CN218856283U

CN218856283U - Nanoscale machining device

Info

Publication number: CN218856283U
Application number: CN202222075688.2U
Authority: CN
Inventors: 江波; 陈国勇; 李思学
Original assignee: Shenzhen Zhizhun Multishaft Technology Co ltd
Current assignee: Shenzhen Zhizhun Multishaft Technology Co ltd
Priority date: 2022-08-05
Filing date: 2022-08-05
Publication date: 2023-04-14
Anticipated expiration: 2032-08-05

Abstract

The utility model relates to a nanometer processingequipment technical field especially relates to a nanometer processingequipment, it includes the base, and set up in the tool changing mechanism of base with the sword mechanism, the tool changing mechanism including trade knife rest, activity set up in trade many star type trades the blade disc of knife rest and be used for the drive many star type trades the blade disc and carries out the tool changing drive assembly of tool changing, many star type trades the blade disc and is used for fixed cutter, with the processing subassembly of sword mechanism including being used for installing the cutter and be used for the drive processing subassembly first drive assembly of subassembly motion. The utility model discloses with the tool changing mechanism with the integration of sword mechanism on a base, have higher integrated level, through the tool changing mechanism, can transport the cutter to changing with sword mechanism, then take off and change with the cutter in the sword mechanism, through changing the cutter, can change different processing methods, satisfy the processing demand, greatly improved machining efficiency.

Description

Nanoscale machining device

Technical Field

The utility model relates to a nanometer processingequipment technical field especially relates to a nanometer processingequipment.

Background

The processing of nanometer-scale precision and the processing of nanometer-scale surface layers, i.e., the removal, relocation, and recombination of atoms and molecules, are one of the main contents of nanotechnology. The nano-processing technology is responsible for supporting the important mission of the latest scientific and technological steps.

According to the processing mode, the nano-scale processing can be divided into four types, namely cutting processing, abrasive processing (including fixed abrasive and free abrasive), special processing and composite processing. Nanoscale processing can also be divided into traditional processing, non-traditional processing, and composite processing. The traditional processing refers to cutting processing of a cutter, inherent abrasive and free abrasive processing; non-traditional processing refers to processing and treating materials with various energies; the composite processing is a composite action of adopting various processing methods. The nano-scale processing technology can also be divided into various methods such as mechanical processing, chemical corrosion, energy beam processing, composite processing, tunnel scanning microscopy and the like. The machining methods include ultra-precision cutting of a single crystal diamond tool, ultra-precision grinding of a diamond grinding wheel and a CBN grinding wheel, machining of fixed abrasive tools such as mirror grinding, grinding and belt polishing, machining of free abrasives such as grinding and polishing, and the like, and the energy beam machining can perform processes such as removal, addition, surface modification and the like of a workpiece, for example, cutting, drilling and surface hardening modification treatment with laser. Electron beams are used for photolithography, welding, micro-and nano-drilling, machining, ion and plasma etching, etc. The processing method of the energy beam also comprises electric spark processing, electrochemical processing, electrolytic jet processing, molecular beam epitaxy and the like. STM processing is the latest technology and can perform atomic level operations and atom removal, addition, relocation, etc.

At present, different cutters are required to be replaced by different machining modes according to the requirements of replacing machining workpieces, therefore, a plurality of machining devices are required to be adopted in the machining process, different machining devices are required to be replaced according to the machining requirements, the machining process is very complicated, and the machining efficiency is greatly influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome prior art's is not enough, provides a nanometer processingequipment to in solving current nanometer processing mode, need adopt a plurality of processing equipment, and change different processing equipment according to the processing demand, the course of working is very loaded down with trivial details, has greatly influenced machining efficiency.

