CN219309498U

CN219309498U - Semiconductor material washs and uses overflow bottle

Info

Publication number: CN219309498U
Application number: CN202223570402.4U
Authority: CN
Inventors: 姚文贤
Original assignee: Shanghai Crystal Silicon Material Co ltd
Current assignee: Shanghai Crystal Silicon Material Co ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-07-07
Anticipated expiration: 2032-12-30

Abstract

The utility model discloses an overflow bottle for cleaning semiconductor materials, which comprises a cleaning bottle body, a central tube, an overflow tube and a pure water access tube, wherein the central tube is arranged in the cleaning bottle body, the overflow tube is arranged on the surface of the upper part of one side of the cleaning bottle body, the pure water access tube is arranged on the surface of the lower part of one side of the cleaning bottle body, and the pure water access tube penetrates through the surface of the cleaning bottle body and is communicated with the central tube. The utility model designs a pure water inlet connected with the pure water with controllable flow, and the pipe diameter of the overflow port is thickened without adding a control valve, so that the pure water can be rapidly led out. The central tube is slightly higher than the overflow port, so that pure water can be quickly replaced, and the sample injection tube is always in clean pure water.

Description

Semiconductor material washs and uses overflow bottle

Technical Field

The utility model relates to the technical field of semiconductor measurement, in particular to an overflow bottle for cleaning semiconductor materials.

Background

The technical field of semiconductors, and a precise instrument testing process such as ICP-MS (inductively coupled plasma-mass spectrometry) and the like for the surface of a semiconductor material. In the process of detecting the metal on the surface of the semiconductor material by ICP-MS, the sample tube is moved into a common bottle after the detected liquid is sucked, kept stand and cleaned for a period of time, and then moved into the next detected liquid again for continuous suction detection. Repeating the sucking detection, standing and cleaning work. The sample tube is moved into a common bottle for standing and cleaning, and pure water in the bottle is polluted, so that the sample tube is not cleaned and polluted, and the accuracy of the test is affected. The original sample injection tube is not cleaned in time in a common bottle to cause pollution, so that the accuracy of the measurement result is affected.

Disclosure of Invention

The utility model aims to provide an overflow bottle for cleaning semiconductor materials, which is designed to be connected with pure water with controllable flow rate by a pure water inlet, and the pipe diameter of an overflow port is thickened without adding a control valve so as to be led out rapidly. The central tube is slightly higher than the overflow port, so that pure water can be quickly replaced, and the sample injection tube is always in clean pure water, so that the problems in the background art are solved.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a semiconductor material washs and uses overflow bottle, is including wasing bottle, center tube, overflow pipe and pure water access tube, the inside of wasing the bottle is equipped with the center tube, one side upper portion surface mounting of wasing the bottle has the overflow pipe, one side lower part surface mounting of wasing the bottle has the pure water access tube, the pure water access tube runs through the surface of wasing the bottle and communicates with the center tube.

Preferably, the aperture of the pipe orifice of the overflow pipe is larger than that of the pure water access pipe.

Preferably, the water level at the port of the central tube is higher than the communication position of the overflow tube and the cleaning bottle body.

Compared with the prior art, the utility model has the beneficial effects that:

1. the utility model designs that the pure water inlet is connected with the pure water with controllable flow, the pipe diameter of the overflow port is thickened, the pure water can be quickly led out without adding a control valve, and the central pipe is slightly higher than the overflow port, so that the pure water can be quickly replaced. So that the sample injection tube is always in clean pure water.

2. The design is used without difference with the original common bottle in operation process, the operation difficulty is not increased, and the measurement accuracy is greatly improved because the sample inlet pipe is ensured to be always kept in pure water.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

fig. 2 is a schematic diagram of the internal structure of the present utility model.

In the figure: 1. cleaning the bottle body; 2. a central tube; 3. an overflow pipe; 4. pure water is connected into the pipe.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-2, the present utility model provides a technical solution:

the utility model provides a semiconductor material washs and uses overflow bottle, including wasing bottle 1, center tube 2, overflow pipe 3 and pure water access tube 4, the inside of wasing bottle 1 is equipped with center tube 2, and the upper portion surface mounting of one side of wasing bottle 1 has overflow pipe 3, and the lower portion surface mounting of one side of wasing bottle 1 has pure water access tube 4, and pure water access tube 4 runs through the surface of wasing bottle 1 and communicates with center tube 2. The orifice diameter of the overflow pipe 3 is larger than that of the pure water access pipe 4. The horizontal plane at the port of the central tube 2 is higher than the communication position of the overflow tube 3 and the cleaning bottle body 1.

In the use, send into the center tube 2 with the feed pipe, accomplish by center tube 2 and accomodate, then utilize pure water access tube 4 to cooperate to pour into pure water into, pure water inlet can control pure water flow during, and the pipe diameter of overflow pipe 3 is coarsened and does not install the control valve additional for pure water access tube 4 for the washing water can derive fast, and center tube 2 port part is slightly higher than overflow pipe 3 can realize carrying out the change of pure water fast, makes the feed pipe can be in clean pure water always. The operation does not increase the operation difficulty, and can greatly improve the measurement precision from the original 5E9 atomic number/cm < 2 >, to 5E8 atomic number/cm < 2 >.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

While embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the utility model.

Claims

1. An overflow bottle for cleaning semiconductor materials, which is characterized in that: including wasing bottle (1), center tube (2), overflow pipe (3) and pure water access tube (4), the inside of wasing bottle (1) is equipped with center tube (2), one side upper portion surface mounting who washs bottle (1) has overflow pipe (3), one side lower part surface mounting who washs bottle (1) has pure water access tube (4), pure water access tube (4) run through the surface of wasing bottle (1) and with center tube (2) intercommunication.

2. An overflow bottle for cleaning semiconductor material according to claim 1, wherein: the caliber of the pipe orifice of the overflow pipe (3) is larger than that of the pure water access pipe (4).

3. An overflow bottle for cleaning semiconductor material according to claim 1, wherein: the horizontal plane of the port of the central tube (2) is higher than the communication position of the overflow tube (3) and the cleaning bottle body (1).