CN218837196U - Polishing equipment for processing polycrystalline silicon material - Google Patents

Abstract

The utility model discloses a polycrystalline silicon material processing is with equipment of polishing, the top of bottom plate is equipped with elevating system, the connecting plate is installed at elevating system's top, servo motor is installed to the top inner wall of bearing box, servo motor's output is connected with the rotation rack, the top of rotating the rack rotates the bottom of connecting at the connecting plate, sliding connection has the carriage release lever on the elevating system, the lateral wall of carriage release lever is equipped with and rotates rack and gear engaged with tooth's socket. The utility model discloses install elevating system's setting, make the slider with lead screw threaded connection reciprocate at the spacing inslot, the spacing groove carries on spacingly to sliding, does not take place the displacement in making its lift, and the slider goes up and down to make and spout sliding connection's carriage release lever go up and down to automatic adjustment polishes about making the emery wheel, can adjust suitable height according to the polycrystalline silicon material of co-altitude through elevating system and polish.

Description

Polishing equipment for processing polycrystalline silicon material

Technical Field

The utility model relates to a polishing equipment technical field specifically is a polycrystalline silicon material processing is with equipment of polishing.

Background

Polycrystalline silicon can be used as a raw material for pulling single crystal silicon, and the difference between polycrystalline silicon and single crystal silicon is mainly expressed in the aspect of physical properties. For example, anisotropy in mechanical, optical and thermal properties is far less pronounced than that of single crystal silicon; polysilicon crystals are also far less conductive than single crystal silicon, in terms of electrical properties, to the extent that they are almost non-conductive. The difference between the two is extremely small in chemical activity. Polycrystalline silicon and monocrystalline silicon can be distinguished from each other in appearance, but the crystal face direction, the conductivity type, the resistivity and the like of the crystal are determined through analysis in real identification, and the surface of a silicon material is usually polished in the polycrystalline silicon processing industry.

Generally polish to polycrystalline silicon processing and adopt artifical manual mode of polishing, artifical not enough even in hand leads to the stone of polishing to appear inclining easily, causes polycrystalline silicon polishing not smooth enough, influences subsequent processing and uses, and artifical polishing speed is slow, and is inefficient, can't satisfy the large-scale processing of enterprise, influences the production of enterprise.

Therefore, the utility model relates to a polycrystalline silicon material processing is with equipment of polishing in order to solve the problem that exists among the prior art.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a polycrystalline silicon material processing is with equipment of polishing to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a polycrystalline silicon material processing is with equipment of polishing, one side top of bottom plate is equipped with the operation panel, the top of operation panel is equipped with the standing groove, the opposite side top of bottom plate is equipped with the bearing case, the top of bottom plate is equipped with elevating system, the connecting plate is installed at elevating system's top, servo motor is installed to the top inner wall of bearing case, servo motor's output is connected with the rotation rack, the top of rotating the rack is rotated and is connected the bottom at the connecting plate, sliding connection has the carriage release lever on the elevating system, the lateral wall of carriage release lever is equipped with and rotates rack gear engaged with's tooth's socket, the connection storehouse is installed to carriage release lever opposite side lateral wall, install driving motor in the connection storehouse, driving motor's output is connected with the pivot of through connection storehouse bottom, the below of pivot is connected with the emery wheel.

Preferably, an air pressure rod is installed on the side wall of one side of the placing groove, and the output end of the air pressure rod is connected with a pressing plate.

Preferably, elevating system includes elevator motor, be connected with the driving gear after elevator motor's output runs through the lateral wall of bearing box, the top of bearing box is run through there is the lead screw, the output of lead screw is connected with the driven gear who meshes with the driving gear wheel mutually, the outside of lead screw is equipped with the spacing groove, the top at the bearing box is installed to the spacing groove, the lateral wall of lead screw has the slider with spacing groove sliding connection through threaded connection, the spout is installed to the lateral wall of slider.

Preferably, the top of the screw rod is provided with a limiting block.

Preferably, a limiting clamping block is arranged below the outer side wall of the screw rod, and a limiting clamping groove connected with the limiting clamping block in a rotating mode is arranged in the limiting groove.

