CN218812047U - Coating film line end air exhaust device - Google Patents
Coating film line end air exhaust device Download PDFInfo
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- CN218812047U CN218812047U CN202223361452.1U CN202223361452U CN218812047U CN 218812047 U CN218812047 U CN 218812047U CN 202223361452 U CN202223361452 U CN 202223361452U CN 218812047 U CN218812047 U CN 218812047U
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Abstract
The utility model relates to a coated wire end head air extractor, which comprises a plurality of coated cavities, branch pipelines, a main pipeline, a first vacuumizing assembly, a controller and a display part, wherein a cathode body is arranged in each coated cavity and is connected with an external driving mechanism through an end head; the branch pipeline is communicated with the end of the coating cavity; the main pipeline is communicated with the branch pipelines through connecting pipelines; the first vacuumizing assembly comprises a first air storage tank and a first vacuum pump, wherein a first detection meter is arranged on the first air storage tank and used for detecting the vacuum degree of the main pipeline; a second detection meter is arranged on the connecting pipeline and used for detecting the vacuum degree of the end; the controller is connected with the first vacuumizing assembly and the second detection meter, and the display component is used for displaying detection results of the first detection meter and the second detection meter. The device provided by the utility model realizes the concentrated air extraction of the end of each coating cavity; the vacuum degree of the end of each coating cavity is known, so that the detection efficiency and the detection precision are greatly improved.
Description
Technical Field
The utility model relates to a coating film line end air exhaust device.
Background
In the vacuum magnetron sputtering technology, the end of the coating line is a key core spare part of the whole line, and the stability of the vacuum degree of the coating line has great influence on the service life of the end and the quality of a coated product, so that the vacuum stability of the end of the coating line is very critical.
At present, the coating end is obtained by pumping air of a single independent diaphragm pump, the cathode number is correspondingly increased along with the requirement on a coating product, and the number of the diaphragm pumps of each line is different from 20 to 50 at present. At present, a specially-assigned person inspects and records the vacuum degree of the cathode end of the coating line and makes discrete paper records, but the number of cathodes is large, so that a large amount of time is spent on inspection and maintenance, and the maintenance intensity is high; the real-time continuous tracking record is lacked, and the prevention and maintenance cannot be realized; the record of the vacuum degree of the single cathode body is discontinuous, so that the accurate analysis cannot be realized when problems occur, and the prevention and maintenance of a diaphragm pump and the like cannot be realized; the end with fault can not be processed in time, even batch waste is caused.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a coating film line end air exhaust device to solve current coating film line end and bleed alone, vacuum measurement record discontinuous, can't accomplish the prevention and maintain and the artifical problem that consumes time for a long time.
In order to achieve the purpose, the utility model adopts the technical proposal that:
a coating film line end air exhaust device comprises:
the cathode bodies are arranged in the coating cavities and are connected with an external driving mechanism through end heads;
the branch pipeline is communicated with the end of the coating cavity;
the main pipeline is communicated with the branch pipelines through connecting pipelines;
the first vacuumizing assembly comprises a first gas storage tank and a first vacuum pump, the first gas storage tank is arranged on the main pipeline, the first vacuum pump is communicated with the first gas storage tank, a first detection table is arranged on the first gas storage tank, and the first detection table is used for detecting the vacuum degree of the main pipeline;
the connecting pipeline is provided with a second detection meter, and the second detection meter is used for detecting the vacuum degree of the end head; the controller is connected with the first vacuumizing assembly and the second detection meter and is used for receiving detection results of the first detection meter and the second detection meter;
and the display component is connected with the controller and is used for displaying the detection results of the first detection table and the second detection table.
Preferably, the device further comprises a second vacuumizing assembly, the second vacuumizing assembly comprises a second air storage tank and a second vacuum pump, the second air storage tank is arranged on the main pipeline, the second vacuum pump is communicated with the second air storage tank, a third detection table is arranged on the second air storage tank, the third detection table is used for detecting the vacuum degree of the main pipeline, the second vacuumizing assembly is connected with the controller, and only one of the first vacuumizing assembly and the second vacuumizing assembly is in a working state.
