CN218826992U

CN218826992U - Auxiliary device for cleaning agent of acid liquid for wafer

Info

Publication number: CN218826992U
Application number: CN202222833178.7U
Authority: CN
Inventors: 王丹; 谭磊; 徐文鑫; 陈旭东; 王毅
Original assignee: Yangzhou Yangjie Electronic Co Ltd
Current assignee: Yangzhou Yangjie Electronic Co Ltd
Priority date: 2022-10-27
Filing date: 2022-10-27
Publication date: 2023-04-07
Anticipated expiration: 2032-10-27

Abstract

An auxiliary device is added to the wafer acid cleaning agent. To semiconductor wafer processing equipment. The method comprises the following steps: the cover body is detachably, hermetically and fixedly arranged on the liquid storage barrel; the injection part is communicated with the cover body, and the top of the injection part is provided with a connecting part matched with a bottle mouth of bottled injection liquid; the switch valve is horizontally and fixedly arranged in the injection part in a sealing manner; the switch valve is plate-shaped and is provided with a valve hole, and a sealing turnover plate hinged to the valve hole is arranged on the valve hole; the rotation angle of the sealing turnover plate on the valve hole is controlled by a rotation handle extending to the outer side of the injection part; the air guide pipe is fixedly arranged on the cover body and is communicated with the cover body; and a filter element is arranged at the top of the inner cavity of the air duct. The utility model discloses a filter core of setting in pouring into side portion air duct collects volatile steam, improves the security and the convenience of filling.

Description

Auxiliary device for cleaning agent of acid liquid for wafer

Technical Field

The utility model relates to a semiconductor wafer processing equipment especially relates to wafer acidizing fluid cleaner adds helps assistor.

Background

At present, the acid adding mode is generally a direct pouring or back-flowing mode without an auxiliary device, and liquid overflow or splashing is easily caused. The liquid adding process involves a large amount of highly corrosive and highly volatile liquid including HCL and NH ₄ OH and the like. Therefore, protective masks, gas masks, acid-proof gloves and acid-proof clothes are commonly provided for staff in the liquid adding process. However, liquid is added in a pouring mode, a large amount of toxic and harmful gas overflows due to the fact that liquid is in large-area contact with air, and the body of a person who does not add acid and enters an ash area at the same time is damaged to a certain extent, particle number can be influenced to a certain extent due to the fact that liquid is in contact with the air in the ash area, particle cleaning of FSI is influenced, impurities exist in a follow-up film growing process and influence the quality of an oxidation film, meanwhile, the impurities on the surface of a wafer have influence on the combination of the oxidation film and the wafer, an epitaxial layer falls off, and the quality of the wafer is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model provides a to above problem, provide a wafer acidizing fluid cleaner adds helps assistor compact structure, use portably, improves the liquid feeding security.

The technical scheme of the utility model is that: wafer acidizing fluid cleaner adds supplementary assistor includes:

the cover body is detachably, hermetically and fixedly arranged on the liquid storage barrel;

the injection part is communicated with the cover body, and the top of the injection part is provided with a connecting part matched with a bottle mouth of bottled injection liquid;

the switch valve is horizontally and fixedly arranged in the injection part in a sealing manner; the switch valve is plate-shaped and is provided with a valve hole, and a sealing turnover plate hinged to the valve hole is arranged on the valve hole; the rotation angle of the sealing turnover plate on the valve hole is controlled by a rotation handle extending to the outer side of the injection part; and

the air guide pipe is fixedly arranged on the cover body and is communicated with the cover body; and a filter element is arranged at the top of the inner cavity of the air duct.

Specifically, one end of the rotating handle is fixedly connected with the sealing turning plate, and the other end of the rotating handle extends to the outer side of the injection part.

Specifically, a flat knob is arranged on the outer side end of the rotating handle.

Specifically, the upper surface of the knob is a plane and is matched with the sealing turning plate.

Specifically, the outside of sealed board that turns over is equipped with the seal groove with the sealing washer adaptation.

Specifically, the air duct is including fixed connection in proper order:

the extension part is provided with a plurality of extension parts,

the bearing part is matched with the filter element and is provided with a loading cavity matched with the filter element.

Specifically, the diameter of the bearing part is larger than that of the extension part.

Specifically, the extension part is of a V-shaped structure.

Specifically, the cover body is a transparent cover body.

Specifically, a floating ball is arranged in the cover body.

The utility model comprises a cover body, an injection part, a switch valve and an air duct; the cover body is detachably, hermetically and fixedly arranged on the liquid storage barrel; the injection part is communicated with the cover body, and the top of the injection part is provided with a connecting part matched with a bottle mouth of the bottled injection liquid; the switch valve is horizontally and fixedly arranged in the injection part in a sealing manner; the sealing turnover plate on the switch valve controls the sealing or liquid adding of the bottled injection liquid. Through setting up the filter core in the gas duct of injection site lateral part, collect volatile steam, improve the security and the convenience of filling.

