CN219267674U - Silicon wafer basket conveying device - Google Patents

Abstract

The utility model belongs to the technical field of photovoltaic equipment, and discloses a silicon wafer basket conveying device which comprises a protective cover, a longitudinal beam assembly, a cross beam assembly, a first driving mechanism and a second driving mechanism. The top of the protective cover is provided with a first via hole, and the back of the protective cover is provided with a second via hole; the longitudinal beam assembly penetrates through the first through hole and is connected with the protective cover in a sliding manner along a first direction; the beam assembly is used for carrying a silicon wafer basket, and one end of the beam assembly is fixedly connected with the longitudinal beam assembly; the first driving mechanism is arranged in the protective cover and can drive the longitudinal beam assembly to move along a first direction; the second driving mechanism comprises a second motor, a driving gear and a rack, and can drive the protective cover, the longitudinal beam assembly and the transverse beam assembly to integrally move along a second direction. The main transmission parts of the silicon wafer basket conveying device are arranged in the protective cover, so that the transmission mechanism can be fully protected, the transmission mechanism is prevented from being corroded by acid gas, the safety protection capability is improved, the failure loss of the device is reduced, and the service life of the device is prolonged.

Description

Silicon wafer basket conveying device

Technical Field

The utility model relates to the technical field of photovoltaic equipment, in particular to a silicon wafer basket conveying device.

Background

The photovoltaic equipment industry is used as a supporting industry of the photovoltaic industry, china is used as the largest solar cell production country worldwide, and the development of the solar cell industry drives the whole photovoltaic industry to rise, so that the photovoltaic equipment industry in China is promoted.

In the silicon wafer production process, a silicon wafer basket is often required to be carried, at present, a manipulator is generally adopted on wet cleaning equipment in the photovoltaic industry to carry the silicon wafer basket, and 200 and 400 silicon wafer basket carrying manipulators are commonly used, and the silicon wafer basket is horizontally moved, vertically taken and placed through the manipulator so as to be transferred to different slots. Most of the mechanical transmission parts of the existing silicon wafer basket conveying manipulator are exposed to the external environment, and the transmission structure is easy to rust an internal transmission part due to the fact that acid gas enters the transmission structure, so that the transmission structure is damaged and invalid, and the service life and the use safety of the manipulator are seriously affected.

Disclosure of Invention

The utility model aims to provide a silicon wafer basket conveying device which is used for preventing transmission mechanism components from being exposed to the external environment and from being rusted.

To achieve the purpose, the utility model adopts the following technical scheme:

provided is a silicon wafer basket transport device, comprising:

the top of the protective cover is provided with a first via hole, and the back of the protective cover is provided with a second via hole;

the longitudinal beam assembly penetrates through the first through hole and is connected with the protective cover in a sliding manner along a first direction;

the cross beam assembly is used for carrying the silicon wafer basket, and one end of the cross beam assembly is fixedly connected with the longitudinal beam assembly;

the first driving mechanism is arranged in the protective cover and can drive the longitudinal beam assembly to move along a first direction;

the second driving mechanism comprises a second motor, a driving gear and a rack, wherein the second motor is arranged in the protective cover, the output end of the second motor is connected with the driving gear, and the rack is arranged outside the protective cover, is arranged at intervals with the back of the protective cover and extends along a second direction; the driving gear part extends out of the second through hole to be meshed with the rack; the second driving mechanism can drive the protective cover, the longitudinal beam assembly and the transverse beam assembly to integrally move along a second direction.

Optionally, the first actuating mechanism includes first motor, screw shaft, nut and push pedal, the screw shaft rotate install in the protection casing, the nut with screw shaft threaded connection, the push pedal with nut with longeron subassembly fixed connection, first motor with screw shaft transmission is connected, can drive the screw shaft is rotatory, so that longeron subassembly moves along first direction.

Optionally, the first driving mechanism includes:

the driving wheel is fixedly connected with a rotary output shaft of the first motor;

the driven wheel is fixedly connected with the screw shaft;

the transmission belt is sleeved on the driving wheel and the driven wheel, and the screw shaft can be driven to rotate when the rotating output shaft of the first motor rotates.

Optionally, the first driving mechanism further comprises a fixing seat, the fixing seats are arranged at two ends of the screw shaft in pairs, the fixing seat is rotationally connected with the screw shaft, and the fixing seat is fixedly installed in the protective cover.

