CN218893734U

CN218893734U - Workpiece rotating mechanism of vacuum coating machine

Info

Publication number: CN218893734U
Application number: CN202223055206.3U
Authority: CN
Inventors: 陈国龙; 张碧云
Original assignee: Zhejiang Moding Nanotechnology Co ltd
Current assignee: Zhejiang Moding Nanotechnology Co ltd
Priority date: 2022-11-17
Filing date: 2022-11-17
Publication date: 2023-04-21
Anticipated expiration: 2032-11-17

Abstract

The utility model discloses a workpiece rotating mechanism of a vacuum coating machine, which comprises a fixed ring and a driving motor, wherein the top of the fixed ring is fixedly connected with an inner disk through a fixed frame, the bottom of the inner disk is rotationally connected with an intermediate gear, and the bottom of the fixed ring is fixedly connected with a toothed ring. When the workpiece rotating mechanism of the vacuum coating machine is used, a workpiece is placed on the workpiece frame, the driving motor is started, the driving motor drives the intermediate gear to rotate, the intermediate gear rotates to drive the first gear, the second gear and the third gear to rotate, and the first gear, the second gear and the third gear drive the connecting rod to rotate so as to drive the workpiece frame to rotate, so that the workpiece frame rotates while revolving around the toothed ring, the vacuum coating machine uniformly coats a film when coating, the workpiece can be uniformly coated, the coating time is shortened, the coating efficiency is improved, and the using effect of the workpiece rotating mechanism of the conventional vacuum coating machine is further improved.

Description

Workpiece rotating mechanism of vacuum coating machine

Technical Field

The utility model relates to the field of vacuum coating machines, in particular to a workpiece rotating mechanism of a vacuum coating machine.

Background

The vacuum coating machine mainly refers to a type of coating which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into two types, evaporation and sputtering. The material to be coated is called a target. In the film plating process, the rotation is needed, so that the omnibearing film plating performance is realized. The rotating mechanism on the market generally has no stable rotation performance and poor carrying performance on the workpiece, and therefore, we propose a workpiece rotating mechanism of a vacuum coating machine.

The workpiece rotating mechanism of the existing vacuum coating machine still has the defects when in use, the existing vacuum coating machine needs to rotate the workpiece when coating the workpiece, and then coating is carried out on the workpiece, so that uneven coating often occurs in the coating process, and the working efficiency of the vacuum coating machine is reduced.

Disclosure of Invention

The utility model aims at: in order to solve the problems, a workpiece rotating mechanism of a vacuum coating machine is provided.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

the utility model provides a work piece rotary mechanism of vacuum coating machine, includes retainer plate and driving motor, the retainer plate top is through mount fixedly connected with inner tray, and inner tray bottom rotates and is connected with the intermediate gear, and retainer plate bottom fixedly connected with ring gear, ring gear bottom fixedly connected with foundation ring, and the interior table wall meshing of foundation ring is connected with first gear, second gear and the outer wall meshing of third gear are connected, and first gear, second gear and the outer wall meshing of third gear are connected with intermediate gear, and driving motor bottom and inner tray top fixed connection, driving motor output and the interior table wall fixed connection of intermediate gear still include:

the workpiece support is arranged on the outer surface wall of the connecting rod, and a connecting mechanism which is convenient for the maintenance of the connecting rod is arranged between the connecting rod and the first gear, between the connecting rod and the second gear and between the connecting rod and the third gear.

Preferably, the connecting mechanism comprises three groups of short rods which are respectively and fixedly connected with the inner surface walls of the first gear, the second gear and the third gear, the bottoms of the three groups of short rods are fixedly connected with a clamping sleeve, and the inner surface walls of the clamping sleeve are in screwed connection with the top of the connecting rod.

Preferably, one side of the vertical end of the fixing frame is fixedly connected with the top of the fixing ring, the other side of the vertical end of the fixing frame is fixedly connected with the top of the inner disc, and an annular groove is arranged between the inner disc and the fixing ring.

Preferably, the top of the connecting rod is fixedly connected with a threaded interface, and the inner surface wall of the clamping sleeve is in screwed connection with the outer surface wall of the threaded interface through a threaded groove.

Preferably, the outer surface wall of the clamping sleeve is connected with a bolt in a screwed mode, the outer surface wall of the threaded interface is provided with a penetrating hole, and the outer surface wall of the bolt is connected with the inner surface wall of the penetrating hole in a screwed mode.

Preferably, the top of the short rod is fixedly connected with a clamping disc, the outer surface wall of the clamping disc is rotationally connected with the outer surface wall of the annular groove through the short rod, and the outer surface wall of the clamping disc is in clamping connection with the outer surface wall of the annular groove.

Preferably, the inner surface wall of the intermediate gear is fixedly connected with a round rod, the top of the round rod is fixedly connected with the output end of the driving motor, and the round rod penetrates through the inner disc.

