CN218867050U

CN218867050U - Wafer curing device

Info

Publication number: CN218867050U
Application number: CN202223162129.1U
Authority: CN
Inventors: 郑棉胜
Original assignee: Suzhou Beiaite Automation Science & Technology Co ltd
Current assignee: Suzhou Beiaite Automation Science & Technology Co ltd
Priority date: 2022-11-27
Filing date: 2022-11-27
Publication date: 2023-04-14
Anticipated expiration: 2032-11-27

Abstract

The application belongs to the technical field of semiconductors, and discloses a wafer solidification equipment is disclosed, which comprises a bod, be provided with solidification platform and UV lamp solidification mechanism in the organism, the door-opening has been seted up to the organism side, the door-opening is the inside protruding chimb that stretches all around, be provided with elevating system in the organism, the elevating system top is provided with the overhead door, the overhead door wholly is the trough-shaped of topside breach, and elevating system pushes away overhead door up-and-down motion and door-opening closure or separation. The lifting door is integrally in a groove shape with a gap at the top edge by convexly extending the convex edge inwards around the door hole, so that the lifting door can be tightly attached to the convex edge of the door hole, and the integral sealing performance is high; the lifting door is pushed to move up and down through the lifting mechanism, so that the door hole can be automatically closed and opened, the automatic closing and opening device is matched with conveying parts such as an external manipulator to work, the automatic feeding and discharging can be realized, and the operation is simple and convenient.

Description

Wafer curing device

Technical Field

The utility model relates to the field of semiconductor technology, in particular to wafer solidification equipment.

Background

The wafer curing means that the wafer is irradiated by a UV lamp to be cured in a short time. The UV lamp works on the principle that a certain amount of high-purity mercury (mercury) is added into a vacuum quartz tube, and a voltage difference (voltage drop) is provided for electrodes at two ends to generate ion discharge so as to generate ultraviolet radiation. This requires that the wafer curing be performed in a closed environment.

Among the prior art, when carrying out the wafer solidification, need place the wafer on wafer solidification device's solidification platform through transmission parts such as manipulator, take out the wafer after waiting to solidify to accomplish again, this just requires to leave the door opening that transmission parts such as confession manipulator pass through on wafer solidification device, in order to keep the confined environment in the wafer solidification device, it is provided with the door plant to articulate on the door opening generally, open or be closed through manual mode, this is so that opening and close of door plant is very inconvenient, and traditional door plant structure closure is relatively poor.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model provides a wafer solidification equipment.

The above technical purpose of the present invention can be achieved by the following technical solutions: the utility model provides a wafer curing device, includes the organism, be provided with solidification platform and UV lamp solidification mechanism in the organism, the door opening has been seted up to the organism side, the door opening is the inside protruding chimb that stretches all around, be provided with elevating system in the organism, the elevating system top is provided with the overhead door, the overhead door is whole to be the trough-shaped of topside breach, and elevating system pushes away the overhead door up-and-down motion and the door opening is closed or separate.

By adopting the technical scheme, the convex edge is convexly extended inwards around the door hole, and the lifting door is arranged into a groove shape with a gap at the top edge as a whole, so that the lifting door and the door hole convex edge can be tightly attached, and the whole sealing performance is high; the lifting door is pushed to move up and down through the lifting mechanism, so that the door hole can be automatically closed and opened, the automatic closing and opening device is matched with conveying parts such as an external manipulator to work, the automatic feeding and discharging can be realized, and the operation is simple and convenient.

Furthermore, the lifting door comprises a door plate parallel to the door hole, a bottom plate and two vertical edges of the door plate are provided with groove edges in an outward protruding mode, the width of each groove edge is consistent with the width of each convex edge, and the distance between the inner plate surfaces of the two vertical groove edges of the door plate is consistent with the distance between the outer plate surfaces of the two vertical convex edges of the door hole.

Through adopting above-mentioned technical scheme, set up the width and the chimb width of trough edge to unanimous, the interior face interval of two vertical trough edges of door plant and the planking face interval of two vertical chimbs of door opening set up to unanimously for the whole door opening inner ring laminating that encloses with the chimb of overhead door is inseparable, and the bulk seal nature is better.

Furthermore, a reinforcing rib is arranged on one side of the door plate, which is far away from the door hole.

Through adopting above-mentioned technical scheme, set up the strengthening rib in the one side that the door plant deviates from the door opening, play the additional strengthening to the door plant, place the door plant and influence the closure in long-term use deformation.

