CN218956525U - Process tank for improving PH measurement accuracy - Google Patents
Process tank for improving PH measurement accuracy Download PDFInfo
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- CN218956525U CN218956525U CN202223073815.1U CN202223073815U CN218956525U CN 218956525 U CN218956525 U CN 218956525U CN 202223073815 U CN202223073815 U CN 202223073815U CN 218956525 U CN218956525 U CN 218956525U
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Abstract
The utility model provides a process tank for improving PH measurement precision, which comprises the following steps: the first process groove and the second process groove are fixedly connected to the outer surface of one side of the first process groove; the two ends of the first water pipe are respectively communicated with the first process groove and the second process groove, a water pump is arranged on the first water pipe, and a first liquid circulation is formed between the first process groove and the second process groove through the first water pipe; and one end of the cooling device is communicated with the first water pipe, the other end of the cooling device is communicated with one end of the second water pipe, the other end of the second water pipe is communicated with the second process groove, a PH probe is arranged in the second water pipe between the cooling device and the second process groove, and the second process groove forms second liquid circulation through part of the first water pipe, the cooling device and the second water pipe. The utility model can measure the PH value of the liquid in the process tank after the liquid is cooled, thereby improving the measurement accuracy.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a process tank for improving PH measurement accuracy.
Background
The chemical plating process has strict clamping control on the PH value of the liquid medicine in each tank, needs to monitor the PH value of the liquid medicine in real time, determines whether to adjust a small amount of PH regulator (10% H2SO4, 10% NAOH, acetic acid and the like) into the tank according to the PH value analysis obtained by detection, and can greatly influence the yield of the product piece if deviation exists in the measurement of the PH of the liquid medicine in the tank body, and can also influence the service life of the liquid medicine and even discard the liquid medicine.
Therefore, the accuracy of the PH measured value of the chemical plating liquid tank is particularly critical, and the most effective temperature environment of the PH probe used by the chemical plating equipment at present is within 25 ℃ of normal temperature; the PH monitoring accuracy of the electroless nickel-plated palladium Jin Gaowen tank is easily affected by temperature.
In order to solve the above problems, a new process tank for improving the PH measurement accuracy is required.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present utility model is to provide a process tank for improving the PH measurement accuracy, which is used for solving the problem that the PH monitoring accuracy of the process tank in the prior art is easily affected by temperature.
To achieve the above and other related objects, the present utility model provides a process tank for improving PH measurement accuracy, comprising:
the device comprises a first process groove and a second process groove, wherein the second process groove is fixedly connected to the outer surface of one side of the first process groove;
the two ends of the first water pipe are respectively communicated with the first process groove and the second process groove, a water pump is arranged on the first water pipe, and a first liquid circulation is formed between the first process groove and the second process groove through the first water pipe;
the cooling device is characterized in that one end of the cooling device is communicated with the first water pipe, the other end of the cooling device is communicated with one end of a second water pipe, the other end of the second water pipe is communicated with the second process tank, a PH probe is arranged in the second water pipe between the cooling device and the second process tank, and the second process tank forms second liquid circulation through part of the first water pipe, the cooling device and the second water pipe.
Preferably, the inner surfaces of the first process tank and the second process tank are respectively provided with a nickel plating palladium gold plating layer.
Preferably, the upper surface of the second process tank is lower than the upper surface of the first process tank, and the lower surface of the second process tank is higher than the lower surface of the first process tank.
Preferably, the cooling device comprises a cooling cylinder, a cooling pipe, a third water pipe and a fourth water pipe, wherein heat insulation cotton is arranged on the outer surface of the cooling cylinder, two ends of the cooling pipe are respectively communicated with the first water pipe and the second water pipe, the rest part of the cooling pipe is arranged in a cavity inside the cooling cylinder, and the third water pipe is communicated with the fourth water pipe and the cavity inside the cooling cylinder.
Preferably, the rest of the cooling tube except for both ends is spiral.
Preferably, the third water pipe and the fourth water pipe are respectively communicated with a process cooling water system, and a third liquid circulation is formed among the third water pipe, the cooling cylinder, the fourth water pipe and the process cooling water system.
