CN219198804U - Electric four-dimensional mechanism for vacuum - Google Patents
Electric four-dimensional mechanism for vacuum Download PDFInfo
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- CN219198804U CN219198804U CN202320171898.3U CN202320171898U CN219198804U CN 219198804 U CN219198804 U CN 219198804U CN 202320171898 U CN202320171898 U CN 202320171898U CN 219198804 U CN219198804 U CN 219198804U
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Abstract
The utility model relates to a vacuum junction equipment technical field specifically discloses an electronic four-dimensional mechanism for vacuum, and it includes the ring flange and overlaps in proper order installs base, first regulating plate, second regulating plate, third regulating plate and the flange board on the ring flange, install first movable part on the base, install second movable part on the first regulating plate, still including installing first lead screw step motor on the third regulating plate lateral wall, the axis of rotation perpendicular to of lead screw in the first lead screw step motor the direction of height of third regulating plate, be provided with first backup pad on the lateral wall of second regulating plate, first lead screw step motor's lead screw one end butt is in the first backup pad. The vacuum connection device has the effect of improving the adjustment precision of the vacuum connection device.
Description
Technical Field
The application relates to the technical field of vacuum connection equipment, in particular to an electric four-dimensional mechanism for vacuum.
Background
Currently, in the laboratory, some experimental processes need to work by using a vacuum environment, so that the use of some experimental devices needs to be connected through special connecting pipes.
The chinese patent with application number CN202021134156.6 in the related art proposes a connecting piece for vacuum equipment connection, mainly include the base, the ring flange is installed to the one end of base, the one end that the ring flange was kept away from to the base is superimposed in proper order and is installed first regulating plate, the second regulating plate, third regulating plate and flange board, regulating spring and adjusting bolt are all installed between second regulating plate and third regulating plate and the flange board, first mobile part is installed to the lateral wall of base, install the second regulating part on the first regulating plate, first pivot is installed in the rotation of the relative both sides of second regulating plate, the fixed setting of third regulating plate is in first pivot, install the first regulating part of control third regulating plate pivoted on the lateral wall of second fixed plate, the second pivot is installed in the rotation of the both sides of third regulating plate relative, the fixed setting of flange plate is in the second pivot, the second regulating part of control flange plate pivoted is installed to the lateral wall of third regulating plate, pass through intermediate part flexonics between flange plate and the base.
With respect to the related art in the above, the inventors consider that there are the following drawbacks: the first adjusting part is specifically utilized to control the third adjusting plate to rotate, an operator is required to manually rotate the threaded rod to drive the third adjusting plate to rotate on the first rotating shaft, the adjustment process of the second adjusting part is the same, a certain error exists in the adjustment precision of the manually rotated threaded rod, and the long-time use can influence the vacuum environment, so that the improvement is needed.
Disclosure of Invention
In order to improve the problem of vacuum connection equipment regulation precision, the application provides an electric four-dimensional mechanism for vacuum.
The application provides an electronic four-dimensional mechanism for vacuum adopts following technical scheme:
the utility model provides an electronic four-dimensional mechanism is used in vacuum, includes the ring flange and stacks in proper order and install base, first regulating plate, second regulating plate, third regulating plate and the flange on the ring flange, install first movable part on the base, install second movable part on the first regulating plate, still including installing first lead screw step motor on the third regulating plate lateral wall, the axis perpendicular to of lead screw in the first lead screw step motor the direction of height of third regulating plate, be provided with first backup pad on the lateral wall of second regulating plate, lead screw one end butt of first lead screw step motor is in on the first backup pad, be provided with on the third regulating plate and be used for restricting lead screw pivoted first locating part in the first lead screw step motor.
Through adopting above-mentioned technical scheme, first mobile part and second mobile part cooperation are adjusted the position of base and first regulating plate, and then drive the second regulating plate of first regulating plate top, the corresponding adjustment is made to the position of third regulating plate and flange board, in addition, first lead screw step motor starts, the rotation of lead screw in the first lead screw step motor of first locating part restriction, make it do reciprocating rectilinear motion, lead screw butt in the first lead screw step motor is in first backup pad, first backup pad downwardly compressing first adjusting spring, make third regulating plate and flange board take place the deflection in step, and then the cooperation error between flange board and the other end equipment has been reduced, the leakproofness between the equipment has been improved, select first lead screw step motor as the driving piece, through spiral transmission with rotary motion conversion rectilinear motion, the location is accurate, the speed is controllable, advantages such as precision are high.
