CN219032361U

CN219032361U - Air inlet distribution device of deposition furnace

Info

Publication number: CN219032361U
Application number: CN202222838934.5U
Authority: CN
Inventors: 黄志国; 周伟; 黄硕
Original assignee: Yangzhou Shuosheng Weiye Electric Heating Equipment Co ltd
Current assignee: Yangzhou Shuosheng Weiye Electric Heating Equipment Co ltd
Priority date: 2022-10-27
Filing date: 2022-10-27
Publication date: 2023-05-16
Anticipated expiration: 2032-10-27

Abstract

The application provides a deposition furnace inlet air distribution device, relates to the field of chemical vapor deposition. The deposition furnace air inlet distribution device comprises a main body, a diffusion mechanism for diffusing air, an air inlet mechanism for conveying the air and a material containing mechanism for clamping and fixing lenses, wherein a heat preservation sleeve is sleeved on the surface of the main body, the diffusion mechanism is provided with a plurality of sprockets movably connected to the bottom of the main body, and one end of each sprocket penetrates through the bottom of the main body and is welded with a plurality of fan blades. This deposition furnace distribution device that admits air through cup jointing a heat preservation sleeve at the surface of main part, when one of them gaseous entering main part is inside, utilizes heat preservation sleeve to play the heat preservation effect to the inside gas of main part, has solved the deposition furnace distribution device that admits air in the past and lacks insulation construction, when one kind gaseous etc. when another kind of gaseous entering to and the problem that the temperature can reduce among the two kinds of gaseous reaction processes, has realized the beneficial effect that improves chemical gas reaction efficiency.

Description

Air inlet distribution device of deposition furnace

Technical Field

The application relates to the technical field of chemical vapor deposition, in particular to an air inlet distribution device of a deposition furnace.

Background

Chemical vapor deposition refers to a method for synthesizing a coating or nano material by reacting chemical gas or steam on the surface of a substrate, is the most widely used technology in the semiconductor industry for depositing various materials, and comprises a wide range of insulating materials, most metal materials and metal alloy materials, wherein during chemical vapor deposition, two gaseous raw materials are introduced into a reaction chamber, and then are subjected to chemical reaction with each other to form a new material, and the new material is deposited on the surface of a wafer.

Publication No. CN216947188U discloses a chemical vapor deposition furnace gas inlet distribution device, and the device heats the gas conveyed by arranging heating wires in a communicating groove, but two gases are respectively conveyed in, when the heated gas is conveyed into the deposition furnace, another gas is required to be conveyed in, in the process, the temperature of the gas conveyed in advance can be reduced due to the lack of a protection structure of the deposition furnace, and the reaction efficiency can be affected due to the difference of the temperatures of the two gases.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the application provides an air inlet distribution device of a deposition furnace, which solves the problems in the background art.

(II) technical scheme

In order to achieve the above purpose, the present application is implemented by the following technical schemes: the utility model provides a deposition furnace distribution device that admits air, includes the main part, is used for diffusing gaseous diffusion mechanism, is used for carrying gaseous air inlet mechanism and is used for holding fixed flourishing material mechanism to the lens, thermal insulation sleeve has been cup jointed on the surface of main part, diffusion mechanism has a plurality of swing joint in the sprocket of main part bottom, the bottom welding that one end of sprocket runs through the main part has a plurality of flabellums, one of them the other end of sprocket is connected with the motor of fixing at the main part lower surface.

Through adopting above-mentioned technical scheme, can utilize the heat preservation sleeve to play the heat preservation effect to the gas in the deposition furnace, on the one hand can make two kinds of gas temperature the same, on the other hand can make chemical gas keep a suitable temperature in the reaction process, improve reaction efficiency, utilize flabellum pivoted mode to blow and make the gas diffusion of deposition furnace, even distribution is in the deposition furnace, simultaneously can make two kinds of gas misce bene again.

Preferably, the air inlet mechanism comprises a main pipeline penetrating through the main body, one end of the main pipeline is welded with an auxiliary pipeline, and valves are arranged at two ends of the auxiliary pipeline.

