CN219103741U - Silver sintering auxiliary preheating and cooling device - Google Patents

Silver sintering auxiliary preheating and cooling device Download PDF

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Publication number
CN219103741U
CN219103741U CN202223352823.XU CN202223352823U CN219103741U CN 219103741 U CN219103741 U CN 219103741U CN 202223352823 U CN202223352823 U CN 202223352823U CN 219103741 U CN219103741 U CN 219103741U
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cooling
preheating
unit
controller
water
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田天成
王建龙
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Suzhou Baosman Semiconductor Equipment Co ltd
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Suzhou Baosman Semiconductor Equipment Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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Abstract

The utility model discloses a silver sintering auxiliary preheating and cooling device, which comprises an equipment frame; the equipment frame is provided with a cooling unit and a preheating unit; a cooling table is arranged in the cooling unit and used for placing a cooling clamp; a preheating table is arranged in the preheating unit and used for placing a preheating clamp; a base is arranged at the lower part of the equipment frame; the base is provided with a controller and water cooling equipment; the controller controls the water cooling equipment to provide cooling water for the cooling table; a cooling clamp position detection sensor is arranged in the cooling unit; a preheating clamp position detection sensor is arranged in the preheating unit; a heating rod is arranged in a preheating table in the preheating unit; the heating rod is controlled by the controller to work; the cooling clamp position detection sensor and the preheating clamp position detection sensor are respectively and electrically connected with the controller and are communicated with each other; the utility model adopts a programmable controller to detect the temperature of preheating and cooling.

