CN219065375U - Liquid immersion type liquid path circulating device for ultrasonic scanning detection - Google Patents

Abstract

The utility model relates to a liquid path circulating device for liquid immersion type ultrasonic scanning detection. The device comprises a scanning detection liquid tank and a liquid storage and collection tank, wherein a coupling medium in the liquid storage and collection tank is pumped by a coupling medium pumping pump unit and is injected into the scanning detection liquid tank through at least one infiltration impact spraying mechanism, and the infiltration impact spraying mechanism can be used for carrying out infiltration spraying and impact spraying on the coupling medium on a power semiconductor device entering the scanning detection liquid tank; the liquid tank liquid draining proportion adjusting valve is used for adaptively connecting the scanning detection liquid tank and the liquid storage and collection tank, and adjusting the opening of the liquid tank liquid draining proportion adjusting valve based on the liquid level of the coupling medium in the scanning detection liquid tank so as to adjust the state that the coupling medium in the scanning detection liquid tank flows into the liquid storage and collection tank. The utility model can effectively realize the automatic circulation of the coupling medium during ultrasonic scanning detection, improve the efficiency of ultrasonic scanning detection and reduce the cost of ultrasonic scanning detection.

Description

Liquid immersion type liquid path circulating device for ultrasonic scanning detection

Technical Field

The utility model relates to a liquid path circulating device, in particular to a liquid path circulating device for liquid immersion type ultrasonic scanning detection.

Background

When the ultrasonic scanning detection is carried out on the power semiconductor device, the detected power semiconductor device needs to be in a liquid spraying or immersion state, namely, the liquid immersion type ultrasonic scanning detection is realized.

In immersion ultrasonic scanning detection, a power semiconductor device needs to be placed in a coupling medium, and whenever an ultrasonic signal encounters an acoustic impedance interface (bubbles, gaps and cracks) on the surface or inside the power semiconductor device, the ultrasonic signal is reflected. The coupling medium, which is typically deionized water or absolute alcohol, serves to prevent rapid attenuation of the ultrasonic signal.

At present, when liquid immersion type ultrasonic scanning detection is adopted, the coupling medium is generally manually poured into the detection groove, the degree of automation is low in the whole detection process, the liquid path circulation cannot be effectively realized, the ultrasonic scanning detection efficiency is low, the ultrasonic scanning detection cost is high, and the industrial requirement on ultrasonic scanning detection cannot be met.

Disclosure of Invention

The utility model aims to overcome the defects in the prior art and provide a liquid path circulating device for liquid immersion type ultrasonic scanning detection, which can effectively realize automatic circulation of a coupling medium during ultrasonic scanning detection, improve the efficiency of ultrasonic scanning detection and reduce the cost of ultrasonic scanning detection.

According to the technical scheme provided by the utility model, the liquid path circulating device for liquid immersion ultrasonic scanning detection comprises

The scanning detection liquid tank is arranged on the scanning detection platform and is used for accommodating a coupling medium used for ultrasonic scanning detection of the power semiconductor device so as to carry out liquid immersion type ultrasonic scanning detection of the power semiconductor device by utilizing the accommodated coupling medium;

the liquid storage and collection box is positioned below the scanning detection liquid tank in the scanning detection platform and is used for providing a coupling medium required by ultrasonic scanning detection,

the coupling medium in the liquid storage and collection tank is pumped by a coupling medium pumping pump unit and is injected into the scanning detection liquid tank through at least one infiltration impact spraying mechanism, the infiltration impact spraying mechanism corresponds to the first end of the scanning detection liquid tank, which allows the power semiconductor device to enter, and the infiltration impact spraying mechanism can be used for performing infiltration spraying and impact spraying of the coupling medium on the power semiconductor device entering the scanning detection liquid tank so as to remove bubbles of the power semiconductor device entering the inner rear surface of the scanning detection liquid tank;

the liquid tank liquid draining proportion adjusting valve is used for adaptively connecting the scanning detection liquid tank and the liquid storage and collection tank, and adjusting the opening of the liquid tank liquid draining proportion adjusting valve based on the liquid level of the coupling medium in the scanning detection liquid tank so as to adjust the state that the coupling medium in the scanning detection liquid tank flows into the liquid storage and collection tank.

The coupling medium pumping pump unit comprises a coupling medium pumping pump body for pumping the coupling medium in the liquid storage and collection box and a pump body motor for driving the coupling medium pumping pump body to work,

the liquid inlet of the coupling medium extraction pump body is communicated with the liquid storage and collection box through a filter, and the liquid outlet of the coupling medium extraction pump body is connected with the infiltration impact spraying mechanism in an adaptive manner through the infiltration impact spraying pipe group so as to convey the extracted coupling medium into the infiltration impact spraying mechanism.

The infiltration impact spraying mechanism comprises:

the infiltration device is used for spraying the coupling medium on the surface of the power semiconductor device before entering the scanning detection liquid tank so as to infiltrate the surface of the power semiconductor device by using the sprayed coupling medium;

a bubble impact device for spraying coupling medium on the surface of the power semiconductor device after entering the scanning detection liquid tank to impact bubbles attached on the surface of the power semiconductor device, wherein,

the flow velocity of the coupling medium sprayed by the bubble impact device is larger than that of the coupling medium sprayed by the infiltration device.

The infiltration device and the bubble impact device are assembled on the removing bracket, wherein,

removing the bracket and crossing the end part of the scanning detection liquid tank so as to fixedly assemble the infiltration impact spraying mechanism at the end part of the scanning detection liquid tank;

the infiltration device and the bubble impact device are distributed on two sides of the removal bracket, and the infiltration device and the bubble impact device are parallel to each other;

when the coupling medium is sprayed, the infiltration device sprays above the liquid level of the coupling medium liquid pool in the scanning detection liquid tank, and the bubble impact device sprays below the liquid level of the coupling medium liquid pool in the scanning detection liquid tank.

