CN218752809U - Conveying vehicle for wafer transfer box storage vertical warehouse - Google Patents
Conveying vehicle for wafer transfer box storage vertical warehouse Download PDFInfo
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- CN218752809U CN218752809U CN202222819436.6U CN202222819436U CN218752809U CN 218752809 U CN218752809 U CN 218752809U CN 202222819436 U CN202222819436 U CN 202222819436U CN 218752809 U CN218752809 U CN 218752809U
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Abstract
The utility model provides a transport vehicle for a wafer transfer box vertical storage warehouse, which comprises a transport vehicle, side plate blocks, a transport box carrying platform and an upper plate block, wherein the side plate blocks are arranged on the left side and the right side of the transport vehicle, the upper end of the transport vehicle is provided with the upper plate block, the transport box carrying platform is arranged above the upper plate block, and the transport box carrying platform moves back and forth in the horizontal direction; the left end and the right end of the lower end face of the conveying vehicle are both provided with a first lower transverse steel plate, the left part and the right part of the upper end of the conveying vehicle are both provided with a group of second lower transverse steel plates, and the front end and the rear end of each second lower transverse steel plate are both provided with a group of first vertical steel plates; and a first upper transverse steel plate is arranged between the upper ends of the two groups of first vertical steel plates on the second lower transverse steel plate. The utility model discloses usable hold-in range drives the nimble removal of wafer storage box microscope carrier, not only conveniently carries the wafer to store the box, does not adopt the slide rail structure moreover, uses safe and reliable, also helps improve equipment's cleanliness factor.
Description
Technical Field
The utility model relates to a wafer storage technology field, concretely relates to delivery wagon that is used for wafer transfer box storage vertical warehouse.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it is circular in shape, and a wafer storage box is widely used as a carrier for the wafer in order to ensure safe storage, transportation, and transportation of the wafer. In the specification of the comparison document "CN216783681U wafer storage box transfer vehicle body structure", the reference comprises a chassis, a mechanical arm mounting shell and a carrying platform, wherein the chassis is used for arranging a travelling mechanism of a transfer vehicle, the mechanical arm mounting shell is arranged in the middle above the chassis and is used for mounting a multi-axis mechanical arm, the carrying platforms are respectively arranged on the chassis at two sides of the mechanical arm mounting shell, each carrying platform at each side comprises two layers of structures, the two layers of structures are arranged in a staggered manner, a carrying platform is arranged on each layer of structure and is used for placing the wafer storage boxes, although the comparison document can simultaneously carry a plurality of groups of wafer storage boxes, the conveying structure is changed to adopt a slide rail structure for movement, dust is easily accumulated and dropped, the moving sensitivity of a sliding block is influenced, dust in a rail is also not easy to clean, and the use is inconvenient and trouble-saving.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects in the prior art, the conveying vehicle for the wafer conveying box storage vertical warehouse is provided so as to solve the problems that although a plurality of groups of wafer storage boxes can be simultaneously conveyed by comparison files, the conveying structure is changed to adopt a slide rail structure for movement, dust is easily accumulated and falls, the moving sensitivity of a slide block is influenced, the dust in a rail is not easy to clean, and the use is inconvenient and trouble-saving.
In order to achieve the purpose, the conveying vehicle for the wafer conveying box vertical storage comprises a conveying vehicle, side plate blocks, a conveying box carrying platform and an upper plate block, wherein the side plate blocks are arranged on the left side and the right side of the conveying vehicle, the upper plate block is arranged at the upper end of the conveying vehicle, the conveying box carrying platform is arranged above the upper plate block, and the conveying box carrying platform moves back and forth in the horizontal direction.
Furthermore, the left end and the right end of the lower end face of the conveying vehicle are provided with first lower transverse steel plates, a group of second lower transverse steel plates are arranged on the left portion and the right portion of the upper end of the conveying vehicle, and a group of first vertical steel plates are arranged at the front end and the rear end of each second lower transverse steel plate.
Furthermore, a first upper transverse steel plate is arranged between the upper ends of the two groups of first vertical steel plates on the second lower transverse steel plate, a lateral moving plate is arranged between the second lower transverse steel plate and the first upper transverse steel plate on the same side, and the second lower transverse steel plate, the first vertical steel plate and the first upper transverse steel plate on the same side are all located on the lateral plate block.
Further, left idler and right idler are installed to the upper portion of side shift board, and left idler and right idler are controlled and are aimed at the setting to the lower part of side shift board is installed the motor, and the leading end of motor installs the synchronizing wheel, and the while is connected with the hold-in range in the transmission between left idler, synchronizing wheel and the right idler.
Furthermore, the front part of the upper side of the side plate block is provided with a synchronous belt front sleeve seat, the rear part of the upper side of the side plate block is provided with a synchronous belt rear sleeve seat, and the front end and the rear end of the synchronous belt are respectively sleeved between the synchronous belt front sleeve seat and the synchronous belt rear sleeve seat.
Furthermore, the left and right parts of the upper end surface of the transmission box loading platform are provided with positioning columns, the bottom of the transmission box loading platform is provided with a lower connecting seat, the left and right ends of the lower part of the lower connecting seat are provided with sleeve plates, and the sleeve plates are sleeved on the synchronous belt.