Optionally, install the second lead screw step motor on the lateral wall of flange board, the axis of rotation of lead screw in the second lead screw step motor with the axis of rotation of lead screw in the first lead screw step motor is parallel, be provided with the second backup pad on the lateral wall of third regulating plate, the lead screw one end butt of second lead screw step motor is in the second backup pad, be provided with on the flange board and be used for limiting lead screw pivoted second locating part in the second lead screw step motor.
Through adopting above-mentioned technical scheme, after the second lead screw step motor starts, the rotation of lead screw in the second lead screw step motor is restricted to the second locating part, make it be reciprocating rectilinear motion, lead screw butt in the second lead screw step motor is in the second backup pad, second backup pad downwardly compressing second adjusting spring, cooperation makes flange board and third regulating plate realize the multi-angle regulation between second adjusting spring and adjusting bolt, and then make the cooperation precision between the equipment of flange board and the other end higher, with first lead screw step motor reason, second lead screw step motor also has advantages such as location accuracy, controllable and the precision is high.
Optionally, the first screw rod stepper motor and the second screw rod stepper motor are both provided with electronic rules, and the length direction of the electronic rules is parallel to the axis direction of the screw rod in the first screw rod stepper motor.
Through adopting above-mentioned technical scheme, the setting of electronic ruler can carry out accurate regulation to the stroke of lead screw in first lead screw step motor and the second lead screw step motor, and effective third regulating plate and flange board's inclination, and then compensate outside mechanical shock to external equipment's influence.
Optionally, the first limiting part comprises a first guide block arranged on the screw rod in the first screw rod stepping motor, a first sliding rail is arranged on the side wall of the third adjusting plate, the length direction of the first sliding rail is parallel to the axis of the screw rod in the first screw rod stepping motor, and the first guide block is slidably embedded in the first sliding rail.
Through adopting above-mentioned technical scheme, the first guide block is reciprocating rectilinear motion in first slide rail, and then has restricted the rotation of lead screw in the first lead screw step motor, makes the stable rectilinear motion of doing of lead screw in the first lead screw step motor, and then adjusts the inclination of third regulating plate.
Optionally, the second limiting part comprises a second guide block arranged on the screw rod of the second screw rod stepping motor, a second sliding rail is arranged on the side wall of the flange plate, the length direction of the second sliding rail is parallel to the axis of the screw rod of the second screw rod stepping motor, and the second guide block is embedded in the second sliding rail in a sliding manner.
Through adopting above-mentioned technical scheme, the second guide block is reciprocating rectilinear motion in the second slide rail, and then has restricted the rotation of lead screw in the second lead screw step motor, makes the stable rectilinear motion of doing of lead screw in the second lead screw step motor, and then adjusts the inclination of flange board.
Optionally, a third limiting part for limiting the stroke of the screw rod in the first screw rod stepping motor is arranged on the third adjusting plate, and a fourth limiting part for limiting the stroke of the screw rod in the second screw rod stepping motor is arranged on the flange plate.
Through adopting above-mentioned technical scheme, third locating part and fourth locating part carry out spacingly to the stroke of lead screw among first lead screw step motor and the second lead screw step motor respectively, make third regulating plate and flange board adjust in prescribed interval.
Optionally, the third limiting part comprises a first photoelectric switch baffle plate arranged on the first guide block, and a first photoelectric switch group is correspondingly arranged on the third adjusting plate.
Through adopting above-mentioned technical scheme, first photoelectric switch group includes spacing and lower spacing, when first photoelectric switch separation blade and the upper limit phase pair of first photoelectric switch group, first lead screw step motor's lead screw begins to descend, when first photoelectric switch separation blade and the lower limit phase pair of first photoelectric switch group, first lead screw step motor's lead screw begins to descend, first photoelectric switch separation blade and first photoelectric switch group's cooperation has effectively restricted the stroke of lead screw in the first lead screw step motor through automatically controlled mode, and then has improved the cooperation precision of flange board and other equipment.
Optionally, the fourth limiting part comprises a second photoelectric switch baffle arranged on the second guide block, and a second photoelectric switch group is correspondingly arranged on the flange plate.