Optionally, the first driving mechanism further includes:

two linear sliding rails are arranged in the protective cover and are arranged on two sides of the screw shaft;

the two connecting seats are in one-to-one corresponding sliding connection with the two linear sliding rails, and the longitudinal beam assembly is fixedly connected with the two connecting seats.

Optionally, the beam assembly includes:

the beam main body is fixedly connected with the longitudinal beam assembly;

the brackets are arranged in a plurality, and are arranged on the beam main body at intervals;

the suspension arm is arranged on the support, and a flower basket lifting hook for hooking the silicon wafer flower basket is arranged on the suspension arm.

Optionally, the crossbeam subassembly still including install in basket of flowers detection switch on the support, basket of flowers detection switch's detection end stretches out towards silicon chip basket of flowers direction, when basket of flowers lifting hook and silicon chip basket of flowers hook in place, silicon chip basket of flowers with basket of flowers detection switch's detection end butt triggers.

Optionally, the crossbeam subassembly is still including pressing basket protection sensor, press basket protection sensor install in on the support, press basket protection sensor's detection end with the davit butt, fixedly connected with stopper on the support, be provided with the slide opening along first direction on the davit, the stopper with slide opening sliding connection presses under the basket state, the davit moves up, the butt triggers press basket protection sensor's detection end.

Optionally, a movable door capable of being opened and closed is arranged on the protective cover.

Optionally, the shield is made of a metallic material.

The utility model has the beneficial effects that:

the main transmission parts of the first driving mechanism and the second driving mechanism of the silicon wafer flower basket conveying device are arranged in the protective cover, so that the transmission mechanism can be fully protected, the transmission mechanism is prevented from being corroded by acid gas in a factory, the failure of the transmission mechanism is caused, the safety protection capability is improved, the associated loss caused by device faults is reduced, and the service life of the device is prolonged.

Drawings

FIG. 1 is a schematic structural view of a silicon wafer basket conveying device according to an embodiment of the present utility model;

FIG. 2 is a schematic view of an assembly of a first drive mechanism, a second drive mechanism, and a stringer assembly according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a second driving mechanism according to an embodiment of the present utility model;

FIG. 4 is a schematic diagram of a first driving mechanism according to an embodiment of the present utility model;

FIG. 5 is a schematic diagram of a second driving mechanism (hidden stringer assembly) according to an embodiment of the present utility model;

FIG. 6 is a schematic view of a protective cover according to an embodiment of the utility model;

FIG. 7 is a schematic view of a beam assembly according to an embodiment of the present utility model;

FIG. 8 is an enlarged partial schematic view at A in FIG. 7;

fig. 9 is a partially enlarged schematic view at B in fig. 7.

In the figure:

1. a protective cover; 11. a first via; 12. a second via; 13. a movable door;

2. a stringer assembly;

3. a first driving mechanism; 31. a first motor; 32. a screw shaft; 33. a nut; 34. a push plate; 35. a driving wheel; 36. driven wheel; 37. a conveyor belt; 38. a fixing seat; 39. a linear slide rail; 391. a connecting seat;

4. a second driving mechanism; 41. a second motor; 42. a drive gear; 43. a rack;

5. a beam assembly; 51. a beam body; 52. a bracket; 521. a limiting block; 53. a suspension arm; 531. a slide hole; 532. flower basket lifting hook; 54. a flower basket detection switch; 55. a basket pressing protection sensor;

100. silicon wafer basket.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar parts throughout, or parts having like or similar functions. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be interpreted broadly, as for example, they may be fixedly connected, or may be detachably connected, or may be electrically connected, or may be directly connected, or may be indirectly connected through an intermediary, or may be in communication with one another in two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the description of the present utility model, unless explicitly stated and limited otherwise, a first feature "above" or "below" a second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature not being in direct contact but being in contact by another feature therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.

