CN218753570U

CN218753570U - Adsorption device and transportation system

Info

Publication number: CN218753570U
Application number: CN202222904642.7U
Authority: CN
Inventors: 胡耿涛; 林生财
Original assignee: Silicon Electric Semiconductor Equipment Shenzhen Co ltd
Current assignee: Silicon Electric Semiconductor Equipment Shenzhen Co ltd
Priority date: 2022-11-01
Filing date: 2022-11-01
Publication date: 2023-03-28
Anticipated expiration: 2032-11-01

Abstract

The utility model discloses an adsorption equipment and conveying system. The utility model discloses an adsorption equipment includes frame and adsorption component. Wherein, adsorption component connects in the frame, and adsorption component is including adsorbing the piece, adsorbs the piece and is provided with main part and protruding portion, and the main part has first terminal surface and second terminal surface, and the protruding portion sets up in the second terminal surface, and a plurality of absorption chambeies are injectd with the main part to the protruding portion, adsorbs the chamber and communicates in the vacuum source, adsorbs the piece and still is provided with a plurality of absorption holes, adsorbs the chamber and is corresponding to a plurality of absorption holes, adsorbs the chamber and first terminal surface that the hole intercommunication corresponds. During the use, after first terminal surface fits the material that has part warpage, partial absorption chamber gas leakage can not influence remaining absorption chamber, makes the size that the absorption that the position that first terminal surface and material laminated completely set up can produce the adsorption affinity can not change to still can produce sufficient adsorption affinity and suck the silicon chip when the deformation degree is less at the material.

Description

Adsorption device and transportation system

Technical Field

The utility model relates to a material transport field, in particular to adsorption equipment and conveying system.

Background

In the correlation technique, when adsorbing the transport to the material, if the surface of material has certain deformation to lead to the contact surface with the sucking disc not completely level and smooth, then probably air leakage appears in the material and the incomplete laminating department of sucking disc, lead to unable absorption or drop in handling, bring inconvenience for the transport flow.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides an adsorption equipment can adsorb the material that has incomplete smooth surface.

The utility model discloses still provide a conveying system with above-mentioned adsorption equipment

According to the utility model discloses an adsorption equipment of first aspect embodiment, including frame and adsorption component. Wherein, adsorption component connect in the frame, adsorption component is including adsorbing the piece, it is provided with main part and protruding portion to adsorb the piece, the main part has the opposite first terminal surface and the second terminal surface of orientation, the protruding portion protruding set up in the second terminal surface, the protruding portion with a plurality of absorption chambeies are injectd to the main part, it can communicate in the vacuum source to adsorb the chamber, it still is provided with a plurality of absorption holes to adsorb the piece, it is corresponding to a plurality of to adsorb the chamber adsorb the hole, the absorption hole intercommunication corresponds adsorb the chamber with first terminal surface, first terminal surface is used for adsorbing the material.

According to the utility model discloses adsorption equipment has following beneficial effect at least: the adsorption member is provided with a plurality of absorption cavities, adsorb the cavity communicate in the vacuum source just is corresponding to a plurality of absorption holes, and the absorption cavity and the first terminal surface that the absorption hole intercommunication corresponds, when first terminal surface laminating has the material of part warpage, part adsorbs the cavity gas leakage and can not influence all the other absorption cavities, makes the size that the absorption hole that the position that first terminal surface and material laminated completely set up can produce can not change to still can produce sufficient adsorption affinity when the material is less at the deformation degree and inhale the silicon chip.

According to the utility model discloses a some embodiments, the main part has the radial of settlement, the second terminal surface still is provided with a plurality of first channels, first channel is followed the circumference direction of main part extends, follows the radial direction of main part, and is a plurality of first channel interval sets up, first channel corresponds a plurality ofly adsorb the hole, it corresponds to adsorb the hole intercommunication first channel and first terminal surface.

According to some embodiments of the utility model, the second terminal surface still is provided with a plurality of second channels, the second channel is followed the radial direction of main part extends, it is corresponding to at least one to adsorb the chamber the second channel, the second channel intercommunication is in a plurality of in same absorption intracavity the first channel, the second channel communicates in the vacuum source.

According to some embodiments of the utility model, the adsorption component still includes the connecting piece, the adsorption component can dismantle connect in the connecting piece, the second terminal surface towards the connecting piece, the connecting piece is provided with the gas pocket, the gas pocket communicate in adsorption cavity and vacuum source.

