CN219085926U

CN219085926U - Tray fixing device

Info

Publication number: CN219085926U
Application number: CN202320064412.6U
Authority: CN
Inventors: 张茂辉; 栗宽
Original assignee: Chinainstru and Quantumtech Hefei Co Ltd
Current assignee: Guoyi Quantum Technology Hefei Co ltd
Priority date: 2023-01-09
Filing date: 2023-01-09
Publication date: 2023-05-26
Anticipated expiration: 2033-01-09

Abstract

The utility model discloses a tray fixing device, which comprises: a first mount adapted to be mounted to a bottom of an electron microscope; the lifting platform comprises a clamping part and a mounting part, the clamping part is connected with the mounting part, and the mounting part is movably mounted on the first mounting piece; the second mounting piece is provided with a clamping groove, the clamping part is suitable for being in sliding clamping connection with the clamping groove, and the second mounting piece is used for mounting the sample holder; and the elastic component is connected with the mounting part and is used for applying elastic force for tightly attaching the clamping part and the clamping groove. The utility model is convenient for operation and installation, has improved fixing performance, and can directly push the connection table and the sample support into the scanning electron microscope, so that the clamping groove of the connection table is combined with the clamping part of the bearing table, and the locking can be completed.

Description

Tray fixing device

Technical Field

The utility model relates to the technical field of scanning electron microscopes, in particular to a tray fixing device.

Background

Scanning Electron Microscopy (SEM) is a viewing means between transmission electron microscopy and optical microscopy. The method uses a focused very narrow high-energy electron beam to scan a sample, excites various physical information through the interaction between the beam and a substance, and collects, amplifies and re-images the information so as to achieve the aim of representing the microscopic morphology of the substance. Scanning electron microscopes are widely used in the research of geotechnical, graphite, ceramic, nanomaterials and the like. Therefore, the scanning electron microscope plays a great role in the scientific research field.

Currently, when a scanning electron microscope is used, a sample needs to be placed on a tray, and then the tray is sent into the scanning electron microscope, and then subsequent scanning work and the like are performed.

However, since the tray is not provided with the fixing mechanism after being sent into the scanning electron microscope, when the equipment runs, the generated vibration greatly interferes with the tray, so that the tray cannot work normally, and the fixing mechanism is required to fix, but the conventional fixing mechanism is inconvenient to operate, is very troublesome to use and reduces the operation efficiency.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present utility model is to provide a tray fixing device, which is convenient to operate and install, has improved fixing performance, and can directly push the engagement table and the sample holder into the scanning electron microscope, so that the engagement groove of the engagement table and the engagement portion of the bearing table are combined, and the locking can be completed.

According to an embodiment of the present utility model, a tray fixing device includes: a first mount adapted to be mounted to a bottom of an electron microscope; the lifting platform comprises a clamping part and a mounting part, the clamping part is connected with the mounting part, and the mounting part is movably mounted on the first mounting piece; the second mounting piece is provided with a clamping groove, the clamping part is suitable for being in sliding clamping connection with the clamping groove, and the second mounting piece is used for mounting the sample holder; and the elastic component is connected with the mounting part and is used for applying elastic force for tightly attaching the clamping part and the clamping groove.

According to the scheme, the lifting platform on the first mounting piece comprises the clamping part and the mounting part, the elastic component is arranged on the mounting part, the clamping groove matched with the clamping part is formed in the second mounting piece, the clamping groove of the second mounting piece is clamped outside the clamping part, the elastic component of the first mounting piece is used for tightly attaching the clamping part and the clamping groove, so that the lifting platform on the first mounting piece is driven to move upwards when the clamping groove clamps the clamping part, and the fastening of the first mounting piece and the second mounting piece is achieved.

According to the tray fixing device provided by the embodiment of the utility model, the first mounting piece is provided with the mounting hole, the mounting part is penetrated through the mounting hole, one end of the mounting part is connected with the clamping part, the other end of the mounting part is connected with the elastic component, and the elastic component is elastically pressed between the mounting part and the first mounting piece.

