CN219036287U

CN219036287U - Gas tank gas cylinder mounting structure

Info

Publication number: CN219036287U
Application number: CN202223328429.2U
Authority: CN
Inventors: 卫宇飞; 杨斌; 陈瑛
Original assignee: Gesbo Semiconductor Technology Shanghai Co ltd
Current assignee: Gesbo Semiconductor Technology Shanghai Co ltd
Priority date: 2022-12-12
Filing date: 2022-12-12
Publication date: 2023-05-16
Anticipated expiration: 2032-12-12

Abstract

The application relates to a gas supply cabinet gas cylinder mounting structure, it includes the cabinet body and sets up in the internal gas cylinder of cabinet, the internal wall fixedly connected with backup pad of cabinet, the gas cylinder holds in the internal portion of cabinet and with backup pad looks butt, the backup pad is provided with automatic fixture, automatic fixture includes a pair of clamping strip, two the clamping strip is located the gas cylinder both sides respectively, and two the clamping strip all wears to establish and slide along the circumference of gas cylinder and connect in the backup pad, clamping strip butt is deviating from one side of backup pad in the gas cylinder, automatic fixture is still including the drive assembly that is used for driving the clamping strip to slide. This application has the effect that improves the efficiency of gas cylinder at the internal installation of cabinet.

Description

Gas tank gas cylinder mounting structure

Technical Field

The application relates to the field of semiconductor gas supply cabinets, in particular to a gas supply cabinet gas cylinder mounting structure.

Background

Generally, in order to ensure stable gas supply and safety during the use of gases in semiconductor processing, a gas supply cabinet is often used. The gas supply cabinet comprises a cabinet body and a gas cylinder arranged in the cabinet body, wherein the inner wall of the cabinet body is fixedly connected with a supporting plate, and a bundling chain is arranged on the supporting plate. When the gas cylinder is installed, the gas cylinder is vertically arranged in the cabinet body, the gas cylinder is abutted to the supporting plate, and then the bundling chain is manually encircled on the gas cylinder, so that the gas cylinder is relatively firmly installed in the cabinet body.

However, in the actual installation process, after the gas cylinder is abutted against the supporting plate, the binding and bundling chain is relatively complicated, so that the efficiency of installing the gas cylinder in the cabinet body is relatively low.

Disclosure of Invention

In order to improve the efficiency of the internal installation of gas cylinder at the cabinet, this application provides a gas supply cabinet gas cylinder mounting structure.

The application provides a gas supply cabinet gas cylinder mounting structure adopts following technical scheme:

the utility model provides a gas supply cabinet gas cylinder mounting structure, includes the cabinet body and sets up in the internal gas cylinder of cabinet, the internal wall fixedly connected with backup pad of cabinet, the gas cylinder holds in the internal portion of cabinet and with backup pad looks butt, the backup pad is provided with automatic fixture, automatic fixture includes a pair of clamping strip, two the clamping strip is located the gas cylinder both sides respectively, and two the clamping strip wears to establish and slide along the circumference of gas cylinder and connect in the backup pad, clamping strip looks butt is in one side that the gas cylinder deviates from the backup pad, automatic fixture is still including the drive assembly that is used for driving the clamping strip and slides.

Through adopting above-mentioned technical scheme, during the gas cylinder installation, stand the gas cylinder and place in the cabinet body, after the gas cylinder butt in the backup pad, slide through drive assembly control clamping strip for two clamping strips slide in opposite directions, and make the gas cylinder can be held between two clamping strips and backup pad, and then be fixed in the cabinet internal with the gas cylinder, and can improve the installation effectiveness of gas cylinder, increase the intelligence simultaneously.

Optionally, the drive assembly is provided with two and corresponds respectively to set up in two centre gripping strips, the drive assembly includes driving motor, driving gear and driven rack, driven rack fixed connection is in the centre gripping strip and extend along the length direction of centre gripping strip, driving motor installs in the backup pad, driving gear coaxial fixed connection is in driving motor's output and meshes with driven rack.

Through adopting above-mentioned technical scheme, during the installation, gas cylinder butt is in the backup pad after, drives the driving gear through driving motor and rotates, drives driven rack and clamping strip afterwards and removes for the clamping strip can the butt deviate from one side of backup pad in the gas cylinder, in order to be fixed in the cabinet body with the gas cylinder automatically.

