CN218797802U - Chemical cleaning tank with filtering structure - Google Patents

Abstract

The utility model relates to a chemical cleaning tank technical field specifically is take filtration's chemical cleaning tank, chemical cleaning tank is used for wasing the container of article, the fixed chemical cleaning tank bottom all around of locating of supporting leg, the fixed chemical cleaning tank bottom middle of locating of drainage portion, the fixed drainage portion below of locating of filter assembly, filter assembly includes the filter house, the fixed driving motor that is equipped with in filter house below, the filter house rotates the chemical liquid that the separation contains the dirt through driving motor, the pars contractilis is used for connecting chemical cleaning tank and filter assembly. The utility model discloses mainly adopt the isolating construction, can arrange the chemical liquid who contains the dirt in the chemical cleaning tank to the filter assembly of chemical cleaning tank below, carry out the centrifugal motion of steady rotation through the dehydration bucket that driving motor drove in filter assembly to reach solid-liquid separation's effect.

Description

Chemical cleaning tank with filtering structure

Technical Field

The utility model relates to a chemical cleaning tank technical field specifically is take filtration's chemical cleaning tank.

Background

In semiconductor manufacturing, parts of semiconductor processing equipment must be cleaned and regenerated periodically or aperiodically to maintain the performance of the semiconductor processing equipment and to extend the service life of the equipment.

Taking the pvd process as an example, the pvd process mainly deposits a thin film on a substrate. Firstly, a direct current power supply is respectively and electrically coupled to a back plate and a covering plate, and an electric field is formed in the reaction chamber cavity through the back plate and the covering plate to impact the ion gun beam to the metal target. After the ion gun beam impacts the target, the metal on the target is sputtered on the substrate to form the film. Usually, after the reaction chamber cavity of physical vapor deposition is used for a period of time, a metal coating film is formed on the surfaces of the cover plate and the base material in the reaction chamber cavity, so that the reaction chamber cavity must be cleaned and regenerated to prevent the fine dust particles generated by the cracking or peeling of the metal coating film from spreading to the substrate and affecting the yield; in the cleaning process, a chemical cleaning tank is required, wherein chemical agents such as acid, alkali, organic chelating agent, dispersing agent and the like are used for dissolving and removing dirt, scale and the like attached to the surface of metal, dirt is accumulated continuously in the process, while in the conventional chemical cleaning tank, various liquids are mixed in the dirt accumulated in the chemical cleaning tank when articles are cleaned, and if the mixture is directly discharged, the discharge pipeline is easily blocked due to the existence of a large amount of dirt, so that the dirt and the liquids need to be separated before being discharged. In view of this, we propose a chemical cleaning tank with a filtering structure.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a take filtration's chemical cleaning tank to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

take filtration's chemical cleaning tank includes the chemical cleaning tank, the chemical cleaning tank is used for wasing the container of article, the fixed chemical cleaning tank bottom all around of locating of supporting leg, water discharge portion is fixed in the middle of locating the chemical cleaning tank bottom, the fixed drainage portion below of locating of filter assembly, filter assembly include the filter house, and the fixed driving motor that is equipped with in filter house below, the filter house rotates the chemical liquid that the separation contains the dirt through driving motor, the pars contractilis is used for connecting chemical cleaning tank and filter assembly.

Further, the drain part is composed of a drain pipe and a valve mounted on the drain pipe.

Furthermore, the filtering part comprises a dewatering barrel, a rotary filter barrel is arranged in the dewatering barrel, a filter element is arranged in the rotary filter barrel, and a drain hole is fixedly formed in the outer surface of the dewatering barrel.

Further, the filtering part further comprises a threaded connecting column, and a fixing shaft is fixedly arranged below the threaded connecting column.

Further, the telescopic part comprises a supporting rod, an inner telescopic rod is connected to the lower portion of the supporting rod in a sliding mode, the supporting rod is fixed to the bottom of the chemical cleaning tank, and the inner telescopic rod is fixedly installed on the left outer wall and the right outer wall of the dewatering barrel.

