CN218974114U

CN218974114U - Vacuum sputtering surface coating film porosity detection device

Info

Publication number: CN218974114U
Application number: CN202223122826.4U
Authority: CN
Inventors: 刘贵宁
Original assignee: Jiangsu Guozijian Testing And Certification Co ltd
Current assignee: Jiangsu Guozijian Testing And Certification Co ltd
Priority date: 2022-11-23
Filing date: 2022-11-23
Publication date: 2023-05-05
Anticipated expiration: 2032-11-23

Abstract

The utility model relates to the technical field of detection, in particular to a vacuum sputtering surface coating porosity detection device which comprises an operation table, a water tank and a base, wherein a support column is arranged at the bottom of the operation table, a mounting box is arranged above the operation table, the water tank is arranged in the mounting box, a chute is formed in the side face of the water tank, mounting plates are symmetrically arranged on one side of the chute, connecting shafts are arranged between the mounting plates in a penetrating manner, rollers are sleeved between the connecting shafts, the base is arranged at the bottom of the water tank, a spring is arranged between the base and the water tank, when the water tank is mounted, downward gravity is applied to the bottom of the mounting box through the water tank, at the moment, the spring is stressed to deform and shrink inwards, and the rollers on the side face of the water tank are matched with the chute, so that the water tank body is effectively buffered.

Description

Vacuum sputtering surface coating film porosity detection device

Technical Field

The utility model relates to the technical field of detection, in particular to a vacuum sputtering surface coating porosity detection device.

Background

Vacuum sputtering surface coating means that a material source (called a target) to be coated and a substrate are placed into a vacuum chamber together, and then positive ions are utilized to bombard the target serving as a cathode, so that atoms and molecules in the target escape and are condensed on the surface of the substrate to form a film. After the coating is finished, the coating is detected by a porosity detection device, and the apparent porosity is an important index for evaluating the quality of raw materials or products, so that not only can the compactness of the materials be reflected, but also the particle size composition, the forming and the sintering in the manufacturing process are characterized as reasonable.

The existing porosity detection device needs to be installed on a water tank, then the water body is put into, the porosity of an electrode is measured through a water boiling method, when the water tank is installed, protective equipment is lacking between the water tank and an instrument, and the water tank and the instrument cannot be buffered, because the falling force of the water tank collides with the contact surface of the instrument when the water tank is placed downwards, the equipment is damaged due to collision, the water tank is inconvenient to use, and meanwhile the water tank is difficult to detach after being installed, so that the water tank is difficult to detach, and the follow-up taking is inconvenient.

Disclosure of Invention

Aiming at the problems in the prior art, a vacuum sputtering surface coating porosity detection device is provided.

The specific technical scheme is as follows:

the utility model provides a vacuum sputtering surface coating film porosity detection device, includes operation panel, water tank and base, the bottom of operation panel is provided with the support column, the top of operation panel is provided with the mounting box, the inside of mounting box is provided with the water tank, the spout has been seted up to the side of water tank, one side symmetry of spout is provided with the mounting panel, run through between the mounting panel and be provided with the axle, the cover is equipped with the gyro wheel between the axle, the bottom of water tank is provided with the base, the base with be provided with the spring between the water tank.

Preferably, the base is provided with a buffer column, a buffer groove is formed in the buffer column, the spring is arranged in the buffer groove, one end, away from the base, of the spring is provided with a connecting block, and a sleeving column is arranged above the connecting block.

Preferably, the base is fixedly connected with the buffer column, one end of the spring is fixedly connected with the bottom of the buffer groove, the other end of the spring is fixedly connected with the connecting block, and one end of the connecting block, which is far away from the spring, is fixedly connected with the sleeve joint column.

Preferably, a sleeving hole is formed in the upper portion of the sleeving column, the sleeving hole is located at the bottom of the water tank, the size of the sleeving column is matched with that of the sleeving column, and the sleeving column and the sleeving hole form sliding connection.

Preferably, one end of the mounting plate is fixedly connected with the inner wall of the mounting box, and the other end of the mounting plate is rotatably provided with the connecting shaft.

Preferably, the roller is sleeved on the connecting shaft and fixedly connected with the connecting shaft, and the position of the roller is opposite to the position of the chute and is in sliding connection with the chute.

Preferably, the support columns are located at four corners of the operation table and are fixedly connected with the operation table, and the mounting box is fixedly connected with the operation table.