Optionally, the driving assembly further comprises a first trigger piece, the first trigger piece is electrically connected with the two driving motors, and the first trigger piece is installed on the end face of the supporting plate, which faces one side of the gas cylinder.

Through adopting above-mentioned technical scheme, when gas cylinder butt in the backup pad, the gas cylinder can trigger first trigger piece action, and then trigger driving motor operation for driving motor drive clamping strip removes, in order to be fixed in the cabinet body with the gas cylinder voluntarily.

Optionally, the driving motor is further electrically connected with a second triggering piece, and the second triggering piece is installed on the supporting plate or the cabinet body.

Through adopting above-mentioned technical scheme, when needs open the centre gripping strip, can control driving motor action through the second trigger piece, increase the convenience of using.

Optionally, the clamping strip is towards the one end fixedly connected with joint post of backup pad, the joint post card is established and is slided and connect in the backup pad.

Through adopting above-mentioned technical scheme, the joint post that sets up can do spacingly and support the grip bar for the grip bar when the butt in gas cylinder outer wall, the joint post can increase the steadiness of grip bar and bear the ability of load.

Optionally, one of them the one end fixedly connected with reinforcing pin that the backup pad was kept away from to the grip bar, another one the grip bar keep away from the backup pad one end offered be used for with reinforcing pin matched with consolidate the groove.

Through adopting above-mentioned technical scheme, when using, two centre gripping strips slip in opposite directions after, consolidate the round pin and can cooperate with the reinforcement groove, and then make two centre gripping strips can support each other, increase both wholeness, further increase the steadiness of using and bear the ability of load.

Optionally, a first filler strip made of elastic material is fixedly connected to one side, facing the gas cylinder, of the support plate.

Through adopting above-mentioned technical scheme, the gas cylinder when the butt in the backup pad, the impact that the gas cylinder received can be reduced to the first filler strip that sets up, and then protects the gas cylinder, reduces the impaired degree of gas cylinder.

Optionally, a second filler strip made of elastic material is fixedly connected to one side of the clamping strip, which faces the gas cylinder.

Through adopting above-mentioned technical scheme, the clamping strip when the butt in the gas cylinder, the second filler strip that sets up can reduce the clamping strip and cause the degree of wearing and tearing to the gas cylinder, further protects the gas cylinder.

In summary, the present application includes at least one of the following beneficial technical effects:

1. when the gas cylinder is installed, the gas cylinder is placed in the cabinet body in a standing mode, after the gas cylinder is abutted to the supporting plate, the clamping strips are controlled to slide through the driving assembly, so that the two clamping strips slide in opposite directions, the gas cylinder can be clamped between the two clamping strips and the supporting plate, the gas cylinder is further fixed in the cabinet body, the installation efficiency of the gas cylinder can be improved, and meanwhile intelligence is improved;

2. when the gas cylinder is abutted against the supporting plate, the gas cylinder can trigger the first trigger piece to act, so that the driving motor is triggered to operate, and the driving motor drives the clamping strip to move, so that the gas cylinder is automatically fixed in the cabinet body;

drawings

FIG. 1 is a schematic diagram of an embodiment of the present application;

FIG. 2 is a schematic view of a partial cross-sectional structure of an embodiment of the present application;

FIG. 3 is an enlarged schematic view of the portion A of FIG. 2;

fig. 4 is an enlarged schematic view of the portion B in fig. 2.

Reference numerals illustrate: 1. a cabinet body; 11. a support plate; 2. a gas cylinder; 3. an automatic clamping mechanism; 31. clamping the strip; 311. a clamping column; 312. a reinforcing pin; 32. a drive assembly; 321. a driving motor; 322. a drive gear; 323. a driven rack; 324. a first trigger; 325. a second trigger; 4. a first filler strip; 5. and a second filler strip.

Detailed Description

The present application is described in further detail below in conjunction with figures 1-4.