By adopting the technical scheme, the two gases can be controlled to be conveyed by the valves at the two ends of the auxiliary pipeline, so that the purpose that the two gases alternately enter the deposition furnace is realized.

Preferably, the air inlet mechanism further comprises an air outlet pipe welded with the other end of the main pipeline, and air outlets for emitting gas are uniformly formed in the surface of the air outlet pipe.

Through adopting above-mentioned technical scheme, can utilize a plurality of tuber pipes, and the surface of tuber pipe has a plurality of air outlets, can make the even distribution of chemical gas who carries in the deposition furnace inside.

Preferably, the material containing mechanism comprises a supporting block, a material containing groove for containing lenses is uniformly formed in the surface of the supporting block, telescopic columns are fixedly installed at the top and the bottom of the inner wall of the material containing groove, clamping plates are welded at one end of each telescopic column, and springs are wound on the surface of each telescopic column.

Through adopting above-mentioned technical scheme, can utilize flexible post and spring adjustment splint's position to the lens of size difference carry out the centre gripping fixedly, improve the suitability of device.

Preferably, the upper surface of main part has seted up the spread groove, the main part is connected with the dome through the spread groove, the lower surface fixed mounting of dome has the sealed pad that is used for improving main part leakproofness.

Through adopting above-mentioned technical scheme, can place the dome in the spread groove, utilize sealed pad can improve the leakproofness of deposition furnace, avoid the entering of air.

Preferably, a hollow cavity is formed in the main body, and an electric heating wire tube for heating the gas is uniformly and fixedly arranged in the hollow cavity.

By adopting the technical scheme, the electric heating wire tube can be utilized to heat the gas of the deposition furnace, so that the reaction efficiency of the chemical gas is improved.

Preferably, the chain wheel is positioned between the two air outlet pipes.

Through adopting above-mentioned technical scheme, can utilize the flabellum rotation between two air-out pipes to diffuse air-out pipe exhaust gas.

Preferably, the inside of the heat preservation sleeve is adhered with a glass cotton layer, one side of the glass cotton layer is adhered with a rock cotton layer, and one side of the rock cotton layer is adhered with a ceramic fiber layer.

Through adopting above-mentioned technical scheme, can utilize a plurality of heat preservation materials of heat preservation sleeve inside to play thermal-insulated effect to the deposition furnace inside, improve thermal insulation efficiency, make gas be in a homothermal state.

(III) beneficial effects

The application provides a deposition furnace inlet air distribution device. The beneficial effects are as follows:

1. this deposition furnace distribution device that admits air through cup jointing a heat preservation sleeve at the surface of main part, when one of them gaseous entering main part is inside, utilizes heat preservation sleeve to play the heat preservation effect to the inside gas of main part, has solved the deposition furnace distribution device that admits air in the past and lacks insulation construction, when one kind gaseous etc. when another kind of gaseous entering to and the problem that the temperature can reduce among the two kinds of gaseous reaction processes, has realized the beneficial effect that improves chemical gas reaction efficiency.

2. This deposition furnace distribution device that admits air through setting up pivoted flabellum between two air-supply lines and bloies, has realized on the one hand that can make the even diffusion of chemical gas in the inside of main part, on the other hand can make the abundant beneficial effect that fuses of two kinds of gases.

Drawings

FIG. 1 is a schematic perspective view of a first embodiment of the present application;

FIG. 2 is a schematic view of a second perspective structure of the present application;

FIG. 3 is a schematic perspective view of the main body of the present application;

FIG. 4 is a schematic diagram of a connection structure between a main pipe and an air outlet pipe;

FIG. 5 is a top cross-sectional view of the body of the present application;

FIG. 6 is a bottom view of the attachment structure of the dome and the loading mechanism of the present application;

FIG. 7 is a front view of the connection structure of the dome and the material containing mechanism of the present application;

FIG. 8 is a schematic view of the connection structure of the telescopic column and the clamping plate;

fig. 9 is a cross-sectional view of a thermal sleeve of the present application.