According to some embodiments of the utility model, the connecting piece is provided with the third terminal surface, the third terminal surface with the second terminal surface laminating, the gas pocket communicate in the third terminal surface, the second terminal surface still is provided with a plurality of first channels and a plurality of second channel, follows the radial direction of main part, it is a plurality of first channel interval sets up, it corresponds to adsorb the hole intercommunication first channel and first terminal surface, the second channel is followed the radial direction of main part extends, the second channel intercommunication is in a plurality of in same absorption intracavity first channel, the gas pocket communicate in the second channel.

According to some embodiments of the present invention, the adsorption assembly further includes a sealing member, the second end surface of the main body portion further includes a receiving groove, the sealing member is disposed between the adsorption member and the connection member, the sealing member is received in the receiving groove and partially protrudes from the receiving groove to form the protruding portion, the sealing member includes a first sealing portion and a plurality of second sealing portions, the receiving groove includes a first receiving portion and a plurality of second receiving portions, the first receiving portion surrounds the periphery of the adsorption member, one ends of the plurality of second receiving portions are communicated with each other, the other ends of the plurality of second receiving portions extend to the connection portion along a radial direction, the first sealing portion corresponds to and is received in the first receiving portion, and each of the second sealing portions corresponds to and is received in each of the second receiving portions.

According to the utility model discloses a some embodiments still include first driving piece, first driving piece connect in the frame, adsorb the piece connect in first driving piece, first driving piece can drive adsorb the piece and remove along the Z axle direction.

According to some embodiments of the utility model discloses a buffer gear still includes, buffer gear includes mounting and elastic component, the mounting connect in first driving piece, the one end of elastic component connect in the mounting, the other end connect in adsorb the subassembly, adsorb the piece can the butt in the material and compress the elastic component.

According to some embodiments of the utility model, still include the CCD camera, the CCD camera connect in the frame or adsorption component, the CCD camera is used for discerning the position of material.

According to the utility model discloses a transportation system of second aspect embodiment, including feed bin, second driving piece and the adsorption equipment that the above-mentioned first aspect embodiment provided. The storage bin is provided with an accommodating cavity, and the accommodating cavity is used for accommodating materials; the adsorption device and the storage bin are arranged at intervals in the Z-axis direction, and the adsorption piece can adsorb materials in the accommodating cavity; the adsorption device is connected to the second driving piece, and the second driving piece can drive the adsorption device to move along the X axis and the Y axis.

According to the utility model discloses transportation system has following beneficial effect at least: the transportation system adopts above-mentioned adsorption equipment and has adsorption equipment's whole advantages at least, and the second driving piece can drive adsorption equipment and remove in X axle direction and Y axle direction, and the second driving piece can drive adsorption equipment and remove to setting for the position after adsorption equipment adsorbs the material, realizes the transport of material.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention will be further described with reference to the following drawings and examples, in which:

FIG. 1 is a schematic view of an adsorption apparatus according to an embodiment of the present invention;

FIG. 2 is an exploded view of an adsorption device according to an embodiment of the present invention;

fig. 3 is an exploded view of an alternative angle of the adsorption device of the embodiment of the present invention;

FIG. 4 is a schematic view of an adsorbing member according to an embodiment of the present invention;

fig. 5 is a schematic view of a sealing member according to an embodiment of the present invention.

Reference numerals:

a frame 100;

the adsorption component 200 and the adsorption member 210;

a main body portion 220, a first end surface 221, a second end surface 222, a first channel 223, a second channel 224, a through hole 225;

the accommodating groove 230, the first accommodating part 231, the second accommodating part 232, the adsorption cavity 240, and the adsorption hole 250;

a connecting piece 260, an air hole 261, a third end face 262 and a joint 263;

a seal 270, a first seal portion 271, and a second seal portion 272;

a protrusion 280;

a first driving member 300;

a buffer mechanism 400, a fixed part 410 and an elastic part 420;

a CCD camera 500.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means is one or more, a plurality of means is two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1 to 5, a first aspect of the present invention provides an adsorption apparatus, including a frame 100 and an adsorption assembly 200. The adsorption component 200 is connected to the rack 100, the adsorption component 200 includes an adsorption member 210, the adsorption member 210 is provided with a main body portion 220 and a protrusion portion 280, the main body portion 220 has a first end surface 221 and a second end surface 222 opposite in orientation, the protrusion portion 280 is protrudingly disposed on the second end surface 222, the protrusion portion 280 and the main body portion 220 define a plurality of adsorption cavities 240, the adsorption cavities 240 are communicated with a vacuum source, the adsorption member 210 is further provided with a plurality of adsorption holes 250, the adsorption cavities 240 correspond to the adsorption holes 250, the adsorption holes 250 are communicated with the corresponding adsorption cavities 240 and the first end surfaces 221, and the first end surfaces 221 are used for adsorbing materials.