The embodiment of the application discloses a gas tank gas cylinder mounting structure. Referring to fig. 1, a gas supply cabinet gas cylinder mounting structure includes a cabinet body 1 and a gas cylinder 2, the cabinet body 1 is provided with an opening at one end side, and a cover plate is provided at the opening. The cabinet body 1 inside wall fixedly connected with backup pad 11, backup pad 11 horizontal extension, backup pad 11 are provided with the holding tank towards cabinet body 1 open-ended one end. The gas cylinder 2 is vertically placed in the cabinet body 1, the bottom of the gas cylinder 2 is abutted against the bottom wall of the cabinet body 1, and the side wall of the gas cylinder 2 is abutted against the supporting plate 11 and is positioned in the accommodating groove.

Referring to fig. 1, the support plate 11 is provided with an automatic clamping mechanism 3, and the automatic clamping mechanism 3 includes a pair of clamping bars 31 and two driving assemblies 32. The clamping strips 31 extend along the circumferential direction of the gas cylinder 2, the two clamping strips 31 are respectively arranged on two sides of the gas cylinder 2, and the two clamping strips 31 penetrate through the circumferential direction of the gas cylinder 2 and are connected to the supporting plate 11 in a sliding manner. The two driving components 32 are respectively and correspondingly arranged on the two clamping bars 31, so that the two driving components 32 can respectively control the two clamping bars 31 to slide.

When the gas cylinder 2 is installed, the gas cylinder 2 is placed in the cabinet body 1 in a standing mode, when the gas cylinder 2 is abutted to the supporting plate 11 and located in the accommodating groove, the clamping strips 31 are controlled to slide through the driving assembly 32, so that the two clamping strips 31 slide in opposite directions, the gas cylinder 2 can be clamped between the two clamping strips 31 and the supporting plate 11, the gas cylinder 2 is further fixed in the cabinet body 1, the installation efficiency of the gas cylinder 2 can be improved, and intelligence is increased.

Referring to fig. 2, the driving assembly 32 includes a driving motor 321, a driving gear 322, and a driven rack 323. The driving motor 321 is mounted on the supporting plate 11, and the driving gear 322 is coaxially and fixedly connected to an output end of the driving motor 321. The driven rack 323 is fixedly connected to one side of the clamping bar 31, which is away from the gas cylinder 2, and the driven rack 323 extends along the length direction of the clamping bar 31, and the driving gear 322 is meshed with the driven rack 323.

Referring to fig. 2 and 3, the drive assembly 32 further includes a first trigger 324, the first trigger 324 being configured as a sensor, the first trigger 324 being electrically connected to the drive motor 321, although the first trigger 324 could be configured as a button or other switch. The first trigger 324 is mounted on the support plate 11, and the first trigger 324 is located on the inner wall of the accommodating groove.

During installation, when gas cylinder 2 butt in backup pad 11 and be located the holding tank, gas cylinder 2 can trigger first trigger piece 324 action, and then trigger driving motor 321 operation for driving motor 321 drives driving gear 322 and rotates, drives driven rack 323 and centre gripping strip 31 afterwards and removes, makes centre gripping strip 31 can the butt in gas cylinder 2 deviate from one side of backup pad 11, in order to be fixed in gas cylinder 2 in the cabinet body 1 voluntarily.

Referring to fig. 2, at the same time, the driving motor 321 is also electrically connected with a second trigger 325, and the second trigger 325 may be configured as a button or other switch, so that when the grip bar 31 needs to be opened, the driving motor 321 can be controlled to operate by the second trigger 325.

In other embodiments, the drive assembly 32 may also be configured as an electric pushrod.

Referring to fig. 4, in order to increase the stability of the clamping bar 31 when the clamping bar 31 slides to abut against the gas cylinder 2, one end of the clamping bar 31 facing the support plate 11 is fixedly connected with a clamping post 311, and the clamping post 311 is clamped and slidingly connected to the support plate 11. The clamping column 311 can limit and support the clamping strip 31, so that the clamping column 311 can increase the stability of the clamping strip 31 and the capacity of bearing load when the clamping strip 31 is abutted against the outer wall of the gas cylinder 2.

Referring to fig. 4, one end of one of the clamping bars 31, which is far from the support plate 11, is fixedly connected with a reinforcing pin 312, and one end of the other clamping bar 31, which is far from the support plate 11, is provided with a reinforcing groove, so that the reinforcing pin 312 can be matched with the reinforcing groove. Therefore, when the clamping bars 31 slide in opposite directions, the reinforcing pins 312 can be matched with the reinforcing grooves, so that the two clamping bars 31 can be mutually supported, the integrity of the clamping bars is improved, and the using stability and the load bearing capacity are further improved.

