CN219297704U

CN219297704U - CCD camera supporting and protecting device for CZ single crystal furnace

Info

Publication number: CN219297704U
Application number: CN202320361637.8U
Authority: CN
Inventors: 洪远文; 李恒恒; 张瑞鑫; 吕淑芳
Original assignee: Inner Mongolia Haoan Energy Technology Co ltd
Current assignee: Inner Mongolia Haoan Energy Technology Co ltd
Priority date: 2023-03-01
Filing date: 2023-03-01
Publication date: 2023-07-04
Anticipated expiration: 2033-03-01

Abstract

The utility model discloses a CCD camera supporting and protecting device for a CZ single crystal furnace, which comprises a base, a connecting rod and a protecting cover; two fixing rods are symmetrically fixed at the opposite positions of the inner wall of the base, and a connecting rod which is horizontally and slidably arranged is connected between the two fixing rods; a supporting rod is arranged on the connecting rod in a sliding way, and the end part of the supporting rod is fixedly connected with a fixed block; the inner side of the bottom edge of the base is provided with a fixing ring which is integrally formed with the base. The protective cover is arranged at the top opening of the base. The advantages are that: the base of the utility model has high straight stability, and the camera is not easy to shift when the furnace is disassembled and assembled. The distance from the camera to the liquid level is consistent, and the uniformity of data is improved. The newly added protective cover enables the camera to work in a fully closed state, as no dust and external light source are interfered, the frequency of cleaning the gold-plated glass of the camera is reduced, the scraping phenomenon is obviously weakened, the service life of the gold-plated glass is prolonged, and meanwhile, the detection accuracy is improved.

Description

CCD camera supporting and protecting device for CZ single crystal furnace

Technical Field

The utility model relates to the technical field of monocrystalline silicon production equipment, in particular to a CCD camera supporting and protecting device for a CZ monocrystalline furnace.

Background

A CZ single crystal furnace (hereinafter referred to as a czochralski single crystal furnace) is a device capable of melting a polycrystalline silicon material in an inert gas atmosphere and producing single crystal silicon by the czochralski method, which is a key device in the solar photovoltaic industry. Currently, mostly CCD (Charge Coupled Devices) cameras are adopted for automatic control of crystal growth of a single crystal furnace, and a CCD camera is used for monitoring a crystal growth process by utilizing a visual image acquisition and processing technology. When the device is used, the CCD camera is mounted at the observation window at the top of the furnace cover of the single crystal furnace, the camera of the CCD camera is arranged towards the inside of the furnace and is used for observing and shooting the liquid level in the furnace, and the capturing position of the camera in the single crystal furnace is determined by adjusting the height and the angles of all directions of the CCD camera; the temperature regulation, seeding, shouldering, shoulder rotating and constant diameter stages in the single crystal drawing process are used for measuring the data such as the liquid level temperature, the distance between the liquid level and the guide cylinder, the diameter of the single crystal silicon rod and the like, and a control parameter basis is provided for the single crystal drawing process.

In a CZ single crystal furnace, a CCD camera is an indispensable part for observing the automatic growth of crystals, so a CCD window is designed on the furnace cover of the CZ single crystal furnace and is used for collecting the growth data of single crystals in the furnace; the existing CCD camera adopts a bracket structure, the bracket structure comprises a supporting rod and a connecting block fixed on the supporting rod, the camera is directly fixed on the connecting block and is fixed at an observation window at the top of the furnace cover through the supporting rod; however, this stent structure has the following disadvantages: 1. the stability of the camera is smaller, and the camera is easy to touch when the furnace is disassembled and assembled due to the lack of the protective cover, and dust can also touch the camera to cause the displacement of the camera, so that the detection data is inaccurate; 2. because the screw of the existing bracket is smooth, the tightness and the stability are poor, frequent disassembly and debugging are needed, and the heights of cameras are difficult to unify after reinstallation, so that the detected data cannot be unified; 3. because of the lack of a shield, other light sources are prone to interfere with camera detection; 4. ash layers and the like are covered on the gold-plated glass in the monitoring process, so that detection data are inaccurate.