The liquid outlet of the liquid tank liquid discharge proportion regulating valve is connected and communicated with the liquid storage and collection tank through a coupling medium return pipe;

the coupling medium return pipe is connected and communicated with the overflow tank outside the first end of the scanning detection liquid tank through the overflow return pipe, and the overflow tank is used for accommodating coupling medium overflowed from the scanning detection liquid tank.

Also included is a device test handler for cyclically transferring power semiconductor devices, wherein,

the device testing and conveying mechanism comprises a sealing box conveying rail matched with the device sealing box, a feeding area rail bracket arranged at the first end of the scanning detection liquid tank and a dehydration area rail bracket arranged at the second end of the scanning detection liquid tank;

a device sealing box is used for accommodating the power semiconductor device detected by ultrasonic scanning;

above the scanning detection platform, the sealing box conveying rail is connected with a feeding area rail bracket, the inner side wall of the scanning detection liquid tank and a dehydration area rail bracket in an adaptive manner;

when the power semiconductor device stored in the device sealing box is conveyed by utilizing the sealing box conveying track, the device sealing box enters the scanning detection liquid tank from the feeding area track support, and enters the dehydration area track support after passing through the scanning detection liquid tank.

A plurality of air knife sets for blowing and removing liquid to the device sealing box are arranged on the track bracket of the dehydration area,

the scanning detection platform is internally provided with an air blowing liquid-removing collection box for collecting the coupling medium blown off by the air knife set, and the coupling medium collected in the air blowing liquid-removing collection box can flow back into the liquid storage and liquid collection box.

The air knife group comprises at least one air knife for blowing air to the upper surface of the device sealing box and at least one air knife for simultaneously blowing air to the lower surface of the device sealing box,

the air knife comprises an air knife cylinder and a plurality of air blowing holes arranged on the air knife cylinder.

The seal box conveying track, the first end of the scanning detection liquid tank and the corresponding part of the scanning detection liquid tank are all in inclined distribution, and the seal box conveying track positioned in the scanning detection liquid tank is lower than the rest seal box conveying tracks above the scanning detection platform.

And a seal box movement driving mechanism for driving the device seal box to move along the seal box conveying track, wherein,

the seal box motion driving mechanism comprises a chain or a driving belt which is matched with the device seal box.

The utility model has the advantages that: the liquid storage and collecting tank is arranged in the scanning detection platform, coupling medium in the liquid storage and collecting tank can be injected into the scanning detection liquid tank through the infiltration impact spraying mechanism so as to form a coupling medium liquid tank in the scanning detection liquid tank, and the liquid level of the coupling medium liquid tank in the scanning detection liquid tank can be controlled by the liquid tank liquid draining proportion regulating valve based on the liquid level depth detected by the liquid level meter of the scanning detection liquid tank, so that the coupling medium liquid tank in the scanning detection liquid tank dynamically keeps a required ultrasonic detection state, the ultrasonic scanning detection efficiency is improved, and the ultrasonic scanning detection cost is reduced.

Drawings

FIG. 1 is a perspective view of one embodiment of a fluid circuit circulation device of the present utility model in a liquid immersion ultrasound scanning test.

Fig. 2 is a schematic structural diagram of an embodiment of the liquid path circulating device in liquid immersion ultrasonic scanning detection.

FIG. 3 is a perspective view of one embodiment of the impact infiltration spray mechanism of the present utility model.

FIG. 4 is a schematic structural view of an embodiment of the impact infiltration spraying mechanism of the present utility model.

Fig. 5 is a schematic diagram of the utility model when the scanning detection platform is omitted.

Reference numerals illustrate: the device comprises a 1-scanning detection platform, a 2-scanning detection liquid tank, a 3-infiltration impact spraying mechanism, a 4-device sealing box, a 5-sealing box conveying track, a 6-servo motor, a 7-air knife, an 8-liquid tank liquid discharge proportion adjusting valve, a 9-liquid storage and collection box, a 10-liquid storage and collection box liquid discharge pipe, a 11-pump body motor, a 12-coupling medium extraction pump body, a 13-scanning detection platform foot pad, a 14-scanning detection platform Ma Fulun, a 15-dehydration area track bracket, a 16-coupling medium return pipe, a 17-overflow liquid return pipe, a 18-overflow liquid tank, a 19-scanning detection liquid tank liquid level meter, a 20-impact spraying liquid pipe, a 21-infiltration spraying liquid pipe, a 22-liquid storage and collection box liquid level sensor, a 23-loading area track bracket, a 24-filter, a 25-removal bracket, a 26-infiltration device, a 27-bubble impact device, a 28-bracket arm hole, a 29-infiltration liquid inlet joint pipe, a 30-impact liquid inlet joint pipe, a 31-bubble impact nozzle, a 32-shunt flow pipe, a 33-bubble impact shunt pipe, a 34-infiltration nozzle and a 35-infiltration box collection box.

Detailed Description

The utility model will be further described with reference to the following specific drawings and examples.

In order to effectively realize the automatic circulation of the coupling medium during the ultrasonic scanning detection, improve the efficiency of the ultrasonic scanning detection, reduce the cost of the ultrasonic scanning detection, the liquid path circulation device for the liquid immersion type ultrasonic scanning detection comprises

A scanning detection liquid tank 2, which is arranged on the scanning detection platform 1 and is used for accommodating a coupling medium used for ultrasonic scanning detection of the power semiconductor device, so as to utilize the accommodated coupling medium to carry out liquid immersion type ultrasonic scanning detection of the power semiconductor device;

a liquid storage and collection tank 9 which is positioned below the scanning detection liquid tank 2 in the scanning detection platform 1 and is used for providing a coupling medium required during ultrasonic scanning detection, wherein,

the coupling medium in the liquid storage and collection tank 9 is pumped by a coupling medium pumping pump unit and is injected into the scanning detection liquid tank 2 through at least one infiltration impact spraying mechanism 3, the infiltration impact spraying mechanism 3 corresponds to the first end of the scanning detection liquid tank 2, which allows the power semiconductor device to enter, and infiltration spraying and impact spraying of the coupling medium can be carried out on the power semiconductor device entering the scanning detection liquid tank 2 by using the infiltration impact spraying mechanism 3 so as to remove bubbles of the power semiconductor device entering the inner rear surface of the scanning detection liquid tank 2;

the liquid tank liquid draining proportion adjusting valve 8 is used for adaptively connecting the scanning detection liquid tank 2 and the liquid storage and collection tank 9, and adjusting the opening of the liquid tank liquid draining proportion adjusting valve 8 based on the liquid level of the coupling medium in the scanning detection liquid tank 2 so as to adjust the state that the coupling medium in the scanning detection liquid tank 2 flows into the liquid storage and collection tank 9.

