CN219218205U

CN219218205U - Quick locking mechanism in single-sided electroplating hanger

Info

Publication number: CN219218205U
Application number: CN202223520195.1U
Authority: CN
Inventors: 余丞宏
Original assignee: Suzhou Huifuhong Automation Technology Co ltd
Current assignee: Suzhou Huifuhong Automation Technology Co ltd
Priority date: 2022-12-28
Filing date: 2022-12-28
Publication date: 2023-06-20
Anticipated expiration: 2032-12-28

Abstract

The utility model discloses a quick locking mechanism in a single-sided electroplating hanger, which comprises a quick locking mechanism barrel body, wherein a columnar inner core is arranged in the quick locking mechanism barrel body, a pin hole is formed in the top of the inner core, an annular locking sliding block is sleeved on the upper part of the inner core, an upper sealing cover with a middle opening is fixed above the quick locking mechanism barrel body, a plurality of supporting springs are arranged at the bottom of the locking sliding block, the supporting springs are positioned between the locking sliding block and a boss at the lower part of the inner core, an annular steel ball movable groove is formed between the upper sealing cover and a conical hole of the locking sliding block, the steel ball movable groove is a cavity, a plurality of locking steel balls are arranged around the cavity, an unlocking air hole is formed in the lower part of the inner core, one end of the unlocking air hole is communicated with a space at the supporting springs, and the other end of the unlocking air hole is communicated with an unlocking air channel. The utility model can realize the quick opening and closing of the sealing cover structure and the hanger body of the single-sided electroplating hanger, and can also improve the loading and unloading efficiency of the semiconductor wafer during electroplating.

Description

Quick locking mechanism in single-sided electroplating hanger

Technical Field

The utility model relates to the technical field of electroplating processing of semiconductor wafers, in particular to a quick locking mechanism in a single-sided electroplating hanger.

Background

In the process of surface treatment technology of semiconductor wafers, particularly electroplating or electroless plating, good conductive jigs and supporting jigs are needed to be matched, and in the wafer electroplating technology developed on the market at present, most of the processes are put into production by adopting a manual feeding and discharging mode due to more and complex opening and closing actions of a conductive jigs. Therefore, it is necessary to develop a new electroplating rack to realize quick opening and closing of the conductive rack, and improve the working efficiency of wafer electroplating. Some wafer electroplating production lines are single-sided electroplating, that is, wafer electroplating is performed on one side of the production line, and for this purpose, the corresponding electroplating rack should also be designed as a single-sided electroplating rack to reduce the cost of the jig. In the single-sided electroplating hanger, the cover structure and the hanger body are required to be quickly opened and closed, and a corresponding quick locking mechanism is required to meet the requirements.

The patent with the publication number CN 214655335U discloses an electroplating hanger and an electroplating device, wherein the electroplating hanger comprises a downloading plate, a fixing structure, a conductive structure, a cathode interface and a protruding part, a wafer groove for placing a wafer is formed in the downloading plate, the fixing structure is used for fixing the wafer in the wafer groove, sealing the back surface of the wafer and exposing the front surface of the wafer; the conductive structure is used for being attached to the back surface of the wafer; the protruding part is arranged on the outer side of the wafer groove, is connected with the downloading plate or the fixing structure, faces the electroplating surface direction of the wafer, and protrudes out of the downloading plate and the fixing structure. After the electroplating rack is placed into the plating tank and immersed in the electroplating liquid, when the electroplating rack is attached to the plating tank, the protruding part can separate the electroplating surface of the wafer from the plating tank, so that the electroplating surface of the wafer is prevented from being shielded, the electroplating surface of the wafer is fully contacted with the electroplating liquid, and the electroplating of the wafer cannot be influenced no matter how the electroplating rack is placed in the plating tank. However, the patent does not address the problem of rapid opening and closing of the fixing structure and the hanger body, and cannot see how to solve the problem of opening and closing efficiency of the fixing structure and the hanger body.

Disclosure of Invention

The utility model mainly solves the technical problem of providing a quick locking mechanism in a single-sided electroplating rack, which can realize the quick opening and closing of a sealing cover structure of the single-sided electroplating rack and a rack body and can also improve the loading and unloading efficiency of a semiconductor wafer during electroplating.

