CN219302378U - Automatic titration device for electroplating solution - Google Patents
Automatic titration device for electroplating solution Download PDFInfo
- Publication number
- CN219302378U CN219302378U CN202223606117.3U CN202223606117U CN219302378U CN 219302378 U CN219302378 U CN 219302378U CN 202223606117 U CN202223606117 U CN 202223606117U CN 219302378 U CN219302378 U CN 219302378U
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- liquid
- pipeline
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- titration
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- 238000004448 titration Methods 0.000 title claims abstract description 40
- 238000009713 electroplating Methods 0.000 title claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 166
- 239000002699 waste material Substances 0.000 claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 230000001502 supplementing effect Effects 0.000 claims abstract description 10
- 238000007747 plating Methods 0.000 claims description 13
- 238000007689 inspection Methods 0.000 claims description 11
- 230000002572 peristaltic effect Effects 0.000 claims description 4
- 239000010808 liquid waste Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 abstract description 8
- 238000011010 flushing procedure Methods 0.000 abstract description 8
- 238000003756 stirring Methods 0.000 abstract description 7
- 238000004140 cleaning Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Control Of Non-Electrical Variables (AREA)
Abstract
The utility model discloses an automatic titration device for electroplating liquid, which comprises: the utility model provides an electroplating liquid automatic titration device which is modularized, convenient to clean, capable of automatically supplementing water and discharging waste and reducing manpower consumption, and is characterized in that a fixed position such as a flushing pipeline, a liquid adding pipeline, a liquid discharging pipeline, a stirring paddle, an electrode and the like is not easy to damage.
Description
Technical Field
The utility model relates to the technical field of semiconductor packaging, in particular to an automatic titration device for electroplating liquid.
Background
In the semiconductor electroplating process, the components of the electroplating solution need to be sampled and analyzed, and the analysis of the components of the electroplating solution needs to be monitored by a potentiometric titrator.
The existing potentiometric titrator is characterized in that a sample is taken and diluted and then put into a rotary table, and a flushing pipeline, a liquid adding pipeline, a liquid discharging pipeline, a stirring paddle, an electrode and the like are fixed on a lifting tower. When the titration device works, the position of the lifting tower is firstly lifted to the highest position, then the turntable is rotated to the designated position, and then the lifting tower is lowered to the working position, and then titration is started.
Electrode wires and pipelines fixed on the lifting tower can cause loosening of the electrode and the liquid adding pipe in the long-term lifting process, even the situation that the liquid adding pipe is inserted outside the sample cup and the electrode wires are too tight to cause damage.
After titration is finished, waste liquid in the sample cup is pumped out through a peristaltic pump, then the inlet wires such as the sample cup, the electrode, the liquid adding pipeline, the stirring paddle and the like are flushed by pumping water through an electric pump, and the operation of flushing and waste discharge is repeated for several times, and then the sample is transferred to the next sample for titration analysis.
Water and waste are contained in two 10L barrels, requiring manual addition of water and disposal of waste, and when the potentiometric titrator is used to analyze too much sample, a large amount of water is consumed for washing, resulting in a large amount of waste. If no one notices water addition and waste liquid treatment, the waste liquid can overflow, and no water is used up for cleaning, so that the analysis result of the next sample is affected.
Disclosure of Invention
In order to solve the problems, the utility model aims to provide an automatic titration device for electroplating liquid, which is characterized in that fixed positions such as a flushing pipeline, a liquid adding pipeline, a liquid discharging pipeline, a stirring paddle, an electrode and the like are not easy to damage, a sample tray is modularized and convenient to clean, automatic water supplementing and waste discharging are realized, and labor consumption is reduced.
According to one aspect of the present utility model, there is provided an automatic titration apparatus for plating solution, comprising: base, crane, censoring subassembly, titration subassembly and automatic drawing liquid subassembly, one side of base is equipped with the crane, and the opposite side of base sets up censoring subassembly side by side with the crane, and the fixed subassembly, liquid feeding pipeline and the play liquid pipeline of titration that set up in top of crane, automatic drawing liquid subassembly and liquid feeding pipeline and play liquid pipeline intercommunication are equipped with the lifting tray of reciprocates on the crane, and the lifting tray will the sample on the censoring subassembly is moved to titration subassembly, liquid feeding pipeline and play liquid pipeline below. The titration component, the liquid adding pipeline and the liquid outlet pipeline are fixed through the movement of the sample cup, and the fixed positions of the stirring paddle, the electrode and the like are not easy to damage during detection; the cleaning and the moving are convenient through the modularized inspection assembly; the automatic cleaning of moisturizing and waste liquid reduces working strength through automatic drawing liquid subassembly.