According to the tray fixing device provided by the embodiment of the utility model, the elastic component comprises the elastic piece and the locking piece, the outer peripheral wall of the other end of the mounting part is provided with the fixing groove, the locking piece is clamped in the fixing groove, and the elastic piece is elastically pressed between the locking piece and the first mounting piece.

According to the tray fixing device provided by the embodiment of the utility model, the locking plate is configured as the annular plate, and the inner peripheral edge of the annular plate is clamped into the fixing groove; the elastic piece comprises an annular part and elastic lugs connected in the annular part, the elastic lugs are a plurality of and are connected with the inner peripheral wall of the annular part at intervals along the circumferential direction, the annular part is abutted against the first mounting piece in a fitting way, and the elastic lugs extend along the radial direction of the annular part and incline along the axial direction so as to be abutted against the locking plate.

According to the tray fixing device provided by the embodiment of the utility model, the locking plate is provided with a deformation opening.

According to the tray fixing device provided by the embodiment of the utility model, the first mounting piece is further provided with the mounting cavity, the mounting cavity is formed on one side of the first mounting piece, which is away from the clamping part, and is communicated with the mounting hole, and the elastic component is positioned in the mounting cavity and elastically abuts against the inner upper wall of the mounting cavity.

According to the tray fixing device provided by the embodiment of the utility model, the first mounting piece comprises the main body part and the mounting boss, the mounting boss is mounted on one side of the main body part, the width of the mounting boss is smaller than that of the main body part so as to limit sliding grooves on two sides of the mounting boss, and the clamping part protrudes out of the mounting boss; one side of the second mounting piece is provided with two spaced-apart protruding strips, a mounting groove is formed between the two protruding strips, the mounting boss is mounted in the mounting groove, and the mounting groove is internally provided with the clamping groove to be matched with the clamping part in a clamping way.

According to the tray fixing device provided by the embodiment of the utility model, the clamping part is in a conical structure, the clamping groove is in a through groove with two open sides, the clamping groove is provided with a dovetail-shaped cross section, and the clamping part is suitable for extending into the clamping groove along the open side of the clamping groove.

According to the tray fixing device provided by the embodiment of the utility model, the inner wall surface of the clamping groove comprises two inclined surfaces and a plane, at least one of the two inclined surfaces is provided with the pre-tightening protrusion, the pre-tightening protrusion is provided with the pressing curved surface, and the clamping part extends into the clamping groove and is pressed against the pressing curved surface of the pre-tightening protrusion.

According to the tray fixing device provided by the embodiment of the utility model, the first mounting piece is a bearing table, the second mounting piece is a connecting table, the bearing table is fixed on the scanning electron microscope, the connecting table is fixed with the sample holder, and the connecting table is fixed with the bearing table.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic view of a first mounting member of a tray fixture according to an embodiment of the present utility model from one perspective;

FIG. 2 is a schematic view of a tray fixture according to another embodiment of the present utility model from another perspective;

FIG. 3 is a schematic view of a second mounting member fixedly coupled to a sample holder according to an embodiment of the present utility model;

FIG. 4 is a schematic view of a lifting platform of a tray fixing device according to an embodiment of the present utility model;

FIG. 5 is a cross-sectional view of a first mounting member of a tray fixture according to an embodiment of the utility model;

FIG. 6 is a schematic structural view of a spring plate of a tray fixing device according to an embodiment of the present utility model;

FIG. 7 is a schematic view of the structure of a locking tab of a tray fixture according to an embodiment of the utility model;

fig. 8 is a schematic view of a connection portion between the engagement groove and the engagement portion of the tray fixing device according to the embodiment of the present utility model.