The technical scheme has the following advantages or beneficial effects:

1. through setting up the post that cup joints, cup joints the cooperation of post and cup joint hole for the bottom of water tank is connected with the bottom of mounting box, sets up the buffer post in the bottom of mounting box, establishes the spring in the buffer post, because the one end and the buffer tank bottom fixed connection of spring, the other end and the connecting block fixed connection of spring, when installing the water tank, exert a decurrent gravity to the bottom of mounting box through the water tank, the spring atress takes place deformation and inwards contracts this moment, through the cooperation of gyro wheel and spout of water tank side, thereby effectually buffering the water tank box;

2. the installation plate is arranged on the side face of the installation box, the connecting shafts are arranged between the installation plates, the rollers are arranged on the connecting shafts, the positions of the rollers are opposite to the positions of the sliding grooves, the rollers and the sliding grooves form sliding connection, friction between the water tank and the installation box is reduced when the water tank is supported, the water tank is conveniently taken through the matching of the sleeving holes and the sleeving columns, and the multifunctional and practical functions of the device are reflected.

Drawings

Embodiments of the present utility model will now be described more fully with reference to the accompanying drawings. The drawings, however, are for illustration and description only and are not intended as a definition of the limits of the utility model.

FIG. 1 is a schematic diagram of the overall structure of a vacuum sputtering surface coating porosity detection device according to the present utility model;

FIG. 2 is a schematic diagram of the internal structure of a mounting box of the vacuum sputtering surface coating porosity detection device;

FIG. 3 is a schematic diagram of the internal structure of a buffer column of the vacuum sputtering surface coating porosity detection device according to the present utility model;

fig. 4 is an enlarged schematic diagram of a part of the structure of fig. 2A of the vacuum sputtering surface coating porosity detection device according to the present utility model.

The above reference numerals denote: 1. an operation table; 11. a support column; 12. a mounting box; 2. a water tank; 21. a chute; 22. a mounting plate; 23. a connecting shaft; 24. a roller; 25. a socket hole; 3. a base; 31. a spring; 32. a buffer column; 33. a buffer tank; 34. a connecting block; 35. and sleeving the column.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.

Referring to fig. 1-4, a vacuum sputtering surface coating film porosity detection device, including operation panel 1, water tank 2 and base 3, the bottom of operation panel 1 is provided with support column 11, the top of operation panel 1 is provided with installation box 12, the inside of installation box 12 is provided with water tank 2, spout 21 has been seted up to the side of water tank 2, one side symmetry of spout 21 is provided with mounting panel 22, run through between the mounting panel 22 and be provided with connecting axle 23, be equipped with gyro wheel 24 between the connecting axle 23, the bottom of water tank 2 is provided with base 3, be provided with spring 31 between base 3 and the water tank 2, through setting up socket post 35, socket post 35 and socket hole 25's cooperation, make the bottom of water tank 2 be connected with the bottom of installation box 12, set up buffer post 32 in the bottom of installation box 12, because the one end and the buffer tank 33 bottom fixed connection of spring 31, when installing water tank 2, through the water tank 2 to the bottom of installation box 12 apply a decurrent gravity, spring 31 atress shrink inwards, through the cooperation of water tank 2

side

24 and 21, thereby effectively to the water tank 2 has been carried out the buffer box 2.

Further, be provided with buffer column 32 on the base 3, buffer tank 33 has been seted up to buffer column 32 inside, buffer tank 33's inside is provided with spring 31, spring 31 is kept away from base 3's one end and is provided with connecting block 34, connecting block 34's top is provided with cup joints post 35, through setting up cup joints post 35, cup joints post 35 and cup joint hole 25's cooperation for the bottom of water tank 2 is connected with the bottom of mounting box 12, set up buffer column 32 in the bottom of mounting box 12, establish spring 31 in buffer column 32, because spring 31's one end and buffer tank 33 bottom fixed connection, spring 31's the other end and connecting block 34 fixed connection, when installing water tank 2, can cushion water tank 2 box.

Further, base 3 and buffer post 32 fixed connection, the one end of spring 31 and the bottom fixed connection of buffer tank 33, the other end and the connecting block 34 fixed connection of spring 31, the one end that spring 31 was kept away from to connecting block 34 and cup joint post 35 fixed connection through setting up spring 31 in buffer tank 33, takes place deformation and inwards contracts when spring 31 atress to effectually cushion water tank 2 box.

Further, cup joint the top of post 35 and be provided with cup joint hole 25, cup joint the bottom that hole 25 is located water tank 2, cup joint the size of post 35 and cup joint the size looks adaptation of post 35, cup joint post 35 and cup joint hole 25 and constitute sliding connection, through setting up cup joint post 35, cup joint the cooperation of post 35 and cup joint hole 25 for the bottom of water tank 2 is connected with the bottom of installation box 12.

