CN219302252U - Auxiliary tool of dark field defect inspection equipment - Google Patents

Abstract

The utility model relates to an auxiliary tool of a dark field defect inspection apparatus, comprising: the bracket is provided with a perforation; the movable seat penetrates through the perforation and is connected with the perforation in a sliding manner; and the separation assembly comprises a first clamping jaw and a second clamping jaw, one end of the first clamping jaw is connected with the bracket, the other end of the first clamping jaw is used for abutting against the bulb, one end of the second clamping jaw is connected with the movable seat, and the other end of the second clamping jaw is used for abutting against the lamp holder. Because the movable seat can move relative to the support, the movable seat is pulled, the movable seat drives the second clamping jaw to move towards the perforation, and therefore, the relative movement of the first clamping jaw and the second clamping jaw is formed, the bulb and the lamp holder are separated from each other, the bulb is not required to be pinched by hands, the operation is simple, and the convenience and the safety of bulb replacement are improved.

Description

Auxiliary tool of dark field defect inspection equipment

Technical Field

The utility model relates to the technical field of field defect detection, in particular to an auxiliary tool of dark field defect inspection equipment.

Background

Dark field detection is a method for detecting defects on the surface of a wafer, and is mainly composed of an incident light source and a detector, wherein during detection, a beam of laser light irradiates the surface of the wafer from the side upper part, scattered light is generated at the defect and is collected by the detector and converted into an electric signal. The wafer rotates on the stage, which translates in a radial direction. So that the irradiation of the laser beam can cover the entire wafer surface. The location of the wafer surface defects (e.g., particles, scratches, etc.) is also recorded. The detector for collecting stray light can be arranged at different solid angles, so that the collected light rays are different, the solid angle of the lens is larger than that of the incident light, the reflected light beam on the surface of the wafer is avoided, and only the stray light at the defect position reaches the lens. The field of view of the wafer surface is dark at this time, i.e., a slice is dark where there are no defects, where there is scattered light.

In the prior art, a detection lamp in dark field defect detection equipment is used for illumination, the detection lamp needs to be replaced periodically, when the detection lamp is replaced manually, the force required in the process of separating a bulb from a lamp holder is large, the bulb can only be pinched by hands, and the bulb is easy to pinch and lead to hand pricking, so that the operation is complex.

Disclosure of Invention

Based on this, it is necessary to provide an auxiliary tool for a dark field defect inspection apparatus capable of effectively improving the operation convenience and safety at the time of inspection lamp replacement.

The technical scheme is as follows: an aid for a dark field defect inspection apparatus, the aid comprising: the bracket is provided with a perforation; the movable seat penetrates through the perforation and is connected with the perforation in a sliding manner; and the separation assembly comprises a first clamping jaw and a second clamping jaw, one end of the first clamping jaw is connected with the bracket, the other end of the first clamping jaw is used for abutting against the bulb, one end of the second clamping jaw is connected with the movable seat, and the other end of the second clamping jaw is used for abutting against the lamp holder.

Above-mentioned appurtenance of dark field defect inspection equipment, when the bulb that detects the lamp needs to be changed, with first clamping jaw card on the bulb, with second clamping jaw card on the second bulb, because movable seat can be relative support activity, consequently, pulling movable seat for movable seat drives second clamping jaw towards perforating the motion, consequently formed the relative motion of first clamping jaw and second clamping jaw, make bulb and lamp stand mutually separated, need not to pinch the bulb with the hand, easy operation is favorable to improving the operating convenience and the security that the bulb was changed.

In one embodiment, the number of the first clamping jaws is at least two, the two first clamping jaws are oppositely arranged on the bracket, and the at least two first clamping jaws are used for clamping the bulb.

In one embodiment, a first abutting portion is arranged at one end, far away from the support, of the first clamping jaw, the two first abutting portions enclose a first clamping hole, and the shape of the first clamping hole is circular.

In one embodiment, the number of the second clamping jaws is at least two, the two second clamping jaws are oppositely arranged on the movable seat, the second clamping jaws are in guiding fit with the perforated hole wall, and the at least two second clamping jaws are used for clamping the lamp holder.

In one embodiment, a second abutting portion is disposed at one end of the second clamping jaw away from the movable seat, the second abutting portions enclose a second clamping hole, and the second clamping hole is square in shape.

In one embodiment, the separating assembly further comprises an elastic member disposed between the two second clamping jaws, and the elastic member is used for driving the two second clamping jaws to move away from each other.

In one embodiment, the auxiliary tool of the dark field defect inspection apparatus further comprises a reset member disposed between the movable seat and the bracket, and the reset member is configured to provide a force to the movable seat away from the bracket.

In one embodiment, the reset piece is a reset spring, the reset spring is sleeved on the movable seat, one end of the reset spring is in interference fit with the support, one end of the movable seat, which is far away from the second clamping jaw, is provided with an operation part, and the other end of the reset spring is in limit fit with the operation part.

In one embodiment, the auxiliary tool of the dark field defect inspection apparatus further comprises a handle assembly comprising a first handle connected to the movable base and a second handle connected to the bracket.