Furthermore, the lifting mechanism comprises a servo electric cylinder, a cylinder body part of the servo electric cylinder is fixed in the machine body, a push rod of the servo electric cylinder is upwards, a fixing block is arranged at the top end of the push rod, and the bottom edge groove edge of the door plate is fixedly connected with the fixing block.

Through adopting above-mentioned technical scheme, elevating system adopts servo electric cylinder, can the lift of accurate control overhead door, guarantees the stability when overhead door opens and closes.

Furthermore, the bottom of the two ends of the fixed block protrudes downwards to form guide rods, a guide plate is arranged at the upper end of the servo electric cylinder body, guide holes are formed in the positions, corresponding to the guide rods, of the guide plates, and the guide rods penetrate through the guide holes.

Through adopting above-mentioned technical scheme, set up guide bar and guiding hole, carry out ascending spacing direction in vertical direction to the elevating movement of overhead door for the overhead door can only follow vertical direction motion, avoids the off tracking.

Further, a mounting frame is arranged on the cylinder body of the servo electric cylinder, and the mounting frame is fixedly mounted in the machine body.

Through adopting above-mentioned technical scheme, set up the mounting bracket, make servo electric jar install in the organism well, the installation is stable.

To sum up, the utility model discloses following beneficial effect has: in the application, the convex edge is convexly arranged inwards at the periphery of the door hole, and the lifting door is arranged into a groove shape with a gap at the top edge as a whole, so that the lifting door and the convex edge of the door hole can be tightly attached, and the whole sealing performance is high; the lifting door is pushed to move up and down through the lifting mechanism, so that the door hole can be automatically closed and opened, the automatic closing and opening device is matched with conveying parts such as an external manipulator to work, the automatic feeding and discharging can be realized, and the operation is simple and convenient.

Drawings

Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention;

fig. 2 is a schematic view of an external frame of an embodiment of the invention;

fig. 3 and 4 are schematic structural views of a lifting mechanism and a lifting door part according to an embodiment of the present invention.

In the figure: 10. a body; 11. a door opening; 12. a convex edge; 20. a curing platform; 30. a UV lamp curing mechanism; 40. a lifting mechanism; 41. a servo electric cylinder; 42. a fixed block; 43. a guide bar; 44. a guide plate; 45. a guide hole; 46. a mounting frame; 50. a lift gate; 51. a door panel; 52. a groove edge; 53. and (7) reinforcing ribs.

Detailed Description

The technical solution in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all embodiments, and all other embodiments obtained by those of ordinary skill in the art without any inventive work based on the embodiments in the present application belong to the protection scope of the present application.

As shown in fig. 1 to 4, the embodiment of the application discloses a wafer curing device, which includes a machine body 10, a curing platform 20 and a UV lamp curing mechanism 30 are disposed in the machine body 10, a door hole 11 is disposed on a side of the machine body 10, a lifting mechanism 40 is disposed in the machine body 10, a lifting door 50 is disposed at a top end of the lifting mechanism 40, and the lifting mechanism 40 pushes the lifting door 50 to move up and down to close or separate from the door hole 11. Namely, when feeding and taking materials, the lifting door 50 moves downwards to be separated from the door hole 11, so that the door hole 11 is opened; after the feeding and the taking are completed, the lifting door 50 moves upwards to be matched with the door hole 11, so that the door hole 11 is closed.

Specifically, the periphery of the door hole 11 is inwardly protruded with convex edges 12, and the four convex edges 12 form a square ring shape in the door hole 11. The lifting door 50 comprises a door plate 51 parallel to the door hole 11, the bottom plate and two vertical edges of the door plate 51 of the lifting door 50 are outwards protruded with groove edges 52, and the door plate 51 and the three groove edges 52 form a groove shape with a gap at the top edge as a whole. When specifically setting up, the width of groove 52 is unanimous with chimb 12 width, and when door opening 11 closed promptly, the outer face of door plant 51 was laminated with the border of chimb 12, and groove 52 border is laminated with organism 10 side for whole closure is good after 50 and the cooperation of door opening 11 of overhead door. The distance between the inner plate surfaces of the two vertical groove edges 52 of the door panel 51 is consistent with the distance between the outer plate surfaces of the two vertical convex edges 12 of the door hole 11, namely, the two sides of the lifting door 50 just buckle the square ring at the inner side of the door hole 11, and the overall sealing performance is further enhanced.

Further setting up as, the one side that door plant 51 deviates from door hole 11 is provided with strengthening rib 53, through setting up strengthening rib 53, can strengthen door plant 51 bulk strength, can prevent that door plant 51 from taking place to warp after long-term the use, makes door plant 51 remain the board straight all the time.

