CN218893729U

CN218893729U - Tectorial membrane processing apparatus

Info

Publication number: CN218893729U
Application number: CN202320076722.XU
Authority: CN
Inventors: 王伟; 张扬; 常杰
Original assignee: Shenzhen Yinuo Vacuum Technology Co ltd
Current assignee: Shenzhen Yinuo Vacuum Technology Co ltd
Priority date: 2023-01-10
Filing date: 2023-01-10
Publication date: 2023-04-21
Anticipated expiration: 2033-01-10

Abstract

The utility model relates to the field of workpiece coating, in particular to a coating treatment device which comprises a mounting assembly, a shielding assembly and a coating assembly, wherein a workpiece is required to be placed below the coating assembly, and the surface of the workpiece is enabled to obtain corresponding attributes through coating treatment. In order to improve the accuracy of tectorial membrane processing, in this application, shelter from the subassembly and enclose tectorial membrane subassembly, installation component encloses and closes and shelter from the subassembly, and installation component forms an installation cavity, through placing the work piece in the installation cavity for the work piece is stable at tectorial membrane in-process. The shielding component makes other positions on the surface of the workpiece not easily affected by the film covering component, so that a good film covering effect is maintained.

Description

Tectorial membrane processing apparatus

Technical Field

The utility model relates to the field of workpiece coating, in particular to a coating treatment device.

Background

At present, in the operation process of the photomask plate, surface coating treatment is carried out on a workpiece, and generally, a product is placed into a vacuum coating machine for treatment. In some cases, the photomask plate is adopted for operation, at this time, the workpiece needs to be placed below the photomask plate and then subjected to film coating treatment, and other positions of the workpiece may be coated, so that the film coating effect of the workpiece is poor.

In view of the above-mentioned related art, there is a problem in that the film coating treatment of the non-film coated surface on the work in the related art results in poor film coating effect.

Disclosure of Invention

In order to improve the effect of coating the surface of a workpiece, the application provides a coating treatment device.

The utility model provides a tectorial membrane processing apparatus, includes installation component, shelters from subassembly and tectorial membrane subassembly, shelter from the subassembly connect in installation component, shelter from the subassembly enclose close in tectorial membrane subassembly, installation cavity has been seted up to installation component, the work piece set up in the installation cavity, tectorial membrane subassembly set up in the top in installation cavity.

Through adopting above-mentioned technical scheme, place the work piece in the installation cavity, and place the work piece in tectorial membrane subassembly's below, shelter from the subassembly with the non-tectorial membrane processing position of work piece to improve the effect of work piece surface tectorial membrane.

Optionally, the shielding assembly includes a first shielding member and a second shielding member, the first shielding member is attached to the side wall of the installation assembly, the second shielding member is disposed above the first shielding member, and the second shielding member is detachably connected to the first shielding member.

Through adopting above-mentioned technical scheme, through the mode that second shielding member and first shielding member pass through detachable connection for the position that the work piece abnormal tectorial membrane handled can be laminated to the second shielding member, thereby maintain the good tectorial membrane effect of work piece. When the second shutter is worn, the second shutter can be replaced, thereby reducing the cost of the overall device.

Optionally, the mounting assembly is provided with a gripping groove.

Through adopting above-mentioned technical scheme, set up and hold the groove and be favorable to holding the whole device and transport, when not setting up and hold the groove, only can hold tectorial membrane processing apparatus through the pressure of horizontal direction and transport tectorial membrane processing apparatus again. In this case, damage to the surface of the film coating apparatus is easily caused, and thus, the provision of the grip groove facilitates gripping of the mounting assembly before film coating treatment.

Optionally, the installation component includes first installed part and second installed part, first installed part is provided with two sets of, the second installed part also is provided with two sets of, two sets of first installed part parallel arrangement, two sets of second installed part also parallel arrangement, two sets of first installed part and two sets of second installed part enclose in shelter from the subassembly, hold tight groove set up in the length direction of first installed part or second installed part.

