CN219244375U

CN219244375U - Vacuum cavity

Info

Publication number: CN219244375U
Application number: CN202320700898.8U
Authority: CN
Inventors: 杨茂; 易卓卓
Original assignee: Wuxi Xinyunda Vacuum Technology Co ltd
Current assignee: Wuxi Xinyunda Vacuum Technology Co ltd
Priority date: 2023-04-03
Filing date: 2023-04-03
Publication date: 2023-06-23
Anticipated expiration: 2033-04-03

Abstract

The utility model discloses a vacuum cavity, which relates to the technical field of vacuum cavities and comprises a vacuum cavity, wherein one side of the vacuum cavity is movably hinged with a door plate through a hinge, the outer side of the vacuum cavity is fixedly connected with a first supporting plate, the upper side of the first supporting plate is fixedly connected with a vacuum pump, the inner part of the vacuum cavity is fixedly connected with a heating plate, and one side of the vacuum cavity is provided with a heat conducting mechanism.

Description

Vacuum cavity

Technical Field

The utility model relates to the technical field of vacuum cavities, in particular to a vacuum cavity.

Background

Vacuum chambers are a structure developed to reduce the number of vacuum chambers in semiconductor applications, with almost unchanged wafer capacity. The vacuum cavity is a container for keeping the inside in a vacuum state, and the volume, the material and the shape of the vacuum cavity are considered in the manufacture of the vacuum cavity. Stainless steel is the main structural material of the current ultra-high vacuum system. Has the advantages of excellent corrosion resistance, low gassing rate, no magnetism, good weldability, low electric conductivity and thermal conductivity, capability of working at-270-900 ℃, the method is widely applied to high vacuum and ultra-high vacuum systems.

In the prior art, when the vacuum cavity is used for processing a product, vacuum is required to be ensured in the cavity, and the product is heated at a high temperature according to the processing technology of the product, but after the product is heated and taken out, heat in the vacuum cavity can be slowly emitted until the temperature is lower, and the heat can be wasted and cannot be effectively recycled.

Disclosure of Invention

Aiming at the problems in the prior art, the utility model aims to provide a vacuum cavity which can effectively solve the problems that after a product is heated and taken out, heat in the vacuum cavity can be slowly emitted until the temperature is lower, and the heat can be wasted and cannot be effectively recycled.

In order to solve the problems, the utility model adopts the following technical scheme:

the vacuum cavity comprises a vacuum cavity body, wherein one side of the vacuum cavity body is movably hinged with a door plate through a hinge, a first supporting plate is fixedly connected to the outer side of the vacuum cavity body, a vacuum pump is fixedly connected to the upper side of the first supporting plate, a heating plate is fixedly connected to the inner side of the vacuum cavity body, and a heat conducting mechanism is arranged on one side of the vacuum cavity body;

the heat conduction mechanism comprises a hollow block fixedly connected to one side of a vacuum cavity, a heat dissipation hole is formed in one side of the vacuum cavity, a plurality of heat dissipation holes are formed in the heat dissipation hole, a heat conduction pipe is fixedly connected to one side of the hollow block, a plurality of heat conduction pipes are arranged, a second support plate is fixedly connected to one side of the vacuum cavity, a water storage tank is arranged on the upper side of the second support plate, the heat conduction pipe is located inside the water storage tank, a cylinder is fixedly connected to one side of the vacuum cavity, a baffle is fixedly connected to the lower side of the cylinder, a sliding groove is formed in the upper side of the hollow block, and the baffle is slidably connected to the inside of the sliding groove.

As a preferable scheme of the utility model, one side of the air cylinder is fixedly connected with a reinforcing rod, and the reinforcing rod is fixedly connected with the vacuum cavity.

As a preferable scheme of the utility model, the upper side of the baffle is fixedly connected with a connecting rod, and the connecting rod is fixedly connected with the cylinder.

As a preferable scheme of the utility model, the inside of the water storage tank is fixedly connected with a protection plate, and the protection plate is positioned at one side of the heat conduction pipe.

