CN219239841U

CN219239841U - Single crystal furnace heating wire and single crystal furnace

Info

Publication number: CN219239841U
Application number: CN202223476969.5U
Authority: CN
Inventors: 李勤财; 刘建忠; 高鹏飞; 易明辉
Original assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Current assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Priority date: 2022-12-26
Filing date: 2022-12-26
Publication date: 2023-06-23
Anticipated expiration: 2032-12-26

Abstract

The utility model discloses a single crystal furnace heating wire and a single crystal furnace, wherein the single crystal furnace heating wire is formed by surrounding a plurality of heating wire monomers around the axis of the single crystal furnace heating wire, the heating wire monomers are divided into a plurality of temperature areas along the axis of the single crystal furnace heating wire, and the same temperature areas in all the heating wire monomers are arranged around the axis of the single crystal furnace heating wire. The same temperature area in all the heating wire monomers forms one temperature area of the whole single crystal furnace heating wire, and the temperature of the same temperature area of the single crystal furnace heating wire at different circumferential positions can be adjusted through the corresponding temperature area on the corresponding heating wire monomer, so that the temperature difference of the same temperature area of the single crystal furnace heating wire in the circumferential direction is eliminated, the dislocation of the single crystal is further eliminated, and the crystallization rate and crystallization quality of the single crystal are improved. In addition, if a certain heating wire monomer in the single crystal furnace heating wire is aged and fused, a certain heating wire monomer can be independently replaced without replacing the whole single crystal furnace heating wire, so that the single crystal growth cost is reduced.

Description

Single crystal furnace heating wire and single crystal furnace

Technical Field

The utility model relates to the field of temperature areas of single crystals, in particular to a heating wire of a single crystal furnace and the single crystal furnace.

Background

Most of the heating wires of the single crystal furnace are annular spiral heating wires, as shown in fig. 1, and in fig. 1, the annular spiral heating wires are divided into A, B, C, D temperature areas along the axial direction. The temperatures of the 4 temperature zones can only be raised or lowered as a whole. However, in practical use, the temperature difference in the circumferential direction of the same temperature zone is caused by factors such as crystallization latent heat, uneven heat transfer of the PBN crucible, uneven heat transfer of the quartz support tube and the like during single crystal growth, and the temperature of the same temperature zone can only be wholly increased or reduced, so that the temperature difference in the circumferential direction of the same temperature zone cannot be eliminated, thereby causing higher dislocation of the single crystal and greatly reducing the crystallization rate and crystallization quality of the single crystal. In addition, when the annular spiral heating wire is aged and fused, the annular spiral heating wire can only be scrapped, so that the single crystal growth cost is increased.

Therefore, how to eliminate the temperature difference of the same temperature area of the heating wire of the single crystal furnace in the circumferential direction, so as to eliminate the dislocation of the single crystal, improve the crystallization rate and the crystallization quality of the single crystal, and reduce the growth cost of the single crystal at the same time is a critical problem to be solved by the technicians in the field.

Disclosure of Invention

The utility model aims to eliminate the temperature difference of the same temperature area in the circumferential direction, thereby eliminating the dislocation of the single crystal, improving the crystallization rate and the crystallization quality of the single crystal and reducing the growth cost of the single crystal. In order to achieve the above purpose, the present utility model provides the following technical solutions:

the single crystal furnace heating wire is formed by surrounding a plurality of heating wire monomers around the axis of the single crystal furnace heating wire, the heating wire monomers are divided into a plurality of temperature areas along the axis of the single crystal furnace heating wire, and the same temperature areas in all the heating wire monomers are arranged around the axis of the single crystal furnace heating wire.

Preferably, the heating wire unit comprises an arc part extending around the circumference of the single crystal furnace heating wire, the arc part is a plurality of arc parts distributed along the axial direction of the single crystal furnace heating wire, two adjacent arc parts are connected through an axial connecting part, and two adjacent axial connecting parts in the axial direction of the single crystal furnace heating wire are alternately arranged at two ends of the arc part.

Preferably, each temperature area in the heating wire monomer is connected with a temperature control thermocouple.

Preferably, a preset distance is arranged between two adjacent heating wire monomers.

Preferably, the single crystal furnace heating wire is formed by surrounding three heating wire monomers around an axis.

Preferably, the heating wire of the single crystal furnace is divided into four temperature areas along the axial direction, and each temperature area is connected with a temperature control thermocouple.