Through adopting above-mentioned technical scheme, hold the groove setting in whole tectorial membrane processing apparatus's edge, consequently, when holding whole tectorial membrane processing apparatus, can maintain the stability of shielding component and tectorial membrane subassembly.

Optionally, the gripping grooves are provided with a plurality of groups, and the plurality of groups of gripping grooves are uniformly distributed along the length direction interval of the first mounting piece and the second mounting piece.

Through adopting above-mentioned technical scheme, the groove of gripping is provided with the multiunit, can grip tectorial membrane processing apparatus through the groove of gripping of different positions to maintain whole tectorial membrane device's transportation stability.

Optionally, the installation component still includes first locating part and second locating part, first locating part connect in first installed part, the second locating part connect in the second installed part, first locating part and second locating part are all along vertical keeping away from shelter from the direction of subassembly and extend.

Through adopting above-mentioned technical scheme, first locating part and second locating part can restrict the work piece and move at tectorial membrane in-process horizontal direction, and on the other hand, first locating part and second locating part enclose the synthetic installation cavity to protect the chamber outside not receive tectorial membrane processing's influence.

Optionally, the film covering component comprises a film covering piece, and the film covering piece is used for film covering treatment of the surface of the workpiece; the tectorial membrane spare includes protective layer, reinforcement layer and conducting layer, reinforcement layer and protective layer are in proper order along keeping away from the direction of first locating part sets up.

By adopting the technical scheme, because the protective layer mainly plays a role in protection and the conductive layer mainly plays a role in conduction, the same metal materials such as silver materials can be adopted for the protective layer and the conductive layer, wherein silver has stable properties and good conductivity. In addition, when the same metal material is adopted, an extrusion effect is formed on the reinforcing layer, so that the stability of the reinforcing layer is maintained.

In summary, the present application includes at least one of the following beneficial technical effects:

1. placing the workpiece in the mounting cavity, placing the workpiece below the film coating assembly, and shielding the non-film coating treatment position of the workpiece by using a shielding assembly, so that the effect of film coating on the surface of the workpiece is improved;

2. through the mode that second shielding member and first shielding member pass through detachable connection for the position that the work piece abnormal tectorial membrane handled can be laminated to the second shielding member, thereby maintain the good tectorial membrane effect of work piece. When the second shielding piece is worn, the second shielding piece can be replaced, so that the cost of the whole device is reduced;

3. the protective layer mainly plays a role in protection, and the conductive layer mainly plays a role in conduction, and when the protective layer and the conductive layer can be made of the same metal material, such as silver material, silver has stable properties and good conductivity. In addition, when the same metal material is adopted, an extrusion effect is formed on the reinforcing layer, so that the stability of the reinforcing layer is maintained.

Drawings

FIG. 1 is a schematic diagram of the overall mechanism of an embodiment of the present application;

FIG. 2 is a schematic exploded view of a structure of an embodiment of the present application;

reference numerals illustrate: 1. a mounting assembly; 11. a mounting cavity; 12. a first mounting member; 121. a holding groove; 13. a second mounting member; 14. a first limiting member; 15. a second limiting piece; 2. a shielding assembly; 21. a first shutter; 22. a second shutter; 3. a film covering component; 31. a film-coated member; 311. a base layer; 312. a protective layer; 313. a reinforcing layer; 314. and a conductive layer.

Detailed Description

The present application is described in further detail below with reference to fig. 1-2.

The application example discloses a tectorial membrane processing apparatus.

Referring to fig. 1 and 2, a film coating treatment apparatus includes a mounting assembly 1, a shielding assembly 2, and a film coating assembly 3, wherein the mounting assembly 1 encloses the shielding assembly 2, and the shielding assembly 2 encloses the film coating assembly 3. In this application, installation component 1, shielding component 2 and tectorial membrane subassembly 3 are integrative to be manufactured to be convenient for the manufacturing, and make the roughness of whole processing apparatus's upper surface higher, so, can maintain good tectorial membrane effect in the tectorial membrane in-process. The installation component 1 has offered installation cavity 11, and tectorial membrane subassembly 3 sets up in the top in installation cavity 11, when needs carry out tectorial membrane processing, needs place the work piece in installation cavity 11, and places the work piece in the below of tectorial membrane subassembly 3, and then accomplishes the tectorial membrane.