As a preferable scheme of the utility model, a thread groove is formed on one side of the water storage tank, and a thread blocking block is connected with the water storage tank in the thread groove in a threaded manner.

As a preferable scheme of the utility model, the drainage plate is fixedly connected in the water storage tank, and the drainage plate is triangular in shape.

Compared with the prior art, the utility model has the advantages that:

1. the heat inside the vacuum cavity in this device can be radiated through the radiating holes, and the hollow block can absorb the heat, and simultaneously the heat pipe can conduct the heat absorbed by the hollow block to the water inside the water storage tank, so as to achieve the effect of heating the water, and the heat generated inside the vacuum cavity can be effectively recycled, so that the waste of resources is not easy to cause.

2. The inside water accessible screw thread groove of storage water tank in this device is smooth discharges, and the people of being convenient for use the water after the heating, and the inside of screw thread groove still can be used to threaded connection screw thread shutoff piece for the screw thread shutoff piece can be stabilized in the inside of screw thread groove, thereby reaches the effect of plugging up the screw thread groove, later also only need rotatory screw thread shutoff piece break away from the screw thread groove, alright let the smooth discharge through the screw thread groove of water.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic cross-sectional view of the present utility model;

FIG. 3 is a schematic view of another view of the present utility model;

fig. 4 is a schematic diagram of an explosive structure according to the present utility model.

The reference numerals in the figures illustrate:

1. a vacuum chamber; 21. a door panel; 22. a first support plate; 23. a vacuum pump; 24. a heating plate; 31. a heat radiation hole; 32. a hollow block; 33. a heat conduction pipe; 34. a second support plate; 35. a water storage tank; 36. a cylinder; 37. a baffle; 38. a chute; 4. a reinforcing rod; 5. a connecting rod; 6. a protective plate; 7. a drainage plate; 81. a thread groove; 82. a thread block.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.

Examples:

referring to fig. 1-4, a vacuum cavity, including vacuum cavity 1, there is door plant 21 one side of vacuum cavity 1 through hinge activity hinge, the inside of vacuum cavity 1 can be used to place the product that needs to process, and door plant 21 then can be used to seal vacuum cavity 1, thereby let the inside of vacuum cavity 1 be difficult for getting into the air, the outside fixedly connected with first backup pad 22 of vacuum cavity 1, the upside fixedly connected with vacuum pump 23 of first backup pad 22, the inside fixedly connected with hot plate 24 of vacuum cavity 1, first backup pad 22 can be used to support vacuum pump 23, and vacuum pump 23 is located the outside of vacuum cavity 1, can be used to connect vacuum cavity 1, and carry out vacuum treatment to vacuum cavity 1, let the inside of vacuum cavity 1 can keep the vacuum, hot plate 24 then can heat the inside of vacuum cavity 1 and produce high temperature, be convenient for process the product, one side of vacuum cavity 1 is provided with heat conducting mechanism, heat conducting mechanism can guide away the inside vacuum cavity 1, thereby reach the effect that is difficult for causing heat to utilize, the extravagant resource, for example, the actual model can be different models are selected to the vacuum pump 23: FY-1H, and the heating plate 24 can be selected according to the actual situation, for example: GRB-01.

The heat conduction mechanism comprises a hollow block 32 fixedly connected to one side of the vacuum cavity 1, a plurality of heat dissipation holes 31 are formed in one side of the vacuum cavity 1, a plurality of heat conduction pipes 33 are arranged in the heat dissipation holes 31, one side of the hollow block 32 is fixedly connected with the heat conduction pipes 33, the plurality of heat conduction pipes 33 are arranged, heat inside the vacuum cavity 1 can be dissipated through the heat dissipation holes 31, the hollow block 32 is located on one side of the heat dissipation holes 31, the hollow block 32 is made of rock wool plates, the rock wool plates have heat absorption effects, the hollow block 32 can absorb the heat dissipated through the heat dissipation holes 31, the heat dissipation holes 31 are arranged in a plurality of ways, the heat dissipation effect is better, the heat conduction pipes 33 have good heat transfer performance, the heat at one end can be rapidly transferred to the other end, the heat conduction pipes 33 can conduct heat to the heat absorbed by the hollow block 32, and the heat conduction pipes 33 can enable the heat conduction effect to be better.