Through adopting above-mentioned technical scheme, second photoelectric switch group includes spacing and lower spacing, and when second photoelectric switch separation blade and the upper limit phase pair of second photoelectric switch group, second lead screw step motor's lead screw begins to descend, and when second photoelectric switch separation blade and the lower limit phase pair of second photoelectric switch group, second lead screw step motor's lead screw begins to descend, and the cooperation of second photoelectric switch separation blade and second photoelectric switch group has effectively restricted the stroke of lead screw in the second lead screw step motor through automatically controlled mode, and then has improved flange board and other equipment's cooperation precision.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the first screw rod stepping motor is matched with the second screw rod stepping motor, the inclination angles of the flange plate and the third adjusting plate are adjusted in an electric control mode, the influence of external mechanical vibration on external equipment is compensated, and the problem of the adjusting precision of the vacuum connecting equipment is solved;
2. the first guide block slides in the first sliding rail to limit the rotation of the screw rod in the first screw rod stepping motor, so that the screw rod can stably reciprocate linearly, and the inclination angles of the third adjusting plate and the flange plate can be adjusted;
3. the third limiting piece and the fourth limiting piece respectively limit the strokes of the screw rods in the first screw rod stepping motor and the second screw rod stepping motor, so that the third adjusting plate and the flange plate are adjusted in a specified interval.
Drawings
Fig. 1 is a schematic overall structure of an embodiment of the present application.
Fig. 2 is a schematic perspective view of a first limiting member and a third limiting member according to an embodiment of the present application.
Fig. 3 is a schematic perspective view of a second limiting member and a fourth limiting member according to an embodiment of the present application.
Reference numerals: 1. a flange plate; 2. a base; 3. a first adjustment plate; 4. a second adjusting plate; 5. a third adjustment plate; 6. a flange plate; 7. a first screw rod stepping motor; 8. a second screw rod stepping motor; 9. a first limiting member; 91. a first guide block; 92. a first slide rail; 10. a second limiting piece; 101. a second guide block; 102. a second slide rail; 11. an electronic ruler; 12. a third limiting member; 121. a first photoelectric switch baffle; 122. a first photoelectric switch group; 13. a fourth limiting member; 131. a second photoelectric switch baffle; 132. a second photoelectric switch group; 14. a first support plate; 15. a second support plate; 16. a first moving part; 17. and a second moving part.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-3.
The embodiment of the application discloses an electric four-dimensional mechanism for vacuum.
Referring to fig. 1, the electric four-dimensional mechanism for vacuum comprises a circular flange plate 1, a base 2, a first adjusting plate 3, a second adjusting plate 4, a third adjusting plate 5 and a flange plate 6 are sequentially and overlapped on the flange plate 1, wherein circular cavities are formed in the base 2, the first adjusting plate 3, the second adjusting plate 4 and the third adjusting plate 5, flexible corrugated pipes are arranged between the flange plate 1 and the flange plate 6 through the circular cavities to compensate displacement in four-dimensional directions, a first moving part 16 is arranged on the base 2, the first moving part 16 is used for adjusting the movement of the first adjusting plate 3 on the base 2 along the X-axis direction, a second moving part 17 is arranged on the first adjusting plate 3, and the second moving part 17 is used for adjusting the second moving part 17 of the second adjusting plate 4 on the first adjusting plate 3 along the Y-axis direction.
Referring to fig. 1, in order to precisely move the first adjustment plate 3 in the X-axis direction, first positioning rails are fixedly installed on opposite sides of the top surface of the base 2 by screws, the length direction of the first positioning rails is parallel to the moving direction of the first moving part 16, and the first adjustment plate 3 is positioned between and attached to two opposite surfaces of the two first positioning rails. Similarly, in order to move the second adjusting plate 4 precisely along the Y-axis direction, second positioning rails are fixedly mounted on opposite sides of the top edge of the first adjusting plate 3 by screws, and the length direction of the second positioning rails is parallel to the moving direction of the second moving portion 17, and the second adjusting plate 4 is located between the two second positioning rails and is attached to two opposite surfaces of the two second positioning rails.
Referring to fig. 1, a first screw stepping motor 7 is fixedly installed on a side wall of the third adjusting plate 5, the first screw stepping motor 7 is located above the first moving portion 16, a moving direction of a screw in the first screw stepping motor 7 is perpendicular to a height direction of the third adjusting plate 5, a first supporting plate 14 coplanar with the second adjusting plate 4 is fixedly installed on a side wall of the second adjusting plate 4, the screw in the first screw stepping motor 7 is movably abutted to the second adjusting plate 4, and meanwhile, a first limiting piece 9 limiting rotation of the screw in the first screw stepping motor 7 is further arranged on the third adjusting plate 5. After the first screw rod stepping motor 7 is started, the screw rod moves linearly under the action of the first limiting piece 9, and when the screw rod is abutted against the first supporting plate 14, the screw rod moves downwards continuously to enable an adjusting spring between the second adjusting plate 4 and the third adjusting plate 5 to be compressed, and then the third adjusting plate 5 and the flange plate 6 are synchronously driven to deflect at a certain angle, so that the tightness between the flange plate 6 and external equipment is adjusted. The first screw rod stepping motor 7 is selected as a driving piece, and rotary motion is converted into linear motion through spiral transmission, so that the device has the advantages of accurate positioning, controllable speed, high precision and the like, and the installation precision between the flange plate 6 and external equipment is improved.