In order to solve the technical problem, the utility model discloses a following technical scheme:

the utility model provides a nanometer processingequipment, its includes the base, and set up in the tool changing mechanism of base and with sword mechanism, tool changing mechanism including trade knife rest, activity set up in trade the many star type trades the blade disc of knife rest and be used for driving many star type trades the blade disc and carries out the tool changing drive assembly of tool changing, many star type trades the blade disc and is used for fixed cutter, with sword mechanism including the processing subassembly that is used for installing the cutter and being used for driving the first drive assembly of processing subassembly motion.

Further, the cutter using mechanism comprises a cutter using frame arranged on the base, the first driving assembly comprises a first driving piece, a second driving piece and a third driving piece, the first driving piece is arranged on the cutter using frame, and the first driving piece is used for driving the processing assembly to move back and forth along the length direction of the cutter using frame; the second driving piece is arranged on the first driving piece and used for driving the machining assembly to move up and down along the vertical direction; the third driving piece is arranged on the second driving piece and used for driving the machining assembly to rotate around the vertical direction, and the machining assembly is arranged on the third driving piece.

Further, with the knife rest be provided with the sword subassembly, with the sword subassembly include the tool bit with set up in the setting element of tool bit, the setting element is used for fixing a position the processing position of tool.

Further, the tool rest is provided with at least two tool utilization assemblies, and each tool utilization assembly is provided with a group of first driving assemblies for driving.

Further, tool changing drive assembly includes X axle driving piece, Z axle driving piece and rotates the driving piece, X axle driving piece is used for driving many star types tool changing dish is followed the length direction round trip movement of tool changing frame, Z axle driving piece is used for driving many star types tool changing dish is followed the direction of height round trip movement of tool changing frame rotate the driving piece and be used for driving many star types tool changing dish is rotatory around its center.

The utility model has the advantages that: the utility model discloses with the tool changing mechanism with the integration of sword mechanism on a base, have higher integrated level, through the tool changing mechanism, can transport the cutter to changing with sword mechanism, then take off and change with the cutter in the sword mechanism, through changing the cutter, can change different processing methods, satisfy the processing demand, greatly improved machining efficiency.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without any creative effort.

FIG. 1 is a schematic perspective view of an embodiment of the present nanoscale processing apparatus;

FIG. 2 is a side view of a tool changing mechanism and a tool using mechanism of the present nano-scale processing apparatus;

FIG. 3 is a front view of a knife mechanism of the present nano-scale processing apparatus embodiment;

FIG. 4 is a front view of a tool changing mechanism of the present nano-scale machining apparatus embodiment;

FIG. 5 is an exploded view of a blade storage mechanism of an embodiment of the present nanofabrication apparatus;

fig. 6 is an enlarged schematic view of the garage door of fig. 5.

The labels in the figures illustrate: 100. a base; 200. a knife storage mechanism; 210. a tool magazine; 220. cutting the die; 230. a storage door; 231. a door panel; 232. a door opening drive assembly; 2321. a driving wheel; 2322. a driven wheel; 2323. a belt; 2324. a door opening drive; 2325. a synchronizing shaft; 240. a cutter storage driving member; 300. a tool changing mechanism; 310. replacing a tool rest; 320. a multi-position star-shaped cutter changing disc; 321. a knife taking device; 322. a transfer device; 330. a tool changing drive assembly; 331. an X-axis drive member; 332. a Z-axis drive member; 333. rotating the driving member; 400. a knife mechanism; 410. processing the assembly; 411. a cutter head; 412. a positioning member; 420. a first drive assembly; 421. a first driving member; 422. a second driving member; 423. a third driving member; 430. using a knife rest.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It is also to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be further understood that the term "and/or" as used in the specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.