Disclosure of Invention

The utility model aims to provide a CCD camera supporting and protecting device for a CZ single crystal furnace, which is convenient for omnibearing adjustment of a camera, and can enable the CCD camera to work in a totally-enclosed state, so that the detection data is accurate, and the service life of gold-plated glass of the CCD camera is prolonged.

The utility model discloses a CCD camera supporting and protecting device for a CZ single crystal furnace, which comprises a base and a connecting rod; the base is a cylinder body with two open ends, two fixing rods are symmetrically fixed at the opposite positions of the inner wall of the base, and the connecting rods which are horizontally arranged in a sliding mode are connected between the two fixing rods; a supporting rod is arranged on the connecting rod in a sliding manner, and the end part of the supporting rod is fixedly connected with a fixed block; the inner side of the bottom edge of the base is provided with a fixing ring which is integrally formed with the base.

Further, a chute b is formed in the fixing rod along the length direction of the fixing rod, and a bolt penetrates through the chute b to fix the connecting rod.

Further, a sliding groove c is formed in the connecting rod along the length direction of the connecting rod, and a bolt penetrates through the sliding groove c to fix the supporting rod.

Furthermore, two circular arc-shaped sliding grooves a are formed in the fixing ring, and bolts penetrate through the sliding grooves a.

Further, the utility model is characterized in that the side wall of the lower part of the base is provided with a threading hole.

Further, the device also comprises a protective cover covered at the top opening of the base, and the protective cover is fixedly connected with the base through screws.

Further, the protective cover further comprises a heat radiation hole, and at least one heat radiation hole is formed in the side wall of the upper portion of the protective cover.

The utility model has the advantages that: the base is directly fixed on the observation window at the top of the furnace cover through the fixing ring, so that the stability is high, and the camera is not easy to shift when the furnace is disassembled and assembled; and the base is convenient to adjust to a proper position through the chute a on the fixed ring.

The camera is installed on the fixed block of base, and the mounting height passes through the bolt fastening, can guarantee that the camera tests the distance unanimity to the liquid level, increases the uniformity of data.

Because the sliding grooves are formed in the base, the fixing rod and the connecting rod, the camera can be adjusted in an omnibearing manner, and the omnibearing monitoring of the camera on the growth of single crystals is realized.

The newly added protective cover enables the camera to work in a fully closed state, as no dust and external light source are interfered, the frequency of cleaning the gold-plated glass of the camera is reduced, the scraping phenomenon is obviously weakened, the service life of the gold-plated glass is prolonged, and meanwhile, the detection accuracy is improved; the upper part of the protective cover is provided with a heat dissipation hole to prevent the fault caused by the high temperature of the internal camera from influencing the detection result.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic view of the overall structure of the present utility model.

FIG. 2 is a schematic view of the base and its internal structure in FIG. 1

Fig. 3 is a schematic view of the use state of the present utility model.

The base 1, the threading hole 101, the protection cover 2, the heat dissipation hole 201, the fixed ring 3, the chute a 301, the fixed rod 4, the chute b 401, the connecting rod 5, the chute c 501, the supporting rod 6 and the fixed block 7.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the terms "center," "upper," "lower," "front," "rear," "top," "bottom," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

As shown in fig. 1 to 3, a CCD camera supporting and protecting apparatus for a CZ single crystal furnace includes a base 1 and a connecting rod 5; the base 1 is a cylinder body with two open ends, a fixing ring 3 integrally formed with the base 1 is fixed on the inner side of the edge of the bottom of the base 1, the center line of the fixing ring 3 coincides with the center line of the cylinder body, a circular arc-shaped chute a 301 is formed in the fixing ring 3, the base 1 is fixed on an observation window at the top of a furnace cover by using a bolt to penetrate through the chute a 301, so that the angle rotation of a camera during debugging is met, and when the camera is rotated to a proper position, the bolt is screwed down for fixing.