In order to solve the technical problems, the utility model adopts a technical scheme that: the utility model provides a quick lock mechanism in single face electroplating hanger for in the single face electroplating hanger, single face electroplating hanger includes the hanger body, and the top surface outside detachably of hanger body is provided with the closing cap, and the bottom surface outside of hanger body is provided with the gas circuit apron, the bottom of closing cap is provided with downward convex closing cap locating pin, radially be provided with the locating pin recess on the outer peripheral face of closing cap locating pin, locating pin recess circle upper cover locating pin a week, be provided with the air vent and the gas circuit on the hanger body, be provided with the gas circuit apron and unblank gas circuit, the air vent, gas circuit and the mutual intercommunication of unblanking gas circuit, quick lock mechanism includes quick lock mechanism ladle body's inside is provided with the column inner core, and the top of inner core is provided with the pin hole, and the lower part of inner core is provided with radial convex boss, and the upper portion cover of inner core is equipped with annular lock and pays the sliding block, and the upper cover that the middle trompil was fixed with, the lid locating pin on the closing cap can be through the upper cover locating pin round the middle cover locating pin round cover round, the trompil, the conical lock hole is formed between the taper hole and the conical hole is paid in the conical hole with the sliding block under the conical hole, the conical hole is formed with the conical hole, the conical hole is located in the conical hole is located between the conical hole is located with the conical hole, the conical hole is located in the conical hole is located down the supporting groove, the conical hole is located down the conical hole.

Preferably, a quick lock mechanism base is arranged at the bottom of the barrel body of the quick lock mechanism.

Preferably, the bottom of the upper sealing cover is close to the middle opening and is provided with a steel ball flange, the joint of the steel ball flange and the middle opening protrudes out of the bottom surface of the upper sealing cover, the locking steel balls are limited in the space between the bottom of the upper sealing cover and the steel ball flange and the conical hole wall of the locking sliding block, and under the condition that an unlocking air hole is normally opened to the atmosphere, the locking sliding block is in an upper limit position, namely the highest position of the locking sliding block due to the supporting force of the supporting spring, and the locking steel balls are propped into the positioning pin groove on the positioning pin of the upper sealing cover by the conical hole wall and the steel ball flange.

Preferably, a plurality of airtight sealing rings are arranged among the barrel body, the inner core, the locking sliding block and the upper sealing cover of the quick locking mechanism.

Preferably, a gap is formed between the outer wall of the upper part of the locking sliding block and the inner wall of the barrel body of the quick locking mechanism, a connecting sleeve which extends downwards is arranged at the bottom of the upper sealing cover, and the connecting sleeve extends into the gap between the outer wall of the upper part of the locking sliding block and the inner wall of the barrel body of the quick locking mechanism.

Preferably, an electromagnet is arranged below the inner core.

Preferably, an electromagnet cover plate is arranged below the electromagnet.

The beneficial effects of the utility model are as follows: the quick locking mechanism in the single-sided electroplating hanger can realize quick opening and closing of the sealing cover structure of the single-sided electroplating hanger and the hanger body, and the semiconductor wafer is electroplated in the hanger, so that the feeding and discharging efficiency of the semiconductor wafer during electroplating can be improved.

Drawings

For a clearer description of the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the description below are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art, wherein:

FIG. 1 is a schematic perspective view of a quick lock mechanism in a single-sided electroplating rack of the utility model;

FIG. 2 is a schematic cross-sectional view of the quick lock mechanism in the single-sided plating rack of FIG. 1;

FIG. 3 is a schematic perspective view of another construction of the quick lock mechanism in the single sided plating rack of the utility model;

FIG. 4 is a schematic cross-sectional view of the quick lock mechanism in the single-sided plating rack of FIG. 3;

FIG. 5 is a schematic view of the structure of the quick lock mechanism in the single-sided plating rack of the utility model in an embodiment;

FIG. 6 is a schematic view of an embodiment of the present utility model including an air circuit cover and a lid;

FIG. 7 is a schematic view of a closure according to an embodiment of the present utility model;

fig. 8 is a schematic cross-sectional view of a closure in accordance with an embodiment of the present utility model.

