CN218982539U - Optical element blowing system and optical device - Google Patents

Optical element blowing system and optical device Download PDF

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Publication number
CN218982539U
CN218982539U CN202223064649.9U CN202223064649U CN218982539U CN 218982539 U CN218982539 U CN 218982539U CN 202223064649 U CN202223064649 U CN 202223064649U CN 218982539 U CN218982539 U CN 218982539U
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China
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blowing
air
optical element
module
optical
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王先炉
杨乐
陈鲁
张嵩
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Feice Technology Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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Abstract

The utility model relates to blowing dust prevention of an optical element, in particular to a blowing system of the optical element. An optical element blowing system comprising: the bearing substrate is provided with at least two element bearing positions for installing corresponding optical elements; the support seat is fixed on the bearing substrate and is provided with at least one blowing module setting position; and at least one blowing module, the blowing module having an air inlet and an air outlet, the air inlet of each blowing module being for communication with an air source, the air outlet being arranged towards at least one of the component bearing positions corresponding to each other to blow air through the air outlet to the corresponding optical component. Because the distributed blowing modules are adopted, the optical device can be provided with different blowing modules according to the blowing requirements of the optical elements, the blowing operation of each optical element is not affected, and the requirements of different optical elements on cleanliness can be better met.

Description

Optical element blowing system and optical device
Technical Field
The utility model relates to blowing dust prevention of an optical element, in particular to a blowing system of the optical element.
Background
In opto-mechanical devices there are many optical elements on the optical path, such as lenses, filters, polarizers, mirrors, etc. Many optical elements belong to precise elements, often have higher cleanliness requirements, and if the surfaces of the optical elements are polluted by dust, the light beams in the light path can be undesirably scattered, blocked and the like, so that accidents such as optical detection failure and the like are caused.
In order to ensure the cleanliness of the optical element, an air blowing mode is often adopted to clean the surface of the optical element. For example, a central blowing system is arranged inside the optical machine, and a large blowing panel is used for blowing air from the top downwards to face all optical elements through a large-caliber air blowing port.
The central blowing system has the advantages of simple structure and large blowing amount. However, the central air blowing system adopts the whole large-area air blowing, the air blowing amounts are equal everywhere, the distribution density of the optical elements is different, and the air blowing amounts required by different optical elements are different, so that the air blowing amount of the central air blowing system on the optical elements with denser distribution is relatively less, the air blowing amount of the optical elements with higher air blowing amount requirement is relatively less, and the cleanliness requirement of the corresponding optical elements is not easy to ensure. If the cleanliness requirements of all optical elements are met by increasing the blowing amount, the air consumption, the power consumption of the equipment and the ageing speed of the equipment are obviously increased, so that the cost is increased.
Disclosure of Invention
The utility model mainly solves the technical problem that the existing central air blowing system is not easy to reliably ensure the cleanliness of all optical elements.
In a first aspect, the present utility model provides an optical element blowing system comprising:
the bearing substrate is provided with at least two element bearing positions for installing corresponding optical elements;
the support seat is fixed on the bearing substrate and is provided with at least one blowing module setting position;
and at least one blow module having an air inlet and an air outlet; the air inlet of each air blowing module is used for being communicated with an air source, and the air blowing openings are arranged towards at least one corresponding element bearing position respectively so as to blow air to the corresponding optical element through the air blowing openings.
In one technical scheme, the device comprises more than two blowing modules, wherein each blowing module is distributed along the trend of the light path corresponding to the optical element on the bearing substrate.
In one technical scheme, the device further comprises a flow regulating device, at least one air inlet of the air blowing module is connected to the flow regulating device, and the flow regulating device can regulate the air blowing amount conveyed into the corresponding air blowing module.
In one technical scheme, the blowing module is detachably connected to the blowing module setting position and is configured to be capable of freely laying or dismantling the blowing module at the blowing module setting position.
In one technical scheme, the blowing module is provided with more than two air outlets to form an air hole array.
