CN218895750U - Self-lubricating bearing coating thickness detection device based on optical interference - Google Patents
Self-lubricating bearing coating thickness detection device based on optical interference Download PDFInfo
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- CN218895750U CN218895750U CN202221788563.8U CN202221788563U CN218895750U CN 218895750 U CN218895750 U CN 218895750U CN 202221788563 U CN202221788563 U CN 202221788563U CN 218895750 U CN218895750 U CN 218895750U
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Abstract
The utility model relates to a self-lubricating bearing coating thickness detection device based on optical interference, which comprises: the tungsten halogen lamp light source module is used for emitting light beams; the first convex lens is used for collimating the emitted light of the tungsten halogen lamp light source module into parallel light beams; the Michelson interferometer module is used for splitting a light beam into two light beams with equal intensity, converging the two light beams as reference light and detection light on the surfaces of the reference mirror and the bearing coating to be detected respectively, and overlapping to generate interference after reflection to form an interference light beam; the two-dimensional spectrometer module comprises a reflecting mirror, a reflective grating, a cylindrical lens and an area array CCD camera, wherein interference light beams are transmitted to the reflective grating through the reflecting mirror, are converged into interference spectral lines by the cylindrical lens after being spatially split according to wavelengths, and are acquired by the area array CCD camera to obtain two-dimensional interference spectrum fringes. The device is favorable for acquiring a two-dimensional interference fringe image of the thickness of the self-lubricating bearing coating, and further realizes non-contact nondestructive testing of the thickness of the self-lubricating bearing coating.
Description
Technical Field
The utility model belongs to the technical field of detection, and particularly relates to a self-lubricating bearing coating thickness detection device based on optical interference.
Background
The self-lubricating bearing and the pin shaft have simple and compact structure and large bearing capacity, and are widely applied to mechanical equipment in the high-precision field such as aerospace, high-speed transportation, military equipment and the like. The abrasion, crack, bubble and other damages of the bearing coating seriously affect the bonding lubrication performance of the coating, and the thickness of the coating also directly affects the service life of the bearing pin shaft assembly. At present, most of coating detection of a bearing is detected by a scanning electron microscope and an energy spectrometer after polishing and grinding of an end surface, and the detection belongs to destructive detection of the coating and a bearing part, and the detection is different from the actual working condition of a self-lubricating coating, so that high-precision measurement of the thickness of the whole coating is difficult to realize.
Disclosure of Invention
The utility model aims to provide a self-lubricating bearing coating thickness detection device based on optical interference, which is favorable for acquiring a two-dimensional interference fringe image of the self-lubricating bearing coating thickness, so as to realize non-contact nondestructive detection of the self-lubricating bearing coating thickness.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a self-lubricating bearing coating thickness detection device based on optical interference, comprising:
the tungsten halogen lamp light source module is used for emitting light beams;
a first convex lens for collimating the point light beam emitted from the tungsten halogen lamp light source module into a parallel light beam;
the Michelson interferometer module is used for splitting a light beam into two light beams with equal intensity, converging the two light beams as reference light and detection light on the surfaces of the reference mirror and the bearing coating to be detected respectively, and overlapping to generate interference after reflection to form an interference light beam; and
the two-dimensional spectrometer module comprises a reflecting mirror, a reflective grating, a cylindrical lens and an area array CCD camera, wherein an interference beam is transmitted to the reflective grating through the reflecting mirror, is converged into an interference spectrum line by the cylindrical lens after being spatially split according to wavelength, and is acquired by the area array CCD camera to obtain two-dimensional interference spectrum fringes.
Further, the michelson interferometer module comprises a beam splitter, a second convex lens, a plane reflecting mirror and a third convex lens, wherein the plane reflecting mirror is used as a reference mirror, the beam splitter splits an incident light beam into two light beams with equal intensity, one light beam is used as reference light and converged on the reference mirror through the second convex lens, the other light beam is used as detection light and converged on the surface of a bearing coating sample to be detected on the three-dimensional mobile platform through the third convex lens, and the two light beams interfere after being reflected to the beam splitter and are emitted to the reflecting mirror of the two-dimensional spectrometer module.
Further, the method also comprises a computer for calculating and obtaining the thickness information of the bearing coating according to the obtained two-dimensional interference spectrum fringes.
Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the two-dimensional interference fringe image of the thickness of the self-lubricating bearing coating is obtained based on optical interference, and the image is subjected to signal processing on the basis, so that the thickness information of the self-lubricating bearing coating can be effectively obtained, the coating and the bearing are not damaged, the high-precision nondestructive detection of the self-lubricating bearing coating thickness can be realized without polishing, and the defect that the traditional device needs destructive detection is overcome. Therefore, the utility model has strong practicability and wide application prospect.
Drawings
FIG. 1 is a schematic diagram of a two-dimensional structure of a device according to an embodiment of the present utility model.
Fig. 2 is a schematic view of a three-dimensional structure of a device according to an embodiment of the present utility model.
In the figure: 1. a tungsten halogen lamp light source module; 2. a first convex lens; 3. a first planar mirror; 4. a second convex lens; 5. a beam splitter; 6. a third convex lens; 7. a bearing coating sample to be measured; 8. a three-dimensional precision moving platform; 9. a second planar mirror; 10. a reflective grating; 11. a cylindrical lens; 12. an area array CCD camera.