In summary, due to the adoption of the technical scheme, the beneficial effects of the utility model are as follows:

the utility model provides a work piece rotary mechanism of vacuum coating machine when using, place the work piece on the work piece frame, start driving motor, driving motor drives the intermediate gear and rotates, the intermediate gear rotates and drives first gear, second gear and third gear and rotate, thereby first gear, second gear and third gear drive the connecting rod rotate and drive the work piece frame and rotate for the work piece frame takes place the autorotation when revolving around the ring gear, make vacuum coating machine can even coating film when the coating film, guaranteed that the work piece can be by even coating film, reduced the coating film time, improved coating film efficiency, and then improved current vacuum coating machine work piece rotary mechanism's result of use.

Drawings

Fig. 1 shows a schematic structural diagram of a rotating mechanism according to an embodiment of the present utility model;

FIG. 2 shows a schematic view of a retainer ring structure provided according to an embodiment of the present utility model;

FIG. 3 illustrates a second gear schematic provided in accordance with an embodiment of the present utility model;

fig. 4 shows a schematic diagram of a structure of a snap-fit sleeve according to an embodiment of the utility model.

Legend description:

1. a fixing ring; 2. a bottom ring; 3. a connecting rod; 4. a driving motor; 5. a work piece holder; 6. a fixing frame; 7. a toothed ring; 8. a bolt; 9. an inner disk; 10. an intermediate gear; 11. a first gear; 12. a second gear; 13. a third gear; 14. a clamping disc; 15. a clamping sleeve; 16. a threaded interface.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the present utility model provides a technical solution:

the utility model provides a work piece rotary mechanism of vacuum coating machine, including retainer plate 1 and driving motor 4, retainer plate 1 top is through mount 6 fixedly connected with inner disc 9, inner disc 9 bottom rotation is connected with intermediate gear 10, retainer plate 1 bottom fixedly connected with ring gear 7, ring gear 7 bottom fixedly connected with end ring 2, the interior table wall meshing of end ring 2 is connected with first gear 11, second gear 12 and the outer surface wall meshing of third gear 13 are connected, first gear 11, second gear 12 and the outer surface wall meshing of third gear 13 are connected with intermediate gear 10, driving motor 4 bottom and inner disc 9 top fixedly connected, driving motor 4 output and the interior table wall fixedly connected of intermediate gear 10, still include:

the connecting rod 3 and the workpiece support 5, the workpiece support 5 is arranged on the outer surface wall of the connecting rod 3, a connecting mechanism which is convenient for the maintenance of the connecting rod 3 is arranged between the connecting rod 3 and the first gear 11, the second gear 12 and the third gear 13, when the workpiece rotating mechanism of the vacuum coating machine is used, a workpiece is placed on the workpiece support 5, the driving motor 4 is started, the driving motor 4 drives the intermediate gear 10 to rotate, the intermediate gear 10 rotates to drive the first gear 11, the second gear 12 and the third gear 13 to rotate, and the first gear 11, the second gear 12 and the third gear 13 drive the connecting rod 3 to rotate to drive the workpiece support 5 to rotate, so that the workpiece support 5 rotates around the toothed ring 7 while revolving, the vacuum coating machine can uniformly coat a film during film coating, the film coating time of the workpiece is ensured to be uniformly coated, and the film coating efficiency is improved.

Specifically, as shown in fig. 1, the connecting mechanism comprises three groups of short rods, wherein the three groups of short rods are respectively and fixedly connected to the inner surface walls of the first gear 11, the second gear 12 and the third gear 13, the bottoms of the three groups of short rods are fixedly connected with a clamping sleeve 15, the inner surface walls of the clamping sleeve 15 are in screwed connection with the top of the connecting rod 3, the connecting rod 3 is convenient to detach, and when the connecting rod 3 is detached, the connecting rod 3 is rotated until the threaded interface 16 is separated from the clamping sleeve 15, and the connecting rod 3 and the workpiece frame 5 can be detached together, so that the workpiece frame 5 is convenient to maintain.

Specifically, as shown in fig. 1, one side of the vertical end of the fixing frame 6 is fixedly connected with the top of the fixing ring 1, the other side of the vertical end of the fixing frame 6 is fixedly connected with the top of the inner disc 9, an annular groove is arranged between the inner disc 9 and the fixing ring 1, the annular groove is convenient for the rotation of the short column and the guest clamping disc 15, and the rotation stability of the first gear 11, the second gear 12 and the third gear 13 is maintained.

Specifically, as shown in fig. 3, the top of the connecting rod 3 is fixedly connected with a threaded interface 16, the inner surface wall of the clamping sleeve 15 is screwed with the outer surface wall of the threaded interface 16 through a threaded groove to rotate the connecting rod 3, and the connecting rod 3 can be separated from the clamping sleeve 14, so that the operation is simple and convenient.