Preferably, a control valve is further arranged on the second water pipe.
Preferably, the temperature of the liquid in the first liquid cycle is higher than the preset operating temperature of the PH probe.
Preferably, the preset working temperature of the PH probe is celsius.
Preferably, the liquid temperature in the second liquid cycle is a preset operating temperature of the PH probe.
As described above, the process tank for improving PH measurement accuracy has the following beneficial effects:
the utility model can measure the PH value of the liquid in the process tank after the liquid is cooled, thereby improving the measurement accuracy.
Drawings
FIG. 1 is a schematic diagram of a process tank according to the present utility model.
Reference numerals illustrate:
PH probe 07
Detailed Description
Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model.
Referring to fig. 1, the present utility model provides a process tank for improving the accuracy of PH measurement, comprising:
the first process groove 01 and the second process groove 02, the second process groove 02 is fixedly connected to the outer surface of one side of the first process groove 01, the first process groove 01 is an inner groove, and the second process groove 02 is an outer groove;
in the embodiment of the utility model, nickel-plated palladium-gold plating layers, namely three-layer plating layers of gold plating, palladium plating and nickel plating, are formed on the inner surfaces of the first process tank 01 and the second process tank 02.
In the embodiment of the utility model, the upper surface of the second process tank 02 is lower than the upper surface of the first process tank 01, and the lower surface of the second process tank 02 is higher than the lower surface of the first process tank 01, i.e. the chemical liquid in the first process tank 01 can overflow into the second process tank.
The two ends of the first water pipe 04 are respectively communicated with the first process tank 01 and the second process tank 02, a water pump 03 is arranged on the first water pipe 04, a first liquid circulation is formed between the first process tank 01 and the second process tank 02 through the first water pipe 04, namely, under the action of the water pump 03, the liquid flow direction of the first liquid circulation is the second process tank 02-the first water pipe 04-the first process tank 01-the second process tank 02, and the liquid temperature in the first liquid circulation is higher, usually more than 25 ℃;
and one end of the cooling device 06 is communicated with the first water pipe 04, the other end of the cooling device 06 is communicated with one end of the second water pipe 05, the other end of the second water pipe 05 is communicated with the second process groove 02, the PH probe 07 is arranged in the second water pipe 05 between the cooling device 06 and the second process groove 02, and the second process groove 02 forms second liquid circulation through part of the first water pipe 04, the cooling device 06 and the second water pipe 05. Namely, when the water pump 03 works, the liquid in the second liquid circulation is the second process tank 02-part of the first water pipe 04-the cooling device 06-the second water pipe 05-the second process tank 02, the first liquid circulation liquid with higher temperature can be led out through the cooling device to cool, the PH probe 07 is used for measuring the PH of the cooled liquid, and the measurement accuracy can be improved.
In the embodiment of the present utility model, the cooling device 06 includes a cooling cylinder 061, a cooling pipe 062, a third water pipe 063 and a fourth water pipe 064, the outer surface of the cooling cylinder 061 is provided with heat insulation cotton, the heat insulation cotton can avoid the influence of the outside air temperature on cooling, two ends of the cooling pipe 062 are respectively communicated with the first water pipe 04 and the second water pipe 05, the rest of the cooling pipe 062 is disposed in a cavity inside the cooling cylinder 061, and the third water pipe 063 and the fourth water pipe 064 are communicated with the cavity inside the cooling cylinder 061.
In the embodiment of the present utility model, the cooling tube 062 has a spiral shape at the rest of the two ends, so that the heat exchange area can be increased and the cooling efficiency can be improved.
In the embodiment of the present utility model, the third water pipe 063 and the fourth water pipe 064 are respectively communicated with the process cooling water system, and a third liquid circulation is formed among the third water pipe 063, the cooling cylinder 061, the fourth water pipe 064 and the process cooling water system, that is, the cooling water cools the liquid in the cooling pipe 062, and the cooling water flow of the process cooling water system should be greater than the liquid flow in the cooling pipe 062.
In the embodiment of the present utility model, the second water pipe 05 is further provided with a control valve 08, the control valve 08 is closed to shut off the second liquid circulation, and the control valve 08 is opened to communicate with the second liquid circulation.