Preferably, the main pipeline comprises a first pipeline, a second pipeline, a third pipeline and a fourth pipeline, one end of the third pipeline and one end of the fourth pipeline are both communicated with the first pipeline, the other end of the third pipeline and the other end of the fourth pipeline are both communicated with the second pipeline, and the first pipeline is communicated with the branch pipelines through the connecting pipeline.
Preferably, the first air storage tank is arranged at the position where the second pipeline is communicated with the third pipeline, and a first pneumatic valve is arranged on the third pipeline and is used for controlling the first air storage tank;
the second gas storage tank is arranged at the communication position of the second pipeline and the fourth pipeline, a second pneumatic valve is arranged on the fourth pipeline, and the second pneumatic valve is used for controlling the second gas storage tank.
Preferably, the first vacuum pump is arranged at one end of the second pipeline, and a third pneumatic valve is arranged between the first vacuum pump and the first air storage tank; the second vacuum pump is arranged at the other end of the second pipeline, a fourth pneumatic valve is arranged between the second vacuum pump and the second air storage tank, and the first vacuum pump and the second vacuum pump are respectively positioned on one sides, far away from each other, of the first air storage tank and the second air storage tank.
Preferably, a fifth pneumatic valve is arranged on a second pipeline communicated between the first air storage tank and the second air storage tank; and a manual ball valve is arranged on the connecting pipeline.
Preferably, four ends are arranged on one coating cavity, the branch pipeline corresponding to the coating cavity comprises a first branch pipeline, a second branch pipeline and a third branch pipeline, two ends of the first branch pipeline are respectively communicated with the two ends, two ends of the second branch pipeline are respectively communicated with the other two ends, two ends of the third branch pipeline are respectively communicated with the first branch pipeline and the second branch pipeline, and the third branch pipeline is communicated with the connecting pipeline.
Preferably, manual ball valves are arranged between two ends of the first branch pipeline and the third branch pipeline, between two ends of the second branch pipeline and the third branch pipeline and on the connecting pipeline.
Preferably, the device further comprises a fifth pipeline, one end of the fifth pipeline is communicated with the first pipeline, a mechanical vacuum gauge is arranged at the other end of the fifth pipeline, and the mechanical vacuum gauge is used for detecting whether the main pipeline leaks air or not.
Preferably, the main pipeline, the branch pipelines and the connecting pipelines are made of stainless steel.
Because of the application of the technical scheme, compared with the prior art, the utility model has the advantages of it is following:
the utility model provides a device for exhausting the end heads of the coating film wires, which realizes the concentrated air exhaust of the end heads of all the coating film cavities; the vacuum degree of the whole main pipeline can be known through the data of the first detection table, the vacuum degree of the end head of each coating cavity can be known through the data of the second detection table, the coating end heads do not need to be checked independently manually, the detection efficiency is greatly improved, the detection precision is improved, the automatic acquisition and recording of the operation data of field equipment are realized, and the failure reason of the end head is conveniently searched and analyzed; not only ensures that the end is in a stable process requirement vacuum range, but also greatly improves the inspection efficiency and the maintenance efficiency of the vacuum degree of the coated end.
Drawings
FIG. 1 is an overall structure diagram of the air extractor for the end of the coated wire provided by the utility model;
FIG. 2 is an enlarged view of FIG. 1;
figure 3 is the structure diagram of the single cathode body and the main pipeline of the air extractor for the end of the coated wire provided by the utility model.