In one technical scheme, the air blowing module is provided with a main air supply channel communicated with the air inlet and a branch air supply channel connected between the main air supply channel and the air outlet; at least a part of inlet ends of the branch air supply channels are distributed on the channel wall of the main air supply channel along the circumferential direction of the main air supply channel.
In one technical scheme, the supporting seat comprises a supporting plate and a bracket, wherein the supporting plate is arranged with the bearing base body at intervals, the bracket is connected between the supporting plate and the bearing base body, the blowing module is arranged on the supporting plate, and the supporting plate is provided with an exhaust port through which air flow blown out by the air blowing port passes.
In one technical scheme, the supporting seat is a cover body structure, the side wall of the cover body structure is connected to the bearing substrate, and the air blowing module is arranged on a plugging end of one side of the cover body structure, which is opposite to the bearing substrate; the side wall of the cover body structure is provided with an optical path avoiding port for light beams to pass through and for gas discharged from the cover body structure to blow in.
In one technical scheme, the blowing module is detachably connected to one side, facing away from the bearing substrate, of the supporting seat, and a blowing avoiding opening for avoiding a blowing opening of the blowing module is formed in the supporting seat.
In a second aspect, the present utility model provides an optical device comprising an optical element blowing system, further comprising an optical element disposed on a carrier substrate of the optical element blowing system;
the optical element blowing system includes:
the bearing substrate is provided with at least two element bearing positions for installing corresponding optical elements;
the support seat is fixed on the bearing substrate and is provided with at least one blowing module setting position;
and at least one blow module having an air inlet and an air outlet; the air inlet of each air blowing module is used for being communicated with an air source, and the air blowing openings are arranged towards at least one corresponding element bearing position respectively so as to blow air to the corresponding optical element through the air blowing openings.
In one technical scheme, the device comprises more than two blowing modules, wherein each blowing module is distributed along the trend of the light path corresponding to the optical element on the bearing substrate.
In one technical scheme, the device further comprises a flow regulating device, at least one air inlet of the air blowing module is connected to the flow regulating device, and the flow regulating device can regulate the air blowing amount conveyed into the corresponding air blowing module.
In one technical scheme, the blowing module is detachably connected to the blowing module setting position and is configured to be capable of freely laying or dismantling the blowing module at the blowing module setting position.
In one technical scheme, the blowing module is provided with more than two air outlets to form an air hole array.
In one technical scheme, the air blowing module is provided with a main air supply channel communicated with the air inlet and a branch air supply channel connected between the main air supply channel and the air outlet; at least a part of inlet ends of the branch air supply channels are distributed on the channel wall of the main air supply channel along the circumferential direction of the main air supply channel.
In one technical scheme, the supporting seat comprises a supporting plate and a bracket, wherein the supporting plate is arranged with the bearing base body at intervals, the bracket is connected between the supporting plate and the bearing base body, the blowing module is arranged on the supporting plate, and the supporting plate is provided with an exhaust port through which air flow blown out by the air blowing port passes.
In one technical scheme, the supporting seat is a cover body structure, the side wall of the cover body structure is connected to the bearing substrate, and the air blowing module is arranged on a plugging end of one side of the cover body structure, which is opposite to the bearing substrate; the side wall of the cover body structure is provided with an optical path avoiding port for light beams to pass through and for gas discharged from the cover body structure to blow in.
In one technical scheme, the blowing module is detachably connected to one side, facing away from the bearing substrate, of the supporting seat, and a blowing avoiding opening for avoiding a blowing opening of the blowing module is formed in the supporting seat.
The utility model has the beneficial effects that: according to the optical element blowing system and the optical device, as the distributed blowing modules are adopted, the blowing modules are fixed on the bearing substrate through the supporting seats, and the blowing ports of the blowing modules can be arranged towards at least one corresponding element bearing position, so that the optical device can be provided with different blowing modules according to the blowing requirements of the optical elements, the blowing operation of each optical element is not affected, the requirements of different optical elements on cleanliness can be better met, the situation that the optical elements with high requirements on cleanliness cannot stably and reliably keep a clean state is avoided, and the unexpected situation that optical detection fails is better avoided.
Furthermore, the blowing modules are distributed along the trend of the light path corresponding to the optical element on the bearing substrate, so that reliable transmission of the light beam on the light path can be better ensured, and the blowing modules can be more effectively utilized to blow the optical element.