In an embodiment of the utility model, the temperature of the liquid in the first liquid cycle is higher than the preset operating temperature of the PH probe 07.
In an embodiment of the present utility model, the preset operating temperature of the PH probe 07 is 25 degrees celsius.
In an embodiment of the utility model, the liquid temperature in the second liquid cycle is the preset operating temperature of the PH probe 07.
It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present utility model by way of illustration, and only the components related to the present utility model are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
In summary, the utility model can cool the liquid in the process tank and then measure the PH value, thereby improving the measurement accuracy. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (10)
1. A process tank for improving PH measurement accuracy, comprising:
the device comprises a first process groove (01) and a second process groove (02), wherein the second process groove (02) is fixedly connected to the outer surface of one side of the first process groove (01);
the device comprises a first water pipe (04), wherein two ends of the first water pipe (04) are respectively communicated with a first process groove (01) and a second process groove (02), a water pump (03) is arranged on the first water pipe (04), and a first liquid circulation is formed between the first process groove (01) and the second process groove (02) through the first water pipe (04);
the cooling device (06), one end of cooling device (06) with first water pipe (04) is linked together, the other end of cooling device (06) is linked together with the one end of second water pipe (05), the other end of second water pipe (05) with second technology groove (02) are linked together, cooling device (06) with be provided with PH probe (07) in second water pipe (05) between second technology groove (02), second technology groove (02) are through part first water pipe (04) cooling device (06) second water pipe (05) form second liquid circulation.
2. The process tank for improving the PH measurement accuracy according to claim 1, wherein: the inner surfaces of the first process groove (01) and the second process groove (02) are respectively provided with a nickel plating palladium gold plating layer.
3. The process tank for improving the PH measurement accuracy according to claim 1, wherein: the upper surface of the second process groove (02) is lower than the upper surface of the first process groove (01), and the lower surface of the second process groove (02) is higher than the lower surface of the first process groove (01).
4. The process tank for improving the PH measurement accuracy according to claim 1, wherein: the cooling device (06) comprises a cooling cylinder (061), a cooling pipe (062), a third water pipe (063) and a fourth water pipe (064), wherein heat-insulating cotton is arranged on the outer surface of the cooling cylinder (061), two ends of the cooling pipe (062) are respectively communicated with the first water pipe (04) and the second water pipe (05), the rest of the cooling pipe (062) is arranged in a cavity inside the cooling cylinder (061), and the third water pipe (063) is communicated with the fourth water pipe (064) and the cavity inside the cooling cylinder (061).
5. The process tank for improving the PH measurement accuracy according to claim 4, wherein: the rest part of the cooling pipe (062) except two ends is spiral.
6. The process tank for improving the PH measurement accuracy according to claim 4, wherein: the third water pipe (063) and the fourth water pipe (064) are respectively communicated with a process cooling water system, and third liquid circulation is formed among the third water pipe (063), the cooling cylinder (061), the fourth water pipe (064) and the process cooling water system.
7. The process tank for improving the PH measurement accuracy according to claim 1, wherein: and a control valve (08) is also arranged on the second water pipe (05).
8. The process tank for improving the PH measurement accuracy according to claim 1, wherein: the temperature of the liquid in the first liquid circulation is higher than the preset working temperature of the PH probe (07).
9. The process tank for improving the PH measurement accuracy according to claim 8, wherein: the preset working temperature of the PH probe (07) is 25 ℃.
10. The process tank for improving the PH measurement accuracy according to claim 8, wherein: the liquid temperature in the second liquid cycle is the preset working temperature of the PH probe (07).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223073815.1U CN218956525U (en) | 2022-11-21 | 2022-11-21 | Process tank for improving PH measurement accuracy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223073815.1U CN218956525U (en) | 2022-11-21 | 2022-11-21 | Process tank for improving PH measurement accuracy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218956525U true CN218956525U (en) | 2023-05-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223073815.1U Active CN218956525U (en) | 2022-11-21 | 2022-11-21 | Process tank for improving PH measurement accuracy |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218956525U (en) |
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2022
- 2022-11-21 CN CN202223073815.1U patent/CN218956525U/en active Active
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