In the figure: 1. a main body; 101. a dome; 102. a connecting groove; 103. a hollow cavity; 104. an electrically heated wire tube; 105. a sealing gasket; 2. a thermal insulation sleeve; 201. a glass wool layer; 202. a rock wool layer; 203. a ceramic fiber layer; 3. a diffusion mechanism; 301. a sprocket; 302. a motor; 303. a fan blade; 4. an air inlet mechanism; 401. a main pipe; 402. a secondary pipe; 403. a valve; 404. an air outlet pipe; 405. an air outlet; 5. a material containing mechanism; 501. a support block; 502. a material containing groove; 503. a telescopic column; 504. a spring; 505. and (3) clamping plates.

Detailed Description

The present application is further elaborated by the following figures and examples.

Referring to fig. 1, fig. 2, fig. 5 and fig. 7, the embodiment of the application provides a deposition furnace distribution device that admits air, including main part 1, be used for diffusing gaseous diffusion mechanism 3, be used for carrying gaseous air inlet mechanism 4 and be used for holding fixed flourishing material mechanism 5 to the lens, heat preservation sleeve 2 has been cup jointed on the surface of main part 1, diffusion mechanism 3 has a plurality of swing joint in the sprocket 301 of main part 1 bottom, the bottom welding that the one end of sprocket 301 runs through main part 1 has a plurality of flabellum 303, the other end of one of them sprocket 301 is connected with the motor 302 of fixing at main part 1 lower surface, and be connected with the chain between every two sprockets 301.

The sprocket 301 is located between two air outlet pipes 404, the motor 302 is started to drive one sprocket 301 to rotate, the sprocket 301 drives a plurality of sprockets 301 to rotate simultaneously through a chain, and the plurality of sprockets 301 rotate to drive the fan blades 303 to rotate for blowing, so that gas is uniformly diffused into the main body 1.

Referring to fig. 2 and 4, in one aspect of the present embodiment, the air intake mechanism 4 includes a main pipe 401 penetrating the main body 1, one end of the main pipe 401 is welded with a sub pipe 402, and both ends of the sub pipe 402 are provided with valves 403.

The air inlet mechanism 4 further comprises an air outlet pipe 404 welded with the other end of the main pipe 401, air outlets 405 for emitting gas are uniformly formed in the surface of the air outlet pipe 404, two chemical gas conveying pipes are respectively connected to two ends of the auxiliary pipe 402, any one of valves 403 at two ends of the auxiliary pipe 402 is opened, one gas enters the main pipe 401 through the auxiliary pipe 402, and then enters each air outlet pipe 404 from the main pipe 401 and is discharged from the air outlets 405.

Referring to fig. 7 and 8, in one aspect of the present embodiment, the material containing mechanism 5 includes a supporting block 501, a material containing groove 502 for containing a lens is uniformly formed on the surface of the supporting block 501, telescopic columns 503 are fixedly installed on the top and bottom of the inner wall of the material containing groove 502, a clamping plate 505 is welded at one end of the telescopic columns 503, a spring 504 is wound on the surface of the telescopic columns 503, a lens is placed in the material containing groove 502, the clamping plate 505 is always in contact with the lens to clamp the lens due to the elastic force of the spring 504, the lens is compressed against the spring 504, and the telescopic columns 503 shrink when the spring 504 is compressed.

Referring to fig. 3 and 6, in one aspect of the present embodiment, the upper surface of the main body 1 is provided with a connection groove 102, the main body 1 is connected with a dome 101 through the connection groove 102, a sealing pad 105 for improving the sealability of the main body 1 is fixedly mounted on the lower surface of the dome 101, the dome 101 is concave in the middle and convex in the periphery, and the convex part of the dome 101 exactly matches with the size of the connection groove 102, so when the dome 101 covers the top of the main body 1, the convex part of the dome 101 is positioned in the connection groove 102, and the sealing pad 105 contacts with the surface of the inner wall of the connection groove 102 to improve the sealability between the dome 101 and the main body 1.

Referring to fig. 5, in one aspect of the present embodiment, a hollow cavity 103 is formed in the main body 1, an electric heating wire tube 104 for heating the gas is uniformly and fixedly installed in the hollow cavity 103, the hollow cavity 103 also has a heat-insulating function, and the electric heating wire tube 104 is energized to transfer heat to the main body 1, so that the temperature of the gas in the main body 1 is increased.