Further, at least one blowing module is detachably connected to the corresponding blowing module setting position, so that flexible adjustment and independent replacement of the blowing modules are conveniently realized, and different blowing requirements are met.
Drawings
FIG. 1 is a schematic diagram of an embodiment of an optical device according to the present utility model;
FIG. 2 is an exploded view of the structure of FIG. 1;
FIG. 3 is a schematic view of the structure of the air blowing port of the air blowing module;
FIG. 4 is a schematic diagram of the connection between the main air supply channel and the branch air supply channels of the air blowing module;
FIG. 5 is a schematic view of another embodiment of an optical device according to the present utility model;
fig. 6 is an exploded view of the structure of fig. 5.
List of feature names corresponding to reference numerals in the figure: 100. a carrier substrate; 110. a component carrying position; 200. a support base; 210. a bearing plate; 211. a blowing avoiding port; 212. an exhaust port; 221. a support frame; 230. a support plate; 231. opening holes; 300. a blowing module; 310. a first blowing module; 320. a second air blowing module; 330. an air inlet; 340. an air blowing port; 350. a main air supply channel; 360. a branched air supply channel; 400. an optical element; 410. a collimating lens; 420. a polarizer; 430. a converging lens; 440. a reflecting mirror; 510. a sidewall; 520. plugging the end; 530. an optical path inlet; 540. and an optical path outlet.
Detailed Description
The utility model will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, some operations associated with the present application have not been shown or described in the specification to avoid obscuring the core portions of the present application, and may not be necessary for a person skilled in the art to describe in detail the relevant operations based on the description herein and the general knowledge of one skilled in the art.
Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated.
In an embodiment of an optical device in the present utility model, distributed air blowing modules 300 are adopted, and each air blowing module 300 can blow air to one or more optical elements 400 individually in a targeted manner, so that the purpose of the air blowing process is stronger, the flexibility is stronger, the differentiated air blowing requirements of different optical elements 400 are met, and the cleanliness of all the optical elements 400 can be ensured more stably and reliably. And, the different optical elements 400 can be better adapted by adjusting the blowing amount of each blowing module 300.
In one embodiment, as shown in fig. 1 and 2, an optical device is a device for polarizing light and emitting the light toward a set direction, and includes an optical element 400 and an optical element blowing system corresponding to the optical element 400.
The optical element 400 includes a collimator lens 410 into which a light beam is incident, a polarizer 420 having a polarizing plate provided therein, a converging lens 430 for converging the light beam, and a reflecting mirror 440 for reflecting the light beam to form an outgoing light beam, and the collimator lens 410, the polarizer 420, the converging lens 430, and the reflecting mirror 440 are sequentially arranged along an optical path. Each of the optical elements 400 may be any well-known element, and the specific structure thereof will not be described in detail herein. In addition, the optical element 400 may be other types of elements, such as a pupil, a lens, a wave plate, a barrel lens, a grating, etc., which will not be described here. Of course, the type and number of optical elements 400 selected may be flexibly configured as desired, and are not limited herein.
In one embodiment, a corresponding optical element blowing system includes a carrier substrate 100, a support base 200, and a blowing module 300.
The carrier body 100 is plate-shaped for fixing in a corresponding position of the opto-mechanical device. As shown in fig. 1 and 2, the carrier substrate 100 is provided with three mounting grooves, and the bottoms of the mounting grooves are provided with threaded connection holes, so as to form element carrying positions 110 for mounting the corresponding optical elements 400. Wherein, a middle mounting groove forms two element bearing positions 110 for respectively mounting the polarizer 420 and the converging lens 430, and two mounting grooves on two sides form one element bearing position 110 for respectively mounting the collimating lens 410 and the reflecting mirror 440. In other embodiments, the component carrier site 110 may be replaced with other forms to enable the installation of optical components.
In one embodiment, the support base 200 includes a bearing plate 210 and a bracket. The bearing plates 210 are spaced apart from the bearing base 100, are positioned on top of the bearing surface of the bearing base 100, and are parallel to the bearing base 100. The bracket is provided with three parts, including two support frames 221 in a shape like a Chinese character 'ji' and a support plate 230 in a shape like a Chinese character 'ji', the top of the bracket is fixedly connected with the support plate 230 in a screw connection manner; the bottom of the bracket is fixedly connected with the bearing substrate 100, thereby realizing stable support of the air blowing module 300. The bottom of the bracket is fixedly connected with the bearing substrate 100 in a specific way: the bottom of the support frame 221 in the shape of a Chinese character 'ji' is provided with a folded edge to form a fixing flange for fixing the support frame 221 in the shape of a Chinese character 