The scanning detection platform 1 is utilized to support the scanning detection liquid tank 2, and the scanning detection platform 1 can adopt the existing common platform form so as to meet the requirements of supporting the scanning detection liquid tank 2 and ultrasonic scanning detection. The bottom of the scanning detection platform 1 is provided with a plurality of uniformly distributed scanning detection platform pad feet 13 and a scanning detection platform Ma Fulun, as shown in fig. 1 and 2, wherein the scanning detection platform 1 can be stably placed at a required position by supporting the scanning detection platform 1 by using the scanning detection platform pad feet 13, and the scanning detection platform 1 can be conveniently moved to the required position by using the scanning detection platform horse wheel 14.

The scanning detection liquid tank 2 is generally rectangular, the scanning detection liquid tank 2 can store coupling medium so as to form a coupling medium liquid tank in the scanning detection liquid tank 2, namely, the liquid immersion type ultrasonic scanning detection is carried out on the power semiconductor device by utilizing the coupling medium liquid tank in the scanning detection liquid tank 2, specifically, the power semiconductor device to be scanned and detected can be immersed in the coupling medium liquid tank in the scanning detection liquid tank 2, and after being immersed in the coupling medium liquid tank, the ultrasonic scanning detection can be carried out on the power semiconductor device.

In order to enable the coupling medium liquid pool in the scanning detection liquid tank 2 to meet the requirement of ultrasonic scanning detection, a liquid storage and collection tank 9 is arranged in the scanning detection platform 1, and at the moment, the liquid storage and collection tank 9 is positioned below the scanning detection liquid tank 2. The liquid storage and collection tank 9 is used for storing coupling media, and the stored coupling media comprise coupling media injected from outside and coupling media circulated and reflowed in the scanning detection process.

From the above description, it is clear that the coupling medium in the scanning detection liquid tank 2 is in a dynamic change process during the ultrasonic scanning detection process. In order to improve the reliability of ultrasonic scanning detection, when entering the coupling medium liquid pool, the ultrasonic scanning part of the power semiconductor device needs to be free of bubbles, namely the effect of the bubbles on the ultrasonic scanning detection needs to be avoided. In order to achieve the required purpose, an immersion impact spraying mechanism 3 is arranged at the first end of the scanning detection liquid tank 2, and the immersion impact spraying mechanism 3 is utilized to carry out immersion and impact on the surface of the power semiconductor device entering the coupling medium liquid tank so as to prevent bubbles in the ultrasonic scanning detection area of the power semiconductor device after the power semiconductor device enters the coupling medium liquid tank.

After the coupling medium is sprayed on the power semiconductor device, the coupling medium sprayed by the soaking impact spraying mechanism 3 can enter the scanning detection liquid tank 2, and at the moment, the liquid level of the coupling medium liquid tank in the scanning detection liquid tank 2 can change. In order to improve the stability of the liquid level of the coupling medium liquid pool in the scanning detection liquid pool 2, the coupling medium in the scanning detection liquid pool 2 can be released by the liquid pool liquid discharge proportion regulating valve 8 and flows back into the liquid storage tank 9, and at the moment, the liquid level of the coupling medium liquid pool in the scanning detection liquid pool 2 can be dynamically balanced.

In specific implementation, the liquid tank draining proportion regulating valve 8 can adopt the existing common proportion regulating electromagnetic valve, the opening of the liquid tank draining proportion regulating valve 8 is related to the liquid level of the coupling medium in the scanning detection liquid tank 2, for example, a reference liquid level can be arranged on the coupling medium liquid tank in the scanning detection liquid tank 2, when the liquid level of the coupling medium liquid tank is higher than the reference liquid level, the opening of the liquid tank draining proportion regulating valve 8 is increased, otherwise, the opening of the liquid tank draining proportion regulating valve 8 is kept or reduced, specifically, the liquid level of the coupling medium liquid tank in the scanning detection liquid tank 2 can be kept stable, and the requirement that the power semiconductor device is positioned in the coupling medium liquid tank for carrying out required ultrasonic scanning detection can be met.

In fig. 1, the liquid level in the scanning detection liquid tank 2 can be detected by using a scanning detection liquid tank liquid level meter 19, the scanning detection liquid tank liquid level meter 19 can adopt the existing common form, for example, the scanning detection liquid tank liquid level meter 19 can be used for detecting the lowest liquid level, the highest liquid level or the real-time liquid level in the scanning detection liquid tank 2, and the condition of the liquid level in the scanning detection liquid tank 2 detected by the scanning detection liquid tank liquid level meter 19 can be selected according to the requirement, so that the purpose of dynamically controlling the dynamic balance of the liquid level of the coupling medium liquid tank in the scanning detection liquid tank 2 by using a liquid tank liquid draining proportion regulating valve 8 can be met.

In fig. 1, a liquid storage and collection tank drain pipe 10 and a liquid storage and collection tank liquid level sensor 22 are provided on a liquid storage and collection tank 9, and when the coupling medium in the liquid storage and collection tank 9 is small, the coupling medium can be injected and replenished from the outside by using the liquid storage and collection tank liquid level sensor 22. The coupling medium in the liquid storage and collection tank 9 can be discharged by the liquid storage and collection tank liquid discharge pipe 10.