Two fixing rods 4 are symmetrically fixed at the opposite positions of the inner wall of the upper part of the base 1, the fixing rods 4 are vertically arranged relative to the central line of the base 1, a connecting rod 5 which is horizontally and slidably arranged is connected between the two fixing rods 4, and the connecting rod 5 is vertically arranged with the fixing rods 4; a chute b 401 is formed in the fixed rod 4 along the length direction of the fixed rod 4, and the end part of the bolt penetrates through the chute b 401 to fix the connecting rod 5; the connecting rod 5 can rotate by taking the bolt as the center, and can also horizontally slide along the chute b 401, and when the connecting rod 5 slides to a required position, the bolt is screwed for fixing.

A chute c 501 is formed in the connecting rod 5 along the length direction of the connecting rod 5, the supporting rod 6 is vertically arranged relative to the connecting rod 5 and can horizontally slide along the chute c 501, and the end part of a bolt penetrates through the chute c 501 to fix the supporting rod 6; the supporting rod 6 can rotate by taking the bolt as the center, and can also horizontally slide along the chute c 501, and when the supporting rod 6 slides to a required position, the bolt is screwed for fixing.

The end part of the supporting rod 6 is fixedly connected with a fixing block 7 for fixing the CCD camera of which the camera faces the bottom end of the base 1. The side wall of the lower part of the base 1 is provided with a threading hole 101, and a signal wire and a power wire enter the camera through the threading hole 101 at the bottom. The top opening of the base 1 is covered with a protective cover 2, and the protective cover 2 is fixedly connected with the base 1 through screws. Four heat dissipation holes 201 are uniformly formed in the side wall of the upper portion of the protection cover 2, so that faults caused by high temperature of an internal camera can be prevented, and detection results are prevented from being influenced.

The camera is fixed on the fixed block 7 through the installation of bolts, and the position of the camera is adjusted through the front-back and left-right movement and rotation pitching of the supporting rod 6 and the connecting rod 5 so as to achieve the optimal acquisition effect; finally, the protective cover 2 is covered on the base 1 and fixed through bolts, so that the camera works in a fully-closed state, the frequency of cleaning the gold-plated glass of the camera is reduced due to no interference of dust and an external light source, the scraping phenomenon of the gold-plated glass of the camera is obviously weakened, the service life of the gold-plated glass is prolonged, the detection accuracy is improved, and the data monitoring can be performed after the installation is completed.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

Claims

1. A CCD camera supporting and protecting device for a CZ single crystal furnace is characterized by comprising a base and a connecting rod;

the base is a cylinder body with two open ends, two fixing rods are symmetrically fixed at the opposite positions of the inner wall of the base, and the connecting rods which are horizontally arranged in a sliding mode are connected between the two fixing rods;

a supporting rod is arranged on the connecting rod in a sliding manner, and the end part of the supporting rod is fixedly connected with a fixed block;

the inner side of the bottom edge of the base is provided with a fixing ring which is integrally formed with the base.

2. The CCD camera supporting and protecting apparatus for a CZ single crystal furnace according to claim 1, wherein a chute b is formed on the fixing rod along a length direction of the fixing rod, and a bolt passes through the chute b to fix the connecting rod.

3. The CCD camera supporting and protecting apparatus for a CZ single crystal furnace according to claim 1, wherein a chute c is formed on the connecting rod along the length direction of the connecting rod, and a bolt passes through the chute c to fix the supporting rod.

4. The CCD camera supporting and protecting device for CZ single crystal furnace of claim 1, wherein two circular arc-shaped sliding grooves a are formed in the fixed ring, and bolts are arranged in the sliding grooves a in a penetrating mode.

5. The CCD camera supporting and protecting apparatus for a CZ single crystal furnace according to any one of claims 1 to 4, wherein a threading hole is provided on a sidewall of a lower portion of the base.

6. The CCD camera supporting and protecting apparatus for a CZ single crystal furnace according to claim 1, further comprising a protective cover covering the top opening of the base, the protective cover being fixedly connected with the base by screws.

7. The CCD camera support and protection apparatus for a CZ single crystal furnace of claim 6, further comprising a heat dissipation hole, at least one of the heat dissipation holes being opened on a sidewall of an upper portion of the protection cover.