CN219119456U - High leakproofness vortex vacuum pump - Google Patents
High leakproofness vortex vacuum pump Download PDFInfo
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- CN219119456U CN219119456U CN202320200361.5U CN202320200361U CN219119456U CN 219119456 U CN219119456 U CN 219119456U CN 202320200361 U CN202320200361 U CN 202320200361U CN 219119456 U CN219119456 U CN 219119456U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a high-tightness vortex vacuum pump, which belongs to the technical field of vacuum pumps and comprises a motor, a pump body shell, a rotary crankshaft, a movable vortex disc and a fixed vortex disc; the pump body shell comprises a front end cover, a shell body and a rear end cover, and the crankshaft is rotatedThe rotary crankshaft is rotatably arranged in the shell, the magnetic coupling driven disc is arranged at the input end of the rotary crankshaft, the magnetic coupling driving disc which is in coupling transmission with the magnetic coupling driven disc is arranged at the output end of the motor, the movable vortex disc is arranged at the output end of the rotary crankshaft, and the fixed vortex disc is arranged in the rear end cover and is correspondingly arranged with the movable vortex disc; the front end cover is connected with the shell in a sealing way through the CF flange, and the shell is connected with the rear end cover in a sealing way through the CF flange. The utility model changes the connection between the motor output end and the rotary crankshaft into a magnetic coupling driving mode and adopts the metal CF flange static seal, so that the utility model ensures the evacuation performance and reduces the leakage rate of the whole machine to 1 multiplied by 10 at the same time ‑12 Pa.m3/s magnitude, so that the utility model can be applied to occasions with high sealing performance and low leakage working requirements.
Description
Technical Field
The utility model belongs to the technical field of vacuum pumps, and particularly relates to a high-tightness vortex vacuum pump.
Background
Leakage rate: the total amount of fluid leaking through the primary seal and the secondary seal per unit time is an important indicator for evaluating the performance of a mechanical seal.
The vortex vacuum pump is a dry vacuum pump based on the vortex exhaust principle and having evacuation performance, and mainly comprises a motor, a rotating crankshaft, a movable disc bearing, a movable vortex disc, a fixed vortex disc, a gas ballast valve, a pump body shell, an electric control part and the like. In order to ensure the ultimate vacuum degree and the sealing performance of the whole machine of the vacuum pump, the existing vortex vacuum pump is provided with a rotary sealing structure at the direct connection part of the motor and the rotary crankshaft, and a boundary static sealing structure is arranged at the rest 3 parts of the pump body. At present, both the rotary dynamic sealing structure and the boundary static sealing structure of the domestic and foreign vacuum pumps are fluororubber rings, and under the sealing mode, the overall leakage rate of the vacuum pump is 5 multiplied by 10 at most under the general condition -8 Pa.m 3 In/s, even if the leakage rate of the Edwardsiella XDS series vortex vacuum pump with the highest level of the leakage rate of the whole machine in domestic and foreign markets can only reach 1 multiplied by 10 -7 Pa.m3/s(1x10 -6 mbar.l/s). Therefore, under the condition of higher leakage rate requirement, the existing vortex vacuum pump cannot meet the use requirement; meanwhile, the fluororubber ring is made of polytetrafluoroethylene material, the working environment with the high temperature of more than 300 ℃ causes material aging, the elasticity and the air permeability of the fluororubber ring are reduced under the working environment with the low temperature of minus 20 ℃, namely the fluororubber ring has poor high temperature resistance and cold resistance, and the fluororubber ring is dense under the working environment with the temperature of more than 300 ℃ or lower than minus 20 DEG CThe sealing performance is greatly reduced, and the leakage rate level of the whole vortex vacuum pump is further reduced.
Disclosure of Invention
The utility model aims to provide a high-tightness vortex vacuum pump, which omits rotary dynamic seal at the joint of a motor and a rotary crankshaft by changing the connection between the output end of the motor and the rotary crankshaft into a magnetic coupling driving mode, and simultaneously, adopts metal CF flange static seal for the static seal of a fluororubber ring on a pump body, so that the utility model ensures the evacuation performance and reduces the leakage rate of the whole pump to 1 multiplied by 10 at the same time -12 Pa.m3/s magnitude, so that the utility model can be applied to occasions with high sealing performance and low leakage working requirements.
In order to achieve the aim of the utility model, the technical scheme adopted is as follows: a high-tightness vortex vacuum pump comprises a motor, a pump body shell, a rotary crankshaft, a movable vortex disc and a fixed vortex disc; the pump body shell comprises a front end cover, a shell body and a rear end cover, the rotary crankshaft is rotatably arranged in the shell body, a magnetic coupling driven disc is arranged at the input end of the rotary crankshaft, a magnetic coupling driving disc which is in coupling transmission with the magnetic coupling driven disc is arranged at the output end of the motor, a movable vortex disc is arranged at the output end of the rotary crankshaft, and a fixed vortex disc is arranged in the rear end cover and corresponds to the movable vortex disc; the front end cover is connected with the shell in a sealing way through the CF flange, and the shell is connected with the rear end cover in a sealing way through the CF flange.
