CN218769461U

CN218769461U - Sheet material overturning assembly

Info

Publication number: CN218769461U
Application number: CN202222362816.1U
Authority: CN
Inventors: 蔡俊飞; 韩真真; 徐华伟; 沈洵
Original assignee: Zhejiang Zhongling Technology Co ltd
Current assignee: Zhejiang Zhongling Technology Co ltd
Priority date: 2022-09-06
Filing date: 2022-09-06
Publication date: 2023-03-28
Anticipated expiration: 2032-09-06

Abstract

The utility model discloses a sheet material upset subassembly, include: a frame; the returning face plate, the normal running fit includes in the frame: a roll-over plate body; the mounting grooves are positioned at two sides of the turnover plate body; the movable piece is in sliding fit in the mounting groove, the surface of the movable piece is flush with the turnover plate body, and a plurality of adsorption holes are formed in the surface of the movable piece; the air control assembly is arranged on the rack and is connected to the adsorption hole of the movable sheet through an air pipe; the plummer sets up in the frame, is located the returning face plate below, the utility model discloses a remove the both ends that the piece adsorbs the sheet material, the returning face plate upset is placed the sheet material on the plummer, avoids producing great effort with sheet material middle part region, reduces the regional local deformation in sheet material middle part.

Description

Sheet material overturning assembly

Technical Field

The utility model relates to the field of semiconductor technology, concretely relates to sheet material upset subassembly.

Background

In the prior art, when a thin material is overturned, the whole thin material is sucked from a bearing table and attached to the lower surface of a plane, a plane mechanism drives the thin material to overturn upwards under the action of mechanical force, so that suction force can be generated on the whole thin material, certain deformation can be easily generated on the whole thin material, especially when an FMM (metal mask plate) is adsorbed, as the middle area of the FMM is a graphic area, once the deformation occurs, the whole FMM cannot be used, as shown in figure 1, in the prior art, when the FMM is overturned, electrostatic force or magnetic force is used for sucking the FMM from the bearing table and attaching the FMM to the lower surface of the plane, and the plane mechanism drives the FMM to overturn upwards under the action of mechanical force; because the FMM is an ultrathin metal foil, irreversible local deformation is easy to occur under the action of external force.

SUMMERY OF THE UTILITY MODEL

For solving above technical problem, the utility model provides a sheet material upset subassembly adsorbs the both ends of sheet material through removing the piece, and the returning face plate upset is placed the sheet material on the plummer, avoids producing great effort with sheet material middle part region, reduces the regional local deformation in sheet material middle part.

The utility model adopts the following technical proposal: a sheet inversion assembly comprising: a frame; the returning face plate, normal running fit includes in the frame: a roll-over plate body; the mounting grooves are positioned at two sides of the turnover plate body; the movable sheet is in sliding fit in the mounting groove, the surface of the movable sheet is flush with the turnover plate body, and a plurality of adsorption holes are formed in the movable sheet; the air control assembly is arranged on the rack and is connected to the adsorption hole of the movable sheet through an air pipe; the plummer sets up in the frame, is located the returning face plate below.

Preferably, a sliding rod is arranged on the mounting groove, a moving groove is formed in the moving piece, and the moving piece is in sliding fit with the sliding rod through the moving groove.

Preferably, the carrier is a sliding fit on the frame.

Preferably, the plummer both ends are equipped with the guide way, be equipped with the guide post with guide way complex in the frame.

Preferably, a driving motor for driving the bearing table to vertically move is arranged on the rack.

Preferably, a rotating motor for rotating the turnover plate is arranged on the side face of the rack.

Preferably, a distance sensor is arranged on the bearing table.

Preferably, the rack comprises a horizontal plate and vertical plates arranged on two sides of the horizontal plate.

Preferably, the mounting groove is provided with a screw rod, the moving piece is provided with a threaded hole, and the moving piece is matched with the screw rod through the threaded hole.