Example one

Referring to fig. 1 and 2, a nano-scale processing apparatus includes a base 100, and a cutter storage mechanism 200, a cutter changing mechanism 300, and a cutter using mechanism 400 that are disposed on the base 100, wherein the cutter storage mechanism 200 is used for storing cutters of different models, the cutter changing mechanism 300 is disposed between the cutter storage mechanism 200 and the cutter using mechanism 400, and the cutter changing mechanism 300 is used for transporting the cutters stored in the cutter storage mechanism 200 to the cutter using mechanism 400 for replacement and transporting the replaced cutters to the cutter storage mechanism 200; the knife mechanism 400 includes a processing assembly 410 for mounting a knife and a first drive assembly 420 for driving the processing assembly 410 in motion. According to the invention, the cutter storage mechanism 200, the cutter changing mechanism 300 and the cutter using mechanism 400 are integrated on the base 100, so that the integration level is higher, the cutter storage mechanism 200 can be used for storing cutters of different models, the cutters stored by the cutter storage mechanism 200 can be transported to the cutter using mechanism 400 for replacement through the cutter changing mechanism 300, then the replaced cutters are transported to the cutter storage mechanism 200 for storage, different processing modes can be replaced through cutter replacement, the processing requirements are met, the processing efficiency is greatly improved, and the complex processing technological requirements of the existing 3C industry are met.

As shown in fig. 2 and 3, the knife using mechanism 400 includes a knife using holder 430 disposed on the base 100, the first driving assembly 420 includes a first driving member 421, a second driving member 422 and a third driving member 423, the first driving member 421 is disposed on the knife using holder 430, and the first driving member 421 is used for driving the processing assembly 410 to move back and forth along the length direction of the knife using holder 430; the second driving element 422 is disposed on the first driving element 421, and the second driving element 422 is used for driving the processing assembly 410 to move up and down along a vertical direction; the third driving member 423 is disposed on the second driving member 422, the third driving member 423 is used for driving the processing assembly 410 to rotate around a vertical direction, and the processing assembly 410 is disposed on the third driving member 423. In this embodiment, the tool holder 430 is a gantry, the first driving element 421 and the second driving element 422 may be a lead screw module, the first driving element 421 drives the tool assembly to move back and forth along the X axis, the second driving element 422 drives the tool assembly to move up and down along the Z axis, and the third driving element 423 may be a motor, and the processing assembly 410 is controlled by the first driving element 421, the second driving element 422, and the third driving element 423 to perform processing.

In this embodiment, the knife assembly includes a cutting head 411 and a positioning part 412 disposed on the cutting head 411, and the positioning part 412 is used for positioning a machining position of the knife. Specifically, the cutting head 411 may be magnetically attracted to fix the cutting tool by an electromagnet, and in other embodiments, the cutting head 411 may be a mechanical clamp. The positioning element 412 may be a laser positioning instrument, the laser positioning instrument is electrically connected to the first driving assembly 420, and during machining, a position coordinate to be machined on a workpiece is determined according to the laser positioning instrument, and then the position coordinate information is transmitted to the first driving assembly 420, and the first driving assembly 420 controls the tool bit 411 to move to a coordinate position for machining. In other embodiments, the positioning member 412 may be a visual camera. In this embodiment, the tool tip 411 may be implemented with various technical means to achieve nanometer scale machining accuracy requirements. For example, the nanometer linear grating ruler is combined with a linear motor, and is provided with a laser tool setting gauge capable of detecting the tool length and the tool diameter on line, an on-line detection probe and the like.

As shown in fig. 3, the tool holder 430 is provided with at least two tool assemblies, and each tool assembly is provided with a set of first driving assemblies 420 for driving. In this embodiment, four sets of tool assemblies are disposed on the tool holder 430, each set of tool assemblies can operate independently or synchronously, and can process four workpieces at the same time, thereby achieving 4 times of processing efficiency and greatly improving the processing speed of the workpieces.

