CN218973223U - Silicon carbide corrosion furnace body and silicon carbide corrosion furnace - Google Patents

Abstract

The utility model provides a silicon carbide corrosion furnace body and a silicon carbide corrosion furnace, wherein the silicon carbide corrosion furnace body comprises: the shell is internally limited with an accommodating space, and a hearth opening communicated with the accommodating space is formed in the shell; the crucible is arranged in the accommodating space, the crucible comprises a top and a bottom, the top is positioned at one side of the bottom close to the hearth opening, and a crucible opening communicated with the accommodating space is formed in the top; the heat insulation piece is arranged in the accommodating space and wraps the crucible, and comprises a first heat insulation layer and a second heat insulation layer; the heating element is arranged on the heat insulation element and surrounds the crucible; at least one part of the first heat insulation layer corresponds to the top, at least one part of the second heat insulation layer corresponds to the bottom, and the strength of the first heat insulation layer is larger than that of the second heat insulation layer. The silicon carbide corrosion furnace body of the utility model has the advantages that the service life of the silicon carbide corrosion furnace body is prolonged while the heat preservation performance is not lost.

Description

Silicon carbide corrosion furnace body and silicon carbide corrosion furnace

Technical Field

The utility model relates to the technical field of semiconductor equipment, in particular to a silicon carbide corrosion furnace body and a silicon carbide corrosion furnace comprising the same.

Background

The heat insulation material in the hearth in the prior art adopts integrated mullite fiber, and although the heating requirement can be met, the hearth material can be eroded and disintegrated by corrosion generated by alkali steam, so that the service life of the corrosion furnace is seriously reduced.

In addition, the inner wall of the hearth in the prior proposal only uses single mullite fiber, and the material has loose quality and low hardness. In the frequent use process, the crucible with heavy mass is moved and taken out to be operated, the inner wall of the hearth is extremely easy to be crushed, the integrity of the heat insulation material is damaged, the temperature distribution of a thermal field is uneven, and the corrosion experiment result is negatively influenced.

Disclosure of Invention

The utility model aims to provide a new technical scheme of a silicon carbide corrosion furnace body, which can solve the technical problem that the accuracy of a corrosion result is affected by the damage of a heat insulation material caused by frequent movement of a crucible and KOH steam in a hearth in the prior art.

It is a further object of the present utility model to provide a silicon carbide etching furnace comprising the above silicon carbide etching furnace body.

According to a first aspect of the present utility model, there is provided a silicon carbide etching furnace body comprising: the shell is internally provided with an accommodating space, and a hearth port communicated with the accommodating space is formed in the shell; the crucible is arranged in the accommodating space and comprises a top and a bottom, the top is positioned at one side of the bottom close to the hearth opening, and a crucible opening communicated with the accommodating space is formed in the top; the heat insulation piece is arranged in the accommodating space and wraps the crucible, and comprises a first heat insulation layer and a second heat insulation layer; the heating piece is arranged on the heat insulation piece and surrounds the crucible; wherein at least a portion of the first insulating layer corresponds to the top portion and at least a portion of the second insulating layer corresponds to the bottom portion, the strength of the first insulating layer being greater than the strength of the second insulating layer.

Optionally, the first thermal insulation layer is a ceramic material piece.

Optionally, the first thermal insulation layer is a zirconia thermal insulation layer, a silicon nitride thermal insulation layer or an alumina thermal insulation layer.

Optionally, the second insulating layer is a fibrous insulating material.

Optionally, the second heat insulating layer is a mullite fiber heat insulating layer.

Optionally, the distance between the outer edge of the first insulation layer and the furnace mouth is no more than 10cm.

Optionally, an end of the first insulating layer is butted or partially overlapped with an end of the second insulating layer in a direction along the bottom to the top.

Optionally, the accommodating space includes: the preheating chamber is located at one side of the heating chamber close to the hearth opening, the heat insulation piece is located at the heating chamber, and the first heat insulation layer is located at one side of the second heat insulation layer close to the preheating chamber.

Optionally, the heating element is embedded in the heat insulating element, a part of the heating element extends into the first heat insulating layer, and another part of the heating element extends into the second heat insulating layer.

According to a second aspect of the present utility model, there is also provided a silicon carbide etching furnace comprising: the silicon carbide corrosion furnace body, wherein the silicon carbide corrosion furnace body is the silicon carbide corrosion furnace body in any embodiment; a basket for loading a sample; and the lifting device is connected with the hanging basket so that the hanging basket enters and exits the crucible from the crucible opening.

According to the silicon carbide corrosion furnace body, the high-strength first heat insulation layer is arranged at the position close to the crucible opening, so that the first heat insulation layer is not easy to be influenced by steam corrosion and frequent movement of the crucible, and the silicon carbide corrosion furnace body is durable, the service life of a hearth is greatly prolonged, and the cost is reduced.