'ji' to the bearing substrate 100; the bottom of the support plate 230 in the shape of a "convex" has a stepped structure, and also forms a fixing flange for fixing the support frame 221 in the shape of a "table" to the carrier base 100, by which fixing flange and screws are used for fixing. The support plate 230 of the "convex" shape is small in size and can save space. Meanwhile, the center of the support plate 230 in the shape of a "convex" is provided with an opening 231, which can allow the air flow blown out from the air blowing port 340 to pass therethrough, and is advantageous in reducing weight and saving materials. The support structure is adopted to form an open exhaust space, so that the blocking of air blown out by the air module is reduced, the air flow can smoothly flow and smoothly take away dust, and the vortex is avoided to cause the dust to swirl and be discharged smoothly. The bearing plate 210 is provided with the air blowing avoiding port 211 and the air outlet 212, the air blowing avoiding port 211 is used for avoiding the air blowing port 340 of the air blowing module 300, the air blowing port 340 can smoothly blow the optical element 400, and the air outlet 212 can also be used for allowing air flow blown by the air blowing port 340 to pass through, so that the weight is reduced, and the material is saved. The area at the blow-off port 211 forms a blow-off module setting bit for installing the blow-off module 300. In other embodiments, the support base 200 may be replaced by other forms, for example, a vertical plate extending along two long sides of the bearing substrate 100, where the top end of the vertical plate is provided with a blowing module fixing structure, and the location where the blowing module fixing structure is provided forms a blowing module setting position.
In a preferred embodiment, the blowing module 300 has a block structure, including a first blowing module 310 and a second blowing module 320, and is detachably connected to a side of the support base 200 facing away from the carrier substrate 100 through a flange structure and screws. The air blowing module 300 is provided with an air inlet 330 and air outlets arranged in an array form to form a distributed air outlet structure (such as an air hole array). Specifically, taking the first air blowing module 310 as an example, as shown in fig. 1, 2 and 3, the first air blowing module 310 has a substantially rectangular parallelepiped structure, and steps are provided at four corners to form a flange structure. The first air blowing module 310 is provided with an air supply hole extending in a length direction of the rectangular parallelepiped, the air supply hole forms a main air supply passage 350, the air supply hole is a blind hole, and an air inlet 330 is formed at an open end. The blowing module 300 is detachably connected to the side of the supporting seat 200 facing away from the bearing base 100, so that the disassembling and assembling operations can be conveniently performed, and the independent replacement can be conveniently performed according to the blowing requirement.
In one embodiment, the air blowing module 300 is detachably connected to the air blowing module setting position, and can be configured to freely arrange or remove the air blowing module 300 at the air blowing module setting position, so that the air blowing modules can be replaced and recombined conveniently, and the purpose of freely arranging the air blowing modules on the supporting seat 200 is achieved. It will be appreciated that the position of the air blowing module 300 may be adjusted in time to fit the arrangement path of the optical element as long as the arrangement path of the optical element is changed.
As shown in fig. 4, the air supply hole is connected with a plurality of branched air supply channels 360, inlet ends of the branched air supply channels 360 are distributed on a wall of the air supply hole, outlet ends of the branched air supply channels 360 form air outlets, the air outlets are arranged on one side of the first air blowing module 310 facing the bearing substrate 100 in a matrix form, a strip-shaped air outlet area is formed, and an extending direction of the strip-shaped air outlet area is parallel to an extending direction of the main air supply channel 350. In this embodiment, in the extending direction of the main air supply channel 350, the inlet end and the outlet end of the branch air supply channels 360 correspond to each other, that is, the plane or straight line of each branch air supply channel 360 is perpendicular to the extending direction of the main air supply channel 350.
It should be noted that, since the inlet end and the outlet end of the branched air supply channel 360 may not be on the same straight line, the branched air supply channel 360 may need to be formed by connecting two or more straight channels with an included angle, or be configured as an inclined channel. The main gas supply channel 350 and the branch gas supply channels 360 may be shaped in any manner chosen by the person skilled in the art, such as mechanical drilling, casting, etc. When more than two sections of straight channel connection with an included angle are needed for the branched air supply channel 360, if a mechanical drilling processing mode is adopted, corresponding straight channels can be processed from corresponding sides of the block respectively, and then unnecessary openings on the corresponding sides can be blocked.
The second blowing module 320 has substantially the same structure as the first blowing module 310 except for the size and the number of the blowing ports 340. In addition, the air inlet 330 of the second air blowing module 320 is disposed at a side facing away from the first air blowing module 310 so as to be connected to an air supply device.