Description

Silver sintering auxiliary preheating and cooling device
Technical Field
The utility model belongs to the technical field related to semiconductor silver sintering, and particularly relates to a silver sintering auxiliary preheating and cooling device adopting a programmable controller for preheating and cooling temperature detection and time visualization management.
Background
In the semiconductor industry, before a silver sintering process, a sintered product needs to be placed on a material frame jig and preheated together with the material frame jig, so that the product can reach a better sintering process effect after entering sintering equipment and the whole sintering process time is shortened; after sintering is completed, operators take out the material frame jig, and then the natural cooling time of the product is shortened, so that the product efficiency is improved.
In the prior art, a material frame is simply placed into a device with a heating platform in a common preheating and cooling process platform; although the device can preheat a material frame into which a product is put, the device has the following two defects:
1. the preheating time is uncontrollable, and the artificial control condition exists; time-free visual management;
2. no preheating temperature curve exists, and no visual management is performed on temperature alarm detection;
3. in the cooling process, the material frame is cooled by a simple fan; time-free visual management.
For this reason, we have developed a silver sintering auxiliary preheating and cooling device that employs a programmable controller for temperature detection and time visualization management of preheating and cooling.
Disclosure of Invention
The utility model aims to provide a silver sintering auxiliary preheating and cooling device which adopts a programmable controller to perform preheating and cooling temperature detection and time visualization management.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a silver sintering auxiliary preheating cooling device comprises an equipment frame; the equipment frame is provided with a cooling unit and a preheating unit; a cooling table is arranged in the cooling unit and used for placing a cooling clamp; a preheating table is arranged in the preheating unit and used for placing a preheating clamp; a base is arranged at the lower part of the equipment frame; the base is provided with a controller and water cooling equipment; the controller controls the water cooling equipment to provide cooling water for the cooling table; a cooling clamp position detection sensor is arranged in the cooling unit; a preheating clamp position detection sensor is arranged in the preheating unit; a heating rod is arranged in a preheating table in the preheating unit; the heating rod is controlled by the controller to work; the cooling clamp position detection sensor and the preheating clamp position detection sensor are respectively and electrically connected with the controller and are communicated with each other.
Preferably, the cooling clamp and the preheating clamp are respectively used for placing products, and the cooling clamp and the preheating clamp are the same in structure.
Preferably, a cooling unit door is arranged on the cooling unit and used for cooling the inlet and outlet of the clamp; the two sides of the cooling unit door are correspondingly provided with cooling unit safety gratings; the cooling unit is provided with a cooling unit LED lamp for illuminating the cooling unit; and the cooling unit safety grating and the cooling unit LED lamp are respectively and electrically connected with the controller and are communicated with each other.
Preferably, a preheating unit door is arranged on the preheating unit and used for preheating the inlet and outlet of the clamp; the two sides of the preheating unit door are correspondingly provided with preheating unit safety gratings; the preheating unit is provided with a preheating unit LED lamp for illuminating the preheating unit; a preheating temperature probe is arranged in the preheating unit; the preheating unit LED lamp, the preheating unit safety grating and the preheating temperature probe are respectively and electrically connected with the controller and are communicated with each other.
Preferably, the equipment frame is also provided with a touch screen and an alarm tri-color lamp; the touch screen is electrically connected with the controller and communicated with the controller, and displays the running state and running record of the whole device; the alarm tri-color lamp is electrically connected to the controller, and the controller controls the alarm tri-color lamp to alarm.
Preferably, the silver sintering auxiliary preheating and cooling device further comprises an input flowmeter, an output flowmeter and a liquid level switch; the input flowmeter is used for communicating the water cooling equipment and the cooling table and detecting the water outlet flow of the water cooling equipment; the output flowmeter is also used for communicating the water cooling equipment and the cooling table and detecting the backwater flow of the water cooling equipment; a cooling water operation pipeline is arranged in the cooling table and is respectively communicated with the input flowmeter and the output flowmeter; the liquid level switch is electrically connected with the controller, detects whether cooling water leaks from the water cooling equipment, and outputs a signal to the controller for signal alarm processing after the signal is detected; the input flowmeter and the output flowmeter are respectively and electrically connected with the controller and are communicated with each other.
Preferably, a water pump is arranged in the water cooling equipment and used for providing cooling water for a cooling water operation pipeline in the cooling table; the water pump is controlled by the controller to work; the liquid level switch is used for detecting whether the water cooling equipment leaks cooling water or not, and outputting the detected signal to the controller for signal alarm processing.
Compared with the prior art, the utility model provides a silver sintering auxiliary preheating and cooling device, which has the following beneficial effects:
the silver sintering auxiliary preheating and cooling device adopts a programmable controller to carry out preheating and cooling temperature detection and time visual management.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate and together with the embodiments of the utility model and do not constitute a limitation to the utility model, and in which:
fig. 1 is a schematic diagram of the overall structure of a silver sintering auxiliary preheating and cooling device according to the utility model;
fig. 2 is a schematic structural view of a cooling jig in the silver sintering auxiliary preheating and cooling device according to the present utility model;
in the figure: 1. an equipment frame; 2. a touch screen; 3. an alarm tri-color lamp; 4. a cooling unit; 5. a cooling unit safety grating; 6. a cooling unit LED lamp; 7. cooling the clamp; 8. preheating a unit LED lamp; 9. a preheating unit; 10. preheating a unit safety grating; 11. preheating a clamp; 12. a controller; 13. 14, water cooling equipment; 15. inputting a flowmeter; 16. outputting a flowmeter; 17. a liquid level switch; 18. a cooling jig position detection sensor; 19. and a preheating clamp position detection sensor.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model; all other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-2, the present utility model provides a technical solution: an auxiliary preheating and cooling device for silver sintering comprises an equipment frame 1; the equipment frame 1 is provided with a touch screen 2, an alarm tri-color lamp 3, a cooling unit 4 and a preheating unit 9; the cooling unit 4 is internally provided with a cooling table (not shown) for placing a cooling jig 7; a preheating table (not shown) is provided inside the preheating unit 9 for placing a preheating jig 11; a cooling unit door (not shown) is arranged on the cooling unit 4 for cooling the inlet and outlet of the clamp 7; the two sides of the cooling unit door are correspondingly provided with cooling unit safety gratings 5; the cooling unit 4 is provided with a cooling unit LED lamp 6 for illuminating the cooling unit 4; a cooling jig position detection sensor 18 is provided in the cooling unit 4; the cooling unit safety grating 5, the cooling unit LED lamp 6 and the cooling clamp position detection sensor 18 are respectively and electrically connected with the controller 12 and are communicated with each other; the preheating unit 9 is provided with a preheating unit door (not shown) for preheating the inlet and outlet of the clamp 11; the two sides of the preheating unit door are correspondingly provided with a preheating unit safety grating 10; the preheating unit 9 is provided with a preheating unit LED lamp 8 for illuminating the preheating unit 9; a preheating clamp position detection sensor 19 is arranged in the preheating unit 9; a heating rod is arranged in a preheating table in the preheating unit 9; the heating rod is controlled to work by the controller 12; the preheating unit 9 is internally provided with a preheating temperature probe (not shown). The preheating unit LED lamp 8, the preheating unit safety grating 10, the preheating clamp position detection sensor 19 and the preheating temperature probe are respectively and electrically connected with the controller 12 and are communicated with each other; the cooling clamp 7 and the preheating clamp 11 are respectively used for placing products, and have the same structure.
The lower part of the equipment frame 1 is provided with a base 13; the base 13 is provided with a controller 12, a water cooling device 14, an input flowmeter 15, an output flowmeter 16 and a liquid level switch 17; the input flowmeter 15 is used for communicating the water cooling equipment 14 and the cooling table, and detecting the water outlet flow of the water cooling equipment 14; the output flowmeter 16 is also used for communicating the water cooling equipment 14 with the cooling table, and detecting the backwater flow of the water cooling equipment 14; a cooling water operation pipeline is arranged in the cooling platform and is respectively communicated with an input flowmeter 15 and an output flowmeter 16; the liquid level switch 17 is electrically connected with the controller 12, detects whether the water cooling equipment 14 leaks cooling water, and outputs a detected signal to the controller 12 for signal alarm processing; the input flowmeter 15 and the output flowmeter 16 are respectively electrically connected with the controller 12 and are communicated with each other.
The equipment frame 1 is a preheating cooling device equipment main body frame; the touch screen 2 is electrically connected with the controller 12 and communicated with each other, and displays the running state and running record of the whole device; the alarm tri-color lamp 3 is electrically connected to the controller 12, and the controller 12 controls the alarm tri-color lamp 3 to alarm; the cooling unit 4 forms the whole cooling mechanism; the cooling unit safety grating 5 is arranged at the left side and the right side of the cooling unit door and is used for safety detection; the cooling unit LED lamp 6 is arranged at the upper part of the cooling unit 4 for illumination; the cooling unit safety grating 5 is electrically connected with the controller 12 and communicated with each other; the cooling clamp 7 is placed on a cooling table in the cooling unit 4 for cooling; the cooling clamp 7 is provided with a cooling product for cooling and transferring; the preheating unit LED lamp 8 is arranged at the upper part of the preheating unit 9 for illumination; the preheating unit 9 constitutes the whole preheating mechanism; the preheating unit safety grating 10 is arranged at the left side and the right side of the preheating unit door and is used for safety detection; the preheating unit safety grating 10 is electrically connected with the controller 12 and communicated with each other; the preheating clamp 11 is placed on a preheating table in the preheating unit 9 to perform a preheating function; the preheating clamp 11 is provided with a product to be preheated, and preheating temperature is transferred; the controller 12 is used for forming temperature detection alarm, temperature curve recording, safety detection and illumination control of