As shown in fig. 1 to 9, the utility model provides a silicon wafer basket conveying device, which comprises a protective cover 1, a longitudinal beam assembly 2, a cross beam assembly 5, a first driving mechanism 3 and a second driving mechanism 4. In this embodiment, the first direction refers to the Z direction in fig. 1, i.e. the vertical direction; the second direction is referred to as the X-direction in fig. 1, i.e. the horizontal direction. Optionally, the protection cover 1 in this embodiment is made of a metal material, as shown in fig. 1 and 2, a first via hole 11 is formed on the top of the protection cover 1, and a second via hole 12 is formed on the back of the protection cover 1. The longitudinal beam assembly 2 is arranged through the first through hole 11 and is connected with the protective cover 1 in a sliding manner along the first direction. The beam assembly 5 is used for carrying the silicon wafer basket 100, and one end of the beam assembly 5 is fixedly connected with the longitudinal beam assembly 2. The first driving mechanism 3 is installed in the protective cover 1 and can drive the longitudinal beam assembly 2 and the cross beam assembly 5 thereon to synchronously move along the first direction. As shown in fig. 1-3, the second driving mechanism 4 includes a second motor 41, a driving gear 42 and a rack 43, in this embodiment, the second motor 41 is installed in the protective cover 1, an output end of the second motor 41 is connected with the driving gear 42, the rack 43 is disposed outside the protective cover 1 and is spaced from the back of the protective cover 1, and extends along a second direction (the rack 43 is not shown in fig. 1 and 2), it is understood that the rack 43 is fixedly laid in the factory in advance along the second direction (the rack 43 can be understood as a preset rack track), is disposed at a certain distance from the back of the protective cover 1, and the driving gear 42 partially extends out of the second through hole 12 to engage with the rack 43, when the second motor 41 is started, the driving gear 42 drives the protective cover 1, the girder assembly 2 and the girder assembly 5 to integrally move synchronously along the second direction, so as to realize the movement of the protective cover 1, the girder assembly 2 and the girder assembly 5 in the second direction.

In this silicon chip basket of flowers conveyor, the main transmission parts of first actuating mechanism 3 and second actuating mechanism 4 all install in protection casing 1, can fully protect drive mechanism, avoid in the factory sour gas to corrode drive mechanism, cause drive mechanism inefficacy, promote safety protection ability, reduce the company's loss that the device trouble caused, promoted the life of device.

Further, as shown in fig. 4 and 5, the first driving mechanism 3 includes a first motor 31, a screw shaft 32, a nut 33 and a push plate 34, the screw shaft 32 is rotatably installed in the protection cover 1, optionally, the first driving mechanism 3 includes a fixing seat 38, the fixing seat 38 is fixedly installed in the protection cover 1, the fixing seats 38 are disposed at two ends of the screw shaft 32 in pairs, and the screw shaft 32 penetrates through the fixing seat 38 and is rotatably connected with the fixing seat 38. The nut 33 is in threaded connection with the screw shaft 32, the push plate 34 is fixedly connected with the nut 33 and the longitudinal beam assembly 2, and the first motor 31 is in transmission connection with the screw shaft 32. Optionally, in this embodiment, the first motor 31 is connected to the screw shaft 32 by a belt, and specifically, the first driving mechanism 3 further includes a driving wheel 35, a driven wheel 36, and a conveyor belt 37. The driving wheel 35 is fixedly connected with a rotary output shaft of the first motor 31; the driven wheel 36 is fixedly connected with the screw shaft 32; when the first motor 31 is started, the rotating output shaft of the first motor 31 can drive the screw shaft 32 to rotate through the driving wheel 35, the conveying belt 37 and the driven wheel 36, so that the nut 33 drives the push plate 34 and the longitudinal beam assembly 2 to move up and down along the first direction, and the silicon wafer basket 100 can be conveniently taken and placed.

Optionally, the first driving mechanism 3 further includes two linear slide rails 39 and two connection seats 391, as shown in fig. 5, where the two linear slide rails 39 are fixedly installed in the protection cover 1 and disposed on two sides of the screw shaft 32; the two connecting seats 391 are in one-to-one corresponding sliding connection with the two linear sliding rails 39, the longitudinal beam assembly 2 is fixedly connected with the two connecting seats 391, and the linear sliding rails 39 play a role in guiding and stabilizing, so that the stability of the vertical movement of the longitudinal beam assembly 2 is improved.