In one embodiment, the optical element blowing system includes a gas supply device including a gas source and a gas delivery conduit (not shown), the gas source being a gas generating device or a gas storage device capable of generating or storing at least one of dry air, nitrogen, helium, etc., in a manner familiar to those skilled in the art, and not specifically described herein. In addition, in one embodiment, the air inlet 330 of each air blowing module 300 or the corresponding air conveying pipeline may be provided with a regulating valve, and the regulating valve forms a flow regulating device, so that the air blowing amount of each air blowing module 300 can be independently regulated. In other embodiments, the flow regulating device may be replaced by other forms, such as an air inlet connector with different diameters. Of course, in other embodiments, each of the air blowing modules 300 may be connected to one air delivery pipe in a unified manner, and the air blowing amounts of all the air blowing modules 300 may be adjusted in a unified manner.
When in use, the optical device of the utility model can be provided with different air blowing modules 300 according to the air blowing requirements of the optical element 400, and the air blowing requirements can be determined by factors such as the density degree of the optical element 400, the cleaning requirement and the like; the blowing operation of each optical element 400 is not affected, and the requirements of different optical elements 400 on cleanliness can be better met, so that the problem that the optical elements 400 with high requirements on cleanliness cannot stably and reliably keep a clean state is avoided, and the unexpected situation of optical detection failure is better avoided. In addition, because the air blowing pertinence of the distributed air blowing modules 300 is strong, the air blowing quantity is not required to be increased to ensure the cleanliness, the required air blowing quantity is smaller, and the complicated and staggered internal channels are not required to be designed as in the central air blowing mode. Furthermore, the blowing module 300 is designed in a distributed manner, and is small in size and convenient to manufacture.
Embodiment two:
referring to fig. 5 and 6, in one embodiment, the support base 200 of the optical element blowing system is a cover structure, and includes a square side wall 510, one end of the square side wall 510 is a plugging end 520, and the other end is an opening end facing the carrier substrate 100. The cover body structure is covered on the bearing substrate 100, the opening end is fixedly connected with the bearing substrate 100, and the air blowing module 300 is arranged on a plugging end 520 of one side of the cover body structure, which is away from the bearing substrate 100; the side wall 510 of the cover body is provided with an optical path avoiding port, the optical path avoiding port comprises an optical path inlet 530 and an optical path outlet 540, and the optical path inlet 530 and the optical path outlet 540 can be used for exhausting gas which is blown into the cover body structure. The support base 200 adopts a cover structure to improve the tightness of the optical element 400, and the inside of the cover structure can form a positive pressure environment when the air blowing module 300 blows air, so that external dust cannot enter, and the optical element 400 is prevented from being polluted as much as possible.
In the above embodiment, the component carrying sites 110 on the carrying substrate 100 are formed by mounting slots, and in other embodiments, the component carrying sites 110 may be formed in other forms, such as by flat planar surfaces and corresponding fixing structures on the carrying substrate 100.
In the above embodiment, each air blowing module 300 is provided with more than two air outlets, so as to form a distributed air outlet structure. In other embodiments, only one air outlet on the air blowing module 300 may be provided, and when the optical element 400 corresponding to the air outlet is larger in size, the air outlet may be correspondingly provided in a shape of a rectangular hole, a square hole, a circular hole, or the like to meet the air blowing requirement of the optical element 400. In addition, when there are multiple air outlets, the arrangement of the air outlets may also be changed, for example, the air outlets on the air blowing module 300 are set to be more than two groups, and the groups have intervals therebetween. In addition, the air outlets can be arranged according to other shapes, such as circular array arrangement or prismatic arrangement.
In the above-described embodiment, the air inlet 330 is formed by the air supply holes, and is provided with only one. In other embodiments, the air inlet 330 may be formed by a larger cavity, such as a rectangular parallelepiped cavity provided in the air blowing module 300, with the branched air supply channels 360 connected to the walls of the cavity. In addition, more than two air inlets 330 may be provided on one air blowing module 300.
In the above embodiment, the air blowing module 300 is provided with two. In other embodiments. The air blowing module 300 may be provided with three or more, for example, a separate air blowing module 300 for each optical element 400.
Embodiments of the optical element blowing system in the present utility model:
the embodiment of the optical element blowing system in the present utility model is the same as that in any of the embodiments of the above-described one optical device, and the description thereof will not be repeated here.
The foregoing description of the utility model has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the utility model pertains, based on the idea of the utility model.