Drawings

FIG. 1 is a schematic view of the three-dimensional structure of the present invention in a disassembled state,

FIG. 2 is a perspective view of the cover;

in the figure, 100 is a liquid storage barrel, 200 is a cover body, 300 is an injection part, 400 is an on-off valve, 410 is a sealing turning plate, 420 is a rotary handle, 500 is an air duct, 510 is an extension part, 520 is a bearing part, 600 is bottled injection liquid, and 700 is a floating ball.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The utility model is shown in figures 1-2; wafer acidizing fluid cleaner adds helps assistor includes:

the cover body 200 is detachably, hermetically and fixedly arranged on the liquid storage barrel 100;

the injection part 300 is communicated with the cover body 200, and the top of the injection part 300 is provided with a connecting part matched with the bottle mouth of the bottled injection liquid 600; the bottled injection liquid 600 is detachably and hermetically arranged on the connecting part;

an on-off valve 400, the on-off valve 400 being horizontally fixedly and hermetically disposed in the injection part 300; the switch valve 400 is plate-shaped and is provided with a valve hole, and a sealing turnover plate 410 which is hinged to the valve hole is arranged on the valve hole; the sealing flap 410 controls the rotation angle thereof on the valve hole by a rotation handle 420 extended to the outside of the injection part 300; and

the air duct 500 is fixedly arranged on the cover body 200, and is communicated with the cover body 200; and a filter element is arranged at the top of the inner cavity of the air duct.

Further defined, as shown with reference to FIG. 2; one end of the rotation handle 420 is fixedly connected with the sealing flap 410, and the other end extends to the outside of the injection part 300.

A flat knob is arranged on the outer side end of the rotating handle 420.

The upper surface of the knob is a plane and is matched with the sealing turning plate 410, namely, the upper surface of the sealing turning plate 410 and the upper surface of the knob are on the same plane, so that the position state of the sealing turning plate 410 in the valve hole can be conveniently and intuitively controlled.

The outside of the sealing turning plate 410 is provided with a sealing groove matched with the sealing ring. By installing the adapted sealing ring, the sealing performance of the sealing flap 410 when closed is improved.

Further defined, the airway tube 500 comprises, fixedly connected in sequence:

the length of the extension portion 510 is,

the bearing part 520 is matched with the filter element, a loading cavity matched with the filter element is arranged on the bearing part 520, and air holes communicated with the loading cavity are formed in the bearing part. When acid is added, toxic substances in harmful gas can be absorbed through the gas filter element, so that the harm to human bodies is reduced.

The diameter of the receiving part 520 is greater than that of the extending part 510.

The extension part 510 is of a V-shaped structure, so that cleaning agents can be blocked conveniently, and the volatilization amount is reduced.

Further optimize, lid 200 is transparent lid 200, whether the visual observation of being convenient for adds the cleaner and adds the settlement position.

A fastening floating ball 700 is provided in the cover 200. The float 700 is usually red and is fastened under the cover 200, so that the cleaning agent can be visually detected when reaching a predetermined height.

The using mode is as follows:

1. the connection part of the injection part 300 is connected to the mouth of the bottled injection liquid 600 in advance, and the on-off valve 400 is closed at this time;

2. the cover body 200 is arranged on the liquid storage barrel 100 and is hermetically connected with the liquid storage barrel 100 through a sealing piece;

3. the switch valve 400 is opened, the liquid in the bottled injection liquid 600 flows into the liquid storage barrel 100, the floating ball 700 in the transparent cover body 200 is observed, and after the floating ball 700 reaches the early warning position, the switch valve 400 is rotated to be closed, and the cleaning liquid is stopped from being added.

The disclosure of the present application also includes the following points:

(1) The drawings of the embodiments disclosed herein only relate to the structures related to the embodiments disclosed herein, and other structures can refer to general designs;

(2) In case of conflict, the embodiments and features of the embodiments disclosed in this application can be combined with each other to arrive at new embodiments;

the above embodiments are only embodiments disclosed in the present disclosure, but the scope of the disclosure is not limited thereto, and the scope of the disclosure should be determined by the scope of the claims.

Claims

1. Wafer acidizing fluid cleaner adds supplementary assistor, its characterized in that includes:

2. The wafer acid cleaning agent auxiliary device as claimed in claim 1, wherein one end of the rotation handle is fixedly connected to the sealing flap, and the other end extends to the outside of the injection portion.

3. The wafer acid cleaning agent aid as claimed in claim 1 or 2, wherein a flat knob is provided on the outer end of the rotation handle.

4. The wafer acid cleaning agent aid as defined in claim 3, wherein the upper surface of the knob is a flat surface adapted to the sealing flap.

5. The wafer acid cleaning agent auxiliary device as claimed in claim 1, wherein a sealing groove adapted to the sealing ring is formed on the outer side of the sealing turnover plate.

6. The wafer acid cleaning agent aid as claimed in claim 1, wherein the gas-guiding tube comprises, in order and fixedly connected:

the extension part is provided with a plurality of extension parts,

7. The wafer acid cleaning agent aid as defined in claim 6, wherein the diameter of the receiving portion is larger than the diameter of the extension portion.

8. The wafer acid cleaning agent aid as claimed in claim 6, wherein the extension is V-shaped.

9. The wafer acid cleaning agent aid as defined in claim 1, wherein the cover is a transparent cover.

10. The wafer acid cleaning agent aid as defined in claim 9, wherein a floating ball is provided in the lid.