CN218941451U

CN218941451U - Positioning mechanism for processing ceramic substrate

Info

Publication number: CN218941451U
Application number: CN202223400711.7U
Authority: CN
Inventors: 谢冰洁; 刘光明
Original assignee: Shandong Zhongwei Electronic Technology Co ltd
Current assignee: Shandong Zhongwei Electronic Technology Co ltd
Priority date: 2022-12-19
Filing date: 2022-12-19
Publication date: 2023-04-28
Anticipated expiration: 2032-12-19

Abstract

The utility model belongs to the field of ceramic substrate processing, and particularly relates to a positioning mechanism for ceramic substrate processing, which comprises a tool table, wherein a concave processing end seat is arranged in the middle of the tool table; the vacuum part comprises a vacuum platform arranged in the processing end seat, a plurality of vacuum suction cups with holes are arranged on an upper layer array of the vacuum platform, a vacuum valve is arranged at one end of the vacuum platform penetrating through the tool table, and an air pipe for air circulation is arranged on the vacuum valve; limiting part grooves are symmetrically formed in the corner of the tooling table and the machining end seat; the bottom of the ceramic substrate is adsorbed through the vacuum part, the pressing part is matched for pressing the upper part of the ceramic substrate downwards, the upper part and the lower part are reinforced in double, the clamping stability of the ceramic substrate is improved, meanwhile, the pressing part is movably designed, ceramic substrates with different thicknesses or widths can be adapted according to the rotating amplitude and the vertical sliding amplitude, and the clamping and positioning use of the ceramic substrates with multiple specifications is realized.

Description

Positioning mechanism for processing ceramic substrate

Technical Field

The utility model relates to the field of ceramic substrate processing, in particular to a positioning mechanism for ceramic substrate processing.

Background

Ceramic substrates refer to special process plates in which copper foil is bonded directly to the surface (single or double sided) of an alumina (Al 2O 3) or aluminum nitride (AlN) ceramic substrate at high temperature. The ultrathin composite substrate has excellent electrical insulation performance, high heat conduction property, excellent soldering property and high adhesion strength, can etch various patterns like a PCB, and has great current carrying capacity. Therefore, ceramic substrates have become a base material for high-power electronic circuit structure technology and interconnection technology.

The prior art has the following problems:

1. before the surface of the ceramic substrate is etched, the ceramic substrate needs to be clamped and positioned, most of positioning mechanisms are of fixed designs and cannot adapt to ceramic substrates with different specifications, so that when the ceramic substrate to be processed is switched, the positioning mechanisms need to be replaced, the use is inconvenient, and the replacement cost of the positioning mechanisms is high;

2. when the ceramic substrate is clamped on the positioning mechanism, the parallel positions of the ceramic substrate and the side edge of the tool table need to be adjusted, errors are easy to occur in manual adjustment, and the working personnel are easy to fatigue and have defects.

Disclosure of Invention

Object of the utility model

In order to solve the technical problems in the background art, the utility model provides a positioning mechanism for processing a ceramic substrate, which has the characteristic of adapting to clamping and positioning of ceramic substrates with different specifications.

(II) technical scheme

In order to solve the technical problems, the utility model provides a positioning mechanism for processing a ceramic substrate, which comprises a tool table, wherein a concave processing end seat is arranged in the middle of the tool table;

the vacuum part comprises a vacuum platform arranged in the processing end seat, a plurality of vacuum suction cups with holes are arranged on an upper layer array of the vacuum platform, a vacuum valve is arranged at one end of the vacuum platform penetrating through the tool table, and an air pipe for air circulation is arranged on the vacuum valve;

limiting part grooves are symmetrically formed in the corner of the tooling table and the machining end seat;

the pressing part comprises a stand column arranged on the limiting part groove, a direction-adjusting ring seat is arranged on the stand column, a convex pressing rod hanging plate is arranged on the direction-adjusting ring seat, a pressing rod is arranged at the opening end of the pressing rod hanging plate in a penetrating manner, and a convex gasket is connected to the bottom of the pressing rod;

the pushing part comprises an air cylinder arranged on one side of the processing end seat, a piston rod is movably arranged at the output end of the air cylinder, a supporting table provided with a placing groove is connected with the other end of the piston rod, a movable limiting plate is arranged on the supporting table, and the limiting plate is connected with the supporting table through a spring piece.

Preferably, the steering ring seat slides up and down along the upright post, and the compression bar suspension plate is rotationally connected with the upright post through the steering ring seat.

Preferably, the compression bar slides up and down along the opening of the compression bar suspension plate.

Preferably, a ceramic substrate to be processed is clamped between the gasket and the vacuum chuck.

