particular to a silicon wafer soft damage machine.

Background

The soft damage technology is to use special wet sand blasting technology on the back of the silicon wafer to form a layer of very slight uniform damage on the back of the silicon wafer, and the typical size of the soft damage technology is 10nm. Such damage cannot be found even under microscopes and Scanning Electron Microscopes (SEM), and thermal oxidation produces a prescribed density of thermal Oxidation Induced Stacking Faults (OISF) as a gettering source.

In the use process of the existing soft injury machine, the processed workpiece is required to be placed on equipment for sand blasting, the workpiece is sprayed with materials through compressed air due to the fact that the workpiece is more in data discharged, and the spraying area is larger, so that the spraying is uneven, and therefore, the silicon wafer soft injury machine is provided.

Disclosure of Invention

In order to overcome the defects in the prior art, the utility model provides a silicon wafer soft injury machine to solve the problems in the background art.

The utility model provides the following technical scheme: the soft silicon wafer damage machine comprises a workbench, wherein the bottom end of the workbench is fixedly connected with a supporting underframe, the top end of the workbench is fixedly connected with a sand blasting frame, the top end of the sand blasting frame is fixedly connected with a storage box, one side of the top end of the workbench is movably connected with a conveyor belt, one side of the workbench is fixedly connected with a cleaning box, the top end of the inner surface of the sand blasting frame is fixedly connected with a guide rail, and the bottom end of the guide rail is movably connected with a sprinkler head;

further, the bottom swing joint of clean case internal surface has the atress spring, the internal surface fixedly connected with dead lever of atress spring, the top fixedly connected with tray of dead lever, the filtration pore has been seted up on the top of tray.

Further, the top fixedly connected with slider of sprinkler head, one side swing joint of slider has the telescopic link, utilizes the flexible effect that can drive sprinkler head and slider and carry out horizontal migration in the bottom of guide rail of telescopic link, improves the sandblast quality of equipment simultaneously.

Further, one side fixedly connected with connecting rod on tray top, the top fixedly connected with depression bar of connecting rod utilizes the cooperation between atress spring and the dead lever, has played the effect of conveniently doing elevating movement to the tray in the inside of clean case.

Further, the quantity of dead lever has a plurality of, and a plurality of dead lever equidistance symmetric distribution is in the both sides of tray bottom utilizes a plurality of dead levers, has played the effect that makes things convenient for the tray to carry out even atress.

Further, the cross section shape of the filter holes is circular, the filter holes are distributed at equal intervals on the top end of the tray, and the filter holes are utilized to play a role in filtering the user conveniently.

Further, the one end of telescopic link with one side of sandblast frame internal surface is laminated mutually, the quantity of telescopic link has two, two telescopic link symmetric distribution is in the both sides of sandblast frame internal surface utilizes the telescopic link can be with being connected between one end and the sandblast frame of slider, has reached the effect of conveniently fixing a position the sprinkler head.

The utility model has the technical effects and advantages that:

1. according to the utility model, the guide rail and the sliding block are arranged to connect the spray head with the sand blasting frame, and the telescopic rod stretches to drive the spray head to horizontally move at the bottom end of the guide rail, so that the sand blasting area is conveniently increased, the sand blasting efficiency is improved, and meanwhile, the working efficiency of equipment is improved.

2. The utility model has the advantages that the tray and the cleaning box are connected through the mutual matching between the stressed spring and the fixed rod, the pressing rod and the tray can be connected through the connecting rod, and the tray can be driven to do lifting movement in the cleaning box by pressing the pressing rod, so that the effect of conveniently cleaning the workpiece after sand blasting is achieved.

Drawings

Fig. 1 is a schematic diagram of the overall structure of the present utility model.

Fig. 2 is a schematic structural view of the blasting frame of the present utility model.

Fig. 3 is a schematic structural view of the guide rail of the present utility model.

Fig. 4 is a schematic top view of the sand blasting frame of the present utility model.

Fig. 5 is a schematic view showing the internal structure of the cleaning tank of the present utility model.

The reference numerals are: 1. a work table; 2. a support chassis; 3. a sand blasting frame; 4. a storage box; 5. a conveyor belt; 6. a cleaning tank; 7. a guide rail; 8. a spray head; 9. a slide block; 10. a telescopic rod; 11. a force spring; 12. a fixed rod; 13. a tray; 14. filtering holes; 15. a connecting rod; 16. and (5) pressing the rod.

Detailed Description

The embodiments of the present utility model will be described more fully hereinafter with reference to the accompanying drawings, in which the embodiments of the present utility model are shown by way of illustration only, and the utility model is not limited to the embodiments of the present utility model, but other embodiments of the present utility model will be apparent to those skilled in the art without making any inventive effort.

Referring to fig. 1 to 5, the utility model provides a silicon wafer soft injury machine, which comprises a workbench 1 and is characterized in that: the bottom end of the workbench 1 is fixedly connected with a supporting underframe 2, the top end of the workbench 1 is fixedly connected with a sand blasting frame 3, the top end of the sand blasting frame 3 is fixedly connected with a storage box 4, one side of the top end of the workbench 1 is movably connected with a conveyor belt 5, one side of the workbench 1 is fixedly connected with a cleaning box 6, the top end of the inner surface of the sand blasting frame 3 is fixedly connected with a guide rail 7, and the bottom end of the guide rail 7 is movably connected with a spray head 8;

wherein, the bottom swing joint of clean case 6 internal surface has atress spring 11, and the internal surface fixedly connected with dead lever 12 of atress spring 11, the top fixedly connected with tray 13 of dead lever 12, the filtration pore 14 has been seted up on the top of tray 13.

