CN218873163U - High-pressure cleaning machine for inner and outer walls of quartz tube - Google Patents

High-pressure cleaning machine for inner and outer walls of quartz tube Download PDF

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Publication number
CN218873163U
CN218873163U CN202222544887.3U CN202222544887U CN218873163U CN 218873163 U CN218873163 U CN 218873163U CN 202222544887 U CN202222544887 U CN 202222544887U CN 218873163 U CN218873163 U CN 218873163U
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mounting
mounting bracket
quartz tube
quartz
belt wheel
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CN202222544887.3U
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Chinese (zh)
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王青松
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Wuhan Zhenxin Semiconductor Equipment Co ltd
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Wuhan Zhenxin Semiconductor Equipment Co ltd
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Abstract

The utility model belongs to the technical field of the cleaning machine technique and specifically relates to a quartz capsule inside and outside wall high pressure cleaner, the mounting bracket comprises a mounting bracket, first clearance mechanism is installed at the top of mounting bracket, first clearance mechanism includes the rotor, the rotor runs through the roof of mounting bracket, and rotate with the mounting bracket and be connected, mounting disc fixed mounting is at the top of rotor, the outside slidable mounting of mounting disc has a plurality of slide bars that run through, a plurality of slide bars are around mounting disc evenly distributed, the one end fixed mounting of a plurality of slide bars has arc splint, the other end fixed mounting of a plurality of slide bars has the stopper, all the cover is equipped with the answer spring on a plurality of slide bars, a plurality of arc splint all are located the mounting disc inboard, install the quartz capsule between a plurality of arc splint, second clearance mechanism is installed to the one end at mounting bracket top, water spray mechanism is installed to the other end at mounting bracket top. The utility model discloses improved the cleaning performance to the quartz capsule greatly, the practicality is strong.