Preferably, one side of the vacuum valve is connected with a barometer.

Preferably, the opening section of the processing end seat is symmetrically provided with waste end plates with inclined single sides.

The technical scheme of the utility model has the following beneficial technical effects:

1. the bottom of the ceramic substrate is adsorbed through the vacuum part, the upper part of the ceramic substrate is pressed down by the pressing part, the upper part and the lower part are reinforced in double, the clamping stability of the ceramic substrate is improved, meanwhile, the pressing part is movably designed, and ceramic substrates with different thickness or width can be adapted according to the rotation amplitude and the up-down sliding amplitude, so that the clamping and positioning of the ceramic substrates with multiple specifications are realized;

2. the setting of pushing part carries out the limit of side of ceramic substrate in the early saddle when feeding, makes ceramic substrate can be in the state parallel to frock platform side, and follow-up carries out the material loading of saddle to vacuum platform department through cylinder drive piston rod, need not manual adjustment and can guarantee that ceramic substrate's side parallel placement on vacuum platform.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic side view of the present utility model;

FIG. 3 is a schematic view of a press section structure of the present utility model;

fig. 4 is a schematic diagram of a pusher portion according to the present utility model.

Reference numerals:

1. a tooling table; 2. processing an end seat; 21. a waste end plate; 31. a vacuum platform; 32. a vacuum chuck; 33. a vacuum valve; 34. an air pipe; 35. an air pressure gauge; 4. a limiting piece groove; 51. a column; 52. a direction-adjusting ring seat; 53. a compression bar suspension plate; 54. a compression bar; 55. a gasket; 61. a cylinder; 62. a piston rod; 63. a support; 64. a spring member; 65 limit plates.

Detailed Description

The objects, technical solutions and advantages of the present utility model will become more apparent by the following detailed description of the present utility model with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the utility model. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present utility model.

As shown in fig. 1-3, the positioning mechanism for processing a ceramic substrate provided by the utility model comprises a tool table 1, wherein a concave processing end seat 2 is arranged in the middle of the tool table 1;

the vacuum part comprises a vacuum platform 31 arranged in the processing end seat 2, a plurality of vacuum suckers 32 with holes are arranged on an upper layer array of the vacuum platform 31, a vacuum valve 33 is arranged at one end of the vacuum platform 31 penetrating through the tool table 1, and an air pipe 34 for air circulation is arranged on the vacuum valve 33;

limiting piece grooves 4 are symmetrically formed in the corners of the tooling table 1 and the processing end seat 2;

the pressing part comprises a stand column 51 arranged on the limiting part groove 4, a direction adjusting ring seat 52 is arranged on the stand column 51, a convex pressing rod hanging plate 53 is arranged on the direction adjusting ring seat 52, a pressing rod 54 is arranged at the opening end of the pressing rod hanging plate 53 in a penetrating mode, and a convex gasket 55 is connected to the bottom of the pressing rod 54.

It should be noted that:

1. the direction-adjusting ring seat 52 slides up and down along the upright post 51 to adjust the height of the pressure lever suspension plate 53, and the pressure lever suspension plate 53 is rotationally connected with the upright post 51 through the direction-adjusting ring seat 52 to rotate the pressure lever suspension plate 53 to the upper side of the ceramic substrate.

2. The pressing rod 54 slides up and down along the opening of the pressing rod suspension plate 53; the bottom spacer 55 is abutted against the upper portion of the ceramic substrate by the depression of the depression bar 54.

In this embodiment, the vacuum part is used to adsorb the bottom of the ceramic substrate, and the pressing part is matched to press the upper part of the ceramic substrate, so as to double-strengthen the upper and lower parts, so as to improve the clamping stability of the ceramic substrate, meanwhile, the pressing part is movably designed, the pressing rod suspension plate 53 is rotated to a position close to the upper part of the frame of the ceramic substrate by rotating the direction-adjusting ring seat 52 on the upright post 51, the pressing rod 54 is pressed down along the opening of the pressing rod suspension plate 53, the gasket 55 at the bottom is abutted against the frame of the ceramic substrate, and ceramic substrates with different thicknesses or widths can be adapted according to the rotating amplitude and the up-down sliding amplitude, so that the clamping and positioning of the ceramic substrates with multiple specifications are realized.

Wherein a ceramic substrate to be processed is sandwiched between the spacer 55 and the vacuum chuck 32.

As an example of the operation of the vacuum section: the ceramic substrate is placed at the vacuum chuck 32 of the vacuum platform 31, the vacuum valve 33 works, the gas on the contact end surface of the ceramic substrate and the vacuum platform 31 is discharged through the opening of the vacuum chuck 32, and the ceramic substrate is discharged through the gas pipe 34, and the bottom of the ceramic substrate is vacuum adsorbed on the vacuum platform 31 under the action of atmospheric pressure.