In the above drawings: 1-a first gas storage tank, 2-a first vacuum pump, 3-a first detection meter, 4-a second gas storage tank, 5-a second vacuum pump, 6-a second detection meter and 7-a third detection meter;
8-main, 81-first, 82-second, 83-third, 84-fourth, 85-fifth, 86-sixth;
9-branch pipeline, 91-first branch pipeline, 92-second branch pipeline, 93-third branch pipeline;
10-end, 11-first pneumatic valve, 12-second pneumatic valve, 13-third pneumatic valve, 14-fourth pneumatic valve, 15-fifth pneumatic valve, 16-manual ball valve, 17-connecting pipe, 18-mechanical vacuum meter, 19-cathode body.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
Referring to the air extracting device for the end head of the coating wire shown in fig. 1 to 3, the device comprises a coating cavity, a branch pipeline 9, a main pipeline 8, a first vacuum-pumping assembly, a second vacuum-pumping assembly and a controller, and specifically:
the coating film cavity is provided with a plurality of, is provided with one or more negative pole bodies 19 in the coating film cavity, and negative pole body 19 is connected with external drive mechanism through end 10, and external drive mechanism is used for driving negative pole body 19 rotatory. In one embodiment, a cathode body 19 is disposed in one coating chamber, and one cathode body 19 is connected to an external driving mechanism through four terminals 10.
The branch pipelines 9 are communicated with the ends 10 of the film coating cavities, the main pipeline 8 is communicated with the branch pipelines 9 of the plurality of film coating cavities through connecting pipelines 17 respectively, namely the branch pipelines 9 of each film coating cavity are communicated with the main pipeline 8 through the connecting pipelines 17.
First evacuation subassembly includes first gas holder 1, first vacuum pump 2, and first gas holder 1 sets up on total pipeline 8, and first vacuum pump 2 and first gas holder 1 intercommunication are provided with first detection table 3 on the first gas holder 1, and first detection table 3 is used for detecting total pipeline 8's vacuum.
The controller is connected with the first vacuumizing assembly and the second detection table 6, and the controller is used for receiving detection results of the first detection table 3 and the second detection table 6.
Display element is connected with controller real-time communication, and display element is the display screen, and display element is used for showing the first testing table 3, the second testing table 6's testing result, can learn holistic vacuum through the numerical value of the first testing table 3 on the display element, accomplishes the vacuum pump prevention and maintains, and realizes that remote access looks over vacuum and pump running state function. The numerical value of the second detection table 6 can obtain the vacuum degree numerical value of each coated end 10, and each coated end 10 does not need to be checked independently by manpower, so that the detection efficiency is greatly improved, the detection precision is improved, the automatic acquisition and recording of the operation data of the field equipment are realized, and the fault reason of the end 10 is conveniently searched and analyzed; the display component and the controller are both provided with remote access configuration, so that historical data of the touch screen can be checked on site, and meanwhile, the remote access query function is also provided.
The vacuum degree values of the first detection table 3 and the second detection table 6 are approximately equal, if the vacuum degree value of the first detection table 3 is abnormal, the vacuum degree value of the coating end 10 can be known to be abnormal, and the vacuum degree value of the second detection table 6 can be checked to quickly know which coating end 10 is abnormal, so that the whole and the coating end 10 can be monitored.
Furthermore, an alarm can be arranged and connected with the controller, and if the vacuum degree values of the first detection table 3 and the second detection table 6 are smaller than or larger than a set value, the controller can trigger the alarm to work, even if the worker is informed to check the vacuum degree values.
In a preferred embodiment, the device comprises a first vacuumizing assembly and a second vacuumizing assembly, wherein the second vacuumizing assembly comprises a second air storage tank 4 and a second vacuum pump 5, the second air storage tank 4 is arranged on a main pipeline 8, the second vacuum pump 5 is communicated with the second air storage tank 4, a third detection table 7 is arranged on the second air storage tank 4, and the third detection table 7 is used for detecting the vacuum degree of the main pipeline 8. The second vacuumizing assembly is connected with the controller, and the display part can display the vacuum degree value of the third detection table 7 and can inquire history and real-time record.