Alternatively, as shown in fig. 7-8, the beam assembly 5 includes a beam body 51, a bracket 52, and a boom 53. The crossbeam main body 51 is fixedly connected with the longitudinal beam assembly 2, and adopts the structural form of an aluminum alloy profile cladding plate, so that the lightweight design is realized, and the characteristics of easiness in processing, convenience in installation, economy and practicability are realized. The plurality of brackets 52 are provided and are mounted on the beam main body 51 at intervals. The boom 53 is mounted on the bracket 52 and provided with a basket hook 532 for hooking the silicon wafer basket 100. When the silicon wafer basket 100 is used, the first driving mechanism 3 and the second driving mechanism 4 are controlled by operation, so that the basket hooks 532 on the suspension arms 53 are aligned with the openings on the silicon wafer basket 100 to be clamped in, the silicon wafer basket 100 is hooked on the basket hooks 532, and the subsequent carrying of the silicon wafer basket 100 is realized.

Optionally, as shown in fig. 8, the beam assembly 5 further includes a basket detecting switch 54 mounted on the bracket 52, where the basket detecting switch 54 is a sensing device commonly used in the field and is used for detecting whether the hanging arm 53 is hooked with the silicon wafer basket 100, the detecting end of the basket detecting switch 54 extends towards the silicon wafer basket 100, when the basket hook 532 is hooked in place with the silicon wafer basket 100, the silicon wafer basket 100 will abut against the detecting end of the basket detecting switch 54, the detecting end is moved upwards by an abutting force, and the basket detecting switch 54 is triggered to feedback in real time to detect the in-place state of the silicon wafer basket 100.

Optionally, the beam assembly 5 further includes a basket pressing protection sensor 55, where the basket pressing protection sensor 55 is a commonly used sensing device in the field and is used for sensing whether the basket pressing and stacking phenomenon occurs in the silicon wafer basket conveying device during the conveying process. The phenomena of pressing and stacking are that under normal working conditions, the silicon wafer basket conveying device can place a plurality of silicon wafer baskets 100 in different slots, the silicon wafer baskets 100 are horizontally placed in the slots, and the pressing basket protection sensor 55 is used for preventing the silicon wafer baskets 100 from being stacked and pressed with other silicon wafer baskets 100 in the slots in the placing or carrying process and preventing the silicon wafer baskets 100 and silicon wafers on the silicon wafer baskets from being scratched and damaged. As shown in fig. 9, the basket pressing protection sensor 55 is mounted on the bracket 52, the detection end of the basket pressing protection sensor 55 abuts against the suspension arm 53, a limiting block 521 is fixedly connected to the bracket 52, a sliding hole 531 is formed in the suspension arm 53 along the first direction, the vertical opening size of the sliding hole 531 is larger than the length size of the limiting block 521, and the limiting block 521 is slidably connected with the sliding hole 531. In a normal conveying state, as shown in fig. 9, when a basket pressing or stacking phenomenon occurs, the limiting block 521 is abutted against the upper portion of the sliding hole 531, in the process of lowering the silicon wafer basket 100, the silicon wafer basket 100 and the placed silicon wafer basket 100 in the groove position collide and displace vertically, and as the basket hooks 532 are hooked and clamped with the silicon wafer basket 100, collision force is transmitted to the suspension arm 53 through the silicon wafer basket 100, so that the suspension arm 53 is lifted under force, the limiting block 521 is abutted against the lower portion of the sliding hole 53, meanwhile, the suspension arm 53 is lifted under force and is abutted against the detection end of the basket pressing protection sensor 55, the basket pressing protection sensor 55 sends a signal to the device control system, and the control system controls the first driving mechanism 3 to stop emergently.

Optionally, as shown in fig. 6, a movable door 13 capable of being opened and closed is arranged on the protective cover 1, so that maintenance of mechanical components in the protective cover 1 is facilitated. The protective cover 1 of the embodiment can be additionally provided with a CDA positive pressure protection to prevent external chemical gas from entering into a corrosion transmission structure.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. The utility model provides a silicon chip basket of flowers conveyor which characterized in that includes:

the semiconductor device comprises a protective cover (1), wherein a first via hole (11) is formed in the top of the protective cover (1), and a second via hole (12) is formed in the back of the protective cover (1);

the longitudinal beam assembly (2) is arranged in the first through hole (11) in a penetrating mode and is connected with the protective cover (1) in a sliding mode along a first direction;