In one embodiment of the utility model, the coupling medium pumping pump unit comprises a coupling medium pumping pump body 12 for pumping the coupling medium in the liquid storage and collection tank 9 and a pump body motor 11 for driving the coupling medium pumping pump body 12 to work, wherein,

the liquid inlet of the coupling medium extracting pump body 12 is communicated with the liquid storage and collection box 9 through a filter 24, and the liquid outlet of the coupling medium extracting pump body 12 is connected with the infiltration impact spraying mechanism 3 in an adaptive manner through the infiltration impact spraying pipe group so as to convey the extracted coupling medium into the infiltration impact spraying mechanism 3.

In specific implementation, the coupling medium pumping pump body 12 can be a conventional pump, so as to pump the coupling medium in the liquid storage and collection tank 9. In order to avoid that the ultrasonic scanning detection is affected by impurities in the coupling medium in the liquid storage and collection tank 9, when the coupling medium is extracted by the coupling medium extraction pump body 12, the extracted coupling medium is filtered by the filter 24. The filter 24 may take the form of conventional filtering, particularly if the filtering is sufficient for extraction of the coupling medium.

The pump body motor 11 is used for driving the coupling medium pumping pump body 12 to work, and the pump body motor 11 can adopt the existing common motor mode, and specifically, the pump body motor 11 can drive the coupling medium pumping pump body 12 to work. As can be seen from the above description, the extracted coupling medium needs to be injected into the scanning detection liquid tank 2 through the immersion impact spraying mechanism 3, that is, the liquid outlet of the coupling medium extracting pump body 12 is connected with the immersion impact spraying mechanism 3 in an adaptive manner. Of course, when the coupling medium is injected into the scanning detection liquid tank 2, the coupling medium sprayed by the soaking impact spraying mechanism 3 can also be used for removing bubbles on the surface of the power semiconductor device entering the coupling medium liquid tank.

In one embodiment of the present utility model, the immersion impact spraying mechanism 3 includes:

the infiltrating device 26 is used for spraying the coupling medium on the surface of the power semiconductor device before entering the scanning detection liquid tank 2 so as to infiltrate the surface of the power semiconductor device by using the sprayed coupling medium;

a bubble striking device 27 for spraying a coupling medium on the surface of the power semiconductor device after entering the scanning detection liquid tank 2 to strike bubbles attached to the surface of the power semiconductor device, wherein,

the flow rate and the flow velocity of the coupling medium sprayed by the bubble impact device 27 are larger than those of the coupling medium sprayed by the infiltration device 26.

In fig. 1 and 3, an embodiment of the immersion impact spraying mechanism 3 is shown, and as can be seen from the foregoing description, the coupling medium may be deionized water or absolute alcohol, the power semiconductor device may be a MOSFET type device or an IGBT type device, and the type of the power semiconductor device and the type of the coupling medium may be more specifically selected so as to satisfy the ultrasonic scanning detection.

When the ultrasonic scanning detection is carried out, the power semiconductor device is required to be positioned in the coupling medium liquid pool, namely the ultrasonic scanning part of the power semiconductor device is positioned below the liquid surface of the coupling medium liquid pool. In order to avoid the influence of bubbles attached to the surface of the power semiconductor device on ultrasonic scanning detection, before the power semiconductor device enters the coupling medium liquid pool, the surface of the power semiconductor device is sprayed with the coupling medium by utilizing the infiltration device 26, and the sprayed coupling medium and the coupling medium liquid pool can be of the same type. The infiltrating device 26 is used for realizing the infiltration of the surface of the power semiconductor device after the surface of the power semiconductor device is sprayed with the coupling medium so as to smooth and uniformly coat the surface of the power semiconductor device, and the power semiconductor device is prevented from entering the coupling medium liquid pool from a dry surface, so that the problem caused by the fact that the surface of the power semiconductor device is dried and enters the coupling medium liquid pool can be avoided, namely, when entering the coupling medium liquid pool, bubbles attached to the surface of the power semiconductor device can be reduced.

After the power semiconductor device enters the coupling medium liquid pool, a small amount of bubbles possibly exist to be adsorbed on the surface of the power semiconductor device, at the moment, the surface of the power semiconductor device is sprayed by utilizing the bubble impact device 27, and the sprayed coupling medium is used for impacting the bubbles attached to the surface of the power semiconductor device, so that the bubbles attached to the surface of the power semiconductor device are further eliminated, and the reliability of the power semiconductor device in ultrasonic scanning detection is improved.

In specific implementation, the coupling medium sprayed by the bubble impact device 27 is generally the same as the coupling medium sprayed by the infiltration device 26 and the coupling medium in the coupling medium liquid pool, and the flow velocity of the coupling medium sprayed by the bubble impact device 27 are both greater than the corresponding flow and flow velocity of the coupling medium sprayed by the infiltration device 26. The corresponding flow and flow velocity of the coupling medium sprayed by the infiltration device 26 and the bubble impact device 27 are specifically related to the speed of the power semiconductor device entering the coupling medium liquid pool, and the specific flow and flow velocity are set so as to meet the requirement of effectively removing bubbles attached to the surface of the power semiconductor device. Specifically, the corresponding flow and flow rate of the coupling medium sprayed by the infiltration device 26 and the bubble impact device 27 can be controlled by adopting a proportional valve or the like.

In one embodiment of the utility model, the infiltration device 26, the bubble impingement device 27 are mounted on the removal support 25, wherein,

the removing bracket 25 spans the end part of the scanning detection liquid tank 2 so as to fixedly assemble the infiltration impact spraying mechanism 3 on the end part of the scanning detection liquid tank 2;

the infiltration device 26 and the bubble impact device 27 are distributed on two sides of the removal bracket 25, and the infiltration device 26 and the bubble impact device 27 are parallel to each other;

when the coupling medium is sprayed, the infiltration device 26 sprays above the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 2, and the bubble impact device 27 sprays below the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 2.