The lifting mechanism 40 includes a servo cylinder 41, a cylinder portion of the servo cylinder 41 is fixed in the machine body 10, and specifically, a mounting bracket 46 is provided on the cylinder portion of the servo cylinder 41, and the mounting bracket 46 is fixedly mounted in the machine body 10. The push rod of the servo electric cylinder 41 is arranged upwards, the top end of the push rod of the servo electric cylinder 41 is provided with the fixing block 42, the fixing block 42 is used for being fixedly connected with the bottom edge groove edge 52 of the door plate 51, the edge of the bottom edge groove edge 52 of the door plate 51 is flush with the edge of the fixing block 42, or the edge of the bottom edge groove edge 52 of the door plate 51 extends out of the edge of the fixing block 42, and the influence of the edge protrusion of the fixing block 42 on the matching sealing performance of the lifting door 50 and the door hole 11 is prevented.

The bottom of the two ends of the fixed block 42 is provided with a guide rod 43 in a downward protruding manner, the upper end of the cylinder body of the servo electric cylinder 41 is provided with a guide plate 44, the guide plate 44 is provided with a guide hole 45 at a position corresponding to the guide rod 43, and the guide rod 43 penetrates through the guide hole 45. The guide rod 43 and the guide hole 45 form a limiting and guiding fit in the vertical direction, that is, the limiting and guiding function is achieved when the lifting mechanism 40 pushes the lifting door 50 to move up and down, so that the movement track of the lifting door 50 is ensured to move along the vertical direction all the time, the lifting door 50 can be perfectly matched with the door hole 11, and the sealing performance is improved.

Further, the servo electric cylinder 41 can be replaced by an air cylinder, an electric push rod, a screw rod mechanism and the like.

The use principle of a wafer curing device in this embodiment is: when feeding or taking materials, the servo electric cylinder 41 drives the lifting door 50 to move downwards to gradually separate from the door hole 11, and finally the door hole 11 is opened, and at the moment, a wafer can be placed on the curing platform 20 by a manipulator or other conveying parts, or the wafer can be taken out of the curing platform 20; then the servo electric cylinder 41 drives the lifting door 50 to move upwards, the lifting door 50 is gradually matched with the door hole 11, and finally the door hole 11 is completely closed.

It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a wafer solidification equipment, includes organism (10), be provided with solidification platform (20) and UV lamp solidification mechanism (30) in organism (10), characterized by: the side edge of the machine body (10) is provided with a door hole (11), convex edges (12) are convexly extended inwards around the door hole (11), a lifting mechanism (40) is arranged in the machine body (10), a lifting door (50) is arranged at the top end of the lifting mechanism (40), the lifting door (50) is integrally in a groove shape with a top edge notch, and the lifting mechanism (40) pushes the lifting door (50) to move up and down to be closed or separated from the door hole (11).

2. The wafer curing apparatus of claim 1, wherein: the lifting door (50) comprises a door plate (51) parallel to the door hole (11), the bottom plate and two vertical edges of the door plate (51) are outwards protruded to form groove edges (52), the width of each groove edge (52) is consistent with the width of the convex edge (12), and the distance between the inner plate surfaces of the two vertical groove edges (52) of the door plate (51) is consistent with the distance between the outer plate surfaces of the two vertical convex edges (12) of the door hole (11).

3. The wafer curing apparatus of claim 2, wherein: and a reinforcing rib (53) is arranged on one surface of the door panel (51) departing from the door hole (11).

4. The wafer curing apparatus of claim 2, wherein: the lifting mechanism (40) comprises a servo electric cylinder (41), the cylinder body part of the servo electric cylinder (41) is fixed in the machine body (10), a fixed block (42) is arranged on the upward top end of a push rod of the servo electric cylinder (41), and a bottom edge groove edge (52) of the door plate (51) is fixedly connected with the fixed block (42).

5. The wafer curing apparatus of claim 4, wherein: the bottom of both ends of fixed block (42) is the downwardly convex guide bar (43) that has stretched, servo electric cylinder (41) cylinder body upper end is provided with deflector (44), guide hole (45) have been seted up to deflector (44) corresponding guide bar (43) position department, guide bar (43) pass guide hole (45).

6. The wafer curing apparatus of claim 5, wherein: be provided with mounting bracket (46) on the cylinder body of servo electric cylinder (41), mounting bracket (46) fixed mounting is in organism (10).