The reference numerals are given to the figures,

the first mounting member 1 is provided with a first opening,

a lifting table 11, a clamping part 111, a mounting part 112, a mounting boss 12, a baffle 13, a chute 14, a mounting cavity 15,

the second mounting member 2, the engaging groove 21, the pre-tightening protrusion 211, the guide groove 22, the protrusion strip 23,

the sample holder 3, the fixing groove 4,

the locking piece 5, 51-the deformation opening,

elastic member 6, annular portion 61, elastic tab 62.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

The tray fixing device according to the embodiment of the present utility model is described below with reference to fig. 1 to 8, and is convenient to operate and install, and has improved fixing performance, and the second mounting member 2 and the sample holder 3 are directly pushed into the scanning electron microscope, so that the locking groove 21 of the second mounting member 2 is combined with the locking portion 111 of the first mounting member 1, thereby completing locking.

Referring to fig. 1 to 4, a tray fixing device according to an embodiment of the present utility model includes a first mounting member 1, a lifting table 11, a second mounting member 2, and an elastic assembly; the first mount 1 is adapted to be mounted to the bottom of an electron microscope; the lifting platform 11 comprises a clamping part 111 and an installation part 112, the clamping part 111 is connected with the installation part 112, and the installation part 112 is movably installed on the first installation piece 1; the second mounting piece 2 is provided with a clamping groove 21, the clamping part 111 is suitable for being slidably clamped into the clamping groove 21, and the second mounting piece 2 is used for mounting the sample holder 3; the elastic member is connected to the mounting portion 112 and applies an elastic force for tightly attaching the engaging portion 111 to the engaging groove 21. In actual operation, the clamping groove 21 of the second mounting piece 2 is placed at the position of the clamping part 111, then when the clamping groove 21 contacts with the clamping part 111, the elastic component on the mounting part 112 connected with the clamping part 111 gives an elastic pretightening force to the clamping part 111, the clamping part 111 moves in the direction approaching to the clamping groove 21, the connection between the clamping part 111 and the clamping groove 21 is realized, and then the first mounting piece 1 and the second mounting piece 2 are connected.

Through the scheme, the first mounting piece 1 and the second mounting piece 2 are convenient to mount and use after mounting, the fixing performance of the embodiment of the utility model is improved, the second mounting piece 2 and the sample holder 3 are directly pushed into the scanning electron microscope, and the clamping groove 21 of the second mounting piece 2 is combined with the clamping part 111 of the first mounting piece 1, so that locking can be completed. The second mounting member 2 and the sample holder 3 may be connected by a bolt, or may be connected by welding, adhesion, magnetic attraction, or the like, which is not limited herein.

In some embodiments, the first mounting member 1 is provided with a mounting hole, the mounting portion 112 is penetrating through the mounting hole, one end of the mounting portion 112 is connected to the clamping portion 111, and the other end is connected to an elastic component, where the elastic component is elastically pressed between the mounting portion 112 and the first mounting member 1. Through the abutting pressure between the elastic component and the mounting part 112 and the first mounting part 1, when the external force is applied to the clamping part 111, the elastic component can apply an external force to the external force through the self elasticity, namely the elastic pretightening force between the clamping groove 21 and the clamping part 111, so that the clamping groove 21 and the clamping part 111 are clamped.

In some embodiments, referring to fig. 5-7, the elastic component includes an elastic member 6 and a locking piece 5, a fixing groove 4 is provided on an outer peripheral wall of the other end of the mounting portion 112, the locking piece 5 is clamped in the fixing groove 4, and the elastic member 6 is elastically pressed between the locking piece 5 and the first mounting member 1.

