CN219059100U - Reversible crucible mechanism and coating device - Google Patents

Abstract

The utility model relates to the technical field of coating, and particularly discloses a reversible crucible mechanism and a coating device, wherein a bracket is provided with a mounting part and a braking part which are arranged at intervals along the X direction in the reversible crucible mechanism; the crucible assembly comprises a driving assembly and a crucible body arranged at the output end of the driving assembly, the driving assembly is arranged at the installation part, the driving assembly is configured to drive the crucible body to move along the X direction between the installation part and the braking part, and when the crucible body moves to a state that the braking part is far away from one side of the installation part, the crucible body can be driven to turn over. The arrangement can realize the effect that the opening of the crucible body can face the vertical surface to be coated of the workpiece to be coated, so that gas molecules generated in the evaporation process directly collide with the vertical surface to be coated of the workpiece to be coated, film formation is facilitated, and the film forming effect of the vertical surface to be coated of the workpiece to be coated is improved.

Description

Reversible crucible mechanism and coating device

Technical Field

The utility model relates to the technical field of coating, in particular to a reversible crucible mechanism and a coating device.

Background

The coating material bearing mechanism such as a crucible is used as one of the necessary units of the coating equipment, and plays an important role. Because the liquid coating liquid is in a liquid state at normal temperature, the crucible enters the coating cavity along the horizontal direction to carry out evaporation coating, and because the evaporated gas molecules have a tendency to move along the vertical direction when the crucible enters the coating cavity horizontally to be evaporated, for a workpiece to be coated or a vertical surface to be coated of the workpiece to be coated, the normal direction of the workpiece to be coated is approximately perpendicular to the movement direction of the evaporated gas molecules, so that less direct collision is formed with the gas molecules, and the film formation is not facilitated.

Therefore, research on a reversible crucible mechanism is needed to realize horizontal movement and turning action of a crucible and improve the film forming effect of a vertical film surface to be coated of a workpiece to be coated.

Disclosure of Invention

The utility model aims to provide a turnover crucible mechanism and a turnover coating device, so as to realize horizontal movement and turnover action of a crucible and improve the film forming effect of a vertical surface to be coated of a workpiece to be coated.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

in one aspect, the present utility model provides a reversible crucible mechanism comprising:

the support is provided with a mounting part and a braking part which are arranged at intervals along the X direction;

the crucible assembly comprises a driving assembly and a crucible body arranged at the output end of the driving assembly, the driving assembly is arranged at the mounting part, the driving assembly is configured to drive the crucible body to move along the X direction between the mounting part and the braking part, and when the crucible body moves to a state that the braking part is far away from one side of the mounting part or a process that the crucible body is close to the braking part, the crucible body can be driven to turn over.

Optionally, the driving assembly includes:

the pushing piece can move along the X direction and is provided with a fixing part and a connecting part;

the linkage piece is provided with a first end and a second end, the linkage piece and the pushing piece are arranged in a sliding mode along the X direction relatively, the fixing portion can move between the first end and the second end, and the crucible body is connected with the connecting portion and the linkage piece.

Optionally, the crucible body comprises a hinge part and a poking part, and the hinge part is rotatably arranged at one end of the linkage piece far away from the pushing piece; the pushing piece is in transmission connection with the stirring part, and the fixed part moves to the second end in the process, and the pushing piece can drive the crucible body to turn over.

Optionally, the stirring portion includes stirring the groove, the contained angle between stirring the extending direction A of groove and the opening direction B of crucible body is alpha, and alpha is greater than or equal to 0 and is less than or equal to 90, the connecting portion includes the sliding pin, the sliding pin wears to locate stirring the groove and can follow stirring the groove and slide.

Optionally, the driving assembly includes an elastic member disposed between the pushing member and the linkage member, for stopping the fixing portion at the first end.

Optionally, the linkage piece comprises a sliding cylinder, one end of the sliding cylinder, which is close to the braking part, is provided with a stop part, the pushing piece comprises a sliding rod, and the fixing part is arranged on the sliding rod and can slide along the sliding cylinder; the elastic piece comprises a spring, the spring is sleeved on the sliding rod, and two ends of the spring are respectively abutted against the fixing part and the stopping part.