Other features of the present utility model and its advantages will become apparent from the following detailed description of exemplary embodiments of the utility model, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description, serve to explain the principles of the utility model.

FIG. 1 is a schematic view of the structure of a silicon carbide etching furnace body according to an embodiment of the present utility model.

Reference numerals:

a housing 1; a second insulating layer 2; a heating element 3; a preheating chamber 4; a channel 5; an anti-overflow device 6; a grooved channel 7; a hole 8; a pipe 9; a pulley 11; nickel wire 12; a hanging ring 13; a support bar 14; controlling the motor 15; a crucible 16; a basket 17; KOH melt 18; a first insulating layer 19; a top 20; a bottom 21; crucible mouth 22.

Detailed Description

Various exemplary embodiments of the present utility model will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present utility model unless it is specifically stated otherwise.

The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the utility model, its application, or uses.

Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate.

In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of exemplary embodiments may have different values.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.

The silicon carbide etching furnace body according to the embodiment of the utility model is specifically described below with reference to the accompanying drawings.

As shown in fig. 1, a silicon carbide etching furnace body according to an embodiment of the present utility model includes a housing 1, a crucible 16, a heat insulating member, and a heating member 3.

Specifically, an accommodating space is defined in the shell 1, a hearth opening communicated with the accommodating space is formed in the shell 1, the crucible 16 is installed in the accommodating space, the crucible 16 comprises a top 20 and a bottom 21, the top 20 is located at one side, close to the hearth opening, of the bottom 21, a crucible opening 22 communicated with the accommodating space is formed in the top 20, a heat insulating member is installed in the accommodating space and wraps the crucible 16, the heat insulating member comprises a first heat insulating layer 19 and a second heat insulating layer 2, and the heating member 3 is arranged on the heat insulating member and surrounds the crucible 16. Wherein at least a portion of the first insulation layer 19 corresponds to the top 20 and at least a portion of the second insulation layer 2 corresponds to the bottom 21, the strength of the first insulation layer 19 being greater than the strength of the second insulation layer 2.

In other words, the silicon carbide corrosion furnace body according to the embodiment of the utility model mainly comprises a shell 1, a crucible 16, a heat insulating member and a heating member 3, wherein an accommodating space is formed in the shell 1, a hearth opening is formed in the shell 1, and the hearth opening is communicated with the accommodating space. For example, the upper end of the housing 1 is provided with a burner opening, which is located on the upper end surface of the housing 1, i.e. the burner opening is located above the receiving space. The sample may enter and exit the crucible 16 through the furnace port and the crucible port 22 in sequence. The receiving space may extend in a substantially vertical direction, the crucible 16 is mounted in the receiving space, the top 20, i.e., the upper end of the crucible 16 is provided with the crucible opening 22, and the interior of the crucible is provided with the receiving space, which is communicated with the crucible opening 22, and a sample to be corroded may be placed in the crucible 16 through the crucible opening 22 or taken out from the crucible 16. For example, crucible 16 is loaded with KOH melt 18 and the sample is etched by immersing the sample in molten KOH 18 using a basket load of nickel wire 12.

A heat insulating member is also installed in the receiving space, is positioned outside the crucible 16, and can wrap the crucible 16. The heat insulating piece is made of heat insulating materials and has heat insulating performance. A heating element 3 is provided in the heat insulating element, and the heating element 3 may be provided around the crucible 16, and the crucible 16 may be heated by the heating element 3. For example, KOH solids may be melted by high temperature heating, and the SiC wafer immersed therein for etching.

Wherein, the heat insulating member includes first insulating layer 19 and second insulating layer 2, and at least a portion of first insulating layer 19 is located the side that second insulating layer 2 is close to the furnace mouth, and the intensity of first insulating layer 19 is greater than the intensity of second insulating layer 2. For example, the crucible 16 extends substantially vertically, the upper end of the crucible 16 is provided with a crucible opening 22 having an upward opening, and an accommodating space extending substantially vertically is provided inside the crucible 16, and at this time, at least a part of the first heat insulating layer 19 may correspond to the upper portion of the crucible 16, i.e., wrap the upper portion of the crucible 16, and at least a part of the second heat insulating layer 2 may correspond to the lower portion of the crucible 16, i.e., wrap the lower portion of the crucible 16.