Compared with the prior art, the utility model has the advantages of it is following:

1. the utility model provides a sheet material upset subassembly adsorbs the both ends of sheet material through removing the piece, and the returning face plate upset is placed the sheet material on the plummer, avoids producing great effort with sheet material middle part region, reduces the regional local deformation in sheet material middle part.

2. The utility model discloses a sheet material upset subassembly can be used for FMM's upset, through removing the both ends that the piece adsorbs FMM, the returning face plate upset is placed FMM on the plummer, avoids producing great effort with FMM's figure district, reduces FMM's figure district's local deformation.

Drawings

Fig. 1 is a schematic structural view of the flip assembly.

FIG. 2 is a schematic view of a moving plate.

Fig. 3 is a schematic structural diagram of the carrier table.

Fig. 4 is a schematic structural view of the roll-over plate.

Fig. 5 is a schematic structural view of the rack.

In the figure, a machine frame 1, a guide post 11, a horizontal plate 12, a vertical plate 13, a turnover plate 2, a turnover plate body 21, a mounting groove 22, a sliding rod 23, a moving sheet 3, an adsorption hole 31, a moving groove 32, a bearing table 4, a guide groove 41, a driving motor 5, a rotating motor 6 and a distance sensor 7 are arranged.

Detailed Description

In order to facilitate understanding of the technical solution of the present invention, the following detailed description is made with reference to the accompanying drawings and specific embodiments.

Example 1

As shown in fig. 1-5, a sheet turning assembly comprises a frame 1, a turning plate 2, a moving sheet 3, an air control assembly, a bearing table 4, a driving motor 5, a rotating motor 6 and a distance sensor 7;

the rack 1 comprises a horizontal plate 12 and vertical plates 13 arranged on two sides of the horizontal plate 12, wherein the two vertical plates 13 are provided with rotating holes; in addition, the two vertical plates 13 are provided with guide posts 11;

the turnover plate 2 is matched on the rack 1 in a rotating mode, two ends of the turnover plate are installed on the rotating holes through rotating shafts, and the turnover plate comprises a turnover plate body 21, an installation groove 22 and a sliding rod 23;

wherein, the mounting grooves 22 are positioned at two sides of the turnover plate body 21, and the wall surface of the mounting grooves is inwards provided with a sliding rod 23;

the present invention is suitable for thin materials, including but not limited to thin materials made of metals such as copper, aluminum, iron, or alloys, and in this embodiment, FMM is used as an example for illustration.

The number of the moving pieces 3 is two, the moving pieces are in sliding fit in the two mounting grooves 22, the positions of the moving pieces can be adjusted according to the length of the FMM, the surface of the moving pieces is flush with the turnover plate body 21, and the moving pieces are provided with a plurality of adsorption holes 31 which can be used for adsorbing two ends of the FMM; specifically, a moving groove 32 engaged with the sliding rod 23 is formed in a side surface of the moving plate 3, and the moving plate 3 is slidably engaged in the mounting groove 22 through the moving groove 32 and is guided by engagement of the moving groove 32 and the sliding rod 23.

The air control assembly is arranged on the frame 1 and is connected to the adsorption hole 31 of the moving sheet 3 through an air pipe; when the air control assembly sucks air, two ends of the FMM can be adsorbed on the moving piece 3, after the FMM is turned over, the air control assembly sprays air outwards to put down the FMM, or the air control assembly stops sucking air and naturally falls down through the dead weight of the FMM;

the bearing table 4 is arranged on the frame 1 and positioned below the turnover plate 2, and two ends of the bearing table are provided with guide grooves 41 in sliding fit with the guide columns 11;

the driving motor 5 is arranged on the vertical plate 13 and is a telescopic motor, and a telescopic rod of the driving motor is connected to the bearing table 4 and drives the bearing table 4 to move up and down;

the rotating motor 6 is arranged on the outer side of the vertical plate 13, connected to the rotating shaft of the turnover plate 2 and used for driving the turnover plate 2 to rotate.