Optionally, a sliding groove extending along the X direction is provided in the sliding cylinder, and one end of the fixing portion is located in the sliding groove and can slide along the X direction.

Optionally, the crucible assembly includes a drug dropping member provided to the bracket and configured to inject a drug solution into the crucible body between the mounting portion and the braking portion.

Optionally, the driving assembly includes a driving member, the driving member is disposed on the support, the pushing member is disposed at an output end of the driving member, and the driving member is configured to drive the pushing member to move along the X direction.

On the other hand, the utility model provides a coating device, which comprises the reversible crucible mechanism in any scheme, wherein the bracket is provided with a first chamber and a second chamber, the first chamber is communicated with the second chamber through a communication hole, the mounting part is a side wall outside the first chamber, and the braking part is a side wall, close to the second chamber, of the first chamber.

The beneficial effects of the utility model are as follows:

the utility model provides a turnover crucible mechanism and a coating device. The drive assembly of the crucible assembly can drive the crucible body to move in the X direction between the mounting portion and the braking portion. At this time, the injection of the chemical solution can be completed, and the chemical solution can crystallize and adhere to the chemical solution carrier in the crucible body after the crucible body heats the chemical solution; then, the crucible body is driven by the driving assembly to move to one side of the braking part away from the mounting part; at this moment, the drive assembly can drive the crucible body to overturn to the vertical face of waiting to coat of work piece of waiting to coat of opening of crucible body, and then make the gaseous molecule that evaporation process produced and wait to coat the effect that the face formed direct collision with waiting to coat of work piece, be favorable to the film formation, improved the film forming effect of waiting to coat the vertical face of waiting to coat of work piece of waiting to coat.

Drawings

FIG. 1 is a schematic diagram of a film plating apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a crucible assembly according to an embodiment of the present utility model.

In the figure:

100. a workpiece to be coated;

1. a bracket; 11. a first chamber; 111. a mounting part; 112. a braking section; 12. a second chamber;

2. a crucible assembly; 21. a drive assembly; 211. a pushing member; 2111. a fixing part; 2112. a sliding pin; 212. a linkage member; 2121. a first end; 2122. a second end; 2123. a sliding groove; 2124. a stop portion; 213. an elastic member; 214. a driving member; 215. a mounting rod; 22. a crucible body; 221. a rotating shaft; 222. a toggle groove; 23. and a medicine dropping piece.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

Example 1

As shown in fig. 1-2, the present embodiment provides a reversible crucible mechanism, which is used in a coating apparatus, however, in other embodiments, the reversible crucible mechanism may be used in any scenario where a combination of linear motion and reversible motion of a working end is required, and for convenience of description and understanding, the following description will be given by taking an application in a coating apparatus as an example. The reversible crucible mechanism comprises a bracket 1 and a crucible assembly 2, wherein the bracket 1 is provided with a mounting part 111 and a braking part 112 which are arranged at intervals along the X direction; when the bracket 1 is applied to a film plating device, the bracket 1 comprises a first chamber 11 and a second chamber 12, the first chamber 11 and the second chamber 12 are communicated through a communication hole, the mounting part 111 is a side wall outside the first chamber 11, the braking part 112 is a side wall inside the first chamber 11, which is close to the second chamber 12, specifically, the workpiece 100 to be plated is arranged in the second chamber 12 and extends along the Z direction; wherein, the Z direction is perpendicular to the X direction, the second chamber 12 is located on the right side of the first chamber 11 along the X direction, the crucible assembly 2 includes a driving assembly 21 and a crucible body 22 disposed at an output end of the driving assembly 21, the driving assembly 21 is configured to drive the crucible body 22 to move along the X direction in the first chamber 11, and when the crucible body 22 enters the second chamber 12 or is located in the second chamber 12, the driving assembly 21 can drive the crucible body 22 to turn over, and the opening of the crucible body 22 faces the workpiece 100 to be coated. In this embodiment, the driving assembly 21 has only one driving member 214, and the specific connection relationship between the driving member 214 and the crucible body 22 will be described below.

