CN216378371U

CN216378371U - Vacuum coating machine

Info

Publication number: CN216378371U
Application number: CN202122484400.2U
Authority: CN
Inventors: 钦瑞良
Original assignee: Suzhou Kary Nano Technology Co ltd
Current assignee: Suzhou Kary Nano Technology Co ltd
Priority date: 2021-10-15
Filing date: 2021-10-15
Publication date: 2022-04-26
Anticipated expiration: 2031-10-15

Abstract

The utility model relates to the field of vacuum coating machines, and provides a vacuum coating machine which comprises a coating machine main body, wherein the middle part of the upper end surface of the coating machine main body is fixedly connected with a motor, the output end of the motor is fixedly connected with a rotating shaft, the lower end surface of the rotating shaft is fixedly connected with a rotating disc, the outer side of the rotating disc is connected with the coating machine main body in a sliding manner, the periphery of the lower end surface of the rotating disc is uniformly and rotatably connected with hanging rods, the lower end surface of each hanging rod is fixedly connected with a moving gear, the periphery of the lower end surface of the coating machine main body is fixedly connected with supporting columns, and the middle part of the right side of the lower part of the coating machine main body is communicated with a vacuum pump. Through above-mentioned technical scheme, the problem that the work piece drops when the work piece of equidimension not contacted each other and influence coating effect, rotation among the prior art has been solved.

Description

Vacuum coating machine

Technical Field

The utility model relates to the field of vacuum coating machines, in particular to a vacuum coating machine.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into two types of evaporation and sputtering, and when the existing vacuum coating machine is used for coating films on some small-sized workpieces, the workpieces are generally hung on a hanging rod.

The hook on the hanging rod of the existing vacuum coating machine is usually in a fixed position, when workpieces with different sizes are hung on the hanging rod, the upper side and the lower side of the workpiece can be contacted, the coating effect is influenced, and when the hanging rod rotates, the workpiece can fall off, so that troubles are caused.

SUMMERY OF THE UTILITY MODEL

The utility model provides a vacuum coating machine, which solves the problems that workpieces with different sizes are contacted with each other to influence the coating effect and the workpieces fall off during rotation in the related technology.

The technical scheme of the utility model is as follows: the utility model provides a vacuum coating machine, includes the coating machine main part, coating machine main part up end middle part fixedly connected with motor, motor output fixedly connected with pivot, terminal surface fixedly connected with carousel under the pivot, carousel outside sliding connection has the coating machine main part, the terminal surface is evenly rotated all around under the carousel and is connected with the peg, terminal surface fixedly connected with moves the gear under the peg, equal fixedly connected with support column all around of terminal surface under the coating machine main part, coating machine main part lower part right side middle part intercommunication has the vacuum pump.

Preferably, both sides are evenly rotated around the peg inner chamber and are connected with the worm, worm rear end face fixedly connected with twists the hand, the peg inner chamber wall left and right sides is evenly rotated and is connected with the threaded rod, threaded rod middle part fixedly connected with worm wheel, the worm wheel meshing is connected with the worm.

Preferably, threaded rod left end threaded connection has the thread bush, thread bush left end downside fixedly connected with couple, thread bush downside middle part fixedly connected with gag lever post, the one end sliding connection that the thread bush was kept away from to the gag lever post has the peg.

Preferably, the hook is connected with an L-shaped rod in a rotating mode through a pin shaft, one end, far away from the threaded sleeve, of the hook is connected with a bolt in a threaded mode, the lower end of the bolt is connected with a connecting block in a threaded mode, and the right end face of the connecting block is fixedly connected with the threaded sleeve.

Preferably, the middle part of the lower end face of the inner cavity wall of the coating machine main body is fixedly connected with a fixed column, the upper end face of the fixed column is fixedly connected with a fixed gear, and the fixed gear is connected with the moving gear in a meshing manner.

Preferably, the lower end face of the moving gear is fixedly connected with a connecting column, the lower end face of the connecting column is fixedly connected with a sliding ball, the lower end face of the inner cavity wall of the main body of the film plating machine is fixedly connected with a sliding groove, and the inner cavity wall of the sliding groove is slidably connected with the sliding ball.

Preferably, the front part of the coating machine main body is provided with a movable door.

Preferably, a control switch is arranged in the middle of the left side of the upper end face of the coating machine main body and electrically connected with the motor and the vacuum pump.