Preferably, the arc angles corresponding to the heating wire monomers are equal.

The utility model also provides a single crystal furnace, which comprises any single crystal furnace heating wire, and further comprises a quartz tube supporting tube arranged inside the single crystal furnace heating wire, a quartz tube arranged on the quartz supporting tube and a crucible arranged in the quartz tube.

From the technical scheme, the following can be seen: the same temperature area in all the heating wire monomers forms one temperature area of the whole single crystal furnace heating wire, and the temperature of the same temperature area of the single crystal furnace heating wire at different circumferential positions can be adjusted through the corresponding temperature area on the corresponding heating wire monomer, so that the temperature difference of the same temperature area of the single crystal furnace heating wire in the circumferential direction is eliminated, the dislocation of the single crystal is further eliminated, and the crystallization rate and crystallization quality of the single crystal are improved.

In addition, if a certain heating wire monomer in the single crystal furnace heating wire is aged and fused, a certain heating wire monomer can be independently replaced without replacing the whole single crystal furnace heating wire, so that the single crystal growth cost is reduced.

Drawings

In order to more clearly illustrate the solution of the embodiments of the present utility model, the following description will briefly explain the drawings needed to be used in the embodiments, it being evident that the drawings in the following description are only some embodiments of the present utility model and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a heating wire of a single crystal furnace according to an embodiment of the prior art;

FIG. 2 is a schematic structural diagram of a heating wire of a single crystal furnace according to an embodiment of the present utility model;

FIG. 3 is a schematic structural diagram of a heating wire of a single crystal furnace according to an embodiment of the present utility model;

fig. 4 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present utility model.

The single crystal furnace comprises a single crystal furnace heating wire 100, a heating wire monomer 1, an arc part 11, an axial connecting part 12, a temperature control thermocouple 2, a quartz tube supporting tube 3, a quartz tube 4, a crucible 5 and a single crystal 6.

Detailed Description

The utility model discloses a single crystal furnace heating wire which can eliminate the temperature difference of the same temperature zone in the circumferential direction, so as to eliminate dislocation of single crystals, improve the crystallization rate and the crystallization quality of the single crystals, and reduce the growth cost of the single crystals.

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to fall within the scope of the utility model.

Please refer to fig. 2-4

The utility model discloses a single crystal furnace heating wire, which is characterized in that the single crystal furnace heating wire is formed by encircling a plurality of heating wire monomers 1 around the axis of the single crystal furnace heating wire. In other words, the single crystal furnace heating wire is divided into a plurality of heating wire units 1 around the circumference of the single crystal furnace heating wire. In the axial direction of the single crystal furnace heating wire, the heating wire monomer 1 is divided into a plurality of temperature areas, and the same temperature areas in all the heating wire monomers 1 are arranged around the axis of the single crystal furnace heating wire.

The same temperature area in all the heating wire monomers 1 forms one temperature area of the whole single crystal furnace heating wire, and the temperature of the same temperature area of the single crystal furnace heating wire at different circumferential positions can be adjusted through the corresponding temperature area on the corresponding heating wire monomers 1, so that the temperature difference of the same temperature area of the single crystal furnace heating wire in the circumferential direction is eliminated, the dislocation of the single crystal is further eliminated, and the crystallization rate and crystallization quality of the single crystal are improved.

In addition, if a certain heating wire monomer 1 in the single crystal furnace heating wire is aged and fused, the certain heating wire monomer 1 can be independently replaced without replacing the whole single crystal furnace heating wire, so that the single crystal growth cost is reduced.

The heating wire unit 1 comprises a plurality of arc parts 11 extending around the circumferential direction of the single crystal furnace heating wire, the arc parts 11 are distributed along the axial direction of the single crystal furnace heating wire, two adjacent arc parts 11 are connected through an axial connecting part 12, and two adjacent axial connecting parts 12 in the axial direction of the single crystal furnace heating wire are alternately distributed at two ends of the arc parts 11. The heating wire single bodies 1 form a plurality of arched shapes which are distributed along the axial direction of the heating wire of the single crystal furnace. By the arrangement, uniformity of the heating wire monomer 1 in the circumferential direction and the axial direction can be improved, and therefore heating uniformity of the heating wire of the single crystal furnace is improved.

A preset distance is arranged between two adjacent heating wire monomers 1, and the preset distance cannot be too large, so that the heating effect of the single crystal is affected if the preset distance is too large. The preset distance cannot be too small, and if so, the different positions in the circumferential direction of the same temperature zone cannot be precisely controlled. In one embodiment of the present utility model, the predetermined distance is designed to be 5-10mm.