Detailed Description

The following description of the technical solutions in the embodiments of the present utility model will be clear and complete, and it is obvious that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The embodiment of the utility model comprises the following steps:

referring to fig. 1 to 8, the quick lock mechanism in the single-sided electroplating rack of the present utility model is used in the single-sided electroplating rack, the single-sided electroplating rack comprises a rack body 20, a sealing cover 30 is arranged on the outer side of the top surface of the rack body 20, a gas circuit cover plate 40 is arranged on the outer side of the bottom surface of the rack body, a sealing cover positioning pin 301 protruding downwards is arranged at the bottom of the sealing cover 30, a positioning pin groove 302 is radially arranged on the outer circumferential surface of the sealing cover positioning pin 301, the positioning pin groove 302 surrounds the upper cover positioning pin 301 for one circle, a vent 201 and a vent gas circuit 202 are arranged on the rack body 20, an unlocking gas circuit 401 is arranged on the gas circuit cover plate 40, the vent gas circuit and the unlocking gas circuit are mutually communicated, the quick lock mechanism 10 comprises a quick lock mechanism barrel body 101, a columnar inner core 103 is arranged in the quick lock mechanism barrel body 101, a pin hole 105 is arranged at the top of the inner core 103, the lower part of the inner core 103 is provided with a boss 112 protruding radially, the upper part of the inner core 103 is sleeved with an annular locking sliding block 104, an upper sealing cover 102 with a middle opening is fixed above a barrel body 101 of the quick locking mechanism, a sealing cover positioning pin 301 on the sealing cover 30 can enter the pin hole 105 through the middle opening of the upper sealing cover 102, the bottom of the locking sliding block 104 is provided with a plurality of supporting springs 109, the supporting springs 109 are positioned between the locking sliding block 104 and the boss 112, the top of an inner hole of the locking sliding block 104 is a conical hole, the diameter of the upper end hole of the conical hole is larger than the diameter of the lower end hole of the conical hole, an annular steel ball movable groove 108 is formed between the upper sealing cover 102 and the conical hole of the locking sliding block 104, the steel ball movable groove 108 is a cavity, a plurality of locking steel balls 106 are arranged around the cavity, the positioning pin groove 302 corresponds to the positions of the locking steel balls 106, the lower part of the inner core 103 is provided with unlocking air holes 114, the unlocking air holes 114 are distributed on the inner core 103 in a Y shape, one end of the unlocking air holes 114, namely the upper end of the Y shape, is communicated with a space at the position of the supporting spring 109, and the other end of the unlocking air holes 114, namely the lower end of the Y shape, is communicated with an unlocking air path 401.

Preferably, the bottom of the upper cover 102 is close to the middle opening and is provided with a steel ball flange 107, the joint of the steel ball flange 107 and the middle opening protrudes downwards from the bottom surface of the upper cover 102, and the locking steel balls 106 are limited in the space between the bottom of the upper cover 102 and the wall of the conical hole of the steel ball flange 107 and the locking sliding block 104.

A gap 111 is formed between the outer wall of the upper part of the locking sliding block 104 and the inner wall of the quick locking mechanism barrel body 101, a connecting sleeve 110 which extends downwards is arranged at the bottom of the upper sealing cover 102, and the connecting sleeve 110 extends into the gap 111 between the outer wall of the upper part of the locking sliding block 104 and the inner wall of the quick locking mechanism barrel body 101.

Under the condition of normal atmospheric ventilation, the locking sliding block 104 is at the upper limit position, namely the highest position of the locking sliding block 104 due to the supporting force of the supporting spring 109, the locking steel balls 106 are propped into the positioning pin grooves 302 on the sealing cover positioning pins 301 by the conical hole walls and the steel ball flanges 107, and the sealing cover positioning pins 301 are fixed in 105, so that the hanger body 20, the sealing cover 30 and the air circuit cover plate 40 are connected together, and the quick synchronous locking of the quick locking mechanism is realized; through carrying out the evacuation to the air vent 201 that leads to unblanking gas pocket 114, pull down lock slider 104 to lower limit under the negative pressure effect and put in lock slider 104's lowest position department, the cavity space of steel ball movable groove 106 increases this moment, lock slider 104 moves down and simultaneously with the locking steel ball 106 of closing cap locating pin 301 in the in-process of pulling out upwards is pushed to the cavity inboard, lock steel ball 106 breaks away from the locating pin recess 302 on the closing cap locating pin 301, closing cap locating pin 301 upwards can pull out pin hole 105 and make closing cap 30 break away from with gas circuit apron 40, realize quick synchronous unblanking of quick locking mechanism.