For example, the material may be a silicon wafer, and when the silicon wafer is partially warped and the like, if the chuck in the prior art is used, the warping of the silicon wafer may cause air leakage of the chuck, and even if the rest of the flat portion of the silicon wafer can be completely attached to the chuck, the suction force of the chuck at the position may be insufficient to cause incapability of adsorption or dropping after the chuck is sucked up. And adopt the utility model provides an adsorb piece 210 has the warpage at the silicon chip and leads to under the unable first terminal surface 221 condition of can not laminating completely, makes the partial chamber 240 that adsorbs leak gas and can not influence all the other chamber 240 that adsorbs, makes the size that adsorbs that the hole 250 can produce that first terminal surface 221 and the position setting of laminating completely of silicon chip can not change to still can produce sufficient adsorption affinity and inhale the silicon chip when silicon chip warpage degree is less.

In addition, each adsorption cavity 240 corresponds to each vacuum source one-to-one, and because dust may be stained on the material, when the dust enters the accommodating cavity and blocks the corresponding vacuum source during material adsorption, the rest of the vacuum sources are not affected and can still adsorb the material, it should be noted that the plurality of vacuum sources may be formed by separately connecting the same vacuum source to each adsorption cavity 240 through different pipelines, or may be a plurality of mutually independent vacuum sources.

Referring to fig. 2 and 4, in some embodiments, the main body 220 has a set radial direction, the second end face 222 is further provided with a plurality of first grooves 223, the first grooves 223 extend along the circumferential direction of the main body 220, the plurality of first grooves 223 are arranged at intervals along the radial direction of the main body 220, the first grooves 223 correspond to the plurality of adsorption holes 250, and the adsorption holes 250 communicate the corresponding first grooves 223 with the first end face 221. The plurality of adsorption holes 250 are provided at intervals along the extending direction of the first groove 223. The second end surface 222 is provided with the plurality of first grooves 223, the first grooves 223 are communicated with the adsorption holes 250 arranged at intervals, the first grooves 223 are arranged in an arc shape and can contain as many adsorption holes 250 as possible, the adsorption holes 250 can be uniformly distributed on the first end surface 221, the adsorption holes 250 are guaranteed to adsorb materials, the stress of the materials is more uniform, and the damage of the materials caused by the fact that a part of the materials are stressed too much is avoided.

Referring to fig. 2 and 4, in some embodiments, the second end face 222 is further provided with a plurality of second channels 224, the second channels 224 extend in a radial direction of the main body portion 220, the second channels 224 communicate with the plurality of first channels 223 in the same adsorption chamber 240, the adsorption chamber 240 corresponds to at least one of the second channels 224, and the second channels 224 communicate with a vacuum source. The vacuum source can suck air in the plurality of first channels 223 in the same adsorption chamber 240 through the second channels 224, so that the adsorption holes 250 communicated with the first channels 223 generate negative pressure at the first end surface 221 to adsorb materials. The provision of the second channel 224 is effective to reduce the number of vacuum sources required, and it is sufficient that one adsorption chamber 240 corresponds to one vacuum source.

Referring to fig. 1 to 3, in some embodiments, the adsorption assembly 200 further includes a connector 260, the adsorption member 210 is detachably connected to the connector 260, the second end face 222 faces the connector 260, and the connector 260 is provided with an air hole 261, and the air hole 261 is communicated with the adsorption cavity 240 and the air flow source. When any one of the adsorption hole 250, the first groove channel 223 and the second groove channel 224 is blocked, after the adsorption piece 210 and the connecting piece 260 are disassembled, the first groove channel 223 and the second groove channel 224 can be exposed to remove the blocking object, and the maintenance is convenient. Specifically, one end of the connection member 260 away from the adsorption member 210 is provided with a plurality of joints 263, each joint 263 corresponds to and communicates with each air hole 261 one by one, and the vacuum source is connected to the joints 263 through a pipeline. The connection member 260 is provided with a screw hole, and the suction member 210 is provided with a through hole 225. The suction member 210 is inserted into the through hole 225 through a threaded fastener and screwed with a threaded hole formed in the connecting member 260, so that the suction member 210 is detachably connected to the connecting member 260. Alternatively, the connector 260 may be integrally formed with the absorbent member 210, and the protrusion 280 connects the connector 260 and the absorbent member 210 to define a plurality of absorbent cavities 240.