In one embodiment, the first handle and the second handle are arranged in a crossing manner and are in sliding connection, the support is provided with a guide post, the first handle is provided with a guide hole, and the guide post is in guide fit with the guide hole.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model.

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram showing the overall structure of an auxiliary tool of a dark field defect inspection apparatus according to an embodiment.

Reference numerals illustrate:

100. auxiliary tools for dark field defect inspection equipment; 110. a bracket; 111. perforating; 112. a guide post; 120. a movable seat; 121. an operation unit; 130. a separation assembly; 131. a first jaw; 132. a second jaw; 133. an elastic member; 140. a reset member; 150. a handle assembly; 151. a first handle; 152. a second handle; 153. and a guide hole.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1, fig. 1 is a schematic diagram illustrating an overall structure of an auxiliary tool 100 of a dark field defect inspection apparatus according to an embodiment of the present utility model, and an auxiliary tool 100 of a dark field defect inspection apparatus according to an embodiment of the present utility model is provided, where the auxiliary tool 100 of the dark field defect inspection apparatus includes: a bracket 110, a movable seat 120 and a separating assembly 130. The support 110 is provided with a through hole 111, and the movable seat 120 passes through the through hole 111 and is connected with the through hole 111 in a sliding manner; the separation assembly 130 includes a first clamping jaw 131 and a second clamping jaw 132, wherein one end of the first clamping jaw 131 is connected with the bracket 110, the other end of the first clamping jaw 131 is used for abutting against a bulb, one end of the second clamping jaw 132 is connected with the movable base 120, and the other end of the second clamping jaw 132 is used for abutting against a lamp holder.

According to the auxiliary tool 100 of the dark field defect inspection device, when the bulb of the inspection lamp needs to be replaced, the first clamping jaw 131 is clamped on the bulb, the second clamping jaw 132 is clamped on the second bulb, and the movable seat 120 can move relative to the bracket 110, so that the movable seat 120 is pulled, the movable seat 120 drives the second clamping jaw 132 to move towards the perforation 111, and therefore, the relative movement of the first clamping jaw 131 and the second clamping jaw 132 is formed, the bulb and the lamp holder are separated from each other, the bulb does not need to be pinched by hands, the operation is simple, and the convenience and the safety of bulb replacement operation are improved.

Alternatively, the profile shape of the perforations 111 may be circular, rectangular, triangular, regular pentagonal, or other irregular shape.

Specifically, the outline shape of the through hole 111 is square. The outer contour of the movable seat 120 is square. Therefore, the movable base 120 can be prevented from rotating around its axis when moving in the through hole 111, and the working reliability of the tool can be improved. The present embodiment provides only a specific embodiment of the profile shape of the through hole 111, but is not limited thereto.

In one embodiment, referring to fig. 1, the number of the first clamping jaws 131 is at least two, two of the first clamping jaws 131 are disposed opposite to each other on the bracket 110, and at least two of the first clamping jaws 131 are each used for clamping a bulb. For example, two first clamping jaws 131 are provided, and the two first clamping jaws 131 are disposed opposite to each other on the bracket 110. Thus, the clamping stability of the bulb is improved.

In one embodiment, referring to fig. 1, a first abutting portion is disposed at an end of the first clamping jaw 131 away from the bracket 110. The two first abutting parts enclose a first clamping hole, and the shape of the first clamping hole is round. Thus, the circular first clamping hole can stably clamp the edge of the bulb, so that the bulb and the lamp holder are separated conveniently, slipping is avoided, and breakage of the bulb caused by impact of a sharp part on the bulb is avoided.

In one embodiment, referring to fig. 1, there are at least two second clamping jaws 132, two second clamping jaws 132 are disposed opposite to each other on the movable base 120, the second clamping jaws 132 are in guiding engagement with the hole wall of the through hole 111, and at least two second clamping jaws 132 are each used for clamping a lamp socket. For example, the second clamping jaw 132 is two. Thus, the clamping stability of the lamp holder is improved.

In an embodiment, referring to fig. 1, a second abutting portion is disposed at an end of the second clamping jaw 132 away from the movable base 120, and the two second abutting portions enclose a second clamping hole, and the second clamping hole is square in shape. So, square second centre gripping hole can stabilize the edge of blocking the lamp stand to make things convenient for the separation of bulb and lamp stand, avoid skidding, improve the convenience of bulb and lamp stand separation.

In one embodiment, referring to fig. 1, the separating assembly 130 further includes an elastic member 133, where the elastic member 133 is disposed between the two second clamping jaws 132, and the elastic member 133 is configured to drive the two second clamping jaws 132 to move away from each other. In this way, the two second clamping jaws 132 can be pushed open by the elastic member 133, and therefore, by sliding the movable base 120 over the through hole 111, the opening angle of the second clamping jaw 132 can be adjusted, thereby adjusting the degree of clamping to the lamp holder. When the second clamping jaw 132 is opened, the second clamping jaw 132 can be abutted against the first clamping jaw 131, so that the opening angle of the first clamping jaw 131 is adjusted, and the clamping degree of the bulb is adjusted.