In order to facilitate automatic control of the temperature zones, in the specific embodiment of the utility model, each temperature zone in the heating wire monomer 1 is connected with a temperature control thermocouple 2 so as to measure the temperature of the temperature zone, the measured temperature value is fed back to the controller, and the controller controls the temperature zone to rise or fall according to the fed-back temperature value.

In the specific embodiment of the utility model, the single crystal furnace heating wire is formed by surrounding three heating wire monomers 1 around the axial direction of the single crystal furnace heating wire. The three heating wire monomers 1 can be regarded as three heating wire monomers 1 formed by trisecting the heating wire of the single crystal furnace around the circumferential direction. The arc angle corresponding to each heating wire monomer 1 is 120 degrees.

Further, the heating wire monomer 1 is divided into a, b, c, d four temperature areas along the axial direction, the four temperature areas are arranged in parallel, each temperature area is connected with one temperature control thermocouple 2, and thus 12 temperature control thermocouples 2 respectively control 12 temperature areas. The a temperature area on the three heating wire monomers 1 forms an A temperature area of the whole single crystal furnace heating wire, the B temperature area on the three heating wire monomers 1 forms a B temperature area of the whole single crystal furnace heating wire, and the C temperature area on the three heating wire monomers 1 forms a C temperature area of the whole single crystal furnace heating wire.

The heating wires of the single crystal furnace can be divided into four equal parts or six equal parts according to actual conditions. The number of the heating wires of the single crystal furnace is not particularly limited, and the temperature difference in the circumferential direction of the same temperature zone can be eliminated, so that the number falls into the protection scope of the single crystal furnace.

The utility model also discloses a single crystal furnace, which comprises a single crystal furnace heating wire, wherein the single crystal furnace heating wire is any single crystal furnace heating wire, the single crystal furnace heating wire has the effects, and the single crystal furnace with the single crystal furnace heating wire also has the effects, so that the description is omitted.

The single crystal furnace comprises a single crystal furnace heating wire, a quartz tube supporting tube 3, a quartz tube 4 and a crucible 5. The quartz tube support tube 3 is used for supporting the quartz tube 4, and the crucible 5 is positioned in the quartz tube 4. The quartz tube 4 and the quartz tube supporting tube 3 are both positioned inside the heating wire of the single crystal furnace.

Finally, it is also noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The single crystal furnace heating wire is characterized in that the single crystal furnace heating wire is formed by surrounding a plurality of heating wire monomers (1) around the axis of the single crystal furnace heating wire, the heating wire monomers (1) are divided into a plurality of temperature areas along the axis of the single crystal furnace heating wire, and the same temperature areas in all the heating wire monomers (1) are arranged around the axis of the single crystal furnace heating wire.

2. Single crystal furnace heating wire according to claim 1, characterized in that the heating wire unit (1) comprises an arc part (11) extending around the circumference of the single crystal furnace heating wire, the arc part (11) is a plurality of arc parts arranged along the axial direction of the single crystal furnace heating wire, two adjacent arc parts (11) are connected through an axial connecting part (12), and two adjacent axial connecting parts (12) in the axial direction of the single crystal furnace heating wire are alternately arranged at two ends of the arc part (11).

3. The single crystal furnace heating wire according to claim 1, wherein each temperature zone in the heating wire monomer (1) is connected with a temperature control thermocouple (2).

4. The single crystal furnace heating wire according to claim 1, wherein a preset distance is provided between two adjacent heating wire monomers (1).

5. The single crystal furnace heating wire according to claim 1, characterized in that the single crystal furnace heating wire is formed by three heating wire monomers (1) around an axis.

6. The single crystal furnace heating wire according to claim 5, wherein the single crystal furnace heating wire is divided into four temperature zones along the axial direction, and each temperature zone is connected with a temperature control thermocouple (2).

7. The single crystal furnace heating wire according to claim 1, wherein the arc angles corresponding to each heating wire monomer (1) are equal.

8. A single crystal furnace, characterized by comprising the single crystal furnace heating wire according to any one of claims 1-7, and further comprising a quartz tube supporting tube (3) arranged inside the single crystal furnace heating wire, a quartz tube (4) arranged on the quartz tube supporting tube (3), and a crucible (5) positioned in the quartz tube (4).