In some embodiments, the inspection assembly includes: the rotary table is provided with a plurality of sample trays, the sample cups are placed on the sample trays, and the rotary table drives the sample trays and the sample cups to rotate. And rotating one side of the sample to be tested to the position of the lifting tray through the turntable so as to carry out large-scale test.
In some embodiments, the number of sample cups corresponds to the number of sample trays.
In some embodiments, the tip of the lifting tray is trapezoid, a plurality of gaps are regularly distributed in the middle of the turntable, and the tip supports the sample tray and the sample cup from the gaps to the lower part of the titration assembly, the liquid adding pipeline and the liquid outlet pipeline. The sample tray and the sample cup are moved to the inspection position by the lifting tray through the cooperation of the gap and the trapezoid tip.
In some embodiments, the liquid outlet pipeline is positioned at the bottom of the inner side of the sample cup, and the liquid adding pipeline is positioned at the top of the inner side of the sample cup. The positions of the liquid outlet pipeline and the liquid adding pipeline are convenient for better flushing and discharging the waste liquid.
In some embodiments, an automated pipetting assembly comprises: the liquid supplementing part is communicated with the liquid outlet pipeline, the water supplementing part is communicated with the liquid inlet pipeline, and peristaltic pumps are arranged in the liquid outlet pipeline and the liquid inlet pipeline. The water replenishing part is used for flushing the sample cup, and the liquid outlet pipeline is used for discharging the waste liquid to the waste liquid part.
In some embodiments, the water replenishing portion includes: liquid storage pot, charge pump, first pipeline, second pipeline, first level sensor and second level sensor, the charge pump setting is inside or outside the liquid storage pot, and first pipeline and second pipeline all connect the charge pump, and first level sensor is located the lower part of liquid storage pot, and second level sensor is located the upper portion of liquid storage pot. The upper limit and the lower limit of liquid in the liquid storage tank are limited through the first liquid level sensor and the second liquid level sensor, liquid is replenished from the first pipeline when the upper limit is lower than the lower limit, and the liquid is discharged from the second pipeline when the upper limit is higher than the upper limit, so that personnel participation is reduced, and labor intensity is reduced.
In some embodiments, the waste portion comprises: the liquid outlet pump is arranged inside or outside the waste liquid tank, the third pipeline is connected with the liquid adding pump, and the third liquid level sensor is positioned on the upper portion of the waste liquid tank. The highest position of the waste liquid is monitored by a third liquid level sensor, and the waste liquid is discharged by a liquid outlet pump.
According to the utility model, the titration assembly, the liquid adding pipeline and the liquid outlet pipeline are fixed through movement of the sample cup, and the fixed positions of the stirring paddle, the electrode and the like are not easy to damage during detection; the cleaning and the moving are convenient through the modularized inspection assembly; the automatic cleaning of water replenishing and waste liquid is realized through the automatic liquid pumping assembly, so that the working strength is reduced; rotating one side of a sample to be tested to the position of the lifting tray through the turntable so as to perform large-scale test; the sample tray and the sample cup are ensured to be moved to the inspection position by the lifting tray through the cooperation of the gap and the trapezoid tip; flushing the sample cup by using the water supplementing part, and discharging the waste liquid to the waste liquid part by using the liquid outlet pipeline; the upper limit and the lower limit of liquid in the liquid storage tank are limited through the first liquid level sensor and the second liquid level sensor, liquid is replenished from the first pipeline when the upper limit is lower than the lower limit, and the liquid is discharged from the second pipeline when the upper limit is higher than the upper limit, so that personnel participation is reduced, and labor intensity is reduced.
Drawings
FIG. 1 is a schematic view of an automatic titration apparatus for plating solution according to the present utility model;
FIG. 2 is a schematic view of the inspection assembly of the automatic titration apparatus for plating solution of the present utility model;
FIG. 3 is a schematic view showing the structure of a lifting tray of the automatic titration apparatus for plating solution of the present utility model;
FIG. 4 is a schematic view showing the structure of a water replenishing portion of the automatic titration apparatus for plating solution according to the present utility model;
FIG. 5 is a schematic view showing the structure of a waste liquid section of an automatic plating liquid titration apparatus according to the present utility model.
Detailed Description
The present utility model will be described in detail below with reference to the embodiments shown in the drawings, but it should be understood that the embodiments are not limited to the utility model, and equivalent changes or substitutions of functions, methods or structures according to the embodiments by those skilled in the art are included in the scope of the present utility model.