As shown in fig. 2 and 4, the tool changing mechanism 300 comprises a tool changing frame 310, a multi-position star-shaped tool changing disc 320 movably arranged on the tool changing frame 310, and a tool changing driving assembly 330 for driving the multi-position star-shaped tool changing disc 320 to change tools; the multiposition star-shaped cutter disc 320 is provided with a cutter taking device 321 and a transfer device 322, the cutter changing driving component 330 is used for driving the cutter taking device 321 to move the cutters stored in the cutter storage mechanism 200 to the cutter using mechanism 400, and drives the transfer device 322 to take down the cutters in the cutter using mechanism 400, and to install the cutters in the cutter taking device 321 to the cutter using mechanism 400. The tool changing mechanism 300 is provided with a tool extractor 321 and a transfer device 322 on a multi-position star-shaped tool changer 320, wherein the tool extractor 321 is used for extracting the tool to be replaced, and the transfer device 322 is used for transferring the tool replaced from the tool changing mechanism 400. Compare and adopt specific instrument to take off the working knife in general manual work, change reserve cutter again, this tool changing mechanism 300's tool changing efficiency is higher, and degree of automation is higher.

As shown in fig. 4, the tool changing driving assembly 330 includes an X-axis driving member 331, a Z-axis driving member 332 and a rotary driving member 333, the X-axis driving member 331 is used for driving the multi-position star-shaped tool changing disc 320 to move back and forth along the length direction of the tool changing frame 310, the Z-axis driving member 332 is used for driving the multi-position star-shaped tool changing disc 320 to move back and forth along the height direction of the tool changing frame 310, and the rotary driving member 333 is used for driving the multi-position star-shaped tool changing disc 320 to rotate around the center thereof. Specifically, the tool changer 310 may be a gantry, and the tool changer 310 is disposed on the base 100 and parallel to the tool holder 430. The X-axis driver 331 may be a lead screw module, the Z-axis driver 332 may be a lead screw module, and the rotary driver may be a motor. Through the tool changing driving assembly 330, the tool taking device 321 and the transfer device 322 can be controlled to be close to the tool bit 411, the transfer device 322 is controlled to take off the tool on the head, and then the tool taking device 321 is controlled to mount a new tool.

As shown in fig. 4, the knife extractors 321 and the repeaters 322 are circumferentially distributed on the multi-position star-shaped turret disc 320, and the knife extractors 321 and the repeaters 322 are symmetrically arranged at the center of the multi-position star-shaped turret disc 320. Specifically, the arrangement can leave sufficient space for the cutters, and meanwhile, the gravity center and the center of the multi-position star-shaped cutter changing disc 320 are overlapped, so that the stability is higher.

Specifically, the multi-position star-type cutter changing disc 320 is provided with at least two cutter taking devices 321 and at least two transfer devices 322, and the cutter taking devices 321 and the transfer devices 322 are arranged in a one-to-one correspondence manner. In this embodiment, four knife taking devices 321 and four transfer devices 322 are respectively provided, and once knife taking can be used for changing knives for four knife heads 411, so that the times of knife taking are reduced, and the knife changing efficiency is improved.

More specifically, a plurality of get sword ware 321 and transfer 322 and evenly set up around multiposition star type cutter changing disc 320 circumference, can reserve sufficient space for the cutter, avoid adjacent getting the cutter on sword ware 321 or the transfer 322 to collide with.

In this embodiment, the multi-position star-shaped cutter disc 320 is divided into a cutter taking area and a transition area (no mark in the figure), the cutter taking area is provided with at least two cutter taking devices 321, the transition area is provided with at least two transition devices 322, and the cutter taking devices 321 and the transition devices 322 are arranged in a one-to-one correspondence manner. Specifically, be provided with four respectively and get sword ware 321 and four transfer ware 322, when many swords were got from storing up sword mechanism 200 to multiposition star type cutter changing disc 320, only need rotate multiposition star type cutter changing disc 320 less angle at every turn, just can get the sword, once get the sword and can carry out the tool changing for four tool bits 411, reduce the number of times of getting the sword, improved the efficiency of tool changing.

