CN219016791U

CN219016791U - Double-sided nano imprinting equipment

Info

Publication number: CN219016791U
Application number: CN202223587785.6U
Authority: CN
Inventors: 鲁建芬; 李益; 揭晶
Original assignee: Wuxi Rouman Textile Co ltd
Current assignee: Wuxi Rouman Textile Co ltd
Priority date: 2022-12-31
Filing date: 2022-12-31
Publication date: 2023-05-12
Anticipated expiration: 2032-12-31

Abstract

The utility model discloses double-sided nano imprinting equipment which comprises a bottom plate, wherein the upper end of the bottom plate is fixedly connected with a mounting plate, the upper end of the mounting plate is fixedly connected with a first pneumatic cylinder, and the output end of the first pneumatic cylinder is fixedly connected with a first supporting plate. According to the utility model, the first pneumatic cylinder and the second pneumatic cylinder are arranged up and down on the device, when the imprinting work is carried out, the first pneumatic cylinder and the second pneumatic cylinder can be started to respectively push the first negative pressure adsorption plate and the second negative pressure adsorption plate to move, the first negative pressure adsorption plate and the second negative pressure adsorption plate can adsorb templates on the device after internal air is extracted, and then the two templates are pushed to be close to the clamping frame part, so that the upper template and the lower template are attached to the upper surface and the lower surface of the substrate, the device can imprint the two surfaces of the substrate at the same time, the imprinting efficiency is accelerated, and the problem that the traditional device can only imprint one surface of the substrate is solved.

Description

Double-sided nano imprinting equipment

Technical Field

The utility model relates to the technical field of nanoimprint, in particular to double-sided nanoimprint equipment.

Background

The nanoimprint technology is a technology for transferring a micro-nano structure on a template to a material to be processed by the aid of photoresist, and the double-sided nanoimprint equipment is a device capable of simultaneously imprinting two sides of the processed material.

In the prior art, as disclosed in chinese patent CN 210954603U, the nano-imprinting apparatus comprises a cavity, the inner chamber fixedly connected with tray of cavity, the top lateral wall of tray is equipped with the base plate, the inner chamber of cavity is equipped with the ultraviolet lamp shade, the inner chamber of ultraviolet lamp shade is equipped with the ultraviolet lamp, the bottom lateral wall of clamp plate is equipped with flexible mould, the bottom lateral wall of flexible mould is equipped with anchor clamps, the bottom lateral wall of ultraviolet lamp shade is equipped with the light screen, the lateral wall symmetry fixedly connected with concave block of light screen, the inner chamber of concave block is equipped with the lug, the lateral wall fixedly connected with spring of lug, the lateral wall fixedly connected with side lever of spring, the lateral wall and the support fixed connection of side lever. The device sets up a nanometer impression equipment, promotes the lug through the spring, fixes the light screen, then carries out nanometer impression, and this process is under the condition of not changing the flexible mold, only needs to change the base plate, realizes cyclic operation, avoids taking place the overflow to glue the phenomenon moreover, prevents to cause the base plate to glue and be difficult to the separation on the tray.

However, in the prior art, the nano imprinting equipment can only imprint one surface of the substrate when imprinting the substrate, so that the imprinting work on the upper surface and the lower surface of the substrate can not be realized, the imprinting efficiency of the nano imprinting machine is greatly influenced, and the high-efficiency production is not facilitated.

Disclosure of Invention

The utility model aims to solve the problems that when a nano imprinting device imprints a substrate, only one surface of the substrate can be imprinted, the imprinting work of the upper surface and the lower surface of the substrate can not be rapidly realized, the imprinting efficiency of a nano imprinting machine is greatly influenced, and the high-efficiency production is not facilitated.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a two-sided nanometer impression equipment, includes the bottom plate, the upper end fixedly connected with mounting panel of bottom plate, the upper end fixedly connected with pneumatic cylinder No. one of mounting panel, the output fixedly connected with backup pad of pneumatic cylinder No. one, the equal fixedly connected with bracing piece around No. one backup pad upper end, four the upper end fixedly connected with negative pressure adsorption plate of No. one bracing piece, one side fixedly connected with overhead pole of bottom plate, one side fixedly connected with pneumatic cylinder No. two of overhead pole upper end, the output fixedly connected with backup pad No. two of pneumatic cylinder No. two, the equal fixedly connected with No. two bracing pieces around No. two backup pad lower extreme, four No. two lower extreme fixedly connected with No. two negative pressure adsorption plates of bracing piece, no. one negative pressure adsorption plate with No. two negative pressure adsorption plate's one side is even has seted up the absorption hole, no. one negative pressure adsorption plate with No. two negative pressure adsorption plate's middle part has all seted up the gas sucking hole.

Preferably, both sides of bottom plate upper end are all fixedly connected with dead lever, two one side of dead lever upper end is all fixedly connected with No. three pneumatic cylinders.

Preferably, the output ends of the three pneumatic cylinders are fixedly connected with clamping frames, and two sides of one side of each clamping frame are fixedly connected with clamping pads.

Preferably, both sides of the two clamping frames are fixedly connected with connecting blocks.