Wherein, the second insulating layer 2 not only has thermal-insulated effect, can guarantee thermal-insulated, the heat preservation effect to crucible 16, still because the hardness of second insulating layer 2 need not too high to can reduce manufacturing cost, the second insulating layer 2 can be when guaranteeing stable heating effect promptly, the cost is reduced. The first heat insulating layer 19 has a hardness stronger than that of the second heat insulating layer 2, so that the first heat insulating layer 19 has not only a heat insulating effect but also a larger strength, and does not become loose or even crushed after long-term use, thereby avoiding influencing experimental effects. That is, when it is necessary to frequently move the crucible 16, the first insulating layer 19 is not easily damaged even if the crucible 16 collides with the first insulating layer 19 due to the position of the first insulating layer 19 near the crucible opening 22. In addition, even if alkali vapor generated in the crucible 16 is accumulated near the position of the crucible opening 22, the first heat insulating layer 19 is not easily eroded.

Therefore, according to the silicon carbide corrosion furnace body disclosed by the embodiment of the utility model, the high-strength first heat insulation layer 19 is arranged at the position close to the crucible opening 22, so that the silicon carbide corrosion furnace body is not easy to be influenced by steam corrosion and frequent movement of the crucible 16, is durable, greatly prolongs the service life of a hearth, and reduces the cost.

Alternatively, the crucible 16 may be a flat rectangular parallelepiped structure with a flange, made of nickel metal, and the flange is engaged with the housing 1.

Alternatively, the housing 1 may have a rectangular parallelepiped structure extending in the up-down direction.

Alternatively, the casing 1 is made of stainless steel, and has high strength.

According to one embodiment of the utility model, the first insulating layer 19 is a ceramic material piece, and the ceramic material piece is high-strength heat-resistant ceramic, so that the corrosion furnace body is not easy to be influenced by steam erosion and frequent movement of the crucible 16, and the furnace is durable, the service life of the hearth is greatly prolonged, and the cost is reduced.

In some embodiments of the present utility model, the first insulating layer 19 is a zirconia insulating layer, a silicon nitride insulating layer, an alumina insulating layer, or the like. By taking a zirconia heat-insulating layer as an example, zirconia ceramic has high toughness, high bending strength, light strength and wear resistance, and excellent heat-insulating performance, and the thermal expansion coefficient is close to that of steel.

According to one embodiment of the utility model, the second heat insulation layer 2 is a fiber heat insulation material, so that good heat insulation performance of the hearth can be ensured.

According to one embodiment of the utility model, the second heat insulation layer 2 is a mullite fiber heat insulation layer, so that a stable heating effect can be ensured.

In some embodiments of the utility model, the distance between the outer edge of the first insulating layer 19 and the furnace mouth does not exceed 10cm, i.e. in addition to the second insulating layer 2, in the region of 10cm above the furnace mouth, a first insulating layer 19 of higher strength, for example zirconia ceramic, is provided. In this embodiment, the first insulating layer 19 is adjacent to the crucible opening 22 and a high strength insulating material, such as a high strength heat resistant ceramic, is used. By limiting the distance between the upper edge of the first insulating layer 19 and the hearth port, the frequently moving crucible 16 can be further prevented from damaging the insulation.

According to one embodiment of the utility model, the end of the first insulating layer 19 is butted or partially overlapped with the end of the second insulating layer 2 in the direction from the bottom 21 to the top 20, that is, the first insulating layer 19 and the second insulating layer 2 may be naturally engaged, so that the installation is facilitated. The upper part and the lower part of the heat insulation material are naturally connected, so that the actual use condition of the hearth is considered while the heat insulation performance is not lost, and the service life of the hearth is greatly prolonged.

In some embodiments of the utility model, the receiving space comprises a preheating chamber 4 and a heating chamber, the preheating chamber 4 being located on a side of the heating chamber adjacent to the hearth opening, the insulation being located on the heating chamber, the first insulation layer 19 being located on a side of the second insulation layer 2 adjacent to the preheating chamber 4. That is, the first heat insulating layer 19 is close to the preheating chamber 4, and the first heat insulating layer 19 close to the preheating chamber 4 has not only a heat insulating effect but also high strength. In the embodiment, by defining the preheating chamber 4 and the heating chamber in the accommodating space, the temperature of the crucible 16 can be prevented from suddenly changing, and the service life can be prolonged

Optionally, a preheating chamber 4 of about 10cm in height and the same size as the upper cross section of the furnace is provided in the upper portion of the furnace, and a passage 5 of the same size as the crucible mouth 22 of the crucible 16 is provided in the middle of the preheating chamber 4.

Optionally, an anti-overflow device 6 is arranged above the preheating chamber 4, the anti-overflow device 6 is a triangular prism cavity with a groove channel 7, a hole 8 is arranged at the bottom side, a side wall is connected with a pipeline 9, and the other end of the pipeline 9 is connected to the side surface of the water pipe.