In the actual installation, in order to enable the elastic piece 6 to be tightly attached to the locking piece 5, firstly, the elastic piece 6 is sleeved at the bottom end of the installation part 112, namely, at a position below the fixing groove 4 of the installation part 112, then the locking piece 5 is sleeved on the installation part 112 to be tightly attached to the elastic piece 6, and then the locking piece 5 is gradually pushed upwards, so that the elastic piece 6 is always tightly attached to the locking piece 5 to move, and when the locking piece 5 is just tightly clamped in the fixing groove 4, the upper end of the elastic piece 6 is tightly attached to the first installation piece 1; in design, the elastic member 6 is shaped and sized such that one end is located just above the fixing groove 4 and the other end of the elastic member 6 is in contact with the first mounting member 1. The locking piece 5 in the embodiment of the present utility model is to provide a supporting force to the elastic member 6, so that the elastic member 6 has a supporting force at both ends, and the elastic member 6 provides an elastic pre-tightening force to the outside when the outside applies a force to the elastic member 6.

In some embodiments, the locking piece 5 is configured as an annular piece, and the inner peripheral edge of the annular piece is snapped into the fixing groove 4; the elastic member 6 includes an annular portion 61 and elastic lugs 62 connected in the annular portion 61, the elastic lugs 62 are plural and connected to an inner peripheral wall of the annular portion 61 at intervals in a circumferential direction, the annular portion 61 abuts against the first mounting member 1, and the elastic lugs 62 extend in a radial direction of the annular portion 61 and are inclined in an axial direction to abut against the locking pieces 5.

Specifically, the elastic piece 6 is a bowl-like structure, and by arranging a plurality of elastic lugs 62, the elastic lugs 62 are propped against the periphery of the locking plate 5, and the elastic lugs 62 release elastic pretightening force when external acting force is applied; the elastic tab 62 extends along the radial direction of the annular portion 61 and inclines along the axial direction to abut against the locking plate 5, and is in a state of the elastic member 6 when the locking groove 21 and the locking portion 111 are not connected, when the locking groove 21 contacts with the locking portion 111, an acting force is given to the elastic tab 62, so that the elastic tab 62 gives an upward elastic pre-tightening force to the external mounting portion 112, and then the elastic tab 62 of the elastic member 6 moves upward along with the locking plate 5 and the mounting portion 112, and at this time, the caliber of the elastic member 6 similar to a bowl-shaped structure also becomes large.

In some embodiments, as shown with reference to fig. 7, the locking tab 5 has a deformation opening 51. The caliber of the locking plate 5 can be changed by the deformation opening 51, and the mounting part 112 of the embodiment of the utility model is a cylinder, so that the caliber of the deformation opening 51 can be adapted to the diameter of the mounting part 112, the caliber of the locking plate 5 which is sleeved on the mounting part 112 just before is larger than the caliber of the locking plate 5 which is sleeved in the fixing groove 4, on one hand, the deformation opening is adapted to the change of different calibers of the locking plate 5 which are mounted on the same mounting part 112, and also the change of the locking plate 5 which is arranged on the mounting part 112 with different diameters can be adapted.

In some embodiments, the first mounting member 1 is further provided with a mounting cavity 15, the mounting cavity 15 is formed on one side of the first mounting member 1 facing away from the clamping portion 111, the mounting cavity 15 is communicated with the mounting hole, and the elastic component is located in the mounting cavity 15 and elastically abuts against the inner upper wall of the mounting cavity 15. Providing the mounting cavity 15 may facilitate mounting the elastic assembly on the mounting portion 112, while also facilitating support and stress between the elastic assembly and the inner wall of the mounting cavity 15.

In some embodiments, with continued reference to fig. 1, the first mounting member 1 includes a main body portion and a mounting boss 12, the mounting boss 12 is mounted on one side of the main body portion, the mounting boss 12 has a smaller width than the main body portion to define a chute 14 on both sides of the mounting boss 12, and a clamping portion 111 protrudes from the mounting boss 12; referring to fig. 3, two spaced apart protrusions 23 are provided on one side of the second mounting member 2, a mounting groove is formed between the two protrusions 23, the mounting boss 12 is mounted in the mounting groove, and a locking groove 21 is formed in the mounting groove to be locked and engaged with the locking portion 111.