Preferably, telescopic rods are fixedly connected between two ends of the clamping frames.

Preferably, the two telescopic rods are sleeved with buffer springs, and two ends of each buffer spring are fixedly connected with two sides of each clamping frame respectively.

Preferably, the lower end of the negative pressure adsorption plate I is fixedly connected with an ultraviolet lamp I, and the upper end of the negative pressure adsorption plate II is fixedly connected with an ultraviolet lamp II.

Compared with the prior art, the utility model has the advantages and positive effects that:

1. according to the utility model, the first pneumatic cylinder and the second pneumatic cylinder are arranged up and down on the device, when the imprinting work is carried out, the first pneumatic cylinder and the second pneumatic cylinder can be started to respectively push the first negative pressure adsorption plate and the second negative pressure adsorption plate to move, the first negative pressure adsorption plate and the second negative pressure adsorption plate can adsorb templates on the device after internal air is extracted, and then the two templates are pushed to be close to the clamping frame part, so that the upper template and the lower template are attached to the upper surface and the lower surface of the substrate, the device can imprint the two surfaces of the substrate at the same time, the imprinting efficiency is accelerated, and the problem that the traditional device can only imprint one surface of the substrate is solved.

2. According to the utility model, the buffer springs are arranged on the two sides of the clamping frame, so that the clamping force of the clamping frame can be buffered when the clamping frame clamps the substrate, the situation that the edge of the substrate is damaged due to overlarge clamping force is avoided, the clamping pad can deform when being stressed, and the clamping force can be buffered and simultaneously the clamping is more stable.

Drawings

Fig. 1 is a schematic perspective view of a double-sided nanoimprint apparatus according to the present utility model;

fig. 2 is a schematic front plan view structure of a double-sided nano-imprint apparatus according to the present utility model;

fig. 3 is a schematic perspective view of a clamping frame in a double-sided nanoimprint apparatus according to the present utility model;

fig. 4 is a schematic cross-sectional view of a part of a structure of a double-sided nanoimprint apparatus according to the present utility model.

Legend description:

1. a bottom plate; 2. a mounting plate; 3. a first pneumatic cylinder; 4. a first support plate; 5. a first support rod; 6. a negative pressure adsorption plate I; 7. adsorption holes; 8. a fixed rod; 9. a third pneumatic cylinder; 10. a clamping frame; 12. a buffer spring; 13. a negative pressure adsorption plate II; 14. a second support rod; 15. a second ultraviolet lamp; 16. a second supporting plate; 17. a second pneumatic cylinder; 18. a lifting rod; 19. ultraviolet lamp I; 20. a clamping pad; 21. a telescopic rod; 22. a connecting block; 23. and an air suction hole.

Detailed Description

In order that the above objects, features and advantages of the utility model will be more clearly understood, a further description of the utility model will be rendered by reference to the appended drawings and examples. It should be noted that, in the case of no conflict, the embodiments of the present application and the features in the embodiments may be combined with each other.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the present utility model is not limited to the specific embodiments of the disclosure that follow.

Example 1

As shown in fig. 1, 2 and 4, the present utility model provides a double-sided nanoimprint apparatus, which comprises a base plate 1, wherein the upper end of the base plate 1 is fixedly connected with a mounting plate 2, the upper end of the mounting plate 2 is fixedly connected with a first pneumatic cylinder 3, the output end of the first pneumatic cylinder 3 is fixedly connected with a first support plate 4, the periphery of the upper end of the first support plate 4 is fixedly connected with a first support rod 5, the upper ends of the four first support rods 5 are fixedly connected with a first negative pressure adsorption plate 6, one side of the base plate 1 is fixedly connected with a lifting rod 18, one side of the upper end of the lifting rod 18 is fixedly connected with a second pneumatic cylinder 17, the output end of the second pneumatic cylinder 17 is fixedly connected with a second support plate 16, the periphery of the lower end of the second support plate 16 is fixedly connected with a second support rod 14, the lower ends of the four second support rods 14 are fixedly connected with a second negative pressure adsorption plate 13, the suction holes 7 are uniformly formed in one side of the negative pressure suction plate 6 and one side of the negative pressure suction plate 13, the suction holes 23 are formed in the middle of one side of the negative pressure suction plate 6 and one side of the negative pressure suction plate 13, the device is provided with the pneumatic cylinder 3 and the pneumatic cylinder 17 up and down, when the device is used for stamping, the pneumatic cylinder 3 and the pneumatic cylinder 17 can be started to respectively push the negative pressure suction plate 6 and the negative pressure suction plate 13 to move, the negative pressure suction plate 6 and the negative pressure suction plate 13 can absorb templates on the internal air after extracting, then the two templates are pushed to be close to the clamping frame 10, the upper template and the lower template are attached to the upper surface and the lower surface of the substrate, the device can stamp the two surfaces of the substrate at the same time, the stamping efficiency is improved, and the problem that the traditional device can only stamp one surface of the substrate is solved.

As shown in fig. 1-2, two sides of the upper end of the bottom plate 1 are fixedly connected with fixing rods 8, one side of the upper end of each fixing rod 8 is fixedly connected with a third pneumatic cylinder 9, and the fixing rods 8 can be used for fixing the third pneumatic cylinders 9.