Specifically, as shown in fig. 4, the outer surface wall of the clamping sleeve 15 is screwed and connected with a bolt 8, the outer surface wall of the threaded interface 16 is provided with a penetrating hole, and the outer surface wall of the bolt 8 is screwed and connected with the inner surface wall of the penetrating hole to secondarily reinforce the connecting rod 3.

Specifically, as shown in fig. 1, the top of the short rod is fixedly connected with a clamping disc 14, the outer surface wall of the clamping disc 14 is rotationally connected with the outer surface wall of the annular groove through the short rod, the outer surface wall of the clamping disc 14 is in clamping connection with the outer surface wall of the annular groove, the inner surface wall of the intermediate gear 10 is fixedly connected with a round rod, the top of the round rod is fixedly connected with the output end of the driving motor 4, and the round rod penetrates through the inner disc 9.

When the workpiece rotating mechanism of the vacuum coating machine provided by the embodiment is used, a workpiece is placed on the workpiece frame 5, the driving motor 4 is started, the driving motor 4 drives the intermediate gear 10 to rotate, the intermediate gear 10 rotates to drive the first gear 11, the second gear 12 and the third gear 13 to rotate, the first gear 11, the second gear 12 and the third gear 13 drive the connecting rod 3 to rotate so as to drive the workpiece frame 5 to rotate, the workpiece frame 5 rotates while revolving around the toothed ring 7, the vacuum coating machine can uniformly coat a film when coating, the workpiece can be uniformly coated, the coating time is shortened, the coating efficiency is improved, in addition, the connecting rod 3 is convenient to detach, and when the connecting rod 3 is detached, the connecting rod 3 is rotated until the threaded interface 16 is separated from the clamping sleeve 15, so that the connecting rod 3 and the workpiece frame 5 can be detached together, and the maintenance of the workpiece frame 5 is facilitated.

The previous description of the embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The utility model provides a work piece rotary mechanism of vacuum coating machine, includes retainer plate (1) and driving motor (4), its characterized in that, retainer plate (1) top is through mount (6) fixedly connected with inner disc (9), inner disc (9) bottom rotation is connected with intermediate gear (10), retainer plate (1) bottom fixedly connected with ring gear (7), ring gear (7) bottom fixedly connected with foundation ring (2), table wall meshing is connected with first gear (11) in foundation ring (2), second gear (12) and third gear (13) outward appearance wall meshing are connected, first gear (11), second gear (12) and third gear (13) outward appearance wall and intermediate gear (10) outward appearance wall meshing are connected, driving motor (4) bottom and inner disc (9) top fixedly connected, driving motor (4) output and intermediate gear (10) inward surface wall fixedly connected, still include:

the connecting rod (3) and the workpiece frame (5), the workpiece frame (5) is arranged on the outer surface wall of the connecting rod (3), a connecting mechanism which is convenient for the maintenance of the connecting rod (3) is arranged between the connecting rod (3) and the first gear (11), between the second gear (12) and the third gear (13).

2. The workpiece rotating mechanism of the vacuum coating machine according to claim 1, wherein the connecting mechanism comprises three groups of short rods, the three groups of short rods are respectively and fixedly connected to the inner surface walls of the first gear (11), the second gear (12) and the third gear (13), the bottoms of the three groups of short rods are respectively and fixedly connected with a clamping sleeve (15), and the inner surface walls of the clamping sleeves (15) are in rotary connection with the top of the connecting rod (3).

3. The workpiece rotating mechanism of the vacuum coating machine according to claim 2, wherein one side of the vertical end of the fixing frame (6) is fixedly connected with the top of the fixing ring (1), the other side of the vertical end of the fixing frame (6) is fixedly connected with the top of the inner disc (9), and an annular groove is arranged between the inner disc (9) and the fixing ring (1).

4. The workpiece rotating mechanism of the vacuum coating machine according to claim 3, wherein the top of the connecting rod (3) is fixedly connected with a threaded interface (16), and the inner surface wall of the clamping sleeve (15) is in screwed connection with the outer surface wall of the threaded interface (16) through a threaded groove.

5. The workpiece rotating mechanism of the vacuum coating machine according to claim 4, wherein the outer surface wall of the clamping sleeve (15) is connected with a bolt (8) in a screwed mode, the outer surface wall of the threaded interface (16) is provided with a penetrating hole, and the outer surface wall of the bolt (8) is connected with the inner surface wall of the penetrating hole in a screwed mode.

6. The workpiece rotating mechanism of a vacuum coating machine according to claim 5, wherein the tops of the short rods are fixedly connected with a clamping disc (14), the outer surface wall of the clamping disc (14) is rotationally connected with the outer surface wall of the annular groove through the short rods, and the outer surface wall of the clamping disc (14) is in clamping connection with the outer surface wall of the annular groove.

7. The workpiece rotating mechanism of the vacuum coating machine according to claim 6, wherein a round rod is fixedly connected to the inner surface wall of the intermediate gear (10), the top of the round rod is fixedly connected with the output end of the driving motor (4), and the round rod penetrates through the inner disc (9).