By providing the holder 1 and the crucible assembly 2, the driving assembly 21 of the crucible assembly 2 can drive the crucible body 22 to move in the X direction between the mounting portion 111 and the stopper portion 112, i.e., in the X direction within the first chamber 11. The injection of the chemical solution can be completed when the crucible assembly 2 is positioned at the corresponding position of the first chamber 11. When the crucible body 22 heats the chemical liquid, the chemical liquid will crystallize and adhere to the chemical liquid carrier in the crucible body 22; then, the crucible body 22 is moved to the side of the braking portion 112 away from the mounting portion 111 by driving the driving assembly 21, at this time, the driving assembly 21 can drive the crucible body 22 to turn over, i.e. the driving assembly 21 can drive the crucible body 22 to turn over during the process of entering the second chamber 12 or after entering the second chamber 12. The opening of the turnover crucible body 22 can face the vertical surface to be coated of the workpiece 100 to be coated, so that the effect of direct collision between gas molecules generated in the evaporation process and the vertical surface to be coated of the workpiece 100 to be coated is achieved, film formation is facilitated, and the film forming effect of the vertical surface to be coated of the workpiece 100 to be coated is improved.

In the above embodiment, the overturning of the crucible body 22 is mainly to overturn the liquid medicine carrier carrying the liquid medicine, where the liquid medicine carrier may be a porous material such as steel wool. In other embodiments, the drug solution carrier may be turned over directly, and in this embodiment, the crucible body 22 may not be provided, as long as the drug solution is ensured to be attached to the drug solution carrier at the time of turning over.

Regarding the structure of the driving assembly 21, in the present embodiment, alternatively, the driving assembly 21 includes a pushing member 211, a linkage member 212, and an elastic member 213, wherein the pushing member 211 is movable in the X direction, and the pushing member 211 is provided with a fixing portion 2111 and a connecting portion; the linkage member 212 has a first end 2121 and a second end 2122, the linkage member 212 and the pushing member 211 are slidably disposed relative to each other in the X direction, and the fixing portion 2111 is movable between the first end 2121 and the second end 2122, and the crucible body 22 is connected to the connecting portion and to the linkage member 212; the elastic member 213 is disposed between the pushing member 211 and the linkage member 212, and is used for stopping the fixing portion 2111 at the first end 2121; the linkage piece 212 is in the first chamber 11, the linkage piece 212 can be pushed to move rightwards along the X direction by the elastic piece 213 in the rightward moving process of the pushing piece 211, the linkage piece 211 can be abutted against the first end 2121 through the fixing portion 2111 in the leftward moving process, the linkage piece 212 is driven to move leftwards along the X direction, in the state that the linkage piece 212 is abutted against the side wall of the first chamber 11 close to the second chamber 12, namely, in the state that the linkage piece 212 is abutted against the braking portion 112, the pushing piece 211 continues to move rightwards, the linkage piece 212 and the pushing piece 211 slide relatively, the fixing portion 2111 can move towards the second end 2122, and in the process, the connecting portion of the pushing piece 211 can drive the crucible body 22 to turn over. By means of the arrangement of the structure, the pushing piece 211 can move in the X direction and drive the linear motion and the overturning of the crucible body 22, the structure is ingenious, the production and the assembly are convenient, and the cost is saved. In addition, with the above arrangement, the angle at which the crucible body 22 is turned over can be achieved according to the distance in which the link 212 and the pusher 211 slide relatively.

In other embodiments, two separate motion assemblies may be used to drive the crucible body 22, and in particular, a push rod cylinder and a stepper motor may be used, where the stepper motor is disposed at the output end of the push rod cylinder and the crucible body 22 is disposed at the output end of the stepper motor. In view of cost, the present embodiment prefers a combination of the pusher 211 and the link 212. In this embodiment, only one driving member 214 is needed to complete two actions of the crucible body 22, thereby greatly reducing the cost.