According to one embodiment of the utility model, the heating element 3 is embedded inside the insulating element, a part of the heating element 3 extending into the first insulating layer 19 and a further part of the heating element 3 extending into the second insulating layer 2.

In some embodiments of the utility model, the heating element 3 comprises a plurality of heating tubes disposed around the periphery and bottom 21 of the crucible 16, e.g., uniformly distributed on the bottom and periphery of the insulating material, to facilitate uniform heating of the crucible 16.

The utility model also provides a silicon carbide corrosion furnace, which comprises a silicon carbide corrosion furnace body, a hanging basket 17 and a lifting device, wherein the hanging basket 17 is used for loading samples, the lifting device is connected with the hanging basket 17, so that the hanging basket 17 enters and exits from the crucible opening 22 into the crucible 16, and the silicon carbide corrosion furnace body is the silicon carbide corrosion furnace body of any embodiment.

Optionally, the lifting device is an electric pulley lifting assembly 10, the electric pulley lifting assembly 10 mainly comprises three pulleys 11, a nickel wire 12, a hanging ring 13, a supporting rod 14 and a control motor 15, and a graduated scale can be carved on the supporting rod 14.

In summary, according to the silicon carbide corrosion furnace body provided by the embodiment of the utility model, the soft second heat insulation layer 2 is adopted at the position far away from the hearth opening, so that the stability of a heating source can be ensured. At the same time, the first heat insulating layer 19 with larger strength near the hearth opening can maintain the integrity and uniformity of the thermal field and the rigidity of the corrosion furnace by adopting a hard heat insulating material. That is, the silicon carbide corrosion furnace body divides the internal heat insulation material into an upper part and a lower part, the lower part is softer, the upper part is hard and heat-insulating, the use is not affected, and the long-term stability of the corrosion furnace is ensured.

The heat insulation material of the first heat insulation layer 19 and the second heat insulation layer 2 is adopted in the hearth, so that the heat insulation material of the crucible opening 22 is not seriously lost after the hearth is used for a long time. In addition, the hearth heat insulation material is not easy to wear, the integrity of the heat insulation material is not lost, uneven distribution of the temperature of the whole thermal field is avoided, and further, the defect corrosion pit size difference of the same type in different areas is not too large when wafers are corroded, so that the accuracy of defect density statistics can be ensured.

While certain specific embodiments of the utility model have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the utility model. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the utility model. The scope of the utility model is defined by the appended claims.

Claims (10)

1. A silicon carbide etching furnace body, comprising:

the shell is internally provided with an accommodating space, and a hearth port communicated with the accommodating space is formed in the shell;

the crucible is arranged in the accommodating space and comprises a top and a bottom, the top is positioned at one side of the bottom close to the hearth opening, and a crucible opening communicated with the accommodating space is formed in the top;

the heat insulation piece is arranged in the accommodating space and wraps the crucible, and comprises a first heat insulation layer and a second heat insulation layer;

the heating piece is arranged on the heat insulation piece and surrounds the crucible;

wherein at least a portion of the first insulating layer corresponds to the top portion and at least a portion of the second insulating layer corresponds to the bottom portion, the strength of the first insulating layer being greater than the strength of the second insulating layer.

2. The silicon carbide etching furnace body of claim 1, wherein the first insulating layer is a piece of ceramic material.

3. The silicon carbide etching furnace body of claim 2, wherein the first insulating layer is a zirconia insulating layer, a silicon nitride insulating layer, or an alumina insulating layer.

4. The silicon carbide etching furnace body of claim 1, wherein the second insulating layer is a fibrous insulating material.

5. The silicon carbide etching furnace body according to claim 4, wherein the second insulating layer is a mullite fiber insulating layer.

6. The silicon carbide erosion furnace body of claim 1, wherein the distance between the outer edge of the first insulating layer and the hearth port is no more than 10cm.

7. The silicon carbide etching furnace body of claim 1, wherein an end of the first insulating layer is butted or partially overlapped with an end of the second insulating layer in a direction along the bottom portion toward the top portion.

8. The silicon carbide etching furnace body according to claim 1, wherein the accommodating space includes:

the preheating chamber is located at one side of the heating chamber close to the hearth opening, the heat insulation piece is located at the heating chamber, and the first heat insulation layer is located at one side of the second heat insulation layer close to the preheating chamber.

9. The silicon carbide etching furnace body of claim 1, wherein the heating element is embedded inside the heat insulating element, a portion of the heating element extends into the first heat insulating layer, and a further portion of the heating element extends into the second heat insulating layer.

10. A silicon carbide etching furnace, comprising:

a silicon carbide etching furnace body according to any one of claims 1 to 9;

a basket for loading a sample;

and the lifting device is connected with the hanging basket so that the hanging basket enters and exits the crucible from the crucible opening.

Images