Further, the rear end face of the front end cover, the front end face and the rear end face of the shell and the front end face of the rear end cover are provided with flange rings, metal gaskets are arranged between the flange rings on the front end cover and the front end face of the shell and between the flange rings on the rear end face of the shell and the flange rings on the rear end cover, and the flange rings on the front end cover and the front end face of the shell and between the flange rings on the rear end face of the shell and the flange rings on the rear end cover are locked and fixed through fastening screws.
Further, the metal gasket is a copper gasket.
Further, the motor and pump body shell are respectively arranged on the two supports.
Further, a plurality of bearings are also installed in the housing, and the rotating crankshaft is commonly installed on the plurality of bearings.
Further, the movable vortex disc is in clearance fit with the fixed vortex disc.
Furthermore, a gas ballast valve is also arranged on the pump body shell.
The beneficial effects of the utility model are as follows:
the motor and the rotary crankshaft are driven in a magnetic coupling mode, so that rotary dynamic sealing at the joint of the motor and the rotary crankshaft is omitted; meanwhile, the static seal of the fluororubber ring on the pump body is fully metal CF flange static seal, so that the utility model ensures the evacuation performance and reduces the leakage rate of the whole pump to the magnitude of 1 multiplied by 10 < -12 > Pa.m3/s, and the utility model is applicable to occasions with high sealing performance and low leakage work requirements.
By adopting the copper gasket as the metal gasket, the sealing part of the pump body shell can bear high-temperature baking, the influence of high-temperature or low-temperature environment on the leakage rate of the whole machine is small, and the sealing stability is obviously higher than that of a conventional fluorine rubber ring.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model.
Fig. 1 is a schematic structural view of a high-tightness scroll vacuum pump provided by the utility model.
The reference numerals and corresponding part names in the drawings:
1. the motor, 2, pump body shell, 3, rotating crankshaft, 4, moving vortex disk, 5, fixed vortex disk, 6, magnetic coupling driving disk, 7, magnetic coupling driven disk, 8, metal gasket, 9, support;
21. front end cover, 22, casing, 23, rear end cover, 24, flange ring.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the substances, and not restrictive of the utility model. It should be further noted that, for convenience of description, only the portions related to the present utility model are shown in the drawings.
In addition, the embodiments of the present utility model and the features of the embodiments may be combined with each other without collision. The present utility model will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in FIG. 1, the high-tightness vortex vacuum pump provided by the utility model comprises a motor 1, a pump body shell 2, a rotary crankshaft 3, a movable vortex disc 4 and a fixed vortex disc 5; the pump body housing 2 comprises a front end cover 21, a shell 22 and a rear end cover 23, wherein the front end cover 21 is arranged at one end of the shell 22 close to the motor 1, the rear end cover 23 is arranged at one end of the shell 22 far away from the motor 1, and in the installation process, the front end cover 21, the shell 22 and the rear end cover 23 are fixedly connected through bolts.
The rotary crankshaft 3 is arranged in the shell 22, the rotary crankshaft 3 can fully rotate in the shell 22, the magnetic coupling driven disc 7 is arranged at the input end of the rotary crankshaft 3, the magnetic coupling driving disc 6 is arranged at the output end of the motor 1, the magnetic coupling driving disc 6 and the magnetic coupling driven disc 7 are positioned on the same axis, and the magnetic coupling driving disc 6 and the magnetic coupling driven disc 7 are in transmission connection through magnetic coupling; in order to ensure the coupling effect between the magnetic coupling driving disk 6 and the magnetic coupling driven disk 7, the portion of the front end cover 21 located between the magnetic coupling driving disk 6 and the magnetic coupling driven disk 7 is as thin as possible, and the magnetic coupling driven disk 7 is housed together in the front end cover 21 and the housing 22 when the front end cover 21 is fixed to the housing 22.
The movable vortex disc 4 is fixedly arranged at the output end of the rotary crankshaft 3, the rotary crankshaft 3 drives the movable vortex disc 4 to synchronously rotate while rotating, the fixed vortex disc 5 is fixedly arranged in the rear end cover 23, and when the rear end cover 23 is arranged on the shell 22, the movable vortex disc 4 and the fixed vortex disc 5 are positioned on the same axis, so that the movable vortex disc 4 and the fixed vortex disc 5 are correspondingly arranged.
The front end cover 21, the shell 22 and the rear end cover 23 are in sealing connection through CF flanges under the condition of mutual fixation, and the tightness between the front end cover 21 and the shell 22 and between the shell 22 and the rear end cover 23 is ensured under the condition of mutual installation of the front end cover 21, the shell 22 and the rear end cover 23.