In the description of the present utility model, it should be noted that, unless otherwise specified and defined, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, mechanically or electrically connected, may be in communication with each other between two elements, may be directly connected, or may be indirectly connected through an intermediate medium, and the specific meaning of the terms may be understood by those skilled in the art according to circumstances.
As shown in fig. 1, the automatic titration device for plating solution according to the present utility model comprises: base 1, crane 2, censoring subassembly 3, titration subassembly 4 and automatic drawing liquid subassembly 5, one side of base 1 is equipped with crane 2, and the opposite side of base 1 sets up censoring subassembly 3 side by side with crane 2, and the fixed subassembly 4, liquid feeding pipeline 6 and the play liquid pipeline 7 of titration that set up in top of crane 2, automatic drawing liquid subassembly 5 and liquid feeding pipeline 6 and play liquid pipeline 7 intercommunication are equipped with the lift tray 8 of reciprocates on the crane 2, and lift tray 8 will sample on the censoring subassembly 3 is removed to titration subassembly 4, liquid feeding pipeline 6 and play liquid pipeline 7 below. The titration component 4, the liquid adding pipeline 6 and the liquid outlet pipeline 7 are fixed by moving the sample cup 33, and the fixed positions of the stirring paddles, the electrodes and the like are not easy to damage during detection; cleaning and movement are facilitated by the modular inspection assembly 3; the automatic cleaning of water replenishing and waste liquid is realized through the automatic liquid pumping assembly 5, so that the working strength is reduced.
As shown in fig. 2, the inspection module 3 includes: carousel 31, sample tray 32 and sample cup 33 are equipped with a plurality of sample trays 32 on the carousel 31, and sample cup 33 is placed on sample tray 32, and carousel 31 drive sample tray 32 and sample cup 33 rotate. The sample to be inspected is rotated to the position of the lifting tray 8 on one side by the turntable 31 for large-scale inspection. In the specific implementation process, the turntable 31 is driven by a servo motor, and the position of the sample tray 32 is controlled by the accurate stop of the main shaft, so that the lifting tray 8 is convenient to extract and move.
The number of sample cups 33 corresponds to the number of sample trays 32.
As shown in fig. 3, the tip of the lifting tray 8 is trapezoidal, a plurality of gaps are regularly distributed in the middle of the turntable 31, and the tip supports the sample tray 32 and the sample cup 33 from the gaps to the lower part of the titration assembly 4, the liquid adding pipeline 6 and the liquid outlet pipeline 7. The cooperation of the gap with the trapezoidal tip ensures that the lifting tray 8 moves the sample tray 32 and the sample cup 33 to the inspection position. Since the turntable 31 is circular, the regularly distributed gaps are flared, and the shape of the tips is also optimally isosceles trapezoid for maximum contact area with the sample tray 32, with the longer bottom being closer to the lifting tower 2 and the shorter upper bottom being closer to the turntable 31.
The liquid outlet pipeline 7 is positioned at the bottom of the inner side of the sample cup 33, and the liquid adding pipeline 6 is positioned at the top of the inner side of the sample cup 33. The positions of the liquid outlet line 7 and the liquid adding line 6 facilitate better flushing and discharge of waste liquid.
The automatic liquid drawing assembly 5 includes: the water supplementing part 51 and the waste liquid part 52, the waste liquid part 52 is communicated with the liquid outlet pipeline 7, the water supplementing part 51 is communicated with the liquid inlet pipeline, and peristaltic pumps are arranged in the liquid outlet pipeline 7 and the liquid inlet pipeline. The sample cup 33 is rinsed by the water replenishing portion 51, and the waste liquid is discharged to the waste liquid portion 52 by the liquid outlet line 7.
As shown in fig. 4, the water replenishing portion 51 includes: the liquid storage tank 511, the liquid filling pump 512, the first pipeline 513, the second pipeline 514, the first liquid level sensor 515 and the second liquid level sensor 516, the liquid filling pump 512 is arranged inside or outside the liquid storage tank 511, the liquid filling pump 512 is arranged outside the liquid storage tank 511 for installation and maintenance convenience, the first pipeline 513 and the second pipeline 514 are connected with the liquid filling pump 512, the first liquid level sensor 515 is located at the lower portion of the liquid storage tank 511, and the second liquid level sensor 516 is located at the upper portion of the liquid storage tank 511. The first liquid level sensor 515 and the second liquid level sensor 516 define the lower limit and the upper limit of the liquid in the liquid storage tank 511, liquid is supplemented from the first pipeline 513 when the liquid is lower than the lower limit, and the liquid is discharged from the second pipeline 514 when the liquid is higher than the upper limit, so that personnel participation is reduced, and labor intensity is reduced.