As shown in fig. 4, the tool extractor 321 and the transfer device 322 include a vacuum chuck, an air cylinder, an electromagnetic absorption member, or a mechanical clamp. In this embodiment, the cutter taking device 321 and the transfer device 322 may be electromagnetic adsorbing devices, and the electromagnetic adsorbing devices utilize the principle of electromagnets, so that the cutters are very conveniently adsorbed.

As shown in fig. 5 and 6, the tool storage mechanism 200 includes a tool magazine 210 and a tool die 220, the tool magazine 210 is disposed on the base 100 and located on a side of the tool changer 310 away from the tool changer 430, and a magazine door 230 for opening or closing the tool magazine 210 is disposed on a side of the tool magazine 210 close to the tool changer 310; the cutting die 220 is slidably disposed in the tool magazine 210, the cutting die 220 is provided with a tool slot for accommodating a tool, and the tool magazine 210 is provided with a tool storage driving member 240 for driving the cutting die 220 to approach or be away from the tool changing frame 310. In this embodiment, the cutting die 220 is used for placing various types of tools, the cutting die 220 is placed in the tool magazine 210, the tools are not easily polluted and damaged, and the cutting die 220 is moved below the tool changing frame 310 through the tool storage driving member 240 during use, so that the tool changing mechanism 300 can conveniently change tools.

In this embodiment, the knife storage driving member 240 may be a screw module, and the screw module moves along the Y axis. Specifically, four sets of cutting dies 220 are provided, each set of cutting die 220 is connected to one storage driving member 240, the four sets of storage driving members 240 are arranged in parallel, and the storage driving members 240 and the cutting assemblies are arranged in one-to-one correspondence.

As shown in fig. 5 and 6, the magazine door 230 includes a door plate 231 movably disposed on the tool magazine 210, and a door opening driving assembly 232 for driving the door plate 231 to open or close the tool magazine 210. Specifically, door plant 231 vertical sliding sets up in tool magazine 210, drive assembly 232 opens the door includes action wheel 2321, driven wheel 2322, the cover establishes belt 2323 between action wheel 2321 and driven wheel 2322 and is used for the drive action wheel 2321 pivoted drive piece 2324 that opens the door, action wheel 2321 with driven wheel 2322 rotates respectively and bears on the tool magazine 210, door plant 231 with belt 2323 fixed connection. The door opening drive 2324 may be a motor.

In this embodiment, two driving wheels 2321, a driven wheel 2322 and a belt 2323 are respectively disposed on two sides of the door panel 231, and a synchronizing shaft 2325 is connected between the two driving wheels 2321. The door plate 231 is driven by two groups of belts 2323, the door plate 231 is opened and closed more stably, and meanwhile, the two driving wheels 2321 are connected through a synchronizing shaft 2325, so that only one door opening driving member 2324 is required to drive the two belts 2323 to rotate simultaneously.

In this embodiment, can adjust the size and the quantity of cutting die 220 as required, through the volume that increases tool magazine 210, increase the quantity of cutting die to improve the quantity that holds the cutter, place the cutter of different models, satisfy the complicated processing technology requirement of current 3C trade.

Further, in order to improve the processing efficiency, the tool magazine 210 may prepare a required tool in advance according to a requirement of a system processing program, and move the cutting die 220, which is a special tool to be used, out of the door plate 231 in advance according to a preset program, thereby reducing the time for preparing the tool, improving the tool changing efficiency, and further improving the processing efficiency.

In summary, the tool storage mechanism 200, the tool changing mechanism 300 and the tool using mechanism 400 are integrated on the base 100, so that the tool storage mechanism 200 has a high integration level, tools of different types can be stored in the tool storage mechanism 200, the tools stored in the tool storage mechanism 200 can be transported to the tool using mechanism 400 for replacement through the tool changing mechanism 300, the replaced tools can be transported to the tool storage mechanism 200 for storage, different machining modes can be replaced through tool replacement, machining requirements are met, and machining efficiency is greatly improved.