Claims (10)

1. An optical element blowing system, comprising:
a bearing base body (100), wherein at least two element bearing positions (110) for installing corresponding optical elements (400) are arranged on the bearing base body (100);
the support seat (200) is fixed on the bearing substrate (100), and at least one blowing module setting position is arranged on the support seat (200);
and at least one blow module (300), the blow module (300) having an air inlet (330) and an air outlet (340); the air inlet (330) of each air blowing module (300) is used for communicating with an air source, and the air blowing openings (340) are arranged towards at least one corresponding element bearing position (110) so as to blow air to the corresponding optical element (400) through the air blowing openings (340).
2. An optical element blowing system according to claim 1, comprising more than two of said blowing modules (300), each of said blowing modules (300) being distributed along a path of light on the carrier substrate (100) corresponding to said optical element (400).
3. An optical element blowing system according to claim 1 or 2, characterized in that it further comprises a flow adjustment device to which the air inlet of at least one of said blowing modules (300) is connected, said flow adjustment device being capable of adjusting the amount of blowing delivered into the corresponding blowing module.
4. The optical element blowing system according to claim 1 or 2, characterized in that the blowing module (300) is detachably connected at the blowing module setting position and is configured to enable free laying or removal of the blowing module (300) at the blowing module setting position.
5. The optical element blowing system according to claim 1 or 2, characterized in that the blowing module (300) is provided with more than two air outlets (340) to form an array of air holes.
6. An optical element blowing system according to claim 5, characterized in that said blowing module (300) is provided with a main air supply channel (350) communicating with said air inlet (330), a branch air supply channel (360) connected between said main air supply channel (350) and said air outlet (340); at least a part of the inlet ends of the branched gas supply channels (360) are distributed on the channel wall of the main gas supply channel (350) in the circumferential direction of the main gas supply channel (350).
7. An optical element blowing system according to claim 1 or 2, characterized in that said support base (200) comprises a support plate (210) spaced from said carrier body (100), a bracket connected between said support plate (210) and the carrier body (100), said blowing module (300) being mounted on said support plate (210), said support plate (210) being provided with an exhaust opening (212) for the passage of the air flow blown by said air blowing opening (340).
8. The optical element blowing system according to claim 1 or 2, wherein the support base (200) is a cover structure, a side wall (510) of the cover structure is connected to the carrying substrate (100), and the blowing module (300) is mounted on a plugging end (520) of a side of the cover structure facing away from the carrying substrate (100); the side wall (510) of the cover body structure is provided with an optical path avoiding port for light beams to pass through and for gas to be blown into the cover body structure to be discharged.
9. The optical element blowing system according to claim 1 or 2, wherein the blowing module (300) is detachably connected to a side of the support base (200) facing away from the bearing substrate (100), and a blowing avoidance opening (211) for avoiding a blowing opening (340) of the blowing module (300) is provided on the support base (200).
10. An optical device comprising an optical element blowing system according to any of claims 1 to 9, further comprising an optical element (400) arranged on a carrier substrate (100) of the optical element blowing system.
CN202223064649.9U 2022-11-18 2022-11-18 Optical element blowing system and optical device Active CN218982539U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223064649.9U CN218982539U (en) 2022-11-18 2022-11-18 Optical element blowing system and optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223064649.9U CN218982539U (en) 2022-11-18 2022-11-18 Optical element blowing system and optical device

Publications (1)

Publication Number Publication Date
CN218982539U true CN218982539U (en) 2023-05-09

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Application Number Title Priority Date Filing Date
CN202223064649.9U Active CN218982539U (en) 2022-11-18 2022-11-18 Optical element blowing system and optical device

Country Status (1)

Country Link
CN (1) CN218982539U (en)

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