Further, fixedly connected with spliced pole on the interior telescopic link, fixedly connected with electronic jar on the spliced pole, electronic jar is fixed in on the chemical cleaning tank.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses mainly adopt the isolating construction, simple structure, the simple operation can be with containing the chemical liquid of dirt in the chemical cleaning tank arrange the filter assembly of chemical cleaning tank below, carries out the centrifugal motion of steady rotation through the filter house that driving motor drove in filter assembly to reach solid-liquid separation's effect, avoid causing discharge line's jam.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic sectional view of the overall structure of the present invention;

FIG. 3 is a schematic view of the drainage portion of the present invention;

fig. 4 is a schematic view of the filter assembly of the present invention;

fig. 5 is a schematic view of the structure of the telescopic portion of the present invention.

In the figure:

1. a chemical cleaning tank; 2. supporting legs; 3. a water discharge section; 31. a drain pipe; 32. a valve; 4. a filter assembly; 41. a filter element; 42. rotating the filter vat; 43. a drive motor; 44. a dewatering barrel; 45. a drain hole; 46. a threaded connection post; 47. a fixed shaft; 5. a telescopic part; 51. a support bar; 52. an inner telescoping rod; 53. an electric cylinder; 54. connecting columns.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and for simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1-5, the present invention details the above technical solution by the following embodiments:

take filtration's chemical cleaning tank, including chemical cleaning tank 1 the container that is used for wasing article, supporting leg 2 is fixed locates chemical cleaning tank 1 bottom all around, drainage part 3 is fixed in the middle of locating chemical cleaning tank 1 bottom, filtering component 4 is fixed locates drainage part 3 below, filtering component 4 includes the filter house, the fixed driving motor 43 that is equipped with in filtering part below, the filter house rotates the chemical liquid that the separation contains the dirt through driving motor 43, pars contractilis 5 is used for connecting chemical cleaning tank 1 and filtering component 4.

Use the technical scheme of this embodiment, set up four supporting legs 2 around chemical cleaning tank 1, can improve chemical cleaning tank 1's stability, have water drainage part 3 in the middle of chemical cleaning tank 1, make things convenient for the inside chemical liquid who contains the dirt of chemical cleaning tank 1 to pass through water drainage part 3 and flow into filtering component 4 of below.

In this embodiment, the drain portion 3 is composed of a drain pipe 31 and a valve 32.

With the above arrangement, the chemical liquid containing dirt in the drain pipe 31 can be freely controlled to enter and exit through the valve 32.

In this embodiment, the filtering part includes a dewatering barrel 44, a rotary filtering barrel 42 is arranged in the dewatering barrel 44, a filtering core 41 is arranged in the rotary filtering barrel 42, and a drainage hole 45 is fixed on the outer surface of the dewatering barrel 44.

Through the arrangement, the dirt-containing chemical liquid is filtered by the filter element 41, the treated liquid flows into the dehydration barrel 44 and finally flows out from the drain hole 45, and the device can better separate the dirt-containing chemical liquid.

In this embodiment, the filtering assembly 4 further includes a threaded connection column 46, and a fixing shaft 47 is fixedly disposed below the threaded connection column 46.

It is supplementary to need, and the bottom surface central point of rotatory lauter tub 42 puts and is equipped with the thread groove of mutually supporting with thread connection post 46, and filter element 41 can be fixed on rotatory lauter tub 42 through the screw thread butt joint between the thread groove of bottom thread connection post 46 and rotatory lauter tub 42, and in the same way, unscrew thread connection post 46 from the thread groove, can realize filtering element 41's dismantlement, can pour out the dirt of inside through this kind of setting.

It should be added that the driving motor 43 is fixed at the bottom of the dehydration barrel 44 in the filtering assembly 4, the output shaft of the driving motor 43 passes through the dehydration barrel 44 and is fixedly connected with the fixed shaft 47, the rotary filtering barrel 42 and the fixed shaft 47 are fixedly connected, and the threaded connection column 46 and the filter element 41 are fixedly connected.

Because fixed axle 47 is being connected driving motor 43's output shaft, so can drive filtering component 4 and rotate the separation to be convenient for chemical cleaning tank 1 and filtering component 4 through pars contractilis 5 connect, realize reciprocating of filtering component 4, conveniently filter and clear up filter core 41 after the chemical liquid that contains the dirt.