Preferably, a limiting plate matched with the rotating rack is installed on one side of the moving rod.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a lifting mechanism's setting, elevator motor drives driving gear positive and negative rotation to make the driven gear with driving gear meshing rotate, and then drive the lead screw and rotate, make the slider with lead screw threaded connection reciprocate in the spacing groove, the spacing groove is spacing to sliding, do not take place the displacement in making its lift, the slider goes up and down makes the spout go up and down, thereby make the carriage release lever with spout sliding connection go up and down, and then make the emery wheel automatically regulated from top to bottom polish, can adjust suitable height according to the polycrystalline silicon material of different heights through elevating system and polish, the practicality of polishing has been increased;

2. the utility model discloses a servo motor drives and rotates rack clockwise and anticlockwise rotation, and the running gear removes through the tooth's socket drive carriage release lever and removes and polish, has enlarged the scope of polishing like this, can polish according to the position about the size adjustment of difference, compares the manual work and polishes, has improved the efficiency of polishing, and the also more steady of polishing avoids causing the impaired of polycrystalline silicon material, has reduced the waste.

Drawings

FIG. 1 is a schematic sectional view of the front view of the present invention;

FIG. 2 is a schematic top view of the travel bar of the present invention;

fig. 3 is an enlarged schematic view of a structure in fig. 1 according to the present invention.

In the figure: 1. a base plate; 2. an operation table; 3. a placement groove; 4. a pneumatic rod; 5. pressing a plate; 6. a bearing box; 7. a lifting mechanism; 8. a connecting plate; 9. a servo motor; 10. rotating the rack; 11. a travel bar; 12. a tooth socket; 13. a limiting plate; 14. a connecting bin; 15. a drive motor; 16. a rotating shaft; 17. a grinding wheel; 701. a lifting motor; 702. a driving gear; 703. a screw rod; 704. a driven gear; 705. a limiting groove; 706. a slider; 707. a limiting block; 708. a chute; 709. a limiting clamping block; 710. limiting clamping grooves.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides an embodiment: the utility model provides a polycrystalline silicon material processing is with equipment of polishing, one side top of bottom plate 1 is equipped with operation panel 2, the top of operation panel 2 is equipped with standing groove 3, the opposite side top of bottom plate 1 is equipped with bearing box 6, the top of bottom plate 1 is equipped with elevating system 7, connecting plate 8 is installed at the top of elevating system 7, servo motor 9 is installed to the top inner wall of bearing box 6, servo motor 9's output is connected with rotation rack 10, the top of rotation rack 10 is rotated and is connected in the bottom of connecting plate 8, sliding connection has carriage release lever 11 on elevating system 7, the lateral wall of carriage release lever 11 is equipped with the tooth's socket 12 with rotation rack 10 gear engaged with, connecting bin 14 is installed to carriage release lever 11 opposite side lateral wall, install driving motor 15 in connecting bin 14, driving motor 15's output is connected with the pivot 16 that runs through connecting bin 14 bottoms, the below of pivot 16 is connected with emery wheel 17, servo motor drives rotation rack and just reverse rotation, thereby make and move about in the spout through the tooth's socket engaged with the carriage release lever with the rotation rack, just so can adjust the position of polishing according to the width of polycrystalline silicon material, the efficiency of polishing has been improved.

In this implementation: pneumatic rod 4 is installed to one side lateral wall of standing groove 3, and the output of pneumatic rod 4 is connected with clamp plate 5, and pneumatic rod promotes the clamp plate and fixes the polycrystalline silicon material in the standing groove, increases the stability of polishing.

In this implementation: the lifting mechanism 7 comprises a lifting motor 701, an output end of the lifting motor 701 penetrates through a side wall of the bearing box 6 and is connected with a driving gear 702, a lead screw 703 penetrates through the top of the bearing box 6, an output end of the lead screw 703 is connected with a driven gear 704 meshed with a gear of the driving gear 702, a limiting groove 705 is arranged on the outer side of the lead screw 703 and is installed above the bearing box 6, the outer side wall of the lead screw 703 is connected with a sliding block 706 in sliding connection with the limiting groove 705 through threads, a sliding groove 708 is installed on the outer side wall of the sliding block 706, the lifting motor positively and reversely rotates to drive the driving gear to rotate, so that the lead screw rotates and drives to slide to move up and down, the limiting groove limits the sliding block, and the moving rod in the sliding groove moves up and down through moving up and down, therefore, a grinding wheel on the moving rod can adjust the grinding height according to the height of the polycrystalline silicon material, and the practicability of the grinding equipment is improved.