The working principle and the beneficial effects of the utility model are as follows:

1. in the utility model. Through twisting the hand of twisting, make the worm drive the worm wheel and rotate, the worm wheel drives the threaded rod and rotates, and the threaded rod drives the thread bush and removes, and the gag lever post slides at the peg inner chamber, adjusts the distance between different couples and the peg to the waiting coating film work piece of both sides can not bump mutually about making, and then makes the coating film effect better. One end of the L-shaped rod, which is far away from the hook, is attached to the upper end face of the connecting block, and the L-shaped rod is fixed to the fixing block through a bolt, so that the hook is closed, and the workpiece is effectively prevented from falling off during film coating. The motor drives the rotating shaft to rotate, the rotating shaft drives the rotating disc to rotate, the rotating disc drives the hanging rod to rotate, and when the hanging rod rotates, the movable gear and the fixed gear are in transmission, so that the hanging rod also rotates while revolving, the coating is more uniform and comprehensive, and the coating effect is better. When the hanging rod revolves, the sliding ball slides in the sliding groove, so that the hanging rod is more stable when rotating.

Drawings

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

FIG. 1 is a schematic view of a half-section structure of the present invention;

FIG. 2 is an enlarged view of area A of FIG. 1;

FIG. 3 is a schematic view of a half-section structure of a main body of a film plating machine according to the present invention;

FIG. 4 is an enlarged view of the area B in FIG. 3 according to the present invention;

fig. 5 is a schematic perspective view of the present invention.

In the figure: 1. a film plating machine main body; 2. a motor; 3. a turntable; 4. a movable door; 5. a rotating shaft; 6. a hanging rod; 7. a worm; 8. screwing a hand; 9. a threaded rod; 10. a worm gear; 11. a threaded sleeve; 12. hooking; 13. a limiting rod; 14. a pin shaft; 15. an L-shaped rod; 16. a bolt; 17. connecting blocks; 18. a fixed gear; 19. fixing a column; 20. a moving gear; 21. connecting columns; 22. a vacuum pump; 23. a support pillar; 24. a chute; 25. a sliding ball; 26. and controlling the switch.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any inventive step, are intended to be within the scope of the present invention.

Example 1

As shown in fig. 1 to 2, the present embodiment provides a vacuum coater.

In the embodiment, the vacuum coating machine comprises a coating machine main body 1, a motor 2 is fixedly connected to the middle of the upper end face of the coating machine main body 1, a rotating shaft 5 is fixedly connected to the output end of the motor 2, a rotating disc 3 is fixedly connected to the lower end face of the rotating shaft 5, a coating machine main body 1 is slidably connected to the outer side of the rotating disc 3, a hanging rod 6 is uniformly rotatably connected to the lower end face of the rotating disc 3 all around, a gear 20 is fixedly connected to the lower end face of the hanging rod 6, supporting columns 23 are fixedly connected to the lower end face of the coating machine main body 1 all around, and a vacuum pump 22 is communicated with the middle of the right side of the lower portion of the coating machine main body 1. The front side and the rear side of the inner cavity of the hanging rod 6 are uniformly and rotatably connected with a worm 7, the rear end face of the worm 7 is fixedly connected with a twisting handle 8, the left side and the right side of the inner cavity wall of the hanging rod 6 are uniformly and rotatably connected with a threaded rod 9, the middle part of the threaded rod 9 is fixedly connected with a worm wheel 10, and the worm wheel 10 is meshed with the worm 7. Threaded rod 9 left end threaded connection has

thread bush

11, 11 left ends of thread bush downside fixedly connected with

couples

12, 11 downside middle part fixedly connected with gag lever post 13 of thread bush, and the one end sliding connection who keeps away from thread bush 11 of gag lever post 13 has peg 6. Through twisting and moving the twisting handle 8, the worm 7 drives the worm wheel 10 to rotate, the worm wheel 10 drives the threaded rod 9 to rotate, the threaded rod 9 drives the threaded sleeve 11 to move left and right, the limiting rod 13 slides in the inner cavity of the hanging rod 6, and the distances between different hooks 12 and the hanging rod 6 are adjusted, so that workpieces to be coated on the upper side and the lower side cannot collide with each other, and the coating effect is better. One end of the hook 12, which is far away from the threaded sleeve 11, is rotatably connected with an L-shaped rod 15 through a pin shaft 14, one end of the L-shaped rod 15, which is far away from the hook 12, is in threaded connection with a bolt 16, the lower end of the bolt 16 is in threaded connection with a connecting block 17, and the right end face of the connecting block 17 is fixedly connected with the threaded sleeve 11. Through keeping away from the one end of couple 12 with L type pole 15 and the laminating of connecting block 17 up end, it is fixed with connection 17 through bolt 16, accomplish couple 12 closed to the condition that the work piece drops when the effectual coating film that has prevented.