As shown in fig. 1-3, the output ends of the two third pneumatic cylinders 9 are fixedly connected with clamping frames 10, two sides of one side of each of the two clamping frames 10 are fixedly connected with clamping pads 20, the clamping frames 10 can be gathered towards the middle under the pushing of the third pneumatic cylinders 9 so as to be used for clamping a substrate, and the clamping pads 20 can protect the edge of the substrate when clamping the substrate, so that the situation that the substrate is damaged due to overlarge clamping force is avoided.

As shown in fig. 3, connecting blocks 22 are fixedly connected to both sides of the two clamping frames 10, and the connecting blocks 22 can be used for fixing the telescopic rods 21.

As shown in fig. 3, telescopic rods 21 are fixedly connected between two ends of the two clamping frames 10, and the telescopic rods 21 shrink when the clamping frames 10 perform clamping work, so that the distance between the two clamping frames 10 is reduced.

As shown in fig. 3, the two telescopic rods 21 are sleeved with buffer springs 12, two ends of each buffer spring 12 are fixedly connected with two sides of each clamping frame 10, and the buffer springs 12 can buffer the clamping force of the clamping frames 10 to avoid the situation that the edge of a substrate is damaged due to overlarge clamping force.

As shown in fig. 1-2, the lower end of the negative pressure adsorption plate 6 is fixedly connected with a first ultraviolet lamp 19, the upper end of the negative pressure adsorption plate 13 is fixedly connected with a second ultraviolet lamp 15, and the first ultraviolet lamp 19 and the second ultraviolet lamp 15 can be used for heating and curing the imprinting glue to finish double-sided imprinting.

The application method and the working principle of the device are as follows: when the device is used, the templates are fixed on the negative

pressure adsorption plates

6 and 13 by extracting the air inside the negative

pressure adsorption plates

6 and 13, then the negative

pressure adsorption plates

6 and 13 are respectively pushed by the first pneumatic cylinder 3 and the second pneumatic cylinder 17 to move, the two templates are pushed to be close to the clamping frame 10, the upper template and the lower template are attached to the upper surface and the lower surface of the substrate, the device can imprint the two surfaces of the substrate at the same time, and then the ultraviolet lamp 19 and the ultraviolet lamp 15 are started to heat and solidify imprinting glue, so that double-sided imprinting is completed.

The present utility model is not limited to the above-mentioned embodiments, and any equivalent embodiments which can be changed or modified by the technical content disclosed above can be applied to other fields, but any simple modification, equivalent changes and modification made to the above-mentioned embodiments according to the technical substance of the present utility model without departing from the technical content of the present utility model still belong to the protection scope of the technical solution of the present utility model.

Claims

1. The utility model provides a two-sided nanometer impression equipment, includes bottom plate (1), its characterized in that, the upper end fixedly connected with mounting panel (2) of bottom plate (1), the upper end fixedly connected with pneumatic cylinder (3) No. one of mounting panel (2), the output fixedly connected with backup pad (4) No. one of pneumatic cylinder (3), the equal fixedly connected with bracing piece (5) around No. one backup pad (4) upper end, four the upper end fixedly connected with negative pressure adsorption plate (6) No. one of bracing piece (5), one side fixedly connected with frame pole (18) of bottom plate (1), one side fixedly connected with pneumatic cylinder (17) of frame pole (18) upper end, the output fixedly connected with pneumatic cylinder (16) No. two of No. two pneumatic cylinders (17), the equal fixedly connected with bracing piece (14) around No. two of No. two backup pads (16) lower extreme fixedly connected with No. two negative pressure adsorption plates (13), no. one side of negative pressure adsorption plate (6) and No. two negative pressure adsorption plates (13) and No. two have the equal air holes (13) of seting up.

2. A double-sided nanoimprint apparatus as claimed in claim 1, wherein: both sides of bottom plate (1) upper end are all fixedly connected with dead lever (8), two one side of dead lever (8) upper end is all fixedly connected with pneumatic cylinder No. three (9).

3. A double-sided nanoimprint apparatus as claimed in claim 2, wherein: the output ends of the three pneumatic cylinders (9) are fixedly connected with clamping frames (10), and two sides of one side of each clamping frame (10) are fixedly connected with clamping pads (20).

4. A double-sided nanoimprint apparatus as claimed in claim 3, wherein: connecting blocks (22) are fixedly connected to two sides of the two clamping frames (10).

5. A double-sided nanoimprint apparatus as claimed in claim 4, wherein: and telescopic rods (21) are fixedly connected between the two ends of the two clamping frames (10).

6. A double-sided nanoimprint apparatus as claimed in claim 5, wherein: the outside of two telescopic link (21) has all cup jointed buffer spring (12), two buffer spring (12) both ends respectively with both sides fixed connection of two holder (10).

7. A double-sided nanoimprint apparatus as claimed in claim 1, wherein: the lower extreme fixedly connected with ultraviolet lamp (19) No. one of negative pressure adsorption plate (6), the upper end fixedly connected with ultraviolet lamp (15) No. two of negative pressure adsorption plate (13).