Preferably, a quick lock mechanism base 115 is disposed at the bottom of the quick lock mechanism barrel 101, and the quick lock mechanism base 115 is fixed on the inner side of the air circuit cover 40.

Preferably, a plurality of airtight sealing rings 113 are installed among the quick locking mechanism barrel body 101, the inner core 103, the locking sliding block 104 and the upper sealing cover 102, so as to play a role in sealing.

Preferably, as shown in fig. 3 and 4, an electromagnet 116 is disposed below the inner core 103, an electromagnet cover plate 117 is disposed below the electromagnet 116, and the sliding block 104 is pulled down by magnetism generated by energizing the electromagnet 116, so that the unlocking operation of the quick locking mechanism can be performed.

Claims

1. The utility model provides a quick lock mechanism in single face electroplating hanger for in the single face electroplating hanger, single face electroplating hanger includes the hanger body, and the top surface outside of hanger body is provided with the closing cap, and the bottom surface outside of hanger body is provided with the gas circuit apron, the bottom of closing cap is provided with downward convex closing cap locating pin, radially be provided with the locating pin recess on the outer peripheral face of closing cap locating pin, locating pin recess circle upper cover locating pin a week, be provided with air vent and air channel on the hanger body, be provided with the gas circuit apron and open the gas circuit, air vent, air channel and the gas circuit intercommunication of unblanking, its characterized in that, quick lock mechanism includes quick lock mechanism ladle body, the inside of quick lock mechanism ladle body is provided with the column inner core, and the top of inner core is provided with the round pin hole, and the lower part of inner core is provided with radial convex boss, and the upper portion cover of inner core is equipped with annular lock and pays the sliding block, and the upper cover of middle trompil is fixed with, the lid locating pin on the closing cap can be through the upper cover locating pin a week, be provided with the air vent and the air vent, the conical lock hole is formed in the taper-shaped groove is paid in the conical hole between the conical lock groove and the supporting hole under the steel ball, the conical lock hole is formed with the conical hole, the conical hole is located between the conical hole is located with the conical hole under the conical lock groove, the conical hole is equipped with the conical hole.

2. The quick lock mechanism in a single-sided plating hanger of claim 1, wherein a bottom of the quick lock mechanism barrel is provided with a quick lock mechanism base.

3. The quick locking mechanism in the single-sided electroplating hanger according to claim 1, wherein the bottom of the upper cover is provided with a steel ball flange near the middle opening, the joint of the steel ball flange and the middle opening is protruded out of the bottom surface of the upper cover, the locking steel balls are limited in the space between the bottom of the upper cover and the steel ball flange and the conical hole wall of the locking sliding block, the locking sliding block is positioned at the upper limit position, namely the highest position of the locking sliding block due to the supporting force of the supporting spring under the condition that the unlocking air hole is normally opened to the atmosphere, and the locking steel balls are propped into the positioning pin groove on the positioning pin of the upper cover by the conical hole wall and the steel ball flange.

4. The quick lock mechanism in a single-sided electroplating hanger according to claim 1, wherein a plurality of airtight sealing rings are arranged among a barrel body, an inner core, a locking sliding block and an upper sealing cover of the quick lock mechanism.

5. The quick lock mechanism in the single-sided electroplating hanger according to claim 1, wherein a gap is formed between the upper outer wall of the locking sliding block and the inner wall of the barrel of the quick lock mechanism, a connecting sleeve which extends downwards is arranged at the bottom of the upper sealing cover, and the connecting sleeve extends into the gap between the upper outer wall of the locking sliding block and the inner wall of the barrel of the quick lock mechanism.

6. The quick lock mechanism in a single sided plating hanger of claim 1, wherein an electromagnet is disposed below the inner core.

7. The quick lock mechanism in a single sided plating hanger of claim 6, wherein an electromagnet cover plate is disposed below the electromagnet.