As shown in fig. 5, the waste liquid portion 52 includes: the waste liquid tank 521, the liquid outlet pump 522, the third pipeline 523 and the third liquid level sensor 524, the liquid outlet pump 522 is arranged inside or outside the waste liquid tank 521, the third pipeline 523 is connected with the liquid adding pump 522, and the third liquid level sensor 524 is positioned at the upper part of the inner wall of the waste liquid tank 521. The highest level of the waste liquid is monitored by a third level sensor 524 and exceeded is discharged by the effluent pump 522.
While only certain embodiments of the present utility model have been described, it will be apparent to those skilled in the art that other modifications and improvements can be made without departing from the inventive concept of the present utility model.
Claims (8)
1. An automatic titration apparatus for plating solution, comprising: base, crane, censoring subassembly, titration subassembly and automatic drawing liquid subassembly, one side of base is equipped with the crane, the opposite side of base sets up censoring subassembly side by side with the crane, the fixed subassembly, liquid feeding pipeline and the play liquid pipeline of titration that set up in top of crane, automatic drawing liquid subassembly and liquid feeding pipeline and play liquid pipeline intercommunication, be equipped with the lift tray of reciprocates on the crane, the lift tray will censoring subassembly is gone up the sample and is moved to titration subassembly, liquid feeding pipeline and play liquid pipeline below.
2. The plating solution auto-titration device of claim 1, wherein the routing inspection assembly comprises: the rotary table is provided with a plurality of sample trays, the sample cups are placed on the sample trays, and the rotary table drives the sample trays and the sample cups to rotate.
3. The plating solution auto-titration device of claim 2, wherein the number of sample cups corresponds to the number of sample trays.
4. The automatic titration device for electroplating solution according to claim 3, wherein the tip of the lifting tray is trapezoid, a plurality of gaps are regularly distributed in the middle of the turntable, and the tip supports the sample tray and the sample cup from the gaps to the lower parts of the titration assembly, the liquid adding pipeline and the liquid outlet pipeline.
5. The automatic titration apparatus for electroplating solution according to claim 4, wherein the liquid outlet pipeline is located at the bottom of the inner side of the sample cup, and the liquid feeding pipeline is located at the top of the inner side of the sample cup.
6. The automatic plating solution titration device of claim 1, wherein the automatic drawing assembly comprises: the liquid supplementing device comprises a liquid supplementing part and a liquid waste part, wherein the liquid waste part is communicated with a liquid outlet pipeline, the liquid supplementing part is communicated with a liquid inlet pipeline, and peristaltic pumps are arranged in the liquid outlet pipeline and the liquid inlet pipeline.
7. The plating solution automatic titration apparatus according to claim 6, wherein the water replenishing section includes: liquid storage pot, charge pump, first pipeline, second pipeline, first level sensor and second level sensor, the charge pump sets up inside or outside the liquid storage pot, charge pump is all connected to first pipeline and second pipeline, first level sensor is located the lower part of liquid storage pot, second level sensor is located the upper portion of liquid storage pot.
8. The plating solution automatic titration apparatus according to claim 7, wherein the waste liquid section includes: the liquid outlet pump is arranged inside or outside the waste liquid tank, the third pipeline is connected with the liquid adding pump, and the first liquid level sensor is positioned on the upper portion of the waste liquid tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223606117.3U CN219302378U (en) | 2022-12-31 | 2022-12-31 | Automatic titration device for electroplating solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223606117.3U CN219302378U (en) | 2022-12-31 | 2022-12-31 | Automatic titration device for electroplating solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219302378U true CN219302378U (en) | 2023-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223606117.3U Active CN219302378U (en) | 2022-12-31 | 2022-12-31 | Automatic titration device for electroplating solution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219302378U (en) |
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2022
- 2022-12-31 CN CN202223606117.3U patent/CN219302378U/en active Active
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| CP03 | Change of name, title or address |
Address after: 210000 No. 8, Linchun Road, Pukou Economic Development Zone, Pukou District, Nanjing, Jiangsu Province Patentee after: Jiangsu Xinde Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 210000 No. 8, Linchun Road, Pukou Economic Development Zone, Pukou District, Nanjing, Jiangsu Province Patentee before: Jiangsu Xinde Semiconductor Technology Co.,Ltd. Country or region before: China |