Example 2

As shown in fig. 3 to 4, the present embodiment also provides a vacuum coater based on the same concept as that of the above embodiment 1.

In the embodiment, the middle part of the lower end face of the inner cavity wall of the coating machine main body 1 is fixedly connected with a fixed column 19, the upper end face of the fixed column 19 is fixedly connected with a fixed gear 18, and the fixed gear 18 is meshed with a moving gear 20. The motor 2 drives the rotating shaft 5 to rotate, the rotating shaft 5 drives the rotating disc 3 to rotate, the rotating disc 3 drives the hanging rod 6 to rotate, and when the hanging rod 6 rotates, the movable gear 20 and the fixed gear 18 are in transmission, so that the hanging rod 6 rotates while revolving, coating is more uniform and comprehensive, and the coating effect is better. The lower end face of the moving gear 20 is fixedly connected with a connecting column 21, the lower end face of the connecting column 21 is fixedly connected with a sliding ball 25, the lower end face of the inner cavity wall of the coating machine main body 1 is fixedly connected with a sliding groove 24, and the inner cavity wall of the sliding groove 24 is slidably connected with the sliding ball 25. When the hanging rod 6 revolves, the sliding ball 25 slides in the sliding groove 24, so that the hanging rod 6 is more stable when rotating. The front part of the film plating machine main body 1 is provided with a movable door 4. The middle part of the left side of the upper end surface of the film plating machine main body 1 is provided with a control switch 26, and the control switch 26 is electrically connected with the motor 2 and the vacuum pump 22.

The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a vacuum coating machine, its characterized in that, including coating machine main part (1), coating machine main part (1) up end middle part fixedly connected with motor (2), motor (2) output end fixedly connected with pivot (5), terminal surface fixedly connected with carousel (3) under pivot (5), carousel (3) outside sliding connection has coating machine main part (1), the terminal surface evenly rotates all around under carousel (3) and is connected with peg (6), terminal surface fixedly connected with moves gear (20) under peg (6), terminal surface all fixedly connected with support column (23) all around under coating machine main part (1), coating machine main part (1) lower part right side middle part intercommunication has vacuum pump (22).

2. The vacuum coating machine according to claim 1, characterized in that the front side and the rear side of the inner cavity of the hanging rod (6) are uniformly and rotatably connected with a worm (7), the rear end face of the worm (7) is fixedly connected with a twisting handle (8), the left side and the right side of the inner cavity wall of the hanging rod (6) are uniformly and rotatably connected with a threaded rod (9), the middle part of the threaded rod (9) is fixedly connected with a worm wheel (10), and the worm wheel (10) is meshed with the worm (7).

3. The vacuum coating machine according to claim 2, characterized in that a threaded sleeve (11) is connected to the left end of the threaded rod (9) in a threaded manner, a hook (12) is fixedly connected to the lower side of the left end of the threaded sleeve (11), a limiting rod (13) is fixedly connected to the middle of the lower side of the threaded sleeve (11), and one end, far away from the threaded sleeve (11), of the limiting rod (13) is slidably connected with the hanging rod (6).

4. The vacuum coating machine according to claim 3, characterized in that one end of the hook (12) far away from the threaded sleeve (11) is rotatably connected with an L-shaped rod (15) through a pin shaft (14), one end of the L-shaped rod (15) far away from the hook (12) is in threaded connection with a bolt (16), the lower end of the bolt (16) is in threaded connection with a connecting block (17), and the right end face of the connecting block (17) is fixedly connected with the threaded sleeve (11).

5. The vacuum coating machine according to claim 4, characterized in that a fixed column (19) is fixedly connected to the middle of the lower end face of the inner cavity wall of the coating machine main body (1), a fixed gear (18) is fixedly connected to the upper end face of the fixed column (19), and the fixed gear (18) is engaged with the moving gear (20).

6. A vacuum coating machine as claimed in claim 1, characterized in that the lower end face of the moving gear (20) is fixedly connected with a connecting column (21), the lower end face of the connecting column (21) is fixedly connected with a sliding ball (25), the lower end face of the inner cavity wall of the coating machine main body (1) is fixedly connected with a chute (24), and the inner cavity wall of the chute (24) is slidably connected with the sliding ball (25).

7. A vacuum coater according to claim 1, wherein a movable door (4) is provided in the front of the coater body (1).

8. The vacuum coater according to claim 1, wherein a control switch (26) is arranged in the middle of the left side of the upper end surface of the coater body (1), and the control switch (26) is electrically connected with the motor (2) and the vacuum pump (22).