Only one of the first vacuumizing assembly and the second vacuumizing assembly is in a working state, namely, when one of the first vacuumizing assembly and the second vacuumizing assembly works, the other one does not work for standby, specifically, when the first air storage tank 1 and the first vacuum pump 2 work simultaneously, the second air storage tank 4 and the second vacuum pump 5 stop working, and at the moment, the first air storage tank 1 and the first vacuum pump 2 realize the concentrated air suction of the end head 10 of each coating cavity; and when first gas holder 1, first vacuum pump 2 can't work, second gas holder 4, second vacuum pump 5 continue to work, guarantee the continuity of concentrating the air bleed, realize uninterrupted production.
Further, the controller controls the first vacuumizing assembly and the second vacuumizing assembly to alternately work, if the first vacuumizing assembly works within a preset time or within a set vacuum value range, specifically, the first vacuumizing assembly works, the second vacuumizing assembly does not work, and within the preset time, the controller controls the first vacuumizing assembly not to work and the second vacuumizing assembly works; or when the first vacuumizing assembly is damaged, the controller controls the second vacuumizing assembly to work.
In this example, the main duct 8 includes a first duct 81, a second duct 82, a third duct 83, and a fourth duct 84, one end of the third duct 83 and one end of the fourth duct 84 are both communicated with the first duct 81, the other end of the third duct 83 and the other end of the fourth duct 84 are both communicated with the second duct 82, the first duct 81 is communicated with the branch duct 9 through the connection duct 17, the first duct 81 is arranged in parallel with the second duct 82, and the third duct 83 is arranged in parallel with the fourth duct 84.
The first air tank 1 is arranged at the communication part of the second pipeline 82 and the third pipeline 83, a first pneumatic valve 11 is arranged on the third pipeline 83, and the first pneumatic valve 11 is used for controlling the first air tank 1; a second air tank 4 is provided at a position where the second conduit 82 communicates with the fourth conduit 84, and a second air-operated valve 12 is provided on the fourth conduit 84, the second air-operated valve 12 being for controlling the second air tank 4.
The first vacuum pump 2 is arranged at one end of the second pipeline 82, and a third pneumatic valve 13 is arranged between the first vacuum pump 2 and the first air storage tank 1; the second vacuum pump 5 is arranged at the other end of the second pipeline 82, the fourth pneumatic valve 14 is arranged between the second vacuum pump 5 and the second air storage tank 4, and the first vacuum pump 2 and the second vacuum pump 5 are respectively positioned at one sides of the first air storage tank 1 and the second air storage tank 4 far away from each other.
A fifth pneumatic valve 15 is arranged on a second pipeline 82 communicated between the first air storage tank 1 and the second air storage tank 4, and a manual ball valve 16 is arranged on the connecting pipeline 17.
In this example, the first, second, third, fourth, fifth, and manual ball valves 11, 12, 13, 14, 15, and 16 are all connected to a controller, and are all ball valves, which are in an open state in a normal state. The first pneumatic valve 11, the second pneumatic valve 12, the third pneumatic valve 13, the fourth pneumatic valve 14 and the fifth pneumatic valve 15 are hermetically connected through flanges; the main pipeline 8, the branch pipelines 9 and the connecting pipeline 17 are made of stainless steel, and are firm and durable.
Be provided with four ends 10 on the coating film chamber, the branch pipeline 9 that a coating film chamber corresponds includes first branch pipeline 91, second branch pipeline 92, third branch pipeline 93, the both ends of first branch pipeline 91 communicate with two ends 10 respectively, the both ends of second branch pipeline 92 communicate with two other ends 10 respectively, the both ends of third branch pipeline 93 communicate with first branch pipeline 91, second branch pipeline 92 respectively, third branch pipeline 93 communicates with the one end of connecting tube 17, the other end of connecting tube 17 is provided with the second and detects table 6. A branch duct 9 is provided to communicate with the main duct 8.
The main duct 8 further includes a fifth duct 85, and the fifth duct 85 may be provided in plurality. One end of the fifth pipeline 85 is communicated with the first pipeline 81, the other end of the fifth pipeline 85 is provided with the mechanical vacuum gauge 18, the mechanical vacuum gauge 18 is used for detecting whether the main pipeline 8 leaks air, fault troubleshooting can be carried out by manually switching on and off the mechanical vacuum gauge 18 when overhauling is needed, and overhauling efficiency is improved.