According to the embodiment of the utility model, the first mounting piece 1 and the second mounting piece 2 are mounted through the matching between the sliding groove 14 and the protruding strip 23, meanwhile, the mounting groove and the mounting boss 12 are mounted in a matching manner, the clamping groove 21 is matched with the clamping part 111, and the stability and the guidance between the first mounting piece 1 and the second mounting piece 2 can be enhanced through the connection modes such as clamping and clamping in a plurality of modes, wherein the guidance is that when the clamping groove 21 is connected with the clamping part 111, the clamping groove 21 is matched with the clamping part 111 in a rapid advanced position. In addition, in order to control the position when the protruding strip 23 and the sliding groove 14 slide in a matched manner, a baffle 13 is arranged at one end of the installation boss 12, and the baffle 13 is communicated with the two sliding grooves 14, so that the limiting function when the protruding strip 23 and the sliding groove 14 slide in a matched manner is realized.

Further, the installation groove comprises a guide groove 22 and a clamping groove 21, the two guide grooves 22 are positioned at two sides of the clamping groove 21, when the first installation piece 1 is connected with the second installation piece 2, the protruding strip 23 of the second installation piece 2 is matched with the sliding groove 14 of the first installation piece 1, the two guide grooves 22 of the second installation piece 2 are positioned on the installation boss 12 of the first installation piece 1 and positioned at two ends of the lifting platform 11 on the installation boss 12, and then the clamping groove 21 is clamped on the clamping part 111; by this arrangement, the guidance of the first mounting member 1 and the second mounting member 2 at the time of mounting can be further enhanced, so that the engagement between the engaging groove 21 and the engaging portion 111 can be more quickly achieved.

In some embodiments, the clamping portion 111 is configured as a tapered structure, the clamping groove 21 is configured as a through groove with two sides open, and the clamping groove 21 has a dovetail-shaped cross section, and the clamping portion 111 is adapted to extend into along the open side from the clamping groove 21. When the engagement groove 21 having the dovetail-shaped cross section is connected to the engagement portion 111, the engagement groove is not easily released after connection, and reliability is good.

In some embodiments, referring to fig. 8, the inner wall surface of the engaging groove 21 includes two inclined surfaces and a plane, at least one of the two inclined surfaces is provided with a pre-tightening protrusion 211, the pre-tightening protrusion 211 is formed with a pressing curved surface, and the engaging portion 111 extends into the engaging groove 21 and presses against the pressing curved surface of the pre-tightening protrusion 211.

When the pre-tightening protrusion 211 of the embodiment of the utility model is connected with the clamping part 111, the clamping groove 21 and the clamping part 111 start to have relative displacement, and when the pre-tightening protrusion 211 is in contact with the clamping part 111 and cannot move, the elastic component on the mounting part 112 connected with the clamping part 111 applies a pre-tightening elastic force to the mounting part 112, and the mounting part 112 moves upwards; the pre-tightening protrusion 211 is an important structure for pushing up the engaging portion 111, and generates contact force between the engaging groove 21 and the engaging portion 111. The length of the pretensioning projection 211 extending in the direction of the inclined surface of the inner wall surface of the engagement groove 21 may be equal to the inclined surface length, or may be set according to the length of contact between the engagement groove 21 and the engagement portion 111, as long as the engagement portion 111 can be lifted up to approach the engagement groove 21.

The steps of mounting the first mounting member 1 and the second mounting member 2 according to the embodiment of the present utility model have been described above, and during the dismounting, the second mounting member 2 may be pulled upward with force, and when the second mounting member 2 is pulled, the inner wall of the inclined surface of the engagement groove 21 and the engagement portion 111 are supported with force, and the elastic component on the mounting portion 112 acts, and when the second mounting member 2 applies the upward pulling force to the first mounting member 1, the elastic component 6 on the first mounting member 1 applies the downward pulling force to the second mounting member 2, so that the first mounting member 1 and the second mounting member 2 are separated from each other.