The supplementary ones are: one side of the vacuum valve 33 is connected with a barometer 35; the barometer 35 is used to indicate the atmospheric pressure of the gap between the vacuum platen 31 and the ceramic substrate.

In order to facilitate the discharge of the waste generated by etching during the machining, further, the open section of the machining end seat 2 is symmetrically provided with a waste end plate 21 with a single-sided inclination, and the waste discharge is guided by the inclined corner of the waste end plate 21.

As shown in fig. 4, the pushing part comprises an air cylinder 61 arranged at one side of the processing end seat 2, a piston rod 62 is movably mounted at the output end of the air cylinder 61, a supporting table 63 provided with a placing groove is connected at the other end of the piston rod 62, a movable limiting plate 65 is arranged on the supporting table 63, and the limiting plate 65 is connected with the supporting table 63 through a spring member 64.

The processing end seat 2 is not only used for discharging waste, but also can be used for feeding the ceramic substrate to the vacuum platform 31.

In another embodiment, during feeding, a part of the ceramic substrate is placed in a placing groove formed in the supporting table 63, the limiting plate 65 limits the side edge of the ceramic substrate under the pushing of the reset of the spring member 64, and the limiting plate 65 is parallel to the end wall of the supporting table 63, so that the ceramic substrate can be in a state parallel to the side edge of the tool table 1, and then the piston rod 62 is driven by the air cylinder 61 to feed the supporting table 63 to the vacuum platform 31, so that the side edge of the ceramic substrate on the vacuum platform 31 can be ensured to be placed in parallel without manual adjustment.

It should be noted that: the limiting plate 65 is movably designed, and is suitable for clamping ceramic substrates with different widths in the deformation range of the spring piece 64.

It is to be understood that the above-described embodiments of the present utility model are merely illustrative of or explanation of the principles of the present utility model and are in no way limiting of the utility model. Accordingly, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present utility model should be included in the scope of the present utility model. Furthermore, the appended claims are intended to cover all such changes and modifications that fall within the scope and boundary of the appended claims, or equivalents of such scope and boundary.

Claims

1. The positioning mechanism for processing the ceramic substrate is characterized by comprising a tool table (1), wherein a concave processing end seat (2) is arranged in the middle of the tool table (1); the vacuum part comprises a vacuum platform (31) arranged in the processing end seat (2), a plurality of vacuum suckers (32) with holes are arranged on an upper layer array of the vacuum platform (31), a vacuum valve (33) is arranged at one end of the vacuum platform (31) penetrating through the tool table (1), and an air pipe (34) for air circulation is arranged on the vacuum valve (33); limiting part grooves (4) are symmetrically formed in the corners of the tooling table (1) and the processing end seat (2); the pressing part comprises a stand column (51) arranged on the limiting part groove (4), a direction-adjusting ring seat (52) is arranged on the stand column (51), a convex pressing rod hanging plate (53) is arranged on the direction-adjusting ring seat (52), a pressing rod (54) is arranged at the opening end of the pressing rod hanging plate (53) in a penetrating mode, and a convex gasket (55) is connected to the bottom of the pressing rod (54); the pushing part comprises an air cylinder (61) arranged on one side of the processing end seat (2), a piston rod (62) is movably mounted at the output end of the air cylinder (61), a supporting table (63) provided with a placing groove is connected with the other end of the piston rod (62), a movable limiting plate (65) is arranged on the supporting table (63), and the limiting plate (65) is connected with the supporting table (63) through a spring piece (64).

2. The positioning mechanism for processing a ceramic substrate according to claim 1, wherein the direction-adjusting ring seat (52) slides up and down along the upright (51), and the pressure bar cantilever (53) is rotatably connected with the upright (51) through the direction-adjusting ring seat (52).

3. The positioning mechanism for processing a ceramic substrate according to claim 1, wherein the pressing rod (54) slides up and down along the opening of the pressing rod cantilever (53).

4. The positioning mechanism for processing a ceramic substrate according to claim 1, wherein a ceramic substrate to be processed is sandwiched between the spacer (55) and the vacuum chuck (32).

5. The positioning mechanism for processing a ceramic substrate according to claim 1, wherein a barometer (35) is connected to one side of the vacuum valve (33).

6. The positioning mechanism for processing a ceramic substrate according to claim 1, wherein the opening section of the processing end seat (2) is symmetrically provided with a waste end plate (21) with a single-sided inclined.