In addition, one side fixedly connected with second backup pad 34 of vacuum cavity 1, the upside of second backup pad 34 is provided with storage water tank 35, and heat pipe 33 is located the inside of storage water tank 35, second backup pad 34 can be used to support storage water tank 35 for storage water tank 35 can stabilize in the outside of heat pipe 33, and the inside of storage water tank 35 then can be used to pour into the water source, this makes the heat pipe 33 can be located the inside water source of storage water tank 35, this can make heat pipe 33 can be with the heat conduction that hollow piece 32 absorbed to the aquatic, reach the effect of heating the water source, the heat that can the inside produced of effectual recycle vacuum cavity 1, be difficult for causing the waste of resource.

In addition, one side fixedly connected with cylinder 36 of vacuum cavity 1, the downside fixedly connected with baffle 37 of cylinder 36, spout 38 has been seted up to the upside of hollow piece 32, and baffle 37 sliding connection is in the inside of spout 38, the inside of spout 38 can be used to place baffle 37 for baffle 37 can have the space to remove, and baffle 37 then can be used to block louvre 31, make the inside of vacuum cavity 1 when carrying out vacuum and heating, the inside of vacuum cavity 1 is difficult for entering into through louvre 31 to the air, and cylinder 36 then can drive baffle 37 and remove, let baffle 37 can break away from and no longer block louvre 31, this makes the inside heat of vacuum cavity 1 can be given off through louvre 31 smoothly, be applicable to vacuum cavity 1 after the high temperature processing to the product, cylinder 36 can select different models according to actual conditions, for example: SC32-63.

Specifically, one side fixedly connected with reinforcing rod 4 of cylinder 36, and fixed connection between reinforcing rod 4 and the vacuum cavity 1, reinforcing rod 4 can play the effect of reinforcement to cylinder 36 for cylinder 36 is more stable firm in one side of vacuum cavity 1, is difficult for appearing breaking away from in the phenomenon of vacuum cavity 1.

Specifically, the upside fixedly connected with connecting rod 5 of baffle 37, and fixed connection between connecting rod 5 and the cylinder 36, connecting rod 5 can play the effect of connecting cylinder 36 and baffle 37 for the cylinder 36 is more firm with baffle 37's connection, is difficult for appearing baffle 37 fracture and the condition of cylinder 36, and connecting rod 5 is provided with two, makes the reinforcement effect better.

Specifically, the protection board 6 is fixedly connected to the inside of the water storage tank 35, and the protection board 6 is located at one side of the heat conducting pipe 33, and the protection board 6 can be used for blocking the heat conducting pipe 33, so that when the heat conducting pipe 33 conducts heat, people cannot touch the heat conducting pipe 33 by mistake, and therefore the heat conducting pipe 33 is not damaged by mistake.

Specifically, the screw thread groove 81 has been seted up to one side of storage water tank 35, the inside threaded connection of storage water tank 35 in screw thread groove 81 has screw thread blocking 82, the inside water accessible screw thread groove 81 of storage water tank 35 is smooth to be discharged, be convenient for people use the water after the heating, and screw thread groove 81's inside still can be used to screw thread connection screw thread blocking 82, this makes screw thread blocking 82 can stabilize the inside at screw thread groove 81, thereby reach the effect of blocking up screw thread groove 81, let the hydroenergy stabilize in the inside of storage water tank 35, afterwards also only need rotatory screw thread blocking 82 break away from screw thread groove 81, alright let the smooth through screw thread groove 81 discharge of water.