Alternatively, the elastic member 133 may be a spring, a balloon, a torsion spring, an elastic rubber, or other elastic structure or elastic material.

Specifically, the elastic member 133 is a spring. Therefore, the structure is stable, the installation is convenient, and the reliability is strong. The embodiment provides only one specific embodiment of the elastic member 133, but is not limited thereto.

In one embodiment, referring to fig. 1, the auxiliary tool 100 of the dark field defect inspection apparatus further includes a reset element 140. The restoring member 140 is disposed between the movable seat 120 and the support 110, and the restoring member 140 is configured to provide a force to the movable seat 120 away from the support 110. Therefore, when the movable base 120 is operated to separate the lamp holder from the lamp bulb, the movable base 120 can be restored to the initial position by the resetting piece 140, so that the movable piece is prevented from being pulled out of the through hole 111, and the structural stability is improved.

Alternatively, the restoring member 140 may be a spring, balloon, rubber band, torsion spring, elastomeric rubber or other elastic structure or material.

In an embodiment, referring to fig. 1, the reset element 140 is a reset spring, the reset spring is sleeved on the movable seat 120, one end of the reset spring is in interference fit with the bracket 110, one end of the movable seat 120 away from the second clamping jaw 132 is provided with an operation portion 121, and the other end of the reset spring is in limit fit with the operation portion 121. Therefore, the spring can provide a restoring tension between the movable base 120 and the bracket 110, and the operation part 121 can be used for hand grasping and can also provide an installation position for the restoring spring, avoiding the restoring spring from falling off.

In one embodiment, referring to fig. 1, the auxiliary tool 100 of the dark field defect inspection apparatus further includes a handle assembly 150, the handle assembly 150 includes a first handle 151 and a second handle 152, the first handle 151 is connected to the movable base 120, and the second handle 152 is connected to the stand 110. Therefore, by extending the first handle 151 and the second handle 152, one-hand operation can be performed, and convenience of operation can be improved.

Further, referring to fig. 1, the first handle 151 and the second handle 152 are disposed to cross and slidingly connect, the bracket 110 is provided with a guide post 112, the first handle 151 is provided with a guide hole 153, and the guide post 112 is in guide fit with the guide hole 153. Therefore, the convenience and the stability of one-hand operation are improved.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. An auxiliary tool of a dark field defect inspection apparatus, characterized in that the auxiliary tool of the dark field defect inspection apparatus comprises:

the bracket is provided with a perforation;

the movable seat penetrates through the perforation and is connected with the perforation in a sliding manner; a kind of electronic device with high-pressure air-conditioning system

The separation assembly comprises a first clamping jaw and a second clamping jaw, one end of the first clamping jaw is connected with the support, the other end of the first clamping jaw is used for abutting against a bulb, one end of the second clamping jaw is connected with the movable seat, and the other end of the second clamping jaw is used for abutting against a lamp holder.

2. The auxiliary tool for dark field defect inspection apparatus according to claim 1, wherein the number of the first clamping jaws is at least two, the two first clamping jaws are oppositely arranged on the bracket, and the at least two first clamping jaws are used for clamping a bulb.

3. The auxiliary tool for dark field defect inspection equipment according to claim 2, wherein a first abutting portion is arranged at one end of the first clamping jaw away from the bracket, the two first abutting portions enclose a first clamping hole, and the shape of the first clamping hole is circular.

4. The auxiliary tool of the dark field defect inspection apparatus according to claim 1, wherein the number of the second clamping jaws is at least two, the two second clamping jaws are oppositely arranged on the movable base, the second clamping jaws are in guiding fit with the perforated hole wall, and the at least two second clamping jaws are used for clamping a lamp holder.

5. The auxiliary tool for dark field defect inspection equipment according to claim 4, wherein a second abutting portion is arranged at one end of the second clamping jaw away from the movable seat, two second abutting portions enclose a second clamping hole, and the second clamping hole is square in shape.

6. The tool of claim 4, wherein the separating assembly further comprises a resilient member disposed between the two second jaws, the resilient member being adapted to urge the two second jaws away from each other.

7. The auxiliary tool of the dark field defect inspection apparatus according to claim 1, further comprising a reset member disposed between the movable seat and the bracket, the reset member being configured to provide a force to the movable seat away from the bracket.

8. The auxiliary tool for dark field defect inspection equipment according to claim 7, wherein the reset member is a reset spring, the reset spring is sleeved on the movable seat, one end of the reset spring is in interference fit with the support, one end of the movable seat, which is far away from the second clamping jaw, is provided with an operation part, and the other end of the reset spring is in limit fit with the operation part.

9. The tool of any one of claims 1-8, further comprising a handle assembly including a first handle coupled to the movable mount and a second handle coupled to the bracket.

10. The auxiliary tool for dark field flaw detection device according to claim 9, wherein the first handle and the second handle are arranged in a crossing manner and are slidingly connected, the support is provided with a guide post, the first handle is provided with a guide hole, and the guide post is in guide fit with the guide hole.

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