The utility model discloses when using, place FMM on returning face plate 2, FMM's both ends are located two respectively and remove piece 3, at this moment, air control unit bleeds, adsorb FMM, later rotate returning face plate 2 through rotating motor 6, make FMM set up down, upwards remove to the FMM below through 5 drive plummer 4 of driving motor, and less with distance between the FMM, at this moment, air control unit stop work, FMM falls on plummer 4, plummer 4 is under driving motor 5's drive, the downward movement, accomplish FMM's upset process.

As an optimal mode, be equipped with distance sensor 7 on plummer 4 for judge the distance between plummer 4 and the FMM, distance sensor 7 is a prior art, and its method of use is not the utility model discloses a key, the no longer repeated.

When the driving motor 5 drives the bearing platform 4 to move upwards to the position below the FMM, the distance sensor 7 judges that the distance between the bearing platform 4 and the FMM is less than 3mm, and then the driving motor 5 stops moving.

Example 2

The difference between the embodiment 2 and the embodiment 1 is that a screw rod is arranged on the mounting groove 22, one end of the screw rod is connected with a servo motor, a threaded hole is formed in the moving piece 3, and the moving piece 3 is matched with the screw rod through the threaded hole.

The utility model discloses when using, place FMM on returning face plate 2, FMM's both ends are located two removal pieces 3 respectively, this moment, air control assembly bleeds, adsorb FMM, later rotate returning face plate 2 through rotating motor 6, make FMM set up down, because the effect of gravity, the FMM middle part can the downwarping, evens up FMM through servo motor, later upwards remove to the FMM below through 5 drive carrier platforms 4 of driving motor, and the distance is less between the FMM, this moment, air control assembly stop work, FMM falls on carrier platforms 4, carrier platforms 4 is under driving motor 5's drive, the downstream moves, accomplish FMM's upset process.

The above is only the preferred embodiment of the present invention, and the protection scope of the present invention is defined by the scope defined by the claims, and a plurality of modifications and decorations made by those skilled in the art without departing from the spirit and scope of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A sheet inversion assembly, comprising:

a frame (1);

returning face plate (2), normal running fit includes on frame (1):

a roll-over plate body (21);

the mounting grooves (22) are positioned on two sides of the turnover plate body (21);

the moving piece (3) is matched in the mounting groove (22) in a sliding manner, the surface of the moving piece is flush with the turnover plate body (21) and is provided with a plurality of adsorption holes (31);

the air control assembly is arranged on the rack (1) and is connected to the adsorption hole (31) of the moving sheet (3) through an air pipe;

and the bearing table (4) is arranged on the rack (1) and is positioned below the turnover plate (2).

2. A sheet turning assembly according to claim 1, wherein a sliding bar (23) is provided on the mounting groove (22), a moving groove (32) is provided on the moving plate (3), and the moving plate (3) is slidably fitted on the sliding bar (23) through the moving groove (32).

3. A sheet turning assembly according to claim 1, wherein the carrier table (4) is a sliding fit on the frame (1).

4. A sheet turning assembly according to claim 3, characterized in that the carrier table (4) is provided with guide slots (41) at both ends, and the frame (1) is provided with guide posts (11) cooperating with the guide slots (41).

5. A sheet turning assembly according to claim 3, characterized in that the frame (1) is provided with a drive motor (5) for driving the vertical movement of the carrier table (4).

6. A sheet turning assembly according to claim 1, characterized in that the frame (1) is provided with a turning motor (6) for turning the turning plate (2) laterally.

7. A sheet turning assembly according to claim 1, characterized in that the carrier table (4) is provided with a distance sensor (7).

8. A sheet turning assembly according to claim 1, characterized in that the frame (1) comprises a horizontal plate (12) and vertical plates (13) arranged on both sides of the horizontal plate (12).

9. A sheet turnover assembly as claimed in claim 1, wherein the mounting groove (22) is provided with a screw rod, the moving plate (3) is provided with a threaded hole, and the moving plate (3) is engaged with the screw rod through the threaded hole.

10. The sheet turning assembly of claim 1, wherein the sheet is an FMM.