Specifically, the inside fixedly connected with drainage board 7 of storage water tank 35, the shape of drainage board 7 is triangle-shaped, and triangle-shaped's drainage board 7 can drain the inside water source of storage water tank 35, and the position of drainage just is located one side of screw thread groove 81, and this makes the inside that the smooth flow to screw thread groove 81 of water source can pass through the inclined plane of drainage board 7, discharges, is difficult for appearing partial water and piles up the inside at storage water tank 35 and be difficult to the phenomenon of discharge.

The working principle and the using flow of the utility model are as follows: when the device is used, firstly, a product is placed in the vacuum cavity 1, then the door plate 21 is closed, the vacuum pump 23 is started again to vacuumize the vacuum cavity 1, and after the inside of the vacuum cavity 1 is vacuumized, the heating plate 24 can be used for heating the vacuum cavity 1 and the product in the vacuum cavity.

After the product is heated, the air cylinder 36 can be started to drive the baffle 37 to move upwards, so that the baffle 37 can not block the heat dissipation holes 31, then the heat in the vacuum cavity 1 can be dissipated through the heat dissipation holes 31, and the rock wool plate has a heat absorption effect because the hollow block 32 is made of the rock wool plate, so that the hollow block 32 can absorb the heat dissipated through the heat dissipation holes 31, and meanwhile, the heat-conducting pipe 33 can conduct the heat absorbed by the hollow block 32 into the water in the water storage tank 35, thereby achieving the effect of heating the water, effectively recycling the heat generated in the vacuum cavity 1, avoiding the waste of resources, and solving the problems that the heat in the vacuum cavity 1 can be dissipated slowly until the temperature is lower and cannot be effectively recycled after the product is heated and taken out.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical solution and the modified concept thereof, within the scope of the present utility model.

Claims

1. The utility model provides a vacuum cavity, includes vacuum cavity (1), its characterized in that: one side of the vacuum cavity (1) is movably hinged with a door plate (21) through a hinge, a first supporting plate (22) is fixedly connected to the outer side of the vacuum cavity (1), a vacuum pump (23) is fixedly connected to the upper side of the first supporting plate (22), a heating plate (24) is fixedly connected to the inner side of the vacuum cavity (1), and a heat conducting mechanism is arranged on one side of the vacuum cavity (1);

the heat conduction mechanism comprises a hollow block (32) fixedly connected to one side of a vacuum cavity (1), a heat dissipation hole (31) is formed in one side of the vacuum cavity (1), a plurality of heat dissipation holes (31) are formed in the heat dissipation hole, a plurality of heat conduction pipes (33) are fixedly connected to one side of the hollow block (32), a plurality of heat conduction pipes (33) are arranged, a second support plate (34) is fixedly connected to one side of the vacuum cavity (1), a water storage tank (35) is arranged on the upper side of the second support plate (34), the heat conduction pipes (33) are located in the water storage tank (35), an air cylinder (36) is fixedly connected to one side of the vacuum cavity (1), a baffle plate (37) is fixedly connected to the lower side of the air cylinder (36), a sliding groove (38) is formed in the upper side of the hollow block (32), and the baffle plate (37) is slidably connected to the inside of the sliding groove (38).

2. A vacuum chamber as claimed in claim 1, wherein: one side of the air cylinder (36) is fixedly connected with a reinforcing rod (4), and the reinforcing rod (4) is fixedly connected with the vacuum cavity (1).

3. A vacuum chamber as claimed in claim 1, wherein: the upper side of the baffle plate (37) is fixedly connected with a connecting rod (5), and the connecting rod (5) is fixedly connected with the air cylinder (36).

4. A vacuum chamber as claimed in claim 1, wherein: the inside of the water storage tank (35) is fixedly connected with a protection plate (6), and the protection plate (6) is positioned on one side of the heat conduction pipe (33).

5. A vacuum chamber as claimed in claim 1, wherein: a thread groove (81) is formed in one side of the water storage tank (35), and a thread blocking block (82) is connected to the inner thread of the thread groove (81) of the water storage tank (35).

6. A vacuum chamber as claimed in claim 2, wherein: the inside fixedly connected with drainage board (7) of storage water tank (35), the shape of drainage board (7) is triangle-shaped.