Detailed Description
The utility model will be further described with reference to the accompanying drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
As shown in fig. 1 and 2, the embodiment provides a self-lubricating bearing coating thickness detection device based on optical interference, which comprises a tungsten halogen lamp light source module 1, a first convex lens 2, a michelson interferometer module and a two-dimensional spectrometer module.
The tungsten halogen lamp light source module 1 is for emitting a light beam.
The first convex lens 2 is for collimating the spot light beam emitted from the tungsten halogen lamp light source module 1 into a parallel light beam.
The Michelson interferometer module is used for splitting a light beam into two light beams with equal intensity, and the two light beams are used as reference light and detection light to be respectively converged on the surfaces of the reference mirror and the bearing coating to be detected, and the reference light and the detection light are overlapped to interfere after reflection to form interference light beams. In this embodiment, the michelson interferometer module includes a beam splitter 5, a second convex lens 4, a first plane mirror 3 and a third convex lens 6, where the first plane mirror 3 is used as a reference mirror, the beam splitter 5 splits an incident light beam into two beams with equal intensity, one beam is used as a reference light and converged on the reference mirror 3 through the second convex lens 4, the other beam is used as a probe light and converged on the surface of a sample of the bearing coating to be measured on the three-dimensional precision moving platform 8 through the third convex lens 6, and the two beams interfere after being reflected to the beam splitter 5, and exit to the second plane mirror 9 of the two-dimensional spectrometer module.
The two-dimensional spectrometer module comprises a second plane reflector 9, a reflective grating 10, a cylindrical lens 11 and an area array CCD camera 12, wherein interference light beams are transmitted to the reflective grating 10 through the second plane reflector 9, are converged into interference spectral lines by the cylindrical lens 11 after being spatially split according to wavelengths, and are acquired by the area array CCD camera 12 to obtain two-dimensional interference spectrum fringes.
In this embodiment, the apparatus further comprises a computer for obtaining bearing coating thickness information from the obtained two-dimensional interference spectrum fringe calculations.
When the device works, the tungsten halogen lamp light source module emits point light beams, the point light beams are collimated into parallel light beams through the convex lens, then the parallel light beams are split into two light beams with equal intensity through the beam splitter of the Michelson interferometer module, one light beam is used as a reference mirror of the reference light converging Yu Maike Morson interferometer module, and the other light beam is used as detection light to be converged on the surface of a bearing coating sample to be detected; the two beams of light are reflected to the beam splitter to interfere, the interference beams are emitted to the reflecting mirror of the two-dimensional spectrometer module, and the interference beams are reflected and transmitted to the reflective grating; the reflection type grating is converged into an interference spectrum line by a cylindrical lens of the two-dimensional spectrometer module after space light splitting according to wavelength, and two-dimensional interference spectrum fringes are acquired by an area array CCD camera.
The two-dimensional spectrometer module transmits the acquired interference spectrum fringe image to a computer, and the fringe signal is processed by the computer so as to obtain the thickness information of the self-lubricating bearing coating.
The above description is only a preferred embodiment of the present utility model, and is not intended to limit the utility model in any way, and any person skilled in the art may make modifications or alterations to the disclosed technical content to the equivalent embodiments. However, any simple modification, equivalent variation and variation of the above embodiments according to the technical substance of the present utility model still fall within the protection scope of the technical solution of the present utility model.
Claims (3)
1. The utility model provides a self-lubricating bearing coating thickness detection device based on optical interference which characterized in that includes:
the tungsten halogen lamp light source module is used for emitting light beams;
a first convex lens for collimating the point light beam emitted from the tungsten halogen lamp light source module into a parallel light beam;
the Michelson interferometer module is used for splitting a light beam into two light beams with equal intensity, converging the two light beams as reference light and detection light on the surfaces of the reference mirror and the bearing coating to be detected respectively, and overlapping to generate interference after reflection to form an interference light beam; and
the two-dimensional spectrometer module comprises a reflecting mirror, a reflective grating, a cylindrical lens and an area array CCD camera, wherein an interference beam is transmitted to the reflective grating through the reflecting mirror, is converged into an interference spectrum line by the cylindrical lens after being spatially split according to wavelength, and is acquired by the area array CCD camera to obtain two-dimensional interference spectrum fringes.
2. The device for detecting the thickness of the self-lubricating bearing coating based on optical interference according to claim 1, wherein the michelson interferometer module comprises a beam splitter, a second convex lens, a plane reflecting mirror and a third convex lens, wherein the plane reflecting mirror is used as a reference mirror, the beam splitter splits an incident light beam into two light beams with equal intensity, one light beam is used as reference light and converged on the reference mirror through the second convex lens, the other light beam is used as detection light and converged on the surface of a bearing coating sample to be detected on the three-dimensional moving platform through the third convex lens, and the two light beams interfere after being reflected to the beam splitter and are emitted to the reflecting mirror of the two-dimensional spectrometer module.
3. The device for detecting the thickness of the self-lubricating bearing coating based on optical interference according to claim 1, further comprising a computer for calculating and obtaining the thickness information of the bearing coating according to the obtained two-dimensional interference spectrum fringes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221788563.8U CN218895750U (en) | 2022-07-12 | 2022-07-12 | Self-lubricating bearing coating thickness detection device based on optical interference |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221788563.8U CN218895750U (en) | 2022-07-12 | 2022-07-12 | Self-lubricating bearing coating thickness detection device based on optical interference |
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