In this embodiment, the telescopic part 5 comprises a support rod 51, an inner telescopic rod 52 is slidably connected below the support rod 51, the support rod 51 is fixed at the bottom of the chemical cleaning tank 1, and the inner telescopic rod 52 is fixedly installed on the left and right outer walls of the dewatering barrel 44.

It should be added that the supporting rod 51 and the inner telescopic rod 52 are sleeved together, and the inner telescopic rod 52 can move up and down freely in the supporting rod 51.

Through the setting, be convenient for chemical cleaning tank 1 and filter assembly 4 through pars contractilis 5 and connect, realize reciprocating of filter assembly 4.

In this embodiment, the inner telescopic rod 52 is fixedly connected with a connection column 54, the connection column 54 is fixedly connected with an electric cylinder 53, and the electric cylinder 53 is fixed on the chemical cleaning tank 1.

Through the above arrangement, the filter assembly 4 can be moved up and down by the cooperation of the electric cylinder 53 and the connecting column 54. In the specific using process, a worker unscrews the valve 32 of the water discharging part 3, and the water discharging pipe 31 is located above the filter element 41 and can be connected, so that the chemical liquid containing dirt in the chemical cleaning tank 1 flows into the filter element 41 for filtering, the driving motor 43 drives the rotary filter barrel 42 to rotate, the rotary filter barrel 42 drives the filter element 41 to rotate, solid-liquid separation in the filter element 41 can be accelerated, the effect of filtering the chemical liquid containing dirt is achieved, the separated liquid flows out from the water discharging hole 45 in the dewatering barrel 44, the electric cylinder 53 is started to enable the inner telescopic rod 52 to move downwards, the inner telescopic rod 52 is connected with the dewatering barrel 44, the filter assembly 4 is driven to move downwards, the worker removes the filter element 41 from the filter assembly 4 to clean the dirt in the filter assembly, and similarly, the electric cylinder 53 which is started in the reverse direction can drive the filter assembly 4 to move upwards and be butted with the water discharging part 3.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (6)

1. Take filtration's chemical cleaning tank, its characterized in that: the method comprises the following steps:

a chemical cleaning tank (1), wherein the chemical cleaning tank (1) is used for cleaning a container of articles;

the supporting legs (2) are fixedly arranged at the bottom of the periphery of the chemical cleaning tank (1);

the drainage part (3), the drainage part (3) is fixedly arranged in the middle of the bottom of the chemical cleaning tank (1);

the filter assembly (4) is fixedly arranged below the drainage part (3), the filter assembly (4) comprises a filter part, a driving motor (43) is fixedly arranged below the filter part, and the filter part rotates to separate chemical liquid containing dirt through the driving motor (43);

the telescopic part (5), the telescopic part (5) is used for connecting the chemical cleaning tank (1) and the filtering component (4).

2. A chemical cleaning tank with filter structure as defined in claim 1, wherein: the drain part (3) is composed of a drain pipe (31) and a valve (32) mounted on the drain pipe (31).

3. A chemical cleaning tank with filter structure as defined in claim 1, wherein: the filter part comprises a dehydration barrel (44), a rotary filter barrel (42) is arranged in the dehydration barrel (44), a filter element (41) is arranged in the rotary filter barrel (42), and a drain hole (45) is fixedly arranged on the outer surface of the dehydration barrel (44).

4. A chemical cleaning tank with a filter structure as defined in claim 1, wherein: the filtering part further comprises a threaded connecting column (46), and a fixing shaft (47) is fixedly arranged below the threaded connecting column (46).

5. A chemical cleaning tank with a filter structure as defined in claim 1, wherein: the telescopic part (5) comprises a supporting rod (51), an inner telescopic rod (52) is connected to the lower portion of the supporting rod (51) in a sliding mode, the supporting rod (51) is fixed to the bottom of the chemical cleaning tank (1), and the inner telescopic rod (52) is fixedly installed on the left outer wall and the right outer wall of the dewatering barrel (44).

6. The chemical cleaning tank with filter structure as claimed in claim 5, wherein: the chemical cleaning tank is characterized in that a connecting column (54) is fixedly connected to the inner telescopic rod (52), an electric cylinder (53) is fixedly connected to the connecting column (54), and the electric cylinder (53) is fixed to the chemical cleaning tank (1).

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