the whole device; a control center for preheating the cooling device equipment; the base 13 is the base of the device; the water cooling equipment 14 is arranged on the base 13; the input flowmeter 15 detects the water outlet flow of the water cooling device 14; the output flowmeter 16 detects the backwater flow of the water cooling device 14; a water pump (not shown) is arranged in the water cooling device 14 and is used for providing cooling water for a cooling water running pipeline in the cooling table; the water pump is controlled by the controller 12 to work; the liquid level switch 17 is used for detecting whether the water cooling equipment 14 leaks cooling water, and outputting a signal to the controller 12 for signal alarm processing after the signal is detected; the cooling jig position sensor 18 is used for detecting whether the cooling jig is in place or not, if not, real-time detection is performed, when the cooling function is not started, standby non-detection is performed, the preheating jig position sensor 19 is used for detecting whether the preheating jig is in place or not, if not, real-time detection is performed, and when the preheating function is not started, standby non-detection is performed.
The specific working principle is as follows: after the power supply of the controller 12 is powered on, the controller 12 supplies power to the water cooling device 14, the input flowmeter 15, the output flowmeter 16, the touch screen 2, the alarm tri-color lamp 3, the cooling unit safety grating 5, the cooling unit LED lamp 6, the preheating unit LED lamp 8 and the preheating unit safety grating power supply 10, and the part needs to be controlled.
The preheating process is as follows: the operator puts the product to be preheated into the preheating clamp 11, then manually puts the product into the preheating unit 9, at the moment, the preheating unit safety grating 10 detects the preheating clamp 11 or the hands of the operator, the controller 12 receives the input signal, at the moment, the alarm tri-color lamp 3 buzzer prompts, and the tri-color lamp lights the red lamp for warning; a preheating clamp position sensor 19 is arranged in the preheating unit 9, and the preheating clamp position sensor 19 is responsible for detecting whether the preheating clamp 11 is placed in place or not; when the preheating clamp 11 is detected, the preheating clamp position sensor 19 receives a signal and transmits the signal to the controller 12; if the signal is not received, if the operator starts preheating by the starting button or clicks the preheating button on the touch screen 2, the preheating function is impossible to preheat and the touch screen 2 has record alarm; when the preheating clamp 11 is placed, and after the controller 12 receives the information of the preheating clamp position sensor 19 for detecting the installation and positioning of the preheating clamp 11, an operator starts a button to start preheating or clicks the preheating button to start on the touch screen 2, at the moment, a preheating function is opened, meanwhile, a programmable controller in the controller 12 performs program execution, records such as the preheating temperature time and the like are displayed on the touch screen 2, and a corresponding preheating operation interface, preheating temperature and preheating time are adjustable on the touch screen 2; the preheating temperature is provided with upper and lower limit alarms, a preheating heating rod is installed inside a preheating stage of the preheating unit 9, and a preheating temperature probe (not shown) is installed inside the preheating unit 9. After the preheating process is finished, the touch screen 2 prompts that the preheating is finished, and meanwhile, the three-color lamp 3 is alarmed to carry out buzzing prompt, and the three-color lamp lights up and flashes.
The cooling process is as follows: the operator puts the product to be cooled into the cooling clamp 7, then manually puts the product into the cooling unit 4, at the moment, the cooling unit safety grating 5 detects the cooling clamp 7 or the operator hand, the controller 12 receives the input signal, at the moment, the alarm tri-color lamp 3 buzzer prompts, and the tri-color lamp lights the red lamp for warning; a cooling clamp position sensor 18 is arranged in the cooling unit 4, and the cooling clamp position sensor 18 is responsible for detecting whether the cooling clamp 7 is placed in place or not; upon detection 7 of the cooling jig, the cooling jig position sensor 18 transmits the received signal to the controller 12; if the controller 12 does not receive the signal, the operator starts the cooling by starting the button at the moment or clicking the cooling button on the touch screen 2 to start, the cooling function is unable to cool and the touch screen 2 has record alarm; when the cooling clamp 7 is placed, and the controller 12 receives the signal, an operator starts a button to start cooling or clicks the cooling button on the touch screen 2 to start, at the moment, a cooling function is opened, meanwhile, a programmable controller in the controller 12 performs program execution, the cooling time and the like are recorded and displayed on the touch screen 2, a corresponding cooling operation interface is arranged on the touch screen 2, and the cooling time is adjustable; the cooling time is provided with an upper and lower limit alarm, and at the start of cooling, the water cooling device 14 is started, and the water cooling device 14 is provided with an input flow meter 15 and an output flow meter 16.
The input flowmeter 15 detects the water outlet flow of the water cooling device 14; the output flowmeter 16 detects the backwater flow of the water cooling device 14; detecting whether the flow rate is abnormal or not in real time while the input flow meter 15 and the output flow meter 16 are in the cooling process; the touch screen 2 is provided with a flow upper limit and lower limit detection alarm, and the upper limit and the lower limit are adjustable; a liquid level switch 17 is arranged beside the water cooling equipment 14 to detect whether water overflows at any time, so that the condition that water leakage cannot be detected is prevented; after the cooling process is finished, the touch screen 2 prompts the completion of cooling, and meanwhile, the three-color lamp 3 is warned to carry out buzzing prompt, and the three-color lamp lights up and flashes.