Referring to fig. 2, in some embodiments, the connector 260 is provided with a third end face 262, the third end face 262 is attached to the second end face 222, the air holes 261 are communicated with the third end face 262, the second end face 222 is further provided with a plurality of first slots 223 and a plurality of second slots 224, the plurality of first slots 223 are arranged at intervals along the radial direction of the main body portion 220, the adsorption holes 250 are communicated with the corresponding first slots 223 and the first end face 221, the second slots 224 are extended along the radial direction of the main body portion 220, the second slots 224 are communicated with the plurality of first slots 223 in the same adsorption cavity 240, and the air holes 261 are communicated with the second slots 224. The third end surface 262 is attached to the second end surface 222 such that the adsorption chamber 240 includes only the first channel 223 and the second channel 224, is reduced to enable the adsorption force to be transmitted from the through-hole 225 to each of the adsorption holes 250 via the second channel 224 and the first channel 223,

referring to fig. 3 and 5, in some embodiments, the adsorption assembly 200 further includes a sealing member 270, the second end 222 of the body portion 220 is further provided with a receiving groove 230, the sealing member 270 is disposed between the adsorption member 210 and the connection member 260, the sealing member 270 is received in the receiving groove 230 and partially protrudes out of the receiving groove 230 to form a protruding portion 280, the sealing member 270 includes a first sealing portion 271 and a plurality of second sealing portions 272, the receiving groove 230 includes a first receiving portion 231 and a plurality of second receiving portions 232, the first receiving portion 231 surrounds the periphery of the adsorption member 210, one ends of the plurality of second receiving portions 232 are connected to each other, the other ends of the plurality of second receiving portions 232 extend to and are connected to the first receiving portion 231 in the radial direction, the first sealing portion 271 corresponds to and is received in the first receiving portion 231, and the second sealing portions 272 correspond to and are received in the second receiving portions 232 one to one. Sealing member 270 sets up between adsorbing member 210 and connecting piece 260, adsorbing member 210 locks in connecting piece 260 and with sealing member 270 extrusion deformation, make first sealing 271 can be isolated with adsorption cavity 240 and exterior space, prevent that outside air from flowing into adsorption cavity 240 and leading to the adsorption affinity that adsorbs hole 250 to produce to reduce, the isolated each adjacent adsorption cavity 240 of second sealing 272, do not influence remaining adsorption cavity 240 when adsorbing cavity 240 because the material warpage takes place gas leakage, thereby make the adsorption affinity that adsorption hole 250 that remaining adsorption cavity 240 correspond applyed the material can not reduce, guarantee the adsorption effect of adsorbing member 210 to the material.

Referring to fig. 1, in some embodiments, the suction device further includes a first driving member 300, the first driving member 300 is connected to the frame 100, the suction member 210 is connected to the first driving member 300, and the first driving member 300 can drive the suction member 210 to move along the Z-axis direction. The first driving member 300 drives the suction member 210 to move such that the first end surface 221 is attached to the material, and then the material is lifted, thereby facilitating the subsequent handling operation of the material. Wherein the first driver 300 may be selected as a cylinder.

Referring to fig. 1 to 3, in some embodiments, the adsorption device further includes a buffer mechanism 400, the buffer mechanism 400 includes a fixing element 410 and an elastic element 420, the fixing element 410 is connected to the first driving element 300, one end of the elastic element 420 is connected to the fixing element 410, the other end is connected to the adsorption element 200, and the adsorption element 210 can be abutted against the material to compress the elastic element 420. In the process that the first driving member 300 drives the adsorption assembly 200 to press down to the adsorption member 210 to contact with the material, the buffer mechanism 400 can play a role in buffering, so that severe collision is avoided. For example, when the material is a silicon wafer, the silicon wafer may be damaged if an excessive force is applied to the silicon wafer. After the suction member 210 abuts against the silicon wafer, when the first driving member 300 drives the fixing member 410 to move downward, the suction assembly 200 compresses the elastic member 420 to prevent the silicon wafer from being damaged due to an excessive impulse applied to the silicon wafer. Wherein, the elastic member 420 may be selected to be one of a spring or a gas spring.

Referring to fig. 1 to 3, in some embodiments, the suction device further includes a CCD camera 500, the CCD camera 500 is connected to the frame 100 or the suction assembly 200, and the CCD camera 500 is used to identify the position of the material. Because the position that the material was deposited has the difference, before adsorbing the material, the position of material is shot and discerned to CCD camera 500, removes afterwards and adsorbs, guarantees that first terminal surface 221 can be abundant and the adsorption affinity is good with the material contact.