The transmission mode between the motor 1 and the rotary crankshaft 3 is changed, and the rotary dynamic seal at the joint of the motor 1 and the rotary crankshaft 3 is omitted; meanwhile, the static seal of the fluororubber ring on the pump body is fully metal CF flange static seal, so that the utility model ensures the evacuation performance and reduces the leakage rate of the whole pump to 1X 10 -12 Pa.m3/s magnitude, so that the utility model can be applied to occasions with high sealing performance and low leakage working requirements.
As a further improvement in this embodiment, the rear end face of the front end cover 21, the front end face of the housing 22, and the front end face of the rear end cover 23 have flange rings 24, the flange rings 24 on the front end cover 21 and the front end cover 21 are in an integral structure, the flange rings 24 on the rear end cover 23 and the rear end cover 23 are in an integral structure, one side face of the flange rings 24 on the front end cover 21 is flush with the end face of the front end cover 21 near one end of the housing 22, the outer side faces of the flange rings 24 on the two ends of the housing 22 are flush with the end faces of the two ends of the housing 22 respectively, and when the front end cover 21, the housing 22 and the rear end cover 23 are jointly fixed, the flange rings 24 on the front end cover 21 and the flange rings 24 on the front end of the housing 22, and the flange rings 24 on the rear end cover 23 are all provided with metal gaskets 8, and when the front end cover 21, the housing 22 and the rear end cover 23 are jointly fixed, the metal gaskets 8 are pressed between the flange rings 24 on the front end cover 21 and the flange rings 24 on the housing 22 and the rear end cover 22, and the flange rings 24 on the front end cover 22 are tightly connected between the flange rings 24 and the front end cover 22 and the flange rings 22.
In order to make the fixing of the front end cover 21, the shell 22 and the rear end cover 23 more convenient, the flange ring 24 on the front end cover 21 and the flange ring 24 at the front end of the shell 22, and the flange ring 24 at the rear end of the shell 22 and the flange ring 24 on the rear end cover 23 are all fixed by fastening screws, and the plurality of locking screws between the flange ring 24 on the front end cover 21 and the flange ring 24 at the front end of the shell 22 and between the flange ring 24 at the rear end of the shell 22 and the flange ring 24 on the rear end cover 23 are uniformly distributed at intervals along the circumferential direction of the flange ring 24.
As a further improvement of this embodiment, the metal gasket 8 is a copper gasket, specifically, the metal gasket 8 is made of oxygen-free copper, when the front end cover 21, the housing 22 and the rear end cover 23 are locked together, the metal gasket 8 is deformed due to extrusion, so that a sealing function is formed between the front end cover 21 and the housing 22 and between the housing 22 and the rear end cover 23, and the sealing part of the pump body housing 2 can bear high-temperature baking, so that the influence of high-temperature or low-temperature environment on the leakage rate of the whole pump is small, and the sealing stability is obviously higher than that of a conventional fluorine rubber ring.
As a further improvement of the embodiment, the high-tightness vortex vacuum pump further comprises two supports 9, and the motor 1 and the pump body shell 2 are respectively arranged on the two supports 9, so that the motor 1 and the pump body shell 2 are conveniently arranged, and the corresponding relation between the magnetic coupling driving disc 6 and the magnetic coupling driven disc 7 is conveniently adjusted when the high-tightness vortex vacuum pump is arranged, and the installation of the high-tightness vortex vacuum pump is more convenient.
As a further improvement in this embodiment, a plurality of bearings are further installed in the housing 22, the rotating crankshaft 3 is commonly installed on the plurality of bearings, specifically, the number of bearings is at least 2, and the plurality of bearings are respectively located at two ends of the rotating crankshaft 3, so that two ends of the rotating crankshaft 3 are supported, the rotating crankshaft 3 is ensured to rotate, and meanwhile, the rotating of the rotating crankshaft 3 is enabled to be more stable, so that the shake of the magnetic coupling driven disc 7 and the moving vortex disc 4 in the rotating process is effectively reduced, and the transmission of the motor 1 and the rotating crankshaft 3 is ensured.
As a further improvement in the present embodiment, the movable scroll 4 is in clearance fit with the fixed scroll 5, so as to ensure the air extraction function of the present utility model without affecting the rotation of the movable scroll 4.
As a further improvement in this embodiment, the pump body housing 2 is further provided with a ballast valve, specifically, the ballast valve may be directly installed on the rear end cover 23, and in the installation process of the ballast valve, in order to ensure the tightness of the ballast valve, the upper housings of the ballast valve may be connected by a CF flange in a sealing manner.