Fig. 3 shows an embodiment of the immersion device 26 and the bubble impact device 27 cooperating with the removal bracket 25, in fig. 3, the immersion device 26 and the bubble impact device 27 are distributed on two sides of the removal bracket 25, the respective length directions of the immersion device 26 and the bubble impact device 27 are consistent with the length direction of the removal bracket 25, and the immersion device 26 and the bubble impact device 27 are parallel to each other.

When the immersion device 26 and the bubble impact device 27 are fixed to the removal holder 25, the removal holder 25 can be connected to the first end of the scanning detection liquid tank 2 in an adaptive manner. In fig. 3, a bracket arm hole 28 is provided on the removal bracket 25, and the state of the removal bracket 25 being adapted to be connected to the first end of the scanning detection liquid tank 2 can be adjusted by using the bracket arm hole 28.

To improve the reliability of the spraying, the immersion device 26 sprays the coupling medium above the liquid level of the coupling medium bath, while the bubble impact device 27 sprays below the liquid level of the coupling medium bath. When the bubble impact device 27 is arranged below the liquid surface of the coupling medium liquid pool for spraying, air can be prevented from being brought into the coupling medium liquid pool.

In one embodiment of the present utility model, the bubble striking device 27 includes a bubble striking shunt tube 33 and a plurality of bubble striking nozzles 31 disposed on the bubble striking shunt tube 33, wherein,

the plurality of bubble impact sprayers 31 are uniformly distributed on the bubble impact shunt tubes 33 along the length direction of the bubble impact shunt tubes 33, and the bubble impact sprayers 31 are communicated with the bubble impact shunt tubes 33.

In fig. 3, the main body of the removal bracket 25 is in a column shape, and in fig. 3 and 4, the bubble impact device 27 comprises a bubble impact shunt tube 33 and a plurality of bubble impact spray heads 31, the bubble impact shunt tube 33 is in a tubular shape, for example, a column-shaped tube similar to the removal bracket 25 can be adopted, and the specific shape of the bubble impact shunt tube 33 can be selected according to requirements. The bubble impact shunt 33 is fixedly attached to one side of the removal holder 25, and the length direction of the bubble impact shunt 33 coincides with the length direction of the removal holder 25.

The plurality of bubble impact sprayers 31 are uniformly distributed along the length direction of the bubble impact shunt tube 33, so that spraying of a plurality of power semiconductor devices at a time can be realized by utilizing the plurality of bubble impact sprayers 31. Of course, the distribution of the bubble-impact jets 31 on the bubble-impact shunt tubes 33 may be selected as desired, based on meeting the desired spray requirements. The bubble impact spray head 31 is communicated with the bubble impact shunt tube 33, so that the coupling medium to be sprayed needs to enter the bubble impact shunt tube 33 first and then be sprayed out of the bubble impact spray head 31.

In order to improve the efficiency of installing and replacing the bubble impact nozzle 31, a joint threaded pipe is arranged on the bubble impact shunt pipe 33, and the bubble impact nozzle 31 is in threaded connection with the joint threaded pipe in a threaded manner so as to realize the communication of the bubble impact shunt pipe 33 after being connected and matched with the joint threaded pipe. Of course, the air bubble impact nozzle 31 can also adopt other forms of connection and matching with the air bubble impact shunt tube 33, and can be specifically selected according to the needs, so as to meet the requirement of quick and convenient connection and matching between the air bubble impact nozzle 31 and the air bubble impact shunt tube 33.

In order to improve the spraying effect, the nozzle of the bubble impact spray head 31 is flat, wherein the length direction of the nozzle of the bubble impact spray head 31 is perpendicular to the movement direction of the sample to be tested gradually entering the coupling medium liquid pool.

In one embodiment of the present utility model, the bubble impact showerhead 31 has a flat portion located at the head of the bubble impact showerhead 31 such that the nozzle of the bubble impact showerhead 31 is flat. When the nozzle of the bubble impact nozzle 31 is flat, the length direction of the nozzle of the bubble impact nozzle 31 is perpendicular to the movement direction of the power semiconductor device gradually entering the coupling medium liquid pool. For the embodiment of fig. 3, the length of the nozzle of the bubble impact jet 31 coincides with the length of the bubble impact shunt 33.

In one embodiment of the present utility model, the infiltration device 26 includes an infiltration shunt 32 and a plurality of infiltration nozzles 34 disposed on the infiltration shunt 32, wherein,

the plurality of infiltration nozzles 34 are uniformly distributed on the infiltration shunt tubes 32 along the length direction of the infiltration shunt tubes 32, and the infiltration nozzles 34 are mutually communicated with the infiltration shunt tubes 32.

In a specific implementation, the nozzle of the infiltration nozzle 34 is flat, where the length direction of the nozzle of the infiltration nozzle 34 is perpendicular to the moving direction of the sample to be measured gradually entering the coupling medium liquid pool. For the specific conditions of the infiltration shunt tube 32 and the infiltration nozzle 34, reference may be made to the above description of the bubble impact shunt tube 33 and the bubble impact nozzle 31, that is, the same matching form as the bubble impact device 27 may be adopted, and details are not repeated here.

Fig. 4 shows a schematic height diagram of the infiltration nozzle 34 and the bubble impact nozzle 31 on both sides of the removal support 25, so that the coupling medium spraying described above can be satisfied by using the height difference between the infiltration nozzle 34 and the bubble impact nozzle 31. The height difference H in fig. 4 may be selected according to practical needs so as to satisfy the requirement of spraying the coupling medium onto the surface of the power semiconductor device.

In fig. 3, an immersion liquid inlet joint pipe 29 is disposed on the immersion shunt pipe 32, an impact liquid inlet joint pipe 30 is disposed on the bubble impact shunt pipe 33, at this time, a liquid outlet of the coupling medium extraction pump body 12 is connected with the impact liquid inlet joint pipe 30 in an adaptive manner through the impact spray liquid pipe 20, and is connected with the immersion liquid inlet joint pipe 29 in an adaptive manner through the immersion spray liquid pipe 21, so as to convey the extracted coupling medium to the immersion impact spray mechanism 3, as shown in fig. 1.