Wherein, the top fixedly connected with slider 9 of sprinkler head 8, one side swing joint of slider 9 has telescopic link 10, utilizes sprinkler head 8 to carry out the sandblast to the surface of work piece, can drive slider 9 simultaneously and stretch out and draw back in the bottom of guide rail 7 through telescopic link 10, can adjust the effect of position to sprinkler head 8.

One side of the top end of the tray 13 is fixedly connected with a connecting rod 15, the top end of the connecting rod 15 is fixedly connected with a pressing rod 16, and the connecting rod 15 can be used for connecting the pressing rod 16 and the tray 13 from two ends.

The fixing rods 12 are arranged in a plurality, the fixing rods 12 are symmetrically distributed on two sides of the bottom end of the tray 13 at equal intervals, and the plurality of fixing rods 12 are utilized to conveniently stretch and retract the tray 13.

The cross section of the filtering holes 14 is circular, the filtering holes 14 are several, the filtering holes 14 are equidistantly distributed at the top end of the tray 13, and the filtering holes 14 are used to increase the contact area between the cleaning water and the workpiece.

Wherein, the one end of telescopic link 10 is laminated mutually with one side of sandblast frame 3 internal surface, and the quantity of telescopic link 10 has two, and two telescopic link 10 symmetric distributions are in the both sides of sandblast frame 3 internal surface, utilize telescopic link 10 can be with being connected between slider 9 and the sandblast frame 3, have reached the effect of conveniently adjusting the position of sprinkler head 8.

The working principle of the utility model is as follows: after the staff put the equipment in suitable position, can put the work piece that needs the sandblast on the top of conveyer belt 5 and carry, can spout the material of storage box 4 inside at the surface of work piece through sprinkler head 8, can drive slider 9 and sprinkler head 8 and do horizontal migration in the bottom of guide rail 7 through the flexible of telescopic link 10, reached the effect of adjusting the position of sprinkler head 8, improve the area of sprinkler head 8 to the work piece sandblast simultaneously, improve the sandblast effect simultaneously, the work piece after the sandblast enters into the inside of clean case 6, can deposit the work piece through tray 13, the staff accessible presses depression bar 16 and passes through connecting rod 15 and drive tray 13 and remove in the inside of clean case 6, utilize stress spring 11 and dead lever 12 can support the bottom of tray 13, the area of contact between convenient increase work piece and the cleaning agent has been played, improve cleaning efficiency.

The last points to be described are: first, in the description of the present application, it should be noted that, unless otherwise specified and defined, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be mechanical or electrical, or may be a direct connection between two elements, and "upper," "lower," "left," "right," etc. are merely used to indicate relative positional relationships, which may be changed when the absolute position of the object being described is changed;

secondly: in the drawings of the disclosed embodiments, only the structures related to the embodiments of the present disclosure are referred to, and other structures can refer to the common design, so that the same embodiment and different embodiments of the present disclosure can be combined with each other under the condition of no conflict;

finally: the foregoing description of the preferred embodiments of the utility model is not intended to limit the utility model to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the utility model are intended to be included within the scope of the utility model.

Claims

1. The soft injury machine of silicon chip, including workstation (1), its characterized in that: the novel sand blasting machine is characterized in that the bottom end of the workbench (1) is fixedly connected with the supporting underframe (2), the top end of the workbench (1) is fixedly connected with the sand blasting frame (3), the top end of the sand blasting frame (3) is fixedly connected with the storage box (4), one side of the top end of the workbench (1) is movably connected with the conveying belt (5), one side of the workbench (1) is fixedly connected with the cleaning box (6), the top end of the inner surface of the sand blasting frame (3) is fixedly connected with the guide rail (7), and the bottom end of the guide rail (7) is movably connected with the spray head (8).

2. The soft silicon wafer damaging machine according to claim 1, wherein: the cleaning box is characterized in that a stress spring (11) is movably connected to the bottom end of the inner surface of the cleaning box (6), a fixing rod (12) is fixedly connected to the inner surface of the stress spring (11), a tray (13) is fixedly connected to the top end of the fixing rod (12), and a filter hole (14) is formed in the top end of the tray (13).

3. The soft silicon wafer damaging machine according to claim 1, wherein: the top of sprinkler head (8) fixedly connected with slider (9), one side swing joint of slider (9) has telescopic link (10).

4. The soft silicon wafer damaging machine according to claim 2, wherein: one side of tray (13) top fixedly connected with connecting rod (15), the top fixedly connected with depression bar (16) of connecting rod (15).

5. The soft silicon wafer damaging machine according to claim 2, wherein: the number of the fixing rods (12) is a plurality, and the fixing rods (12) are equidistantly and symmetrically distributed on two sides of the bottom end of the tray (13).

6. The soft silicon wafer damaging machine according to claim 2, wherein: the cross section shape of the filter holes (14) is circular, the number of the filter holes (14) is a plurality, and the filter holes (14) are equidistantly distributed at the top end of the tray (13).

7. A silicon wafer soft damage machine according to claim 3, wherein: one end of each telescopic rod (10) is attached to one side of the inner surface of the sandblasting frame (3), two telescopic rods (10) are arranged, and the two telescopic rods (10) are symmetrically distributed on two sides of the inner surface of the sandblasting frame (3).