CN218829873U - 4M and 13.56M double-frequency power supply isolator - Google Patents
4M and 13.56M double-frequency power supply isolator Download PDFInfo
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- CN218829873U CN218829873U CN202222645715.5U CN202222645715U CN218829873U CN 218829873 U CN218829873 U CN 218829873U CN 202222645715 U CN202222645715 U CN 202222645715U CN 218829873 U CN218829873 U CN 218829873U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
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Abstract
The utility model relates to a radio frequency power supply technical field especially relates to a 4M and 13.56M dual-frenquency power supply isolator, including 4M radio frequency power supply, 4M matcher, load coil, 13.56M matcher, high pass filter, 13.56M radio frequency power supply, 4M radio frequency power supply's output is connected on the input of 4M matcher, the output of 4M matcher is connected on load coil's the input, load coil's input still is connected with 13.56M matcher, the input of 13.56M matcher is connected on high pass filter's the output. A high-pass filter is connected in series between a 13.56MHz radio frequency power supply and a 13.56M matcher, and the input/output impedance characteristic of the high-pass filter is 50 ohms, so that 13.56M signals can pass through as losslessly as possible, 4M radio frequency power supply signals coupled from a load end are cut off at the same time, a good isolation effect on the 4M and 13.56M radio frequency power supplies is achieved, and 2 power sources with different frequencies can normally and stably operate.
Description
Technical Field
The utility model relates to a radio frequency power supply technical field especially relates to a 4M and 13.56M dual-frenquency power isolator.
Background
With the development of the material industry, the requirement of novel materials on radio frequency power supplies is increasingly greater and higher. The novel material of the tip needs radio frequency power supplies with various frequencies to be loaded to a load end, and the material is processed by different plasmas generated by different frequencies.
The following technical problems exist in the production and experimental processes when the current radio frequency power supplies with various frequencies are loaded to the same load:
(1) When one of the radio frequency power supplies works normally, the other radio frequency power supplies can display power even if not started, and even a standing wave alarm phenomenon occurs.
(2) The radio frequency power supplies with different frequencies interfere with each other, and the power output is abnormal, so that the radio frequency power supplies cannot work normally.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a 4M and 13.56M dual-frequency power supply isolator.
In order to realize the purpose, the utility model adopts the following technical scheme:
A4M and 13.56M dual-frequency power supply isolator comprises a 4M radio frequency power supply, a 4M matcher, a load coil, a 13.56M matcher, a high-pass filter and a 13.56M radio frequency power supply, wherein the output end of the 4M radio frequency power supply is connected to the input end of the 4M matcher, the output end of the 4M matcher is connected to the input end of the load coil, the input end of the load coil is further connected with the 13.56M matcher, the input end of the 13.56M matcher is connected to the output end of the high-pass filter, and the input end of the high-pass filter is connected to the output end of the 13.56M radio frequency power supply.
The output end of the 13.56M matcher is connected to a radio frequency signal input interface RF IN of the high-pass filter, the radio frequency signal input interface is connected to a capacitor C1, the output end of the capacitor C1 is connected to an inductor L2, the radio frequency signal input interface is further connected to an inductor L1, the inductor L2 and the capacitor C1 form a series circuit, one end of the series circuit is connected to a capacitor C2, the other end of the series circuit is connected to an inductor L3, the capacitor C2, the inductor L3 and the series circuit form a parallel circuit, one end of the parallel circuit is connected to a radio frequency signal output interface RF OUT of the high-pass filter, the other end of the parallel circuit is connected to a ground terminal GND, and IN addition, the radio frequency signal output interface RF OUT is further connected to the input end of the 13.56M matcher. Through the dual-frequency power supply isolator formed by 13.56MHz and 4MHz, the power sources of 13.56MHz and 4MHz 2 different frequency signals do not interfere with each other when glow discharge is carried out on the same chamber and the same load, so that the power sources of 2 different frequencies can work normally and stably.
Preferably, the capacitance of the capacitor C1 and the capacitance of the capacitor C2 are 290 picofarads. Through the arranged capacitors C1 and C2, the signal output can be more uniform when the signal passes through the high-pass filter.
Preferably, the inductance value of the inductor L1 is 867 nanohenries, the inductance value of the inductor L2 is 503 nanohenries, and the inductance value of the inductor L3 is 867 nanohenries. The inductor has good shunt isolation effect on 4M and 13.56M radio frequency power supplies.
Preferably, the input-output impedance characteristic of the high-pass filter is 50 ohms. The input-output impedance characteristic of the high-pass filter is set to be 50 ohms, so that the 13.56M signal can pass through as losslessly as possible, and the 4M radio frequency power supply signal coupled from the load end is cut off.
The utility model has the advantages that: a high-pass filter is connected in series between a 13.56MHz radio frequency power supply and a 13.56M matcher, and the input/output impedance characteristic of the high-pass filter is 50 ohms, so that a 13.56M signal can pass through as losslessly as possible, and a 4M radio frequency power supply signal coupled from a load end is cut off at the same time, so that a good isolation effect on the 4M and 13.56M radio frequency power supplies is achieved, and 2 power sources with different frequencies can normally and stably operate;
by arranging a large inductor inside the 4M radio frequency power supply matcher, a 13.56M signal belongs to an open circuit state at a load end, so that the normal operation of the 4M power supply cannot be influenced.
Drawings
Fig. 1 is a schematic view of a connection structure of a 4M and 13.56M dual-frequency power isolator according to the present invention;
fig. 2 is a high-pass filtering schematic diagram of a 4M and 13.56M dual-band power isolator according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Those not described in detail in this specification are within the skill of the art.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of drawing of description, and the concrete connection mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt prior art, and conventional model, including circuit connection adopts conventional connection mode among the prior art, does not detailed here again.