Description

High-pressure cleaning machine for inner and outer walls of quartz tube
Technical Field
The utility model relates to a cleaning machine technical field especially relates to a quartz pipe inner and outer wall high pressure cleaner.
Background
In the production process of the semiconductor silicon wafer, a quartz tube needs to be cleaned regularly to ensure the cleanliness of the quartz tube; the current cleaning method is to place the quartz tube in an acid-base resistant tank and manually add a cleaning chemical agent; then manually cleaning the brush, and finally spraying and cleaning the brush by a water gun; however, the method has low cleaning efficiency and is easy to cause harm to the safety and health of workers;
in contrast, the chinese patent publication No. CN202021686399.0 "an unpowered quartz tube cleaning device includes a box body; the bearing mechanism is arranged in the box body and used for bearing the quartz tube placed in the inverted buckle; the driving assembly is arranged on one side of the bearing mechanism and used for driving the bearing mechanism to rotate; a multi-directional nozzle arranged on the bearing mechanism and used for cleaning the inner wall of the quartz tube;
this patent is aimed at the inside washing of quartz capsule through diversified nozzle, and the dead angle on quartz capsule inner wall and the quartz capsule inner wall can be washd to the nozzle, however, this patent just sprays the clearance through the nozzle, and some stubborn stains on the quartz capsule wall are difficult to the clearance, and this just makes the unable clean up of quartz capsule, just also influences the reuse of quartz capsule.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem that the quartz tube cannot be cleaned up in the prior art, and providing a quartz tube inner and outer wall high-pressure cleaning machine.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a quartz capsule inside and outside wall high pressure cleaner, includes the mounting bracket, first clearance mechanism is installed at the top of mounting bracket, first clearance mechanism includes the rotor, the rotor runs through the roof of mounting bracket, and rotates with the mounting bracket and be connected, mounting disc fixed mounting is at the top of rotor, the outside slidable mounting of mounting disc has a plurality of slide bars that run through, and is a plurality of the slide bar is around mounting disc evenly distributed, and is a plurality of the one end fixed mounting of slide bar has arc splint, and is a plurality of the other end fixed mounting of slide bar has the stopper, and is a plurality of all the cover is equipped with the answer spring on the slide bar, and is a plurality of arc splint all are located the mounting disc inboard, and are a plurality of install the quartz capsule between the arc splint, second clearance mechanism is installed to the one end at mounting bracket top, water spray mechanism is installed to the other end at mounting bracket top.
Preferably, a hollow shaft is fixedly mounted at the top of the mounting frame and located on the inner side of the rotating cylinder, a first rolling brush is fixedly mounted at the top of the hollow shaft and inserted into the inner side of the quartz tube, and a first water spraying head is fixedly mounted at the top of the first rolling brush.
Preferably, the second cleaning mechanism comprises a first fixed frame, a sliding rail, a sliding block, a reciprocating bolt, a mounting seat and a second rolling brush; first mount fixed mounting is at the top of mounting bracket, slide rail fixed mounting just follows vertical direction setting in the inboard of first mount, the one end and the sliding rail connection of slider, the other end and the mount pad fixed connection of slider, the second round brush rotates to be installed at the mount pad inboard, and with the outer wall laminating of quartz capsule, reciprocal bolt rotates to be installed at reciprocal bolt inboardly, reciprocal bolt run through the slider, and with slider threaded connection.
Preferably, a driving mechanism is mounted on the inner side of the mounting frame, and the driving mechanism comprises a motor, a first belt wheel and a second belt wheel; the motor is fixedly installed on the inner side of the installation frame, an output shaft of the motor is fixedly connected with the reciprocating bolt, the first belt wheel is fixedly installed on the output shaft of the motor, and the second belt wheel is fixedly installed at the bottom end of the rotating cylinder and is in transmission connection with the first belt wheel through a belt.
Preferably, the water spraying mechanism comprises a water tank, a water pump, a three-way pipe, a second fixing frame and a second water spraying head; the water tank is fixedly mounted at the top of the mounting frame, the water pump is fixedly mounted on the outer side of the water tank, the inlet end of the water pump is communicated with the interior of the water tank through a guide pipe, the outlet end of the water pump is communicated with the three-way pipe, one end of the three-way pipe is communicated with the first sprinkler bead through a guide pipe, the second mounting frame is fixedly mounted at the top of the mounting frame, the second sprinkler bead is fixedly mounted at the top of the second mounting frame, and the other end of the three-way pipe is communicated with the second sprinkler bead through a guide pipe.
The utility model provides a pair of quartz capsule inside and outside wall high pressure cleaner, beneficial effect lies in: the inner wall and the outer wall of the quartz tube can be thoroughly cleaned through the matching of the second rolling brush and the first rolling brush, and the cleaning effect on the quartz tube is greatly improved.
Drawings
Fig. 1 is a schematic structural view of a high-pressure cleaning machine for inner and outer walls of a quartz tube according to the present invention;
fig. 2 is a schematic structural diagram of a first cleaning mechanism of a high-pressure cleaning machine for inner and outer walls of a quartz tube according to the present invention;
fig. 3 is a schematic structural diagram of a second cleaning mechanism of the high-pressure cleaning machine for the inner and outer walls of the quartz tube provided by the present invention;
fig. 4 is a schematic structural diagram of a driving mechanism of a high-pressure cleaning machine for inner and outer walls of a quartz tube according to the present invention;
fig. 5 is a schematic structural view of a water spraying mechanism of the high pressure cleaning machine for inner and outer walls of a quartz tube according to the present invention.
In the figure: the cleaning device comprises a mounting frame 1, a first cleaning mechanism 2, a rotating cylinder 21, a mounting disc 22, a sliding rod 23, an arc-shaped clamping plate 24, a limiting block 25, a return spring 26, a hollow shaft 27, a first rolling brush 28, a first water spraying head 29, a quartz tube 3, a second cleaning mechanism 4, a first fixing frame 41, a sliding rail 42, a sliding block 43, a reciprocating bolt 44, a mounting seat 45, a second rolling brush 46, a driving mechanism 5, a motor 51, a first belt wheel 52, a second belt wheel 53, a water spraying mechanism 6, a water tank 61, a water pump 62, a three-way pipe 63, a second fixing frame 64 and a second water spraying head 65.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Example 1:
referring to fig. 1-4, a high-pressure cleaning machine for inner and outer walls of a quartz tube comprises a mounting frame 1, a first cleaning mechanism 2 is installed at the top of the mounting frame 1, the first cleaning mechanism 2 comprises a rotary drum 21, the rotary drum 21 penetrates through the top wall of the mounting frame 1 and is rotatably connected with the mounting frame 1, a mounting disc 22 is fixedly installed at the top of the rotary drum 21, a plurality of penetrating slide bars 23 are slidably installed on the outer side of the mounting disc 22, the plurality of slide bars 23 are uniformly distributed around the mounting disc 22, arc-shaped clamping plates 24 are fixedly installed at one ends of the plurality of slide bars 23, limiting blocks 25 are fixedly installed at the other ends of the plurality of slide bars 23, return springs 26 are sleeved on the plurality of slide bars 23, the plurality of arc-shaped clamping plates 24 are located on the inner side of the mounting disc 22, the quartz tube 3 is installed among the plurality of arc-shaped clamping plates 24, a second cleaning mechanism 4 is installed at one end of the top of the mounting frame 1, and a water spraying mechanism 6 is installed at the other end of the top of the mounting frame 1;
the top of the mounting rack 1 is fixedly provided with a hollow shaft 27, the hollow shaft 27 is positioned on the inner side of the rotating cylinder 21, the top of the hollow shaft 27 is fixedly provided with a first rolling brush 28, the first rolling brush 28 is inserted into the inner side of the quartz tube 3, and the top of the first rolling brush 28 is fixedly provided with a first water spray head 29; the motor 51 can make the first belt wheel 52 rotate, so that the second belt wheel 53 drives the rotating cylinder 21 to rotate synchronously, and this makes the arc-shaped clamping plate 24 drive the quartz tube 3 to rotate, and further makes the quartz tube 3 and the first rolling brush 28 rotate relatively, and also makes the first rolling brush 28 clean the inner wall of the quartz tube 3.
The second cleaning mechanism 4 comprises a first fixed frame 41, a slide rail 42, a slide block 43, a reciprocating bolt 44, a mounting seat 45 and a second rolling brush 46; the first fixing frame 41 is fixedly installed at the top of the mounting frame 1, the sliding rail 42 is fixedly installed on the inner side of the first fixing frame 41 and is arranged along the vertical direction, one end of the sliding block 43 is connected with the sliding rail 42, the other end of the sliding block 43 is fixedly connected with the mounting seat 45, the second rolling brush 46 is rotatably installed on the inner side of the mounting seat 45 and is attached to the outer wall of the quartz tube 3, the reciprocating bolt 44 is rotatably installed on the inner side of the reciprocating bolt 44, and the reciprocating bolt 44 penetrates through the sliding block 43 and is in threaded connection with the sliding block 43; the quartz tube 3 and the second rolling brush 46 slide relatively, so that the second rolling brush 46 can clean the outer wall of the quartz tube 3.
A driving mechanism 5 is arranged on the inner side of the mounting frame 1, and the driving mechanism 5 comprises a motor 51, a first belt wheel 52 and a second belt wheel 53; the motor 51 is fixedly installed on the inner side of the mounting frame 1, an output shaft of the motor is fixedly connected with the reciprocating bolt 44, the first belt wheel 52 is fixedly installed on the output shaft of the motor 51, and the second belt wheel 53 is fixedly installed at the bottom end of the rotating cylinder 21 and is in transmission connection with the first belt wheel 52 through a belt.
Working principle; firstly, pulling the limiting block 25 to enable the arc-shaped clamping plates 24 to extrude the return spring 26 to accumulate potential energy, then placing the quartz tube 3 among the arc-shaped clamping plates 24 and sleeving the quartz tube on the first rolling brush 28, and then loosening the limiting block 25 to enable the return spring 26 to release the potential energy to enable the arc-shaped clamping plates 24 to clamp the quartz tube 3 to complete positioning and installation;
the motor 51 is restarted to enable the first belt wheel 52 to rotate, so that the second belt wheel 53 drives the rotating cylinder 21 to synchronously rotate, the arc-shaped clamping plate 24 drives the quartz tube 3 to rotate, the quartz tube 3 and the first rolling brush 28 rotate relatively, and the first rolling brush 28 cleans the inner wall of the quartz tube 3;
the motor 51 drives the reciprocating bolt 44 to rotate simultaneously, and this makes the slider 43 reciprocate from top to bottom on the reciprocating bolt 44, thereby make the second round brush 46 reciprocate along the outer wall of quartz capsule 3, and quartz capsule 3 and second round brush 46 take place the relative slip, and then make the second round brush 46 clear up the outer wall of quartz capsule 3, can thoroughly clear up the interior outer wall of quartz capsule 3 through the cooperation of second round brush 46 and first round brush 28, the cleaning performance to quartz capsule 3 has been improved greatly.
Example 2:
referring to fig. 1 to 5, as another preferred embodiment of the present invention, the difference from embodiment 1 is that the water spraying mechanism 6 includes a water tank 61, a water pump 62, a tee 63, a second holder 64 and a second water spraying head 65; water tank 61 fixed mounting is at the mounting bracket 1 top, and water pump 62 fixed mounting is in the outside of water tank 61, and the entrance point of water pump 62 passes through the pipe and the inside switch-on of water tank 61, and the exit end and the tee bend 63 switch-on of water pump 62, and the pipe and the first sprinkler bead 29 switch-on are passed through to the one end of tee bend 63, and second mount 64 fixed mounting is at the mounting bracket 1 top, and second sprinkler bead 65 fixed mounting is at second mount 64 top, and the other end of tee bend 63 passes through the pipe and the switch-on of second sprinkler bead 65.
During operation, start water pump 62 and make inside the leading-in three-way pipe 63 of water tank 61, again by inside the leading-in first sprinkler head 29 of three-way pipe 63 and second sprinkler head 65 respectively, first sprinkler head 29 can carry out the water spray washing to the inner wall of quartz capsule 3, and second sprinkler head 65 can carry out the water spray washing to the outer wall of quartz capsule 3, and this cleaning performance that has just further improved quartz capsule 3.
The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, which are designed to be replaced or changed equally, all should be covered within the protection scope of the present invention.