The whole device is also internally provided with a leakage detection circuit breaker, and corresponding safety detection signals are all used for controlling the touch screen 2 to display record and alarm through the controller 12.
The silver sintering auxiliary preheating and cooling device adopts a programmable controller to carry out preheating and cooling temperature detection and time visual management.
Compared with the prior art, the utility model has the following beneficial effects:
the silver sintering auxiliary preheating and cooling device adopts a programmable controller to carry out preheating and cooling temperature detection and time visual management.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. An auxiliary preheating and cooling device for silver sintering is characterized in that: comprises a device frame; the equipment frame is provided with a cooling unit and a preheating unit; a cooling table is arranged in the cooling unit and used for placing a cooling clamp; a preheating table is arranged in the preheating unit and used for placing a preheating clamp; a base is arranged at the lower part of the equipment frame; the base is provided with a controller and water cooling equipment; the controller controls the water cooling equipment to provide cooling water for the cooling table; a cooling clamp position detection sensor is arranged in the cooling unit; a preheating clamp position detection sensor is arranged in the preheating unit; a heating rod is arranged in a preheating table in the preheating unit; the heating rod is controlled by the controller to work; the cooling clamp position detection sensor and the preheating clamp position detection sensor are respectively and electrically connected with the controller and are communicated with each other.
2. The silver sintering auxiliary preheating and cooling apparatus as set forth in claim 1, wherein: the cooling clamp and the preheating clamp are the same in structure and are used for placing products respectively.
3. The silver sintering auxiliary preheating and cooling apparatus as set forth in claim 2, wherein: the cooling unit is provided with a cooling unit door for cooling the inlet and outlet of the clamp; the two sides of the cooling unit door are correspondingly provided with cooling unit safety gratings; the cooling unit is provided with a cooling unit LED lamp for illuminating the cooling unit; and the cooling unit safety grating and the cooling unit LED lamp are respectively and electrically connected with the controller and are communicated with each other.
4. A silver sintering auxiliary preheating cooling apparatus as set forth in claim 3, wherein: the preheating unit is provided with a preheating unit door for preheating the inlet and outlet of the clamp; the two sides of the preheating unit door are correspondingly provided with preheating unit safety gratings; the preheating unit is provided with a preheating unit LED lamp for illuminating the preheating unit; a preheating temperature probe is arranged in the preheating unit; the preheating unit LED lamp, the preheating unit safety grating and the preheating temperature probe are respectively and electrically connected with the controller and are communicated with each other.
5. The silver sintering auxiliary preheating and cooling apparatus as set forth in claim 1, wherein: the equipment frame is also provided with a touch screen and an alarm tri-color lamp; the touch screen is electrically connected with the controller and communicated with the controller, and displays the running state and running record of the whole device; the alarm tri-color lamp is electrically connected to the controller, and the controller controls the alarm tri-color lamp to alarm.
6. The silver sintering auxiliary preheating and cooling apparatus as set forth in claim 1, wherein: the device also comprises an input flowmeter, an output flowmeter and a liquid level switch; the input flowmeter is used for communicating the water cooling equipment and the cooling table and detecting the water outlet flow of the water cooling equipment; the output flowmeter is also used for communicating the water cooling equipment and the cooling table and detecting the backwater flow of the water cooling equipment; a cooling water operation pipeline is arranged in the cooling table and is respectively communicated with the input flowmeter and the output flowmeter; the liquid level switch is electrically connected with the controller, detects whether cooling water leaks from the water cooling equipment, and outputs a signal to the controller for signal alarm processing after the signal is detected; the input flowmeter and the output flowmeter are respectively and electrically connected with the controller and are communicated with each other.
7. The silver sintering auxiliary preheating and cooling apparatus as set forth in claim 6, wherein: a water pump is arranged in the water cooling equipment and used for providing cooling water for a cooling water operation pipeline in the cooling table; the water pump is controlled by the controller to work; the liquid level switch is used for detecting whether the water cooling equipment leaks cooling water or not, and outputting the detected signal to the controller for signal alarm processing.
CN202223352823.XU 2022-12-14 2022-12-14 Silver sintering auxiliary preheating and cooling device Active CN219103741U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223352823.XU CN219103741U (en) 2022-12-14 2022-12-14 Silver sintering auxiliary preheating and cooling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223352823.XU CN219103741U (en) 2022-12-14 2022-12-14 Silver sintering auxiliary preheating and cooling device

Publications (1)

Publication Number Publication Date
CN219103741U true CN219103741U (en) 2023-05-30

Family

ID=86458663

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223352823.XU Active CN219103741U (en) 2022-12-14 2022-12-14 Silver sintering auxiliary preheating and cooling device

Country Status (1)

Country Link
CN (1) CN219103741U (en)

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