Referring to fig. 1, specifically, the first limiting member 9 includes a first sliding rail 92 fixed on the third adjusting plate 5, a length direction of the first sliding rail 92 is parallel to a height direction of the third adjusting plate 5, a first guide block 91 is fixedly installed on a screw of the first screw rod stepper motor 7, the first guide block 91 is formed by combining two fixing blocks through bolt fixing, a circular cavity with a size matching with a screw size in the first screw rod stepper motor 7 is formed after the two fixing blocks are fixed, the first guide block 91 and the screw rod in the first screw rod stepper motor 7 synchronously move under the action of bolt locking, the first guide block 91 is slidably embedded in the first sliding rail 92, and a groove formed by the first sliding rail 92 can be a T-shaped groove, a dovetail groove and the like.
Referring to fig. 1, in order to adjust the turning angles of the third adjusting plate 5 and the flange plate 6 at more angles, a second screw rod stepping motor 8 is fixedly installed on the side wall of the flange plate 6, the axial direction of the screw rod in the second screw rod stepping motor 8 is parallel to the height direction of the flange plate 6, similarly, a second supporting plate 15 coplanar with the second screw rod stepping motor is fixedly installed on the side wall of the third adjusting plate 5, the screw rod in the second screw rod stepping motor 8 is movably abutted on the second supporting plate 15, a second limiting piece 10 limiting the screw rod in the second screw rod stepping motor 8 is further arranged on the flange plate 6, the second limiting piece 10 comprises a second guiding block 101 and a second sliding rail 102, the shape and the size of the second guiding block 91 and the first sliding rail 92 are the same, the second sliding rail 102 is fixed on the flange plate 6, the length direction of the second sliding rail 102 is parallel to the height direction of the flange plate 6, the second guiding block 101 is fixed on the screw rod in the second screw rod stepping motor 8, and the second guiding block 101 is slidably embedded in the second sliding rail 102. The first screw rod stepping motor 7 and the second screw rod stepping motor 8 are matched to perform inclination angle adjustment on the third adjusting plate 5 and the flange plate 6, so that the first screw rod stepping motor and the second screw rod stepping motor can be fixed at any position in a four-dimensional stroke, the influence of external mechanical vibration on external equipment is compensated, and the problem of adjusting precision of vacuum connecting equipment is solved.
Referring to fig. 2, a third limiting member 12 for limiting the stroke of the screw in the first screw stepping motor 7 is further disposed on the third adjusting plate 5, the third limiting member 12 specifically includes a first photoelectric switch blocking piece 121 fixed on the first guide block 91 and a first photoelectric switch group 122 fixed on the third adjusting plate 5 and corresponding to the first photoelectric switch blocking piece 121, the first photoelectric switch group 122 specifically includes an upper limit and a lower limit, and when the first photoelectric switch blocking piece 121 moves to be opposite to the upper limit, the screw in the first screw stepping motor 7 starts to descend; when the first photoelectric switch baffle 121 moves to be opposite to the lower limit, the screw rod in the first screw rod stepping motor 7 starts to move upwards, and the third limit piece 12 limits the stroke accuracy of the screw rod in the first screw rod stepping motor 7 in a reciprocating manner, so that the first guide block 91 always slides on the first sliding rail 92.
Referring to fig. 3, similarly, a fourth limiting member 13 for limiting the stroke of the screw in the second screw stepping motor 8 is also disposed on the flange plate 6, the fourth limiting member 13 includes a second photoelectric switch blocking piece 131 fixed on the second guide block 101 and a second photoelectric switch group 132 fixed on the flange plate 6 and corresponding to the second photoelectric switch blocking piece 131, and the implementation principle of the fourth limiting member 13 is the same as that of the third limiting member 12, so that the precise limitation of the stroke of the screw in the second screw stepping motor 8 is realized. The first screw rod stepping motor 7, the second screw rod stepping motor 8, the third limiting piece 12 and the fourth limiting piece 13 form an electric control system, and the inclination angle in the four-dimensional direction is adjusted in an automatic mode, so that the adjustment precision is improved.
Referring to fig. 1, the first screw stepping motor 7 and the second screw stepping motor 8 are fixedly provided with an electronic ruler 11, and the electronic ruler 11 is also called a linear displacement sensor and can be used for measuring linear displacement of screws in the first screw stepping motor 7 and the second screw stepping motor 8, so that inclination angles of the third adjusting plate and the flange plate 6 are effectively achieved.