In this implementation: and a limiting block 707 is installed at the top of the screw rod 703, and the limiting block limits the sliding block to prevent the sliding block from separating from the screw rod.

In this implementation: a limiting clamping block 709 is arranged below the outer side wall of the screw rod 703, a limiting clamping groove 710 which is rotatably connected with the limiting clamping block 709 is arranged in the limiting groove 705, and the limiting clamping block rotates in the limiting clamping groove, so that the screw rod rotates more stably, and the offset cannot occur.

In this implementation: a limiting plate 13 matched with the rotating rack 10 is installed on one side of the moving rod 11, the limiting plate limits the moving rod, and the moving rod is prevented from being separated from the rotating rack and cannot move left and right.

The working principle is as follows: the pneumatic rod 4 pushes the pressing plate 5 to fix the polysilicon material in the placing groove 3, the servo motor 9 drives the rotating rack 10 to rotate forward and backward, the moving rod 11 moves left and right to drive the grinding wheel 17 to grind, the lifting motor 701 drives the driving gear 702 to rotate forward and backward, the driving gear 702 drives the driven gear 704 meshed with the driving gear to rotate, the driven gear 704 drives the screw rod 703 to rotate, the sliding block 706 in threaded connection with the screw rod 703 slides up and down in the limiting groove 705, the sliding groove 708 mounted on the outer side wall of the sliding block 706 is driven to move up and down, the moving rod 11 in sliding connection with the sliding groove 708 moves up and down, and the grinding height of the grinding wheel 17 is adjusted.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims (6)

1. A grinding device for processing polycrystalline silicon materials comprises: bottom plate (1), its characterized in that: the utility model discloses a grinding machine, including bottom plate (1), one side top of bottom plate (1) is equipped with operation panel (2), the top of operation panel (2) is equipped with standing groove (3), the opposite side top of bottom plate (1) is equipped with bearing box (6), the top of bottom plate (1) is equipped with elevating system (7), connecting plate (8) are installed at the top of elevating system (7), servo motor (9) are installed to the top inner wall of bearing box (6), the output of servo motor (9) is connected with rotation rack (10), the top of rotating rack (10) is rotated and is connected in the bottom of connecting plate (8), sliding connection has carriage release lever (11) on elevating system (7), the lateral wall of carriage release lever (11) is equipped with tooth's socket (12) with rotation rack (10) gear engaged with, connect storehouse (14) are installed to carriage release lever (11) opposite side lateral wall, install driving motor (15) in connecting storehouse (14), the output of driving motor (15) is connected with pivot (16) that runs through and connect storehouse (14) bottom, the below of pivot (16) is connected with emery wheel (17).

2. The polishing device for processing the polysilicon material as set forth in claim 1, wherein: an air pressure rod (4) is installed on the side wall of one side of the placing groove (3), and the output end of the air pressure rod (4) is connected with a pressing plate (5).

3. The polishing device for processing the polysilicon material as set forth in claim 1, wherein: elevating system (7) are including elevator motor (701), be connected with driving gear (702) after the output of elevator motor (701) runs through the lateral wall of bearing case (6), lead screw (703) have been run through at the top of bearing case (6), the output of lead screw (703) is connected with driven gear (704) with driving gear (702) gear engaged with, the outside of lead screw (703) is equipped with spacing groove (705), the top at bearing case (6) is installed in spacing groove (705), the lateral wall of lead screw (703) has slider (706) with spacing groove (705) sliding connection through threaded connection, spout (708) are installed to the lateral wall of slider (706).

4. The polishing device for processing the polysilicon material as set forth in claim 3, wherein: and a limiting block (707) is arranged at the top of the screw rod (703).

5. The polishing device for processing polysilicon material according to claim 3, wherein: a limiting clamping block (709) is arranged below the outer side wall of the screw rod (703), and a limiting clamping groove (710) rotatably connected with the limiting clamping block (709) is arranged in the limiting groove (705).

6. The polishing device for processing the polysilicon material as set forth in claim 1, wherein: and a limiting plate (13) matched with the rotating rack (10) is arranged on one side of the moving rod (11).

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