The main pipe 8 further comprises a sixth pipe 86, one end of the sixth pipe 86 is communicated with the first pipe 81, and the other end of the sixth pipe 86 is communicated with the connecting pipe 17, so that air can be sucked towards the coating end 10 of each cathode body 19.
In this example, under normal conditions, the fifth pneumatic valve 15 between the first air storage tank 1 and the second air storage tank 4 is in a normally open state, if only the first air storage tank 1, the first vacuum pump 2 and the first PG meter work, when the vacuum degree detected by the first PG meter is lower than a set value, both the first vacuum pump 2 and the third pneumatic valve 13 are closed; when the vacuum degree in the first air tank 1 is greater than the set value, the third pneumatic valve 13 connected to the first vacuum pump 2 is turned on again after the first automatic pneumatic vacuum pump 22S.
And if one of the first vacuum pump 2 and the second vacuum pump 5 is abnormally stopped or manually closed, the pneumatic ball valve connected with the vacuum pump and the air storage tank is automatically closed. The other one of the first vacuum pump 2 and the second vacuum pump 5 automatically and normally operates, and a PG (program control) meter on an air storage tank connected with the vacuum pump is used for detecting the vacuum degree and controlling the automatic start and stop of the vacuum pump.
If the whole-line shutdown state occurs, the first vacuum pump 2, the second vacuum pump 5, the third pneumatic valve 13 and the fourth pneumatic valve 14 are closed, and the residual pressure in the air storage tank keeps the tip 10 to obtain a lower vacuum value in a short time.
The pumping speed of this example was 63m 3 /h，The volumes of the first air storage tank 1 and the second air storage tank 4 are 0.3m 3 The material is carbon steel.
In a preferred embodiment, the PG (vacuum pressure transducer) meter is selected as the first detection table 3, the second detection table 6 and the third detection table 7, the detection range is 0.001mbar-1000mbar, and the detection precision is high, and the detection tables are detection components well known to those skilled in the art.
The advantages of the end air extractor of the coated wire of the embodiment are as follows:
(1) The number of vacuum pumps of the magnetron sputtering coating line is reduced, and a centralized air exhaust mode is adopted to facilitate centralized management; correspondingly, the data of the vacuum pump is greatly reduced, the equipment inspection efficiency can be improved, and the equipment maintenance labor intensity is reduced; according to the data of the second detection table, the corresponding cathode body can be detected and maintained, so that the fault reason can be conveniently searched;
(2) The vacuum degree of the coated end and the remote monitoring function of the vacuum pump are realized, the automatic acquisition and recording of the operation data of the field equipment are realized, and the fault reason of the end of the analysis equipment is convenient to search;
(3) The vacuum pump with centralized air suction is automatically started and stopped in the running process, unnecessary energy waste is avoided, personnel are not required to participate in the operation in the whole running process, and automatic and continuous running of equipment is realized.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (10)
1. The utility model provides a coating film line end air exhaust device which characterized in that includes:
the coating device comprises a plurality of coating cavities, a plurality of driving mechanisms and a plurality of control modules, wherein cathode bodies are arranged in the coating cavities and are connected with an external driving mechanism through end heads;
the branch pipeline is communicated with the end of the coating cavity;
the main pipeline is communicated with the branch pipelines through connecting pipelines;
the first vacuumizing assembly comprises a first gas storage tank and a first vacuum pump, the first gas storage tank is arranged on the main pipeline, the first vacuum pump is communicated with the first gas storage tank, a first detection table is arranged on the first gas storage tank, and the first detection table is used for detecting the vacuum degree of the main pipeline;
the connecting pipeline is provided with a second detection meter, and the second detection meter is used for detecting the vacuum degree of the end head;
the controller is connected with the first vacuumizing assembly and the second detection meter and is used for receiving detection results of the first detection meter and the second detection meter;
and the display component is connected with the controller and is used for displaying the detection results of the first detection table and the second detection table.
