CN218849459U

CN218849459U - Four-side clamping mechanism for silicon wafer

Info

Publication number: CN218849459U
Application number: CN202320023817.5U
Authority: CN
Inventors: 董晓清; 王献飞; 周煜杰; 陆文轩; 朱前亮; 周新; 黎魏; 王沿斌
Original assignee: Wuxi Jiangsong Technology Co ltd
Current assignee: Wuxi Jiangsong Technology Co ltd
Priority date: 2023-01-05
Filing date: 2023-01-05
Publication date: 2023-04-11
Anticipated expiration: 2033-01-05

Abstract

The utility model relates to a silicon chip production technical field, concretely relates to silicon chip four sides fixture. The clamping device comprises a base and a clamping groove, wherein the clamping groove is arranged on the base; the upright columns are arranged on the base and positioned at the outer sides of the four corners of the clamping groove; the clamping rods are arranged at the outer sides of four sides of the clamping groove; the middle part of the connecting rod is movably arranged on the upright post, and two ends of the connecting rod are hinged with the clamping rods on two sides; the air cylinder is arranged on the base and used for driving one of the clamping rods; the moving block is arranged on the bottom surface of the clamping rod, and a clamping jaw is arranged at one end, close to the clamping groove, of the moving block. The clamping rods are arranged on four sides of the clamping groove, the clamping rods are connected through the connecting rod, one clamping rod is driven to move through one cylinder, and all the clamping rods are driven to move simultaneously. And then the silicon wafer can be clamped by using one air cylinder. Greatly reducing the cost of use.

Description

Four-side clamping mechanism for silicon wafer

Technical Field

The utility model relates to a silicon chip production technical field, concretely relates to silicon chip four sides fixture.

Background

Silicon wafers are important materials for manufacturing integrated circuits, and various semiconductor devices can be manufactured by means of photolithography, ion implantation and the like on the silicon wafers. At the same time, the chip made of silicon chip has remarkable calculation capability. So that the silicon chip is widely applied to the fields of aerospace, industry, agriculture, national defense and the like.

In the production of silicon wafers, the silicon wafers are generally placed on a conveyor belt for conveying, and therefore, in the production process, the work of clamping the silicon wafers is generally required. Current centre gripping mode sets up four cylinders at the four sides of silicon chip usually, carries out the centre gripping through cylinder drive clamping jaw to the four sides of silicon chip, and the mode of this centre gripping need use four cylinders, can cause the inconvenience of installation and the promotion of cost.

The above problems are problems that the art needs to solve.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a silicon chip four sides clamp holds machine to can use a cylinder, realize the centre gripping work to the silicon chip four sides.

In order to solve the technical problem, the utility model provides a scheme is: a four-side clamping mechanism for a silicon wafer comprises a base and a clamping groove, wherein the clamping groove is arranged on the base; the stand columns are arranged on the base and are positioned at the outer sides of four corners of the clamping groove;

the clamping rods are arranged at the outer sides of the four sides of the clamping groove; the middle part of the connecting rod is movably arranged on the upright post, and two ends of the connecting rod are hinged with the clamping rods on two sides; the cylinder is arranged on the base and used for driving one of the clamping rods;

the moving block is arranged on the bottom surface of the clamping rod, and a clamping jaw is arranged at one end, close to the clamping groove, of the moving block.

As a further improvement of the utility model, be located on the base the below of movable block is provided with the mounting groove, the inside track that is provided with of mounting groove, the movable block is in remove on the track. The clamping rod clamping device has the advantages that the clamping rod clamping device can provide a guiding effect for the moving block, so that the moving block can move more stably, meanwhile, the moving block can also play a supporting effect, and the whole distortion of the clamping rod is avoided.

As a further improvement of the present invention, the cylinder is inclined and arranged on the base, and the piston rod of the cylinder is hinged to the clamping rod. Compared with the piston rod which is vertically connected with the clamping rod, the inclined arrangement enables the cylinder to be driven more laborsavingly. And the piston rod is hinged with the clamping rod, so that the driving mode is smoother.

As a further improvement of the present invention, the holding rod is provided with a position sensor above the hinge point of the connecting rod. When the silicon wafer is not clamped, the hinge point is positioned right below the position sensor. When the silicon chip is clamped, the hinge point moves out of the position sensor from the position right below, and then the silicon chip can be clamped by the position sensor and judged.

As a further improvement, the two ends of the clamping jaw are provided with a limiting block. The upper end and the lower end of the silicon wafer can be limited to a certain extent through the action of the limiting blocks, and the effect of clamping the silicon wafer is improved.

The utility model has the advantages that:

the utility model discloses rational in infrastructure, simple, the simple operation sets up the supporting rod at the four sides in centre gripping groove, couples together the supporting rod through the connecting rod, and one of them holding rod of cylinder drive removes at last, finally drives all supporting rods and removes simultaneously. And then the silicon wafer can be clamped by using one air cylinder. Greatly reducing the cost of use.