In order to reduce the degree of abrasion of the gas cylinder 2 during the installation process, a first filler strip 4 is fixedly connected to one side of the support plate 11 facing the gas cylinder 2, and a second filler strip 5 is fixedly connected to one side of the clamping strip 31 facing the gas cylinder 2. Both the first and second strips 4, 5 are made of an elastic material, such as rubber or silicone.

The implementation principle of the gas tank gas cylinder mounting structure of the embodiment of the application is as follows: when the gas cylinder 2 is installed, the gas cylinder 2 is placed in the cabinet body 1 in a standing mode, when the gas cylinder 2 is abutted to the supporting plate 11 and located in the accommodating groove, the gas cylinder 2 triggers the first trigger piece 324 to act, then triggers the driving motor 321 to operate, controls the clamping strips 31 to slide, enables the two clamping strips 31 to slide in opposite directions, enables the gas cylinder 2 to be clamped between the two clamping strips 31 and the supporting plate 11, and then enables the gas cylinder 2 to be fixed in the cabinet body 1, and can improve the installation efficiency of the gas cylinder 2, and intelligence is increased.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims

1. The utility model provides a gas supply cabinet gas cylinder mounting structure, includes cabinet body (1) and sets up in the inside gas cylinder (2) of cabinet body (1), cabinet body (1) inner wall fixedly connected with backup pad (11), its characterized in that: the utility model discloses a gas cylinder, including cabinet body (1), backup pad (11) and automatic fixture (3), backup pad (11) are provided with automatic fixture (3), automatic fixture (3) include a pair of grip bar (31), two grip bar (31) are located gas cylinder (2) both sides respectively, and two grip bar (31) are all worn to establish and slide along the circumference of gas cylinder (2) and are connected in backup pad (11), grip bar (31) butt deviates from one side of backup pad (11) in gas cylinder (2), automatic fixture (3) still include drive assembly (32) that are used for driving grip bar (31) and slide.

2. The gas supply cabinet gas cylinder mounting structure according to claim 1, wherein: the driving assembly (32) is provided with two clamping strips (31) and is correspondingly arranged on the two clamping strips respectively, the driving assembly (32) comprises a driving motor (321), a driving gear (322) and a driven rack (323), the driven rack (323) is fixedly connected with the clamping strips (31) and extends along the length direction of the clamping strips (31), the driving motor (321) is arranged on the supporting plate (11), and the driving gear (322) is coaxially and fixedly connected with the output end of the driving motor (321) and is meshed with the driven rack (323).

3. The gas supply cabinet gas cylinder mounting structure according to claim 2, wherein: the driving assembly (32) further comprises a first triggering piece (324), the first triggering piece (324) is electrically connected with the two driving motors (321), and the first triggering piece (324) is mounted on the end face of the supporting plate (11) facing the side of the gas cylinder (2).

4. A gas cabinet gas cylinder mounting structure according to claim 3, wherein: the driving motor (321) is also electrically connected with a second trigger piece (325), and the second trigger piece (325) is installed on the supporting plate (11) or the cabinet body (1).

5. The gas supply cabinet gas cylinder mounting structure according to claim 1, wherein: one end of the clamping strip (31) facing the supporting plate (11) is fixedly connected with a clamping column (311), and the clamping column (311) is clamped and glidingly connected to the supporting plate (11).

6. The gas supply cabinet gas cylinder mounting structure according to claim 5, wherein: one end, far away from the supporting plate (11), of one clamping strip (31) is fixedly connected with a reinforcing pin (312), and the other end, far away from the supporting plate (11), of the clamping strip (31) is provided with a reinforcing groove matched with the reinforcing pin (312).

7. The gas supply cabinet gas cylinder mounting structure according to claim 1, wherein: one side of the supporting plate (11) facing the gas cylinder (2) is fixedly connected with a first filler strip (4) made of elastic materials.

8. The gas supply cabinet gas cylinder mounting structure according to claim 7, wherein: and one side of the clamping strip (31) facing the gas cylinder (2) is fixedly connected with a second filler strip (5) made of elastic materials.