In one embodiment of the utility model, the liquid outlet of the liquid tank liquid discharge proportion regulating valve 8 is connected and communicated with the liquid storage and collection tank 9 through a coupling medium return pipe 16;

the coupling medium return pipe 16 is connected and communicated with a liquid overflow groove 18 outside the first end of the scanning detection liquid groove 2 through a liquid overflow return pipe 17, and the liquid overflow groove 18 is used for accommodating the coupling medium overflowed by the scanning detection liquid groove 2.

In order to realize that the coupling medium flows back into the liquid storage and recovery tank 9, the liquid tank liquid discharge proportion regulating valve 8 is connected and communicated with the liquid storage and recovery tank 9 through the coupling medium return pipe 16, namely when the liquid tank liquid discharge proportion regulating valve 8 is opened, the coupling medium in the scanning detection liquid tank 2 can flow back into the liquid storage and recovery tank 9 through the liquid tank liquid discharge proportion regulating valve 8 and the coupling medium return pipe 16.

In the implementation, the overflow tank 18 is arranged outside the first end of the scanning detection liquid tank 2, and when the coupling medium flowing into the scanning detection liquid tank 2 is excessive, the coupling medium can overflow into the overflow tank 18, so that the environmental pollution caused by excessive overflow of the coupling medium is avoided. The coupling medium entering the overflow tank 18 can flow back to the liquid storage and collection tank 9 through the overflow liquid return pipe 17 and the coupling medium return pipe 16, so that the recycling of the coupling medium during ultrasonic scanning detection can be effectively realized, and the cost of ultrasonic scanning detection is reduced.

In one embodiment of the utility model, a device test handler for cyclically transferring power semiconductor devices is also included, wherein,

the device testing and conveying mechanism comprises a sealing box conveying track 5 matched with the device sealing box 4, a feeding area track bracket 23 arranged at the first end of the scanning detection liquid tank 2 and a dehydration area track bracket 15 arranged at the second end of the scanning detection liquid tank 2;

the power semiconductor device detected by ultrasonic scanning is accommodated by the device sealing box 4;

above the scanning detection platform 1, a sealing box conveying rail 5 is connected with a feeding area rail bracket 23, the inner side wall of the scanning detection liquid tank 2 and a dehydration area rail bracket 15 in an adaptive manner;

when the power semiconductor device stored in the device sealing box 4 is conveyed by the sealing box conveying rail 5, the device sealing box 4 enters the scanning detection liquid tank 2 from the feeding area rail bracket 23, passes through the scanning detection liquid tank 2 and then enters the dehydration area rail bracket 15.

In order to realize the automation of ultrasonic scanning detection, the device test conveying mechanism is required to realize the conveying of the power semiconductor device, and certainly, the power semiconductor device needs to be immersed in a coupling medium liquid pool in the scanning detection liquid tank 2 in the conveying process of the power semiconductor device.

In specific implementation, the device sealing box 4 is utilized to realize the storage and the transportation of a plurality of power semiconductor devices at a time, and of course, the power semiconductor devices need to ensure a sealing state in the device sealing box 4, namely, when the power semiconductor devices are immersed in a coupling medium liquid pool through the device sealing box 4, the power semiconductor devices can be waterproof, the ultrasonic scanning detection of the power semiconductor devices cannot be influenced, and the damage to the power semiconductor devices is avoided. The device sealing box 4 can take the conventional common form, and particularly, the device sealing box can be used for accommodating and conveying the power semiconductor devices.

In one embodiment of the present utility model, a feeding area rail bracket 23 is disposed outside the first end of the scanning detection liquid tank 2, a dewatering area rail bracket 15 is disposed outside the second end of the scanning detection liquid tank 2, and the dewatering area rail bracket 15 and the feeding area rail bracket 23 are supported on the scanning detection platform 1, so that the assembly of the seal box conveying rail 5 can be realized by using the dewatering area rail bracket 15, the feeding area rail bracket 23 and the scanning detection liquid tank 2.

The seal box conveying track 5 is oval, the device seal box 4 can move along the seal box conveying track 5, so that the cyclic motion of the device seal box 4 can be realized, and when the device seal box 4 circularly moves, the feeding process of the power semiconductor device in the device seal box 4, the ultrasonic scanning detection in the scanning detection liquid tank 2 and the blanking process after the ultrasonic scanning detection can be realized, so that the ultrasonic scanning efficiency is improved.

In one embodiment of the utility model, a seal cartridge movement drive mechanism for driving the movement of the device seal cartridge 4 along the seal cartridge transport track 5 is also included, wherein,

the capsule motion drive mechanism comprises a chain or belt adapted to the device capsule 4.

In particular embodiments, the movement of the device seal cartridge 4 is powered by a seal cartridge movement drive mechanism that is coupled to the device seal cartridge 4 in a manner that includes a chain or belt, although other arrangements are possible. In fig. 1, a servo motor 6 is arranged on a scanning detection platform 1, and a chain or a driving belt can be driven to circularly move by using power provided by the servo motor 6. When the chain is adopted to be connected with the device sealing box 4 in an adapting way, chain wheels matched with the chain are required to be arranged on the dehydration area track support 15 and the feeding area track support 23, the servo motor 6 drives the chain wheels to rotate, namely, the chain is driven to rotate through the rotation of the chain wheels, so that the driving device sealing box 4 moves along the sealing box conveying track 5, the other forms of driving device sealing boxes 4 moving along the sealing box conveying track 5 are not listed one by one, and the driving device sealing box 4 can circularly move along the sealing box conveying track 5.

When the power semiconductor device is subjected to ultrasonic scanning detection, a feeding area is formed in the area where the feeding area track support 23 is located, and a detected dehydration area is formed in the area where the dehydration area track support 15 is located. The power semiconductor device to be subjected to ultrasonic scanning detection needs to be placed in the device sealing box 4 in the feeding area so as to seal and carry the power semiconductor device to be subjected to ultrasonic scanning detection by using the device sealing box 4. During carrying, the device sealing box 4 enters the scanning detection liquid tank 2 from the feeding area, is submerged in the coupling medium liquid tank in the scanning detection liquid tank 2, and then is subjected to ultrasonic scanning detection by an ultrasonic scanner corresponding to the scanning detection liquid tank 2.