Regarding the structure of the crucible body 22, in this embodiment, the crucible body 22 includes a hinge portion and a toggle portion, and the hinge portion is rotatably disposed at one end of the linkage 212 away from the pushing member 211; the pushing member 211 is in driving connection with the stirring portion, and the pushing member 211 can drive the crucible body 22 to turn around the rotation shaft 221 in the process of moving the fixing portion 2111 to the second end 2122. Since the crucible body 22 is hinged to the second end 2122, the crucible body 22 is flipped relative to the linkage 212 when the pusher 211 is driving the toggle portion. Alternatively, the end of the linkage member 212 away from the pushing member 211 is provided with a mounting rod 215, the hinge portion includes a rotation shaft 221 provided at the left lower portion of the crucible body 22, the mounting rod 215 is provided with a rotation hole, and the rotation shaft 221 is provided to penetrate through the rotation hole and is rotatable therein. The arrangement is such that when the linkage 212 is located in the first chamber 11, the mounting rod 215 passes through the communication hole, so that the crucible body 22 can be completely located in the second chamber 12, and the crucible body 22 can be smoothly turned over.

In this embodiment, one of the link 212 and the pusher 211 includes a slide cylinder, and the other includes a slide rod that is inserted into the slide cylinder. The sliding cylinder and the sliding rod are arranged, the structure is simple, and the relative sliding movement mode is easy to realize. Of course, in other embodiments, the linkage 212 and the pushing member 211 may each have a plate-like structure. In another embodiment, one of the linkage 212 and the pusher 211 is a sliding rail, and the other is a sliding block.

To achieve the stop of the fixing portion 2111 at the first end 2121, in this embodiment, the linkage member 212 includes a sliding cylinder, one end of the sliding cylinder near the second chamber 12 is provided with a stop portion 2124, the pushing member 211 includes a sliding rod, and the fixing portion 2111 is provided on the sliding rod and can slide along the sliding cylinder; the elastic member 213 includes a spring, which is sleeved on the sliding rod, and two ends of the spring respectively abut against the fixing portion 2111 and the stop portion 2124. The spring can be conveniently installed, and the installation is firm.

To avoid tilting of the crucible body 22, which may cause liquid to spill in the first chamber 11, in this embodiment, a sliding groove 2123 extending in the X direction is provided in the sliding cylinder, and one end of the fixing portion 2111 is located in the sliding groove 2123 and can slide in the X direction. With the above arrangement, the slide bar is prevented from rotating about its own axis, thereby preventing the outflow of liquid in the crucible body 22. Wherein the axis of the sliding rod is parallel to the X direction.

The two end surfaces of the sliding groove 2123 along the X direction are a first end surface and a second end surface, respectively, the first end 2121 of the linkage 212 is the first end surface, and the second end 2122 of the linkage 212 is the second end surface.

Regarding the setting of the stirring portion, in this embodiment, the stirring portion includes a stirring slot 222, an included angle between an extending direction a of the stirring slot 222 and an opening direction B of the crucible body 22 is α, and α is greater than or equal to 0 ° and less than or equal to 90 °, and the connecting portion includes a sliding pin 2112, where the sliding pin 2112 is disposed through the stirring slot 222 and can slide along the stirring slot 222. The above arrangement is simple in structure and easy to realize the overturning action on the crucible body 22. In this embodiment, the toggle groove 222 is disposed on a toggle plate, and the toggle plate is fixedly connected to the crucible body 22. Of course, in other embodiments, the toggle slot 222 may be disposed at the connection portion, and the sliding pin 2112 may be disposed on the crucible body 22, and the specific structure is not limited thereto.

In this embodiment, the angle between the extending direction a of the poking groove 222 and the opening direction B of the crucible body 22 is α, which is equal to 45 °. In this embodiment, the direction a is located in the counterclockwise direction of the direction B. This arrangement allows the tapping direction B of the crucible body 22 to be reversed from upward to rightward. In other embodiments, α may be other angles, or may be determined by ensuring that the opening direction B of the crucible body 22 faces the surface to be coated of the workpiece 100 to be coated after the crucible body 22 is turned over.