the cross beam assembly (5) is used for carrying the silicon wafer basket (100), and one end of the cross beam assembly (5) is fixedly connected with the longitudinal beam assembly (2);

the first driving mechanism (3) is arranged in the protective cover (1), and the first driving mechanism (3) can drive the longitudinal beam assembly (2) to move along a first direction;

the second driving mechanism (4) comprises a second motor (41), a driving gear (42) and a rack (43), wherein the second motor (41) is installed in the protective cover (1), the output end of the second motor (41) is connected with the driving gear (42), and the rack (43) is arranged outside the protective cover (1), is arranged at intervals with the back of the protective cover (1) and extends along a second direction; the driving gear (42) partially extends out of the second through hole (12) to be meshed with the rack (43); the second driving mechanism (4) can drive the protective cover (1), the longitudinal beam assembly (2) and the cross beam assembly (5) to integrally move along a second direction.

2. The silicon wafer basket conveying device according to claim 1, wherein the first driving mechanism (3) comprises a first motor (31), a screw shaft (32), a nut (33) and a push plate (34), the screw shaft (32) is rotatably installed in the protective cover (1), the nut (33) is in threaded connection with the screw shaft (32), the push plate (34) is fixedly connected with the nut (33) and the longitudinal beam assembly (2), the first motor (31) is in transmission connection with the screw shaft (32) and can drive the screw shaft (32) to rotate so as to enable the longitudinal beam assembly (2) to move along a first direction.

3. The silicon wafer basket transport apparatus according to claim 2, wherein the first driving mechanism (3) includes:

the driving wheel (35) is fixedly connected with a rotary output shaft of the first motor (31);

a driven wheel (36) fixedly connected with the screw shaft (32);

the conveying belt (37) is sleeved on the driving wheel (35) and the driven wheel (36), and the screw shaft (32) can be driven to rotate when the rotating output shaft of the first motor (31) rotates.

4. A silicon wafer basket conveying device according to claim 3, wherein the first driving mechanism (3) further comprises a fixing seat (38), the fixing seats (38) are arranged at two ends of the screw shaft (32) in pairs, the fixing seat (38) is rotationally connected with the screw shaft (32), and the fixing seat (38) is fixedly installed in the protective cover (1).

5. The silicon wafer basket transport apparatus according to claim 4, wherein the first driving mechanism (3) further comprises:

two linear slide rails (39) which are arranged in the protective cover (1) and are arranged at two sides of the screw shaft (32);

the two connecting seats (391) are in one-to-one corresponding sliding connection with the two linear sliding rails (39), and the longitudinal beam assembly (2) is fixedly connected with the two connecting seats (391).

6. The silicon wafer basket transport apparatus according to claim 1, wherein the beam assembly (5) comprises:

the cross beam main body (51) is fixedly connected with the longitudinal beam assembly (2);

the brackets (52) are arranged in a plurality, and are installed on the beam main body (51) at intervals;

the suspension arm (53) is installed on the support (52), and a flower basket lifting hook (532) for hooking the silicon wafer flower basket (100) is arranged on the suspension arm (53).

7. The silicon wafer basket conveying device according to claim 6, wherein the beam assembly (5) further comprises a basket detection switch (54) mounted on the support (52), the detection end of the basket detection switch (54) extends towards the silicon wafer basket (100), and when the basket lifting hook (532) is hooked in place with the silicon wafer basket (100), the silicon wafer basket (100) is triggered in abutting connection with the detection end of the basket detection switch (54).

8. The silicon wafer flower basket conveying device according to claim 6, wherein the beam assembly (5) further comprises a basket pressing protection sensor (55), the basket pressing protection sensor (55) is installed on the support (52), the detection end of the basket pressing protection sensor (55) is abutted to the suspension arm (53), a limiting block (521) is fixedly connected to the support (52), a sliding hole (531) is formed in the suspension arm (53) along a first direction, the limiting block (521) is in sliding connection with the sliding hole (531), and in a basket pressing state, the suspension arm (53) moves upwards and is abutted to trigger the detection end of the basket pressing protection sensor (55).

9. The silicon wafer basket conveying device according to claim 1, wherein a movable door (13) capable of being opened and closed is arranged on the protective cover (1).

10. The silicon wafer basket transport device according to claim 9, wherein the protective cover (1) is made of a metallic material.

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