Claims (5)

1. The utility model provides a quartz pipe inside and outside wall high pressure cleaner, includes mounting bracket (1), its characterized in that, first clearance mechanism (2) are installed at the top of mounting bracket (1), first clearance mechanism (2) are including a rotor (21), rotor (21) run through the roof of mounting bracket (1) and rotate with mounting bracket (1) and be connected, mounting disc (22) fixed mounting is at the top of rotor (21), the outside slidable mounting of mounting disc (22) has a plurality of slide bar (23) that run through, and is a plurality of mounting disc (22) evenly distributed is around in slide bar (23) a plurality of the one end fixed mounting of slide bar (23) has arc splint (24), and is a plurality of the other end fixed mounting of slide bar (23) has stopper (25), and is a plurality of all the cover is equipped with on slide bar (23) and replies spring (26), and is a plurality of arc splint (24) all are located mounting disc (22) inboard, a plurality of install quartz pipe (3) between arc splint (24), second clearance mechanism (4) are installed to the one end at mounting bracket (1) top, the other end of mechanism (1) top is installed.
2. The quartz tube inner and outer wall high pressure cleaning machine according to claim 1, characterized in that a hollow shaft (27) is fixedly installed on the top of the mounting rack (1), the hollow shaft (27) is located on the inner side of the rotating cylinder (21), a first rolling brush (28) is fixedly installed on the top of the hollow shaft (27), the first rolling brush (28) is inserted into the inner side of the quartz tube (3), and a first water spray head (29) is fixedly installed on the top of the first rolling brush (28).
3. The high-pressure cleaning machine for the inner and outer walls of the quartz tube as claimed in claim 2, wherein the second cleaning mechanism (4) comprises a first fixing frame (41), a slide rail (42), a slide block (43), a reciprocating bolt (44), a mounting seat (45) and a second rolling brush (46); first mount (41) fixed mounting is at the top of mounting bracket (1), slide rail (42) fixed mounting is in the inboard of first mount (41) and sets up along vertical direction, the one end and the slide rail (42) of slider (43) are connected, the other end and mount pad (45) fixed connection of slider (43), second round brush (46) rotate install mount pad (45) inboard and with the outer wall laminating of quartz capsule (3), reciprocal bolt (44) rotate install in reciprocal bolt (44) inboard, reciprocal bolt (44) run through slider (43), and with slider (43) threaded connection.
4. The quartz tube inner and outer wall high pressure cleaning machine according to claim 3, characterized in that a driving mechanism (5) is installed on the inner side of the mounting rack (1), and the driving mechanism (5) comprises a motor (51), a first belt wheel (52) and a second belt wheel (53); the motor (51) is fixedly installed on the inner side of the installation frame (1), an output shaft of the motor is fixedly connected with the reciprocating bolt (44), the first belt wheel (52) is fixedly installed on the output shaft of the motor (51), and the second belt wheel (53) is fixedly installed at the bottom end of the rotating cylinder (21) and is in transmission connection with the first belt wheel (52) through a belt.
5. The quartz tube inner and outer wall high-pressure cleaning machine as claimed in claim 4, wherein the water spraying mechanism (6) comprises a water tank (61), a water pump (62), a three-way pipe (63), a second fixing frame (64) and a second water spraying head (65); the water tank (61) is fixedly mounted at the top of the mounting frame (1), the water pump (62) is fixedly mounted on the outer side of the water tank (61), the inlet end of the water pump (62) is communicated with the interior of the water tank (61) through a guide pipe, the outlet end of the water pump (62) is communicated with the three-way pipe (63), one end of the three-way pipe (63) is communicated with the first water spraying head (29) through a guide pipe, the second fixing frame (64) is fixedly mounted at the top of the mounting frame (1), the second water spraying head (65) is fixedly mounted at the top of the second fixing frame (64), and the other end of the three-way pipe (63) is communicated with the second water spraying head (65) through a guide pipe.
CN202222544887.3U 2022-09-26 2022-09-26 High-pressure cleaning machine for inner and outer walls of quartz tube Active CN218873163U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222544887.3U CN218873163U (en) 2022-09-26 2022-09-26 High-pressure cleaning machine for inner and outer walls of quartz tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222544887.3U CN218873163U (en) 2022-09-26 2022-09-26 High-pressure cleaning machine for inner and outer walls of quartz tube

Publications (1)

Publication Number Publication Date
CN218873163U true CN218873163U (en) 2023-04-18

Family

ID=85956253

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222544887.3U Active CN218873163U (en) 2022-09-26 2022-09-26 High-pressure cleaning machine for inner and outer walls of quartz tube

Country Status (1)

Country Link
CN (1) CN218873163U (en)

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