In other embodiments, to achieve the overturning of the crucible body 22, the pushing member 211 and the linkage member 212 may be connected by other manners, specifically, one end of the crucible body 22 is hinged to the connecting portion, the fixing portion 2111 is located at the first end 2121, the crucible body 22 is partially located on the linkage member 212 and is slidably located on the linkage member 212, and the fixing portion 2111 is located at the second end 2122, so that the crucible body 22 is separated from the linkage member 212 and overturns under the action of gravity to change the opening from upward to right.

The crucible assembly 2 includes a medicine dropping member 23, and the medicine dropping member 23 is provided at a side wall of the first chamber 11 and is used for injecting a medicine liquid into the crucible body 22 located in the first chamber 11. This arrangement enables the operation of injecting the medicinal liquid into the crucible body 22 to be performed, so that the coating process can be simplified and the coating efficiency can be improved.

In order to further improve the coating efficiency, the driving assembly 21 includes a driving member 214, the driving member 214 is fixed relative to the first chamber 11, the pushing member 211 is disposed at an output end of the driving member 214, and the driving member 214 is used for driving the pushing member 211 to move along the X direction. In this embodiment, the driving member 214 may be a telescopic cylinder or a push rod motor, and the pushing member 211 is disposed at an output end of the driving member 214.

In other embodiments, the spring force generated by the spring 213 may be replaced by other substances that generate a flexible force, such as rubber, compressed gas, and the like. Illustratively, the resilient member 213 may be replaced by a compressed gas. Specifically, the sliding rod is arranged on the sliding cylinder in a penetrating manner, the fixing portion 2111 comprises a piston arranged on the sliding rod, one end of the sliding rod penetrates through the sliding cylinder and then is hinged to the crucible body 22, the sliding rod is in sealing connection with the sliding cylinder, specifically, the left end of the sliding cylinder is provided with a left opening, the right end of the sliding cylinder is provided with a right opening, the sliding rod is at least in sealing connection with the right opening, the piston divides the sliding cylinder into a left cavity and a right cavity, compressed gas is filled in at least the right cavity, the piston is enabled to be stopped at the left opening by the compressed gas, when the sliding cylinder abuts against the braking portion 112, the compressed gas is further compressed along with the continued movement of the sliding rod, and the crucible body 22 is overturned.

Wherein the inner diameter of the left opening is smaller than the diameter of the piston, and the inner diameter of the right opening is smaller than the diameter of the piston.

It should be noted that, how to realize the sealing connection between the sliding rod and the right opening is well known to those skilled in the art, and thus will not be described herein. Of course, in other embodiments, the sliding rod and the left opening may be connected in a sealing manner, and the left chamber and the right chamber are filled with compressed gas.

In use, referring to fig. 1, fig. 1 includes four states a, b, c and d of the crucible assembly 2, wherein a represents the crucible body 22 being positioned within the first chamber 11, and in such a state, the medicament dispensing member 23 is operable to dispense medicament into the crucible body 22; b denotes that the linkage 212 abuts against the braking portion 112, before which the pushing member 211 pushes the linkage 212 to move rightward by the elastic member 213; c indicates that the pushing member 211 continues to move in the X direction, i.e., to the right, and the crucible body 22 is turned 45 ° with the linkage member 212 stationary; d indicates that the crucible body 22 is flipped 90 deg..

Example two

Referring to fig. 1, this embodiment further provides a film plating apparatus, including the reversible crucible mechanism in the first embodiment, where the support 1 is provided with a first chamber 11 and a second chamber 12, the first chamber 11 and the second chamber 12 are communicated through a communication hole, the mounting portion 111 is a sidewall outside the first chamber 11, and the braking portion 112 is located on the sidewall of the first chamber 11 near the second chamber 12.