In some embodiments, the first mounting member 1 is a carrying platform, the second mounting member 2 is an engagement platform, and the carrying platform is fixed on the scanning electron microscope, and generally can be fixed by bolts, and the engagement platform is fixed with the sample holder 3, and the engagement platform is fixed with the carrying platform. The carrying table serves as a supporting structure for carrying the sample tray 3, is connected to the sample tray 3 by being connected to the engagement table, and is used for supporting the sample tray 3.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the utility model, a "first feature" or "second feature" may include one or more of such features.

In the description of the present utility model, "plurality" means two or more.

In the description of the utility model, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact with each other by another feature therebetween.

In the description of the utility model, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A tray fixing device, comprising:

a first mount adapted to be mounted to a bottom of an electron microscope;

the lifting platform comprises a clamping part and a mounting part, the clamping part is connected with the mounting part, and the mounting part is movably mounted on the first mounting piece;

the second mounting piece is provided with a clamping groove, the clamping part is suitable for being in sliding clamping connection with the clamping groove, and the second mounting piece is used for mounting the sample holder;

and the elastic component is connected with the mounting part and is used for applying elastic force for tightly attaching the clamping part and the clamping groove.

2. The tray fixing device according to claim 1, wherein the first mounting member is provided with a mounting hole, the mounting portion is disposed through the mounting hole, one end of the mounting portion is connected to the clamping portion, and the other end of the mounting portion is connected to the elastic component, and the elastic component is elastically pressed between the mounting portion and the first mounting member.

3. The tray fixing device according to claim 2, wherein the elastic component comprises an elastic member and a locking piece, a fixing groove is formed in the outer peripheral wall of the other end of the mounting portion, the locking piece is clamped in the fixing groove, and the elastic member is elastically pressed between the locking piece and the first mounting member.

4. A pallet securing device according to claim 3, characterized in that the locking piece is configured as an annular piece, and an inner peripheral edge of the annular piece is snapped into the securing groove;

the elastic piece comprises an annular part and elastic lugs connected in the annular part, the elastic lugs are a plurality of and are connected with the inner peripheral wall of the annular part at intervals along the circumferential direction, the annular part is abutted against the first mounting piece in a fitting way, and the elastic lugs extend along the radial direction of the annular part and incline along the axial direction so as to be abutted against the locking plate.

5. The tray fixture of claim 4 wherein the locking tab has a deformation opening.

6. The tray fixing device according to claim 2, wherein the first mounting member is further provided with a mounting cavity formed on a side of the first mounting member facing away from the clamping portion, the mounting cavity is communicated with the mounting hole, and the elastic component is located in the mounting cavity and elastically abuts against an inner upper wall of the mounting cavity.

7. The tray fixing device according to claim 1, wherein the first mounting member includes a main body portion and a mounting boss mounted to one side of the main body portion, the mounting boss having a smaller width than the main body portion to define a slide groove on both sides of the mounting boss, the catching portion protruding from the mounting boss;

one side of the second mounting piece is provided with two spaced-apart protruding strips, a mounting groove is formed between the two protruding strips, the mounting boss is mounted in the mounting groove, and the mounting groove is internally provided with the clamping groove to be matched with the clamping part in a clamping way.

8. The tray fixture of claim 1 wherein the clamping portion is configured as a tapered structure, the clamping slot is configured as a through slot open on both sides, and the clamping slot has a dovetail-like cross-section, the clamping portion being adapted to extend into along an open side from the clamping slot.

9. The tray fixing device according to claim 8, wherein the inner wall surface of the engaging groove includes two inclined surfaces and a plane, at least one of the two inclined surfaces is provided with a pre-tightening protrusion, the pre-tightening protrusion is formed with a pressing curved surface, and the engaging portion extends into the engaging groove and presses against the pressing curved surface of the pre-tightening protrusion.

10. The tray fixing device according to claim 1, wherein the first mounting member is a carrying table, the second mounting member is a joining table, the carrying table is fixed on the scanning electron microscope, the joining table is fixed with the sample holder, and the joining table is fixed with the carrying table.