Referring to the figures, in the present application, the mounting assembly 1 comprises a first mounting member 12 and a second mounting member 13, wherein the first mounting member 12 is provided with two sets, the second mounting member 13 is provided with two sets, the two sets of first mounting members 12 are arranged in parallel, the two sets of second mounting members 13 are also arranged in parallel, the first mounting member 12 and the second mounting member 13 are arranged horizontally and vertically, the length of the first mounting member 12 is equal to the length of the second mounting member 13, and the two sets of first mounting members 12 and the two sets of second mounting members 13 enclose a square. Further, the first mount 12 and the second mount 13 are integrally manufactured, thereby facilitating production and manufacturing. Further, in the present application, the surfaces of the first mount 12 and the second mount 13 are each provided with the grip grooves 121, wherein the grip grooves 121 are provided with a plurality of groups, and the plurality of groups of grip grooves 121 are uniformly provided along the length direction of the first mount 12 or the second mount 13. The provision of the gripping grooves 121 facilitates gripping of the mounting assembly 1 prior to the lamination process and reduces wear on the surface of the shielding assembly 2 or the lamination assembly 3.

Referring to the figures, in the present application, the mounting assembly 1 further comprises a first limiting member 14 and a second limiting member 15, wherein the first limiting member 14 is arranged below the first mounting member 12, the second limiting member 15 is arranged below the second mounting member 13, the number of the first limiting members 14 is consistent with the number of the first mounting members 12, and the number of the second limiting members 15 is also consistent with the number of the second mounting members 13. The first and

second stoppers

14 and 15 extend vertically away from the first or second mounting member 12 or 13, so that the first and

second stoppers

14 and 15 enclose the mounting cavity 11. The arrangement of the first limiting piece 14 and the second limiting piece 15 ensures that the workpiece is not easy to displace in the film covering process, the film covering range is positioned in the appointed range, and the situation outside the overflow area in the film covering process is reduced.

Referring to the figures, the screen assembly 2 comprises a first screen 21 and a second screen 22, wherein the first screen 21 is arranged to fit the first mount 12 and the second mount 13, the second screen 22 is arranged on the first screen 21, the first screen 21 is arranged for mounting the second screen 22, and the second screen 22 is arranged for marking the coverage. In this application, the second shielding member 22 is adhered to the upper side of the first shielding member 21 by glue, and the second shielding member 22 is used for shielding the first shielding member 21 by the second shielding member 22, and the first shielding member 21 is made of a metal foil material such as tin foil. When the first shutter 21 is used a plurality of times, the shutter effect of the first shutter 21 may be poor, so that the cost of the plurality of times of film coating treatment can be reduced by such easy replacement of the tin foil.

Referring to the figure, the film coating assembly 3 includes a film coating member 31 and film coating holes, wherein the film coating holes are disposed on the film coating member 31, and the film coating holes are provided with a plurality of groups, and the plurality of groups of film coating holes are uniformly distributed along the central circumferential direction of the film coating member 31. In this application, the covering member 31 includes a base layer 311, a protective layer 312, a reinforcing layer 313, and a conductive layer 314, and in this application, the covering member 31 is provided in a net shape, and the base layer 311, the protective layer 312, the reinforcing layer 313, and the conductive layer 314 are provided outward along the center of the covering member 31 in this order.