Example two

The embodiment relates to a nanoscale machining device which is mainly applied to chip machining. The nanoscale machining device comprises a base 100, a cutter storage mechanism 200, a cutter changing mechanism 300 and a cutter using mechanism 400, wherein the cutter storage mechanism 200, the cutter changing mechanism 300 and the cutter using mechanism 400 are arranged on the base 100, the cutter storage mechanism 200 is used for storing cutters of different types, the cutter changing mechanism 300 is arranged between the cutter storage mechanism 200 and the cutter using mechanism 400, the cutter changing mechanism 300 is used for transporting the cutters stored by the cutter storage mechanism 200 to the cutter using mechanism 400 for replacement, and transporting the replaced cutters to the cutter storage mechanism 200; the knife mechanism 400 includes a processing assembly 410 for mounting a knife and a first driving assembly 420 for driving the processing assembly 410 to move. According to the invention, the cutter storage mechanism 200, the cutter changing mechanism 300 and the cutter using mechanism 400 are integrated on the base 100, so that the integration level is higher, the cutter storage mechanism 200 can be used for storing cutters of different models, the cutters stored by the cutter storage mechanism 200 can be transported to the cutter using mechanism 400 for replacement through the cutter changing mechanism 300, then the replaced cutters are transported to the cutter storage mechanism 200 for storage, different processing modes can be replaced through cutter replacement, the processing requirements are met, and the processing efficiency is greatly improved.

The difference between the first embodiment and the second embodiment is that the plurality of knife extractors 321 and the plurality of transfer devices 322 are circumferentially arranged around the multi-position star-shaped cutter disc 320 at intervals, the knife extractors 321 and the transfer devices 322 are arranged in a one-to-one correspondence manner, and through the arrangement, when the cutter head 411 is subjected to tool changing, only a small angle is required to be rotated for the multi-position star-shaped cutter disc 320 at each time. The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or substitutions within the technical scope of the present invention, and these modifications or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. The utility model provides a nanometer processingequipment, its characterized in that, including the base, and set up in the tool changing mechanism of base with sword mechanism, tool changing mechanism including trade knife rest, activity set up in trade the many star type trades blade disc of knife rest and be used for driving many star type trades blade disc carries out the tool changing drive assembly of tool changing, many star type trades blade disc is used for stationary cutter, with sword mechanism including the processing subassembly that is used for installing the cutter and being used for the drive the first drive assembly of processing subassembly motion.

2. The nano-scale processing apparatus according to claim 1, wherein the tool using mechanism includes a tool using holder disposed on the base, the first driving assembly includes a first driving member, a second driving member and a third driving member, the first driving member is disposed on the tool using holder, and the first driving member is configured to drive the processing assembly to move back and forth along a length direction of the tool using holder; the second driving piece is arranged on the first driving piece and used for driving the machining assembly to move up and down along the vertical direction; the third driving piece is arranged on the second driving piece and used for driving the machining assembly to rotate around the vertical direction, and the machining assembly is arranged on the third driving piece.

3. The nano-scale machining device according to claim 2, wherein the tool holder is provided with a tool assembly, the tool assembly includes a tool bit and a positioning member provided on the tool bit, and the positioning member is used for positioning a machining position of the tool.

4. The nano-scale processing apparatus according to claim 3, wherein the tool carriage is provided with at least two of the tool-using assemblies, each of which is provided with a set of first driving assemblies for driving.

5. The nanoscale machining device according to claim 4, wherein the tool changing driving assembly comprises an X-axis driving piece, a Z-axis driving piece and a rotating driving piece, the X-axis driving piece is used for driving the multi-position star-shaped tool changing disc to move back and forth along the length direction of the tool changing frame, the Z-axis driving piece is used for driving the multi-position star-shaped tool changing disc to move back and forth along the height direction of the tool changing frame, and the rotating driving piece is used for driving the multi-position star-shaped tool changing disc to rotate around the center of the multi-position star-shaped tool changing disc.