After ultrasonic scanning detection, the coupling medium enters a dehydration area after detection from the scanning detection liquid tank 2, so that the coupling medium brought out of the scanning detection liquid tank 2 is prevented from damaging the environment of the site. After the coupling medium on the device sealing box 4 is removed, the seal inspection box conveying track 2 enters the scanning detection platform 1, finally moves to the position of the area corresponding to the feeding area in the scanning detection platform 1, and the power semiconductor device after ultrasonic scanning can be moved out of the device sealing box 4, so that the device sealing box 4 is transported to the feeding area above the scanning detection platform 1 again for feeding again.

The process of sealing and carrying the power semiconductor device by using the device sealing box 4 is repeated, so that ultrasonic scanning detection of different power semiconductor devices can be circularly realized.

In one embodiment of the present utility model, the seal box conveying track 5 and the first end of the scan detection liquid tank 2 and the corresponding portion of the scan detection liquid tank 2 are all distributed in an inclined manner, and the seal box conveying track 5 located in the scan detection liquid tank 2 is lower than the rest of seal box conveying tracks 5 above the scan detection platform 1.

In fig. 1, when the power semiconductor device is placed in the device sealing box 4 of the loading area, the device sealing box 4 is located above the scanning detection liquid tank 2. In order to improve the reliability of the entry of the device sealing case 4 into the scanning detection liquid tank 2, the sealing case conveying rail 5 corresponding to the first end of the scanning detection liquid tank 2 is inclined. The first end of the immersion impact spraying mechanism 3 corresponds to the sealing box conveying track 5 which is distributed in an inclined manner at the first end of the scanning detection liquid tank 2, and the immersion device 26 is adjacent to the feeding area, so that the immersion device 26 is located above the liquid level of the coupling medium liquid pool when spraying the coupling medium on the device sealing box 4. The bubble impact device 27 is positioned below the liquid level of the coupling medium liquid pool, i.e. can spray the coupling medium on the surface of the device sealing box 4 entering the scanning detection liquid pool 2.

In one embodiment of the utility model, a plurality of air knife sets for blowing air and removing liquid from the device sealing box 4 are arranged on the track bracket 15 of the dewatering area, wherein,

the scanning detection platform 1 is internally provided with an air blowing and liquid removing collection box 35 for collecting the coupling medium blown off by the air knife set, and the coupling medium collected in the air blowing and liquid removing collection box 35 can flow back into the liquid storage and liquid collection box 9.

In order to remove the coupling medium carried on the device sealing box 4, an air knife set is arranged on the dehydration area track support 15, and the air knife set can blow air into the device sealing box 4 entering the dehydration area track support 15, so that the coupling medium carried on the device sealing box 4 is blown off under the action of blown high-pressure air, the blown-off coupling medium enters a blowing liquid-removing collecting box 35 below, and finally can return to the liquid storage collecting box 9, so that the collection and subsequent circulation of the coupling medium after the blowing off are realized.

In one embodiment of the utility model, the air knife set comprises at least one air knife 7 for blowing air to the upper surface of the device sealing box 4 and at least one air knife 7 for simultaneously blowing air to the lower surface of the device sealing box 4, wherein,

the air knife 7 comprises an air knife cylinder and a plurality of air blowing holes arranged on the air knife cylinder.

In order to achieve effective blowing-off of the coupling medium carried on the device sealing box 4, the air knife set needs to include an air knife 7 for blowing air to the upper surface of the device sealing box 4 and an air knife 7 for blowing air to the lower surface of the device sealing box 4 simultaneously, in fig. 1, an embodiment in which three air knives 7 are disposed on the dewatering-zone track support 15 is shown, that is, in this case, the upper surface of the device sealing box 4 may be blown by using three air knives 7, the air knife 7 for blowing air to the lower surface of the device sealing box 4 is not shown in fig. 1, and the position distribution of the air knives 7 for blowing air to the lower surface of the device sealing box 4 may be selected according to needs, specifically, in order to enable blowing air to the lower surface of the device sealing box 4.

In specific implementation, the air knife 7 comprises an air knife cylinder and a plurality of air blowing holes, wherein the air blowing holes can be uniformly distributed on the air knife cylinder along the length direction of the air knife cylinder, and the air knife cylinder is used for being connected with an external high-pressure air source, namely the external high-pressure air source firstly enters the air knife cylinder and then is blown out. Generally, the high-pressure air source is distributed on the scanning detection platform 1, and the specific distribution position is based on that the high-pressure air source required by the air knife 7 can be provided.

In order to blow the device sealing box 4, the part of the sealing box conveying track 5 corresponding to the second end of the scanning detection liquid tank 2 is inclined, namely, when the device sealing box 4 comes out of the scanning detection liquid tank 2, the device sealing box 4 needs to climb upwards, and during climbing, the coupling medium carried on the device sealing box 4 is blown off. The blown-off coupling medium falls into the blown-off liquid collection box.

When the device sealing box 4 blown by the air knife group continues to be conveyed, the device sealing box enters the scanning detection platform 1 from the upper part of the scanning detection platform 1 until the device sealing box enters the position of the corresponding area of the feeding area again.