The first cavity 11 is equipped with a plurality of, and all communicates with the second cavity 12, and a plurality of first cavities 11 set up along Z direction interval, and crucible assembly 2 is equipped with a plurality of, and a plurality of crucible assemblies 2 set up with a plurality of first cavities 11 one-to-one.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. A reversible crucible mechanism, comprising:

a bracket (1), wherein the bracket (1) is provided with a mounting part (111) and a braking part (112) which are arranged at intervals along the X direction;

the crucible assembly (2), the crucible assembly (2) include drive assembly (21) and locate crucible body (22) of the output of drive assembly (21), drive assembly (21) are located installation department (111), drive assembly (21) are configured to can drive crucible body (22) installation department (111) with brake portion (112) are in follow X direction removes, and when crucible body (22) remove to under brake portion (112) keep away from the state of one side of installation department (111) or in-process that crucible body (22) is close to brake portion (112), can drive crucible body (22) upset.

2. The reversible crucible mechanism according to claim 1, wherein the drive assembly (21) comprises:

a pusher (211), the pusher (211) being movable in the X direction, the pusher (211) being provided with a fixing portion (2111) and a connecting portion;

the linkage piece (212), linkage piece (212) have first end (2121) and second end (2122), linkage piece (212) with push piece (211) are followed X direction relative slip setting, just fixed part (2111) can be in first end (2121) with between second end (2122), crucible body (22) with connecting portion connect, and with linkage piece (212) are connected.

3. The reversible crucible mechanism according to claim 2, wherein the crucible body (22) comprises a hinge portion and a toggle portion, the hinge portion being rotatably provided at an end of the linkage member (212) remote from the pushing member (211); the pushing piece (211) is in transmission connection with the stirring part, and in the process that the fixing part (2111) moves to the second end (2122), the pushing piece (211) can drive the crucible body (22) to turn over.

4. The reversible crucible mechanism according to claim 3, wherein the stirring portion comprises a stirring groove (222), an angle between an extending direction a of the stirring groove (222) and an opening direction B of the crucible body (22) is α, and α is greater than or equal to 0 ° and less than or equal to 90 °, the connecting portion comprises a sliding pin (2112), and the sliding pin (2112) is provided through the stirring groove (222) and is slidable along the stirring groove (222).

5. The reversible crucible mechanism according to claim 2, wherein the drive assembly (21) comprises an elastic member (213), the elastic member (213) being provided between the pushing member (211) and the linkage member (212) for stopping the fixing portion (2111) at the first end (2121).

6. The reversible crucible mechanism according to claim 5, characterized in that the linkage (212) comprises a sliding cylinder, one end of the sliding cylinder, which is close to the braking portion (112), is provided with a stop portion (2124), the pushing member (211) comprises a sliding rod, and the fixing portion (2111) is provided on the sliding rod and can slide along the sliding cylinder; the elastic piece (213) comprises a spring, the spring is sleeved on the sliding rod, and two ends of the spring are respectively abutted against the fixing part (2111) and the stopping part (2124).

7. The reversible crucible mechanism according to claim 6, wherein a sliding groove (2123) extending in the X direction is provided in the interior of the sliding tube, and one end of the fixing portion (2111) is located in the sliding groove (2123) and is slidable in the X direction.

8. The reversible crucible mechanism according to any one of claims 1-7, characterized in that the crucible assembly (2) comprises a drip member (23), the drip member (23) being provided to the holder (1) and being adapted to inject a medicinal liquid into the crucible body (22) between the mounting portion (111) and the braking portion (112).

9. The reversible crucible mechanism according to any one of claims 2-7, wherein the driving assembly (21) comprises a driving member (214), the driving member (214) is provided on the support (1), the pushing member (211) is provided at an output end of the driving member (214), and the driving member (214) is configured to drive the pushing member (211) to move along the X direction.

10. The coating device is characterized by comprising the reversible crucible mechanism according to any one of claims 1-9, wherein the support (1) is provided with a first chamber (11) and a second chamber (12), the first chamber (11) is communicated with the second chamber (12) through a communication hole, the mounting part (111) is a side wall outside the first chamber (11), and the braking part (112) is a side wall, close to the second chamber (12), of the first chamber (11).

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