Referring to fig. 9, in an aspect of the present embodiment, a glass wool layer 201 is bonded to the inside of the insulating sleeve 2, a rock wool layer 202 is bonded to one side of the glass wool layer 201, a ceramic fiber layer 203 is bonded to one side of the rock wool layer 202, and the insulating materials of the glass wool layer 201, the rock wool layer 202, and the ceramic fiber layer 203 can play a role of insulating the chemical gas inside the main body 1.

All the electric equipment in this scheme all carry out the power supply through external power supply.

Working principle: when the device is used, firstly, the device is placed at a proper position, lenses are placed in the holding groove 502, the clamping plate 505 is always contacted with the lenses to clamp the lenses due to the elasticity of the springs 504, then the round cover 101 is covered on the top of the main body 1, two ends of the auxiliary pipeline 402 are respectively connected with two chemical gas conveying pipes, any one valve 403 at two ends of the auxiliary pipeline 402 is opened, one gas enters the main pipeline 401 through the auxiliary pipeline 402 and then enters each air outlet pipe 404 from the main pipeline 401 to be discharged from the air outlet 405, meanwhile, the motor 302 is started to drive one of the chain wheels 301 to rotate, the chain wheels 301 drive the plurality of the chain wheels 301 to rotate simultaneously, the fan blades 303 are driven to rotate to blow, the gas is uniformly diffused into the main body 1 to be combined with the two gases to perform chemical reaction, the gas is insulated by utilizing various heat insulation materials in the heat insulation sleeve 2, and the temperature of the gas is increased by the electric heating wire pipe 104.

Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the application, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a deposition furnace distribution device that admits air, includes main part (1), is used for diffusing gaseous diffusion mechanism (3), is used for carrying gaseous air intake mechanism (4) and is used for holding fixed flourishing material mechanism (5) to the lens, its characterized in that: the surface of main part (1) has cup jointed thermal insulation sleeve (2), diffusion mechanism (3) have a plurality of swing joint sprocket (301) in main part (1) bottom, the bottom welding that one end of sprocket (301) runs through main part (1) has a plurality of flabellum (303), one of them the other end of sprocket (301) is connected with motor (302) of fixing at main part (1) lower surface.

2. The deposition furnace inlet distribution device according to claim 1, wherein: the air inlet mechanism (4) comprises a main pipeline (401) penetrating through the main body (1), one end of the main pipeline (401) is welded with a secondary pipeline (402), and valves (403) are arranged at two ends of the secondary pipeline (402).

3. The deposition furnace inlet distribution device according to claim 1, wherein: the air inlet mechanism (4) further comprises an air outlet pipe (404) welded with the other end of the main pipeline (401), and air outlets (405) for emitting gas are uniformly formed in the surface of the air outlet pipe (404).

4. The deposition furnace inlet distribution device according to claim 1, wherein: the material containing mechanism (5) comprises a supporting block (501), a material containing groove (502) for containing lenses is uniformly formed in the surface of the supporting block (501), telescopic columns (503) are fixedly installed at the top and the bottom of the inner wall of the material containing groove (502), clamping plates (505) are welded at one ends of the telescopic columns (503), and springs (504) are wound on the surface of the telescopic columns (503).

5. The deposition furnace inlet distribution device according to claim 1, wherein: the upper surface of main part (1) has seted up spread groove (102), main part (1) is connected with dome (101) through spread groove (102), the lower surface fixed mounting of dome (101) has sealed pad (105) that are used for improving main part (1) leakproofness.

6. The deposition furnace inlet distribution device according to claim 1, wherein: the inside of main part (1) has seted up cavity (103), the inside of cavity (103) is even fixed mounting has electric heating wire pipe (104) that are used for heating gas.

7. A deposition furnace inlet distribution arrangement as claimed in claim 3 wherein: the chain wheel (301) is positioned between the two air outlet pipes (404).

8. The deposition furnace inlet distribution device according to claim 1, wherein: the inside of heat preservation sleeve (2) bonds there is glass cotton layer (201), one side of glass cotton layer (201) bonds there is rock wool layer (202), one side of rock wool layer (202) bonds there is ceramic fiber layer (203).