2. The device for extracting air from a coated wire end according to claim 1, further comprising a second vacuum-pumping assembly, wherein the second vacuum-pumping assembly comprises a second air storage tank and a second vacuum pump, the second air storage tank is arranged on the main pipeline, the second vacuum pump is communicated with the second air storage tank, a third detection table is arranged on the second air storage tank, the third detection table is used for detecting the vacuum degree of the main pipeline, the second vacuum-pumping assembly is connected with the controller, and only one of the first vacuum-pumping assembly and the second vacuum-pumping assembly is in a working state.
3. The air extractor for a coated wire end head as claimed in claim 2, wherein the main pipe comprises a first pipe, a second pipe, a third pipe and a fourth pipe, one end of the third pipe and one end of the fourth pipe are both connected to the first pipe, the other end of the third pipe and the other end of the fourth pipe are both connected to the second pipe, and the first pipe is connected to the branch pipe through the connection pipe.
4. The device for exhausting end head of coated wire according to claim 3, wherein said first air tank is disposed at a position where said second pipe is communicated with said third pipe, said third pipe being provided with a first pneumatic valve for controlling said first air tank;
the second air storage tank is arranged at the communication position of the second pipeline and the fourth pipeline, a second pneumatic valve is arranged on the fourth pipeline, and the second pneumatic valve is used for controlling the second air storage tank.
5. The device for exhausting end head of coated wire according to claim 4, wherein the first vacuum pump is disposed at one end of the second pipeline, and a third pneumatic valve is disposed between the first vacuum pump and the first air storage tank; the second vacuum pump is arranged at the other end of the second pipeline, a fourth pneumatic valve is arranged between the second vacuum pump and the second air storage tank, and the first vacuum pump and the second vacuum pump are respectively positioned on one sides, far away from each other, of the first air storage tank and the second air storage tank.
6. The device for extracting air from a coated wire end head as claimed in claim 3, wherein a fifth pneumatic valve is arranged on a second pipeline communicated between the first air storage tank and the second air storage tank; and a manual ball valve is arranged on the connecting pipeline.
7. The air extractor for a coated wire end according to claim 1, wherein four ends are disposed on one coated cavity, the branch pipe corresponding to the coated cavity comprises a first branch pipe, a second branch pipe and a third branch pipe, two ends of the first branch pipe are respectively communicated with two ends, two ends of the second branch pipe are respectively communicated with the other two ends, two ends of the third branch pipe are respectively communicated with the first branch pipe and the second branch pipe, and the third branch pipe is communicated with the connecting pipe.
8. The air extractor for the coated wire end head as claimed in claim 7, wherein manual ball valves are respectively disposed between two ends of the first branch pipe and the third branch pipe, between two ends of the second branch pipe and the third branch pipe, and on the connecting pipe.
9. The air extractor for the coated wire end head as claimed in claim 3, further comprising a fifth pipeline, wherein one end of the fifth pipeline is communicated with the first pipeline, and the other end of the fifth pipeline is provided with a mechanical vacuum gauge for detecting whether the main pipeline leaks air.
10. The air extractor for the end of the coated wire according to claim 1, wherein the main pipe, the branch pipes and the connecting pipes are made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223361452.1U CN218812047U (en) | 2022-12-14 | 2022-12-14 | Coating film line end air exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223361452.1U CN218812047U (en) | 2022-12-14 | 2022-12-14 | Coating film line end air exhaust device |
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| Publication Number | Publication Date |
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| CN218812047U true CN218812047U (en) | 2023-04-07 |
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| CN202223361452.1U Active CN218812047U (en) | 2022-12-14 | 2022-12-14 | Coating film line end air exhaust device |
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| CN (1) | CN218812047U (en) |
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- 2022-12-14 CN CN202223361452.1U patent/CN218812047U/en active Active
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