Claims (10)

1. A liquid path circulating device for liquid immersion ultrasonic scanning detection is characterized by comprising

A scanning detection liquid tank (2) which is arranged on the scanning detection platform (1) and is used for accommodating a coupling medium used for ultrasonic scanning detection of the power semiconductor device so as to carry out liquid immersion ultrasonic scanning detection of the power semiconductor device by utilizing the accommodated coupling medium;

a liquid storage and collection tank (9) which is positioned below the scanning detection liquid tank (2) in the scanning detection platform (1) and is used for providing a coupling medium required during ultrasonic scanning detection, wherein,

the coupling medium in the liquid storage and collection tank (9) is pumped by a coupling medium pumping pump unit and is injected into the scanning detection liquid tank (2) through at least one infiltration impact spraying mechanism (3), the infiltration impact spraying mechanism (3) corresponds to the first end of the scanning detection liquid tank (2) allowing the power semiconductor device to enter, and infiltration spraying and impact spraying of the coupling medium can be carried out on the power semiconductor device entering the scanning detection liquid tank (2) by utilizing the infiltration impact spraying mechanism (3) so as to remove bubbles of the power semiconductor device entering the inner rear surface of the scanning detection liquid tank (2);

the liquid tank liquid draining proportion adjusting valve (8) is used for adaptively connecting the scanning detection liquid tank (2) and the liquid storage and collection tank (9), and adjusting the opening of the liquid tank liquid draining proportion adjusting valve (8) based on the liquid level of the coupling medium in the scanning detection liquid tank (2) so as to adjust the state that the coupling medium in the scanning detection liquid tank (2) flows into the liquid storage and collection tank (9).

2. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 1, characterized in that: the coupling medium extraction pump unit comprises a coupling medium extraction pump body (12) for extracting coupling medium in the liquid storage and collection tank (9) and a pump body motor (11) for driving the coupling medium extraction pump body (12) to work,

the liquid inlet of the coupling medium extraction pump body (12) is communicated with the liquid storage and collection box (9) through a filter (24), and the liquid outlet of the coupling medium extraction pump body (12) is connected with the infiltration impact spraying mechanism (3) in an adaptive manner through the infiltration impact spraying pipe group so as to convey the extracted coupling medium into the infiltration impact spraying mechanism (3).

3. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 1, characterized in that: the infiltration impact spraying mechanism (3) comprises:

the infiltrating device (26) is used for spraying the coupling medium on the surface of the power semiconductor device before entering the scanning detection liquid tank (2) so as to infiltrate the surface of the power semiconductor device by using the sprayed coupling medium;

a bubble impact device (27) for spraying a coupling medium on the surface of the power semiconductor device after entering the scanning detection liquid tank (2) to impact bubbles attached to the surface of the power semiconductor device, wherein,

the flow rate and the flow velocity of the coupling medium sprayed by the bubble impact device (27) are larger than those of the coupling medium sprayed by the infiltration device (26).

4. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 3, wherein: the infiltration device (26) and the bubble impact device (27) are assembled on the removal bracket (25), wherein,

the removing bracket (25) spans the end part of the scanning detection liquid tank (2) so as to fixedly assemble the infiltration impact spraying mechanism (3) at the end part of the scanning detection liquid tank (2);

the infiltration device (26) and the bubble impact device (27) are distributed on two sides of the removal bracket (25), and the infiltration device (26) and the bubble impact device (27) are parallel to each other;

when the coupling medium is sprayed, the infiltration device (26) sprays above the liquid level of the coupling medium liquid pool in the scanning detection liquid tank (2), and the bubble impact device (27) sprays below the liquid level of the coupling medium liquid pool in the scanning detection liquid tank (2).

5. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to any one of claims 1 to 4, characterized in that: the liquid outlet of the liquid tank liquid discharge proportion regulating valve (8) is connected and communicated with the liquid storage and collection tank (9) through a coupling medium return pipe (16);

the coupling medium return pipe (16) is connected and communicated with the overflow tank (18) outside the first end of the scanning detection liquid tank (2) through the overflow return pipe (17), and the overflow tank (18) is used for accommodating coupling medium overflowed from the scanning detection liquid tank (2).

6. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to any one of claims 1 to 4, characterized in that: also included is a device test handler for cyclically transferring power semiconductor devices, wherein,

the device testing and conveying mechanism comprises a sealing box conveying rail (5) matched with the device sealing box (4), a feeding area rail bracket (23) arranged at the first end of the scanning detection liquid tank (2) and a dehydration area rail bracket (15) arranged at the second end of the scanning detection liquid tank (2);

a device sealing box (4) is used for accommodating the power semiconductor device detected by ultrasonic scanning;

above the scanning detection platform (1), a sealing box conveying rail (5) is connected with a feeding area rail bracket (23), the inner side wall of the scanning detection liquid tank (2) and a dehydration area rail bracket (15) in an adaptive manner;

when the power semiconductor devices stored in the device sealing box (4) are conveyed by the sealing box conveying rail (5), the device sealing box (4) enters the scanning detection liquid tank (2) from the feeding area rail bracket (23), and enters the dehydration area rail bracket (15) after passing through the scanning detection liquid tank (2).

7. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 6, wherein: a plurality of air knife sets for blowing and removing liquid from the device sealing box (4) are arranged on the track bracket (15) of the dewatering area,

the device is characterized in that an air blowing and liquid removing collecting box for collecting the coupling medium blown off by the air knife set is arranged in the scanning detection platform (1), and the coupling medium collected in the air blowing and liquid removing collecting box can flow back into the liquid storage and liquid collecting box (9).

8. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 7, wherein: the air knife group comprises at least one air knife (7) for blowing air to the upper surface of the device sealing box (4) and at least one air knife (7) for simultaneously blowing air to the lower surface of the device sealing box (4),

the air knife (7) comprises an air knife cylinder and a plurality of air blowing holes arranged on the air knife cylinder.

9. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 6, wherein: the sealing box conveying tracks (5) are obliquely distributed with the first ends of the scanning detection liquid tanks (2) and the corresponding parts of the scanning detection liquid tanks (2), and the sealing box conveying tracks (5) positioned in the scanning detection liquid tanks (2) are lower than the rest sealing box conveying tracks (5) above the scanning detection platform (1).

10. The liquid path circulation device for liquid immersion ultrasonic scanning detection according to claim 6, wherein: also comprises a sealing box movement driving mechanism for driving the device sealing box (4) to move along the sealing box conveying track (5), wherein,

the seal box movement driving mechanism comprises a chain or a driving belt which is matched with the device seal box (4).

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