The first embodiment is as follows: referring to fig. 1-2, a 4M and 13.56M dual-frequency power supply isolator includes a 4M radio frequency power supply, a 4M matcher, a load coil, a 13.56M matcher, a high pass filter, and a 13.56M radio frequency power supply, an output end of the 4M radio frequency power supply is connected to an input end of the 4M matcher, an output end of the 4M matcher is connected to an input end of the load coil, an input end of the load coil is further connected to the 13.56M matcher, an input end of the 13.56M matcher is connected to an output end of the high pass filter, and an input end of the high pass filter is connected to an output end of the 13.56M radio frequency power supply.
The output end of the 13.56M matcher is connected to a radio frequency signal input interface RF IN of the high-pass filter, the radio frequency signal input interface is connected with a capacitor C1, the output end of the capacitor C1 is connected with an inductor L2, the radio frequency signal input interface is further connected with an inductor L1, the inductor L2 and the capacitor C1 form a series circuit, one end of the series circuit is connected with the capacitor C2, the other end of the series circuit is connected with an inductor L3, the capacitor C2, the inductor L3 and the series circuit form a parallel circuit, one end of the parallel circuit is connected to a radio frequency signal output interface RF OUT of the high-pass filter, the other end of the parallel circuit is connected with a ground terminal GND, and IN addition, the radio frequency signal output interface RF OUT is further connected to the input end of the 13.56M matcher.
In the embodiment, the 4M radio frequency power supply is directly connected with the load coil after being connected with the 4M matcher, then the 13.56M radio frequency power supply is connected with the high-pass filter in series, then the 13.56M matcher is connected, and finally the load coil is connected, so that the 13.56M signal can pass through the load coil as losslessly as possible, and the 4M radio frequency power supply signal coupled from the load end is also isolated, because the 4M radio frequency power supply matcher has a large inductance inside, the 13.56M signal belongs to an open circuit at the load end, the normal operation of the 4M power supply cannot be influenced, the power sources of the 2 signals with different frequencies of 13.56MHz and 4MHz do not interfere with each other when glow discharge is carried out in the same chamber and the same load, and the power sources with 2 different frequencies can work normally and stably.
Example two: referring to fig. 1-2, on the basis of the first embodiment, a technical solution of a 4M and 13.56M dual-frequency power isolator is provided, in which the capacitance of the capacitor C1 and the capacitor C2 is 290 picofarads, the inductance of the inductor L1 is 867 nanohenries, the inductance of the inductor L2 is 503 nanohenries, the inductance of the inductor L3 is 867 nanohenries, and the input-output impedance characteristic of the high-pass filter is 50 ohms.
In this embodiment, can make signal output more homogenization when making the signal pass through high pass filter through electric capacity C1 and electric capacity C2 that set up, through inductance L1, L2 and the L3 that sets up, can play fine reposition of redundant personnel isolation effect to 4M and 13.56M radio frequency power supply.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, which are designed to be replaced or changed equally, all should be covered within the protection scope of the present invention.
Claims (4)
1. A4M and 13.56M dual-frequency power supply isolator comprises a 4M radio frequency power supply, a 4M matcher, a load coil, a 13.56M matcher, a high-pass filter and a 13.56M radio frequency power supply, and is characterized in that the output end of the 4M radio frequency power supply is connected to the input end of the 4M matcher, the output end of the 4M matcher is connected to the input end of the load coil, the input end of the load coil is further connected with the 13.56M matcher, the input end of the 13.56M matcher is connected to the output end of the high-pass filter, and the input end of the high-pass filter is connected to the output end of the 13.56M radio frequency power supply;
the output end of the 13.56M matcher is connected to a radio frequency signal input interface RF IN of the high-pass filter, the radio frequency signal input interface is connected to a capacitor C1, the output end of the capacitor C1 is connected to an inductor L2, the radio frequency signal input interface is further connected to an inductor L1, the inductor L2 and the capacitor C1 form a series circuit, one end of the series circuit is connected to a capacitor C2, the other end of the series circuit is connected to an inductor L3, the capacitor C2, the inductor L3 and the series circuit form a parallel circuit, one end of the parallel circuit is connected to a radio frequency signal output interface RF OUT of the high-pass filter, the other end of the parallel circuit is connected to a ground terminal GND, and IN addition, the radio frequency signal output interface RF OUT is further connected to the input end of the 13.56M matcher.
2. The dual band power isolator as claimed in claim 1, wherein the capacitance of the capacitor C1 and the capacitance of the capacitor C2 are 290 picofarads.
3. The 4M and 13.56M dual-band power isolator of claim 1, wherein the inductance of inductor L1 is 867 nanohenries, the inductance of inductor L2 is 503 nanohenries, and the inductance of inductor L3 is 867 nanohenries.
4. The dual-band power isolator of claim 1, wherein the input-output impedance of the high pass filter is 50 ohms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222645715.5U CN218829873U (en) | 2022-10-08 | 2022-10-08 | 4M and 13.56M double-frequency power supply isolator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222645715.5U CN218829873U (en) | 2022-10-08 | 2022-10-08 | 4M and 13.56M double-frequency power supply isolator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218829873U true CN218829873U (en) | 2023-04-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222645715.5U Active CN218829873U (en) | 2022-10-08 | 2022-10-08 | 4M and 13.56M double-frequency power supply isolator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218829873U (en) |
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2022
- 2022-10-08 CN CN202222645715.5U patent/CN218829873U/en active Active
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