The implementation principle of the electric four-dimensional mechanism for vacuum in the embodiment of the application is as follows: the first moving part 16 and the second moving part 17 are matched with each other to accurately adjust the translational displacement distance on the XY plane, and the third adjusting plate 5 and the flange plate 6 are subjected to inclination angle adjustment in an electric mode by the second screw rod stepping motor 8 of the first screw rod stepping motor 7, so that the influence of external mechanical vibration on external equipment is compensated, and the problem of the adjusting precision of the vacuum connecting equipment is solved.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (8)
1. The utility model provides an electronic four-dimensional mechanism is used in vacuum, includes ring flange (1) and stacks in proper order and install base (2), first regulating plate (3), second regulating plate (4), third regulating plate (5) and flange board (6) on ring flange (1), install first removal portion (16) on base (2), install second removal portion (17) on first regulating plate (3), its characterized in that: still including installing first lead screw step motor (7) on third regulating plate (5) lateral wall, the axis of lead screw is perpendicular to in first lead screw step motor (7) the direction of height of third regulating plate (5), be provided with first backup pad (14) on the lateral wall of second regulating plate (4), the lead screw one end butt of first lead screw step motor (7) is in on first backup pad (14), be provided with on third regulating plate (5) and be used for limiting lead screw pivoted first locating part (9) in first lead screw step motor (7).
2. The electric four-dimensional mechanism for vacuum according to claim 1, wherein: install second lead screw step motor (8) on the lateral wall of flange board (6), the axis of rotation of lead screw in second lead screw step motor (8) with the axis of rotation of lead screw in first lead screw step motor (7) is parallel, be provided with second backup pad (15) on the lateral wall of third regulating plate (5), the lead screw one end butt of second lead screw step motor (8) is in on second backup pad (15), be provided with on flange board (6) and be used for the restriction lead screw pivoted second locating part (10) in second lead screw step motor (8).
3. The electric four-dimensional mechanism for vacuum according to claim 2, wherein: the electronic ruler (11) is arranged on the first screw rod stepping motor (7) and the second screw rod stepping motor (8), and the length direction of the electronic ruler (11) is parallel to the axis direction of the screw rod in the first screw rod stepping motor (7).
4. The electric four-dimensional mechanism for vacuum according to claim 2, wherein: the first limiting part (9) comprises a first guide block (91) arranged on the screw rod of the first screw rod stepping motor (7), a first sliding rail (92) is arranged on the side wall of the third adjusting plate (5), the length direction of the first sliding rail (92) is parallel to the axis of the screw rod of the first screw rod stepping motor (7), and the first guide block (91) is slidably embedded in the first sliding rail (92).
5. The electric four-dimensional mechanism for vacuum according to claim 4, wherein: the second limiting part (10) comprises a second guide block (101) arranged on the screw rod of the second screw rod stepping motor (8), a second sliding rail (102) is arranged on the side wall of the flange plate (6), the length direction of the second sliding rail (102) is parallel to the axis of the screw rod of the second screw rod stepping motor (8), and the second guide block (101) is slidably embedded in the second sliding rail (102).
6. The electric four-dimensional mechanism for vacuum according to claim 5, wherein: the third adjusting plate (5) is provided with a third limiting piece (12) used for limiting the stroke of the screw rod in the first screw rod stepping motor (7), and the flange plate (6) is provided with a fourth limiting piece (13) used for limiting the stroke of the screw rod in the second screw rod stepping motor (8).
7. The electric four-dimensional mechanism for vacuum according to claim 6, wherein: the third limiting piece (12) comprises a first photoelectric switch baffle (121) arranged on the first guide block (91), and a first photoelectric switch group (122) is correspondingly arranged on the third adjusting plate (5).
8. The electric four-dimensional mechanism for vacuum according to claim 6, wherein: the fourth limiting piece (13) comprises a second photoelectric switch baffle (131) arranged on the second guide block (101), and a second photoelectric switch group (132) is correspondingly arranged on the flange plate (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320171898.3U CN219198804U (en) | 2023-02-03 | 2023-02-03 | Electric four-dimensional mechanism for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320171898.3U CN219198804U (en) | 2023-02-03 | 2023-02-03 | Electric four-dimensional mechanism for vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219198804U true CN219198804U (en) | 2023-06-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320171898.3U Active CN219198804U (en) | 2023-02-03 | 2023-02-03 | Electric four-dimensional mechanism for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219198804U (en) |
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2023
- 2023-02-03 CN CN202320171898.3U patent/CN219198804U/en active Active
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