An embodiment of the second aspect of the present invention provides a transportation system (not shown in the drawings), including a storage bin, a second driving member and the adsorption apparatus provided by the embodiment of the first aspect. Wherein, the feed bin is provided with the holding chamber, and the holding chamber is used for the holding material. Adsorption equipment sets up with the feed bin at Z axle direction interval, adsorbs piece 210 can be by the adsorption material in the holding chamber. The second driving piece is connected to the adsorption equipment, and the second driving piece can drive the adsorption equipment to remove along X axle and Y axle direction, and the second driving piece can drive the adsorption equipment to remove to setting for the position after adsorption equipment adsorbs the material, and for example next station is processed, has realized the transport to the material.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims

1. An adsorption device, comprising:

a frame;

the adsorption component, connect in the frame, the adsorption component is including adsorbing the piece, it is provided with main part and protruding portion to adsorb the piece, the main part has the opposite first terminal surface and the second terminal surface of orientation, the protruding portion protruding set up in the second terminal surface, the protruding portion with a plurality of absorption chambeies are injectd to the main part, it can communicate in the vacuum source to adsorb the chamber, it still is provided with a plurality of absorption holes to adsorb the piece, it is corresponding to a plurality of to adsorb the chamber adsorb the hole, the absorption hole intercommunication corresponds adsorb the chamber with first terminal surface, first terminal surface is used for adsorbing the material.

2. The suction device according to claim 1, wherein said main body portion has a predetermined radial direction, and said second end face is further provided with a plurality of first channels extending in a circumferential direction of said main body portion, said plurality of first channels being arranged at intervals in the radial direction of said main body portion, said first channels corresponding to said plurality of suction holes, said suction holes communicating with said corresponding first channels and said first end face.

3. The suction device of claim 2, wherein said second end face is further provided with a plurality of second channels extending in a radial direction of said body portion, said suction chamber corresponding to at least one of said second channels, said second channels communicating with a plurality of said first channels in the same suction chamber, said second channels communicating with a vacuum source.

4. The suction device according to claim 1, wherein the suction assembly further comprises a connector, the suction member is detachably connected to the connector, the second end face faces the connector, and the connector is provided with an air hole communicated with the suction chamber and the vacuum source.

5. The suction device according to claim 4, wherein the connecting member has a third end surface, the third end surface is attached to the second end surface, the air hole is connected to the third end surface, the second end surface further has a plurality of first channels and a plurality of second channels, the plurality of first channels are spaced apart from each other along a radial direction of the main body, the suction hole is connected to the corresponding first channels and first end surface, the second channels extend along the radial direction of the main body, the second channels are connected to the plurality of first channels in the same suction chamber, and the air hole is connected to the second channels.

6. The suction device as claimed in claim 5, wherein the suction assembly further comprises a sealing member, the second end surface of the main body further comprises a receiving groove, the sealing member is disposed between the suction member and the connecting member, the sealing member is received in the receiving groove and partially protrudes from the receiving groove to form the protrusion, the sealing member comprises a first sealing portion and a plurality of second sealing portions, the receiving groove comprises a first receiving portion and a plurality of second receiving portions, the first receiving portion surrounds the periphery of the suction member, one ends of the second receiving portions are connected to each other, the other ends of the second receiving portions extend to be connected to the first receiving portion along a radial direction, the first sealing portion is correspondingly received in the first receiving portion, and each of the second sealing portions is correspondingly received in each of the second receiving portions.

7. The suction device according to any one of claims 1 to 6, further comprising a first driving member connected to the frame, wherein the suction member is connected to the first driving member, and the first driving member can drive the suction member to move in the Z-axis direction.

8. The suction device as claimed in claim 7, further comprising a buffering mechanism, wherein the buffering mechanism comprises a fixing member and an elastic member, the fixing member is connected to the first driving member, one end of the elastic member is connected to the fixing member, the other end of the elastic member is connected to the suction assembly, and the suction member can abut against the material to compress the elastic member.

9. The suction device as claimed in claim 1, further comprising a CCD camera connected to the frame or the suction assembly, the CCD camera for identifying a position of the material.

10. A transportation system, comprising:

the storage bin is provided with a containing cavity, and the containing cavity is used for containing materials;

the adsorption device of any one of claims 1 to 9, which is spaced from the storage bin in the Z-axis direction, and the adsorption member can adsorb materials from the accommodating cavity;

and the second driving piece is connected with the adsorption device and can drive the adsorption device to move along the X-axis direction and the Y-axis direction.