Further, one end of the mounting plate 22 is fixedly connected with the inner wall of the mounting box 12, the other end of the mounting plate 22 is rotatably provided with a connecting shaft 23, and the subsequent mounting of the roller 24 is facilitated by arranging the mounting plate 22 and the connecting shaft 23.

Further, the roller 24 is sleeved on the connecting shaft 23 and fixedly connected with the connecting shaft 23, the position of the roller 24 is opposite to the position of the chute 21 and is in sliding connection with the chute 21, the position of the roller 24 is opposite to the position of the chute 21, so that the roller 24 and the chute 21 form sliding connection, the water tank 2 is supported, and meanwhile friction between the water tank 2 and the installation box 12 is reduced.

Further, support column 11 is located four corners of operation panel 1 and with operation panel 1 fixed connection, mounting box 12 and operation panel 1 fixed connection can make whole device more stable through setting up support column 11.

Working principle: when the device is used, firstly, the water tank 2 is installed, the sliding groove 21 of the water tank 2 is aligned with the position of the sliding groove 21, then the water tank 2 is slid downwards until the plugging hole at the bottom of the water tank 2 is completely embedded with the plugging column, so that the installation of the water tank 2 is completed, then water is injected into the water tank 2, when the water tank 2 is filled with water, a downward gravity is applied to the bottom of the installation box 12 through the water tank 2, at the moment, the spring 31 is stressed to deform and shrink inwards, the sliding groove 21 is matched with the sliding groove 24 at the side surface of the water tank 2, so that the box body of the water tank 2 is effectively buffered, a sample to be detected is placed in the box body, the sample is weighed, information is recorded, then the water tank 2 is pulled upwards, the sample is taken out, and then the sample is placed in the installation box 12 for weighing.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims

1. A vacuum sputtering surface coating film porosity detection device is characterized in that: including operation panel (1), water tank (2) and base (3), the bottom of operation panel (1) is provided with support column (11), the top of operation panel (1) is provided with mounting box (12), the inside of mounting box (12) is provided with water tank (2), spout (21) have been seted up to the side of water tank (2), one side symmetry of spout (21) is provided with mounting panel (22), run through between mounting panel (22) and be provided with connecting axle (23), the cover is equipped with gyro wheel (24) between connecting axle (23), the bottom of water tank (2) is provided with base (3), base (3) with be provided with spring (31) between water tank (2).

2. The vacuum sputtering surface coating film porosity detection device according to claim 1, wherein: the novel anti-collision device is characterized in that a buffer column (32) is arranged on the base (3), a buffer groove (33) is formed in the buffer column (32), a spring (31) is arranged in the buffer groove (33), a connecting block (34) is arranged at one end, away from the base (3), of the spring (31), and a sleeving column (35) is arranged above the connecting block (34).

3. The vacuum sputtering surface coating film porosity detection device according to claim 2, characterized in that: the base (3) is fixedly connected with the buffer column (32), one end of the spring (31) is fixedly connected with the bottom of the buffer groove (33), the other end of the spring (31) is fixedly connected with the connecting block (34), and one end, far away from the spring (31), of the connecting block (34) is fixedly connected with the sleeving column (35).

4. A vacuum sputtering surface coating porosity detection device according to claim 3, characterized in that: the top of cup jointing post (35) is provided with cup jointing hole (25), cup jointing hole (25) are located the bottom of water tank (2), cup jointing post (35) the size looks adaptation of post (35) cup jointing, cup jointing post (35) with cup jointing hole (25) constitution sliding connection.

5. The vacuum sputtering surface coating film porosity detection device according to claim 1, wherein: one end of the mounting plate (22) is fixedly connected with the inner wall of the mounting box (12), and the other end of the mounting plate (22) is rotatably provided with the connecting shaft (23).

6. The vacuum sputtering surface coating film porosity detection device according to claim 5, wherein: the roller (24) is sleeved on the connecting shaft (23) and fixedly connected with the connecting shaft (23), and the position of the roller (24) is opposite to the position of the chute (21) and is in sliding connection with the chute (21).

7. The vacuum sputtering surface coating film porosity detection device according to claim 1, wherein: the support columns (11) are located at four corners of the operation table (1) and are fixedly connected with the operation table (1), and the installation box (12) is fixedly connected with the operation table (1).