Drawings

FIG. 1 is a schematic view of the present invention;

fig. 2 is an enlarged schematic view of a portion a in fig. 1.

Reference numerals are as follows: 1. a base; 2. a clamping groove; 3. a column; 4. a clamping rod; 5. a connecting rod; 6. a moving block; 7. a clamping jaw; 8. a track; 9. a position sensor; 10. the limiting is fast; 11. and a cylinder.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not limited to the present invention.

Referring to fig. 1 and 2, for an embodiment of the present invention, two clamping grooves 2 are provided on the base 1, a stand column 3 is installed outside each of the four corners of each clamping groove 2, and the middle part of the bending connecting rod 5 is movably installed on the stand column 3, so that the connecting rod 5 can rotate. And then the clamping rods 4 are arranged on the outer sides of the four sides of the clamping groove 2, the two ends of each clamping rod 4 are hinged with the connecting rods 5, and finally all the clamping rods 4 are connected through the connecting rods 5. Then, an air cylinder 11 is installed on the base 1, and a piston rod of the air cylinder 11 is hinged with any one of the clamping rods 4.

A moving block 6 is arranged on the bottom surface of the clamping rod 4, and a clamping jaw 7 is arranged at one end of the moving block 6 close to the clamping groove 2.

As shown in fig. 2, a mounting groove is provided in the base 1 below the moving block 6, a track 8 perpendicular to the clamping rod 4 is provided in the mounting groove, and the moving block 6 moves on the track 8.

As shown in fig. 1, the cylinder 11 is obliquely arranged on the base 1, and a piston rod of the cylinder 11 is hinged with the clamping rod 4.

As shown in fig. 1, a position sensor 9 is disposed above a hinge point of the clamping rod 4 and the connecting rod 5.

As shown in fig. 1, the upper and lower ends of the clamping jaw 7 are provided with limit blocks 10.

In actual operation, a component to be clamped, such as a silicon wafer, is placed in the clamping groove 2, and then the piston rod of the air cylinder 11 extends outwards, so that the clamping rod 4 hinged with the clamping rod moves towards one side of the silicon wafer along the rail 8. When the clamping rods 4 move inwards, one end of the left connecting rod 5 hinged with the clamping rods 4 also deflects inwards, and the connecting rod 5 is bent and movably connected to the upright post 3 at the middle part, so that the other end of the connecting rod 5 moves towards the other surface of the silicon wafer, and the left clamping rods 4 can be driven to move towards one surface of the silicon wafer. Similarly, the other two clamping rods 4 can also move towards one side of the silicon wafer, so that the clamping operation of the clamping jaws 7 on the four sides of the silicon wafer is finally realized. When the silicon wafer needs to be clamped, the piston rod of the air cylinder 11 only needs to be retracted inwards. Therefore, the clamping work of the four sides of the silicon wafer can be realized through one air cylinder 11, and the difficulty and the cost of installation are greatly reduced.

It will be understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.

As the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like appear, the indicated orientation or positional relationship is based on the orientation or positional relationship as shown in the figures, merely for convenience in describing the invention and to simplify the description, and is not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.

The appearances of the terms first, second, and third, if any, are used for descriptive purposes only and are not intended to be limiting or imply relative importance.

Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structural changes made by the contents of the specification and the drawings, or the direct or indirect application in other related technical fields, are included in the same way in the protection scope of the present invention.

Claims

1. The four-side clamping mechanism for the silicon wafer is characterized by comprising a base (1) and a clamping groove (2), wherein the clamping groove (2) is arranged on the base (1); the upright posts (3) are arranged on the base (1) and are positioned at the outer sides of four corners of the clamping groove (2);

the clamping rods (4) are arranged at the outer sides of four sides of the clamping groove (2); the middle part of the connecting rod (5) is movably arranged on the upright post (3), and the two ends of the connecting rod are hinged with the clamping rods (4) at the two sides; the air cylinder (11) is arranged on the base (1) and used for driving one of the clamping rods (4);

the moving block (6) is arranged on the bottom surface of the clamping rod (4), and a clamping jaw (7) is arranged at one end, close to the clamping groove (2), of the moving block (6).

2. The four-side clamping mechanism for the silicon wafer as claimed in claim 1, wherein a mounting groove is arranged on the base (1) and below the moving block (6), a track (8) is arranged in the mounting groove, and the moving block (6) moves on the track (8).

3. The silicon wafer four-side clamping mechanism as claimed in claim 1, wherein the air cylinder (11) is obliquely arranged on the base (1), and a piston rod of the air cylinder (11) is hinged with the clamping rod (4).

4. The silicon wafer four-side clamping mechanism as claimed in claim 1, characterized in that a position sensor (9) is arranged above the hinge point of the clamping rod (4) and the connecting rod (5).

5. A four-side clamping mechanism for silicon wafers as claimed in claim 1, wherein the clamping jaws (7) are provided at both ends with stop dogs (10).