During installation, the motor 1 is installed through the support 9, the magnetic coupling driving disc 6 is installed at the output end of the motor 1, the rotating crankshaft 3 is installed in the shell 22 through a bearing, the magnetic coupling driven disc 7 is installed at the input end of the rotating crankshaft 3, the movable vortex disc 4 is installed at the output end of the rotating crankshaft 3, the matching of the magnetic coupling driving disc 6 and the magnetic coupling driven disc 7 determines the installation position of the other support 9, the shell 22 is installed on the support 9, finally, metal sealing rings are respectively placed on two end faces of the shell 22, the fixed vortex disc 5 is fixed in the rear end cover 23, the front end cover 21 is fixed at the front end of the shell 22 through fastening screws, and the rear end cover 23 is fixed at the rear end of the shell 22 through fastening screws.
When the motor 1 rotates, the magnetic coupling driving disk 6 is driven to rotate, and because the magnetic coupling driving disk 6 and the magnetic coupling driven disk 7 are magnetically coupled to drive, when the magnetic coupling driving disk 6 rotates, the magnetic coupling driven disk 7 is driven to rotate, when the magnetic coupling driven disk 7 rotates, the rotary crankshaft 3 is driven to rotate, the rotary crankshaft 3 rotates to drive the movable vortex disk 4 to rotate, and the movable vortex disk 4 is matched with the fixed vortex disk 5 to exhaust air.
In the description of the present specification, reference to the terms "one embodiment/manner," "some embodiments/manner," "example," "specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment/manner or example is included in at least one embodiment/manner or example of the present application. In this specification, the schematic representations of the above terms are not necessarily for the same embodiment/manner or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments/modes or examples. Furthermore, the various embodiments/modes or examples described in this specification and the features of the various embodiments/modes or examples can be combined and combined by persons skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.
It will be appreciated by persons skilled in the art that the above embodiments are provided for clarity of illustration only and are not intended to limit the scope of the utility model. Other variations or modifications will be apparent to persons skilled in the art from the foregoing disclosure, and such variations or modifications are intended to be within the scope of the present utility model.
Claims (7)
1. The high-tightness vortex vacuum pump is characterized by comprising a motor (1), a pump body shell (2), a rotary crankshaft (3), a movable vortex disc (4) and a fixed vortex disc (5); the pump body shell (2) comprises a front end cover (21), a shell (22) and a rear end cover (23), the rotary crankshaft (3) is rotatably arranged in the shell (22), a magnetic coupling driven disc (7) is arranged at the input end of the rotary crankshaft (3), a magnetic coupling driving disc (6) which is in coupling transmission with the magnetic coupling driven disc (7) is arranged at the output end of the motor (1), the movable vortex disc (4) is arranged at the output end of the rotary crankshaft (3), and the fixed vortex disc (5) is arranged in the rear end cover (23) and is correspondingly arranged with the movable vortex disc (4); the front end cover (21) and the shell (22) and the rear end cover (23) are connected in a sealing way through CF flanges.
2. The high-tightness scroll vacuum pump according to claim 1, wherein the rear end face of the front end cover (21), the front and rear end faces of the housing (22) and the front end face of the rear end cover (23) are provided with flange rings (24), metal gaskets (8) are respectively arranged between the flange rings (24) on the front end cover (21) and the flange rings (24) on the front end face of the housing (22) and between the flange rings (24) on the rear end face of the housing (22) and the flange rings (24) on the rear end cover (23), and the flange rings (24) on the rear end face of the housing (22) and the flange rings (24) on the rear end cover (23) are fastened and fixed by fastening screws.
3. A high tightness scroll vacuum pump as claimed in claim 2, wherein the metal gasket (8) is a copper gasket.
4. A high tightness scroll vacuum pump according to claim 1 or 2 or 3, further comprising two holders (9), the motor (1) and the pump body housing (2) being mounted on the two holders (9), respectively.
5. A high tightness scroll vacuum pump as claimed in claim 1, 2 or 3, wherein a plurality of bearings are also mounted in said housing (22), the rotating crankshaft (3) being commonly mounted on the plurality of bearings.
6. A high tightness scroll vacuum pump as claimed in claim 1 or 2 or 3, wherein the orbiting scroll (4) is clearance fit with the fixed scroll (5).
7. A high tightness scroll vacuum pump as claimed in claim 1 or 2 or 3, wherein a gas-tight valve is also mounted on the pump body housing (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320200361.5U CN219119456U (en) | 2023-02-14 | 2023-02-14 | High leakproofness vortex vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320200361.5U CN219119456U (en) | 2023-02-14 | 2023-02-14 | High leakproofness vortex vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219119456U true CN219119456U (en) | 2023-06-02 |
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ID=86524879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320200361.5U Active CN219119456U (en) | 2023-02-14 | 2023-02-14 | High leakproofness vortex vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219119456U (en) |
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2023
- 2023-02-14 CN CN202320200361.5U patent/CN219119456U/en active Active
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