In a specific implementation process, the protection layer 312 is made of silver metal material, and the protection layer 312 can protect the base layer 311 because the gold metal material has strong oxidizing property; since the reinforcing layer 313 is made of silicon dioxide, and silicon dioxide is not conductive, the reinforcing layer 313 is provided outside the protective layer 312, which is advantageous in reducing current from outside to be introduced into the protective layer 312. In this application, it is necessary to place a work under the film-coating module 3 and then to film the work so that the surface of the work has the properties of the film-coating module 3.

Referring to the figure, the conductive layer 314 is also made of silver metal, so that during the manufacturing process of the film coating member 31, silver metal can be plated on the base member by two times of electroplating, thereby reducing the cost of manufacturing the product. Moreover, the conductive layer 314 and the protective layer 312 are made of the same silver metal material, and the conductive layer 314 and the protective layer 312 can be pressed against each other during the manufacturing process, so that the reinforcing layer 313 is more stable.

The implementation principle of the embodiment of the application: a film coating treatment device comprises a mounting assembly 1, a shielding assembly 2 and a film coating assembly 3, wherein a workpiece is required to be placed below the film coating assembly 3, and the surface of the workpiece is enabled to obtain corresponding attributes through film coating treatment. In order to improve the accuracy of tectorial membrane processing, in this application, shelter from subassembly 2 enclose and close tectorial membrane subassembly 3, installation component 1 encloses and closes and shelter from subassembly 2, and installation component 1 forms an installation cavity 11 for the work piece is stable at tectorial membrane in-process through placing the work piece in installation cavity 11. The shielding component 2 makes other positions on the surface of the workpiece not easily affected by the film covering component 3, so that a good film covering effect is maintained.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims

1. The utility model provides a tectorial membrane processing apparatus, its characterized in that, including installation component (1), shelter from subassembly (2) and tectorial membrane subassembly (3), shelter from subassembly (2) connect in installation component (1), shelter from subassembly (2) enclose close in tectorial membrane subassembly (3), installation cavity (11) have been seted up to installation component (1), the work piece set up in installation cavity (11), tectorial membrane subassembly (3) set up in the top of installation cavity (11).

2. A film coating apparatus according to claim 1, wherein said shielding member (2) comprises a first shielding member (21) and a second shielding member (22), said first shielding member (21) being disposed so as to be fitted to a side wall of said mounting member (1), said second shielding member (22) being disposed above said first shielding member (21), said second shielding member (22) being detachably connected to said first shielding member (21).

3. A film coating apparatus according to claim 1, wherein the mounting assembly (1) is provided with a grip groove (121).

4. A film treatment apparatus according to claim 3, wherein the mounting assembly (1) comprises a first mounting member (12) and a second mounting member (13), the first mounting member (12) is provided with two groups, the second mounting member (13) is also provided with two groups, the two groups of the first mounting members (12) are arranged in parallel, the two groups of the second mounting members (13) are also arranged in parallel, the two groups of the first mounting members (12) and the two groups of the second mounting members (13) are enclosed in the shielding assembly (2), and the holding groove (121) is formed in the length direction of the first mounting member (12) or the second mounting member (13).

5. The film coating apparatus according to claim 4, wherein the holding grooves (121) are provided in plural groups, and the plural groups of the holding grooves (121) are uniformly spaced apart in the longitudinal direction of the first mounting member (12) and the second mounting member (13).

6. A film treatment apparatus according to claim 4, wherein the mounting assembly (1) further comprises a first stopper (14) and a second stopper (15), the first stopper (14) being connected to the first mounting member (12), the second stopper (15) being connected to the second mounting member (13), the first stopper (14) and the second stopper (15) each extending in a direction vertically away from the shielding assembly (2).

7. A film-coating treatment apparatus according to claim 6, wherein the film-coating assembly (3) comprises a film-coating member (31), the film-coating member (31) being for film-coating treatment of a surface of a workpiece; the film covering piece (31) comprises a protective layer (312), a reinforcing layer (313) and a conductive layer (314), and the conductive layer (314), the reinforcing layer (313) and the protective layer (312) are sequentially arranged along the direction away from the first limiting piece (14).