Furthermore, both sides of the front part of the upper end surface of the upper plate are provided with magnetic grids, and a magnetic grid ruler is connected between the two groups of magnetic grids.
The beneficial effects of the utility model reside in that:
1. the utility model discloses horizontal steel sheet, second horizontal steel sheet, first vertical steel sheet and first last horizontal steel sheet constitute the lower part frame construction of delivery wagon under first in the delivery wagon, and the structure sets up durable firm, does not set up the slide rail in the delivery wagon moreover, can improve equipment's cleanliness factor.
2. The utility model discloses well hold-in range both ends are fixed, and the activity of rotating under the effect of the drive synchronizing wheel of motor to the hold-in range that connects between drive left idler and the right idler is the transmission activity together, so that drive transmission box microscope carrier synchronous motion, it is more convenient quick to carry.
3. The utility model provides a transmission box microscope carrier can bear the weight of ten kilograms above heavy objects, and the independent transport of transmission box microscope carrier does not set up the slide rail structure, helps improving the cleanliness factor that transmission box microscope carrier used.
Drawings
Fig. 1 is a schematic front view of an embodiment of the present invention;
fig. 2 is a schematic top view of an embodiment of the present invention;
fig. 3 is a schematic cross-sectional structure diagram of an embodiment of the present invention.
In the figure: 1. a delivery wagon; 10. a first lower transverse steel plate; 11. a second lower transverse steel plate; 12. a side moving plate; 13. a first vertical steel plate; 14. a first upper transverse steel plate; 2. a side plate block; 20. a synchronous belt front sleeve seat; 21. a synchronous belt; 22. a synchronous belt rear sleeve seat; 23. a left idler pulley; 24. a synchronizing wheel; 25. a right idler pulley; 26. a motor; 3. a transport box carrier; 30. a positioning column; 31. a lower connecting seat; 32. sheathing; 4. an upper plate; 40. a magnetic grid; 41. a magnetic grid ruler.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects of the present invention to be solved clearer and more obvious, the present invention is further described in detail below with reference to the accompanying drawings and examples. The specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention, such specific details are set forth as a particular system architecture, techniques, etc., in order to provide a more thorough understanding of the embodiments of the invention. The described embodiments are only a subset of the embodiments of the present disclosure, and not all embodiments. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings.
Fig. 1 is a schematic front view, fig. 2 is a schematic top view and fig. 3 is a schematic cross-sectional view of an embodiment of the present invention.
Referring to fig. 1 to 3, the utility model provides a delivery wagon for vertical storehouse of wafer transfer box storage, including delivery wagon 1, side plate block 2, transmission box microscope carrier 3 and last plate 4, the left and right sides of delivery wagon 1 all is provided with side plate block 2, and the upper end of delivery wagon 1 is provided with plate 4, and the top of going up plate block 4 is provided with transmission box microscope carrier 3, and transmission box microscope carrier 3 is at the horizontal direction back-and-forth movement activity.
In the embodiment, the left end and the right end of the lower end surface of the transport vehicle 1 are both provided with a first lower transverse steel plate 10, the left part and the right part of the upper end of the transport vehicle 1 are both provided with a group of second lower transverse steel plates 11, and the front end and the rear end of each second lower transverse steel plate 11 are both provided with a group of first vertical steel plates 13; a first upper transverse steel plate 14 is arranged between the upper ends of two groups of first vertical steel plates 13 on the second lower transverse steel plate 11, a side moving plate 12 is arranged between the second lower transverse steel plate 11 and the first upper transverse steel plate 14 on the same side, and the second lower transverse steel plate 11, the first vertical steel plate 13 and the first upper transverse steel plate 14 on the same side are all positioned on the side plate block 2.
As an embodiment of preferred, the utility model discloses horizontal steel sheet 11, first vertical steel sheet 13 and the first lower horizontal steel sheet 14 that constitutes the lower part frame construction of delivery wagon 1 under first horizontal steel sheet 10, the second in the delivery wagon 1, the structure sets up firmly, does not set up the slide rail moreover in the delivery wagon 1, can improve equipment's cleanliness factor.
In the present embodiment, the upper portion of the side moving plate 12 is mounted with a left idle wheel 23 and a right idle wheel 25, and the left idle wheel 23 and the right idle wheel 25 are arranged in left-right alignment, and the lower portion of the side moving plate 12 is mounted with a motor 26, and the front end of the motor 26 is mounted with a synchronous wheel 24, and a synchronous belt 21 is drivingly connected among the left idle wheel 23, the synchronous wheel 24 and the right idle wheel 25; the front part of the upper side of the side plate block 2 is provided with a synchronous belt front sleeve seat 20, the rear part of the upper side of the side plate block 2 is provided with a synchronous belt rear sleeve seat 22, and the front end and the rear end of the synchronous belt 21 are respectively sleeved between the synchronous belt front sleeve seat 20 and the synchronous belt rear sleeve seat 22.
As a preferred embodiment, the utility model discloses well hold-in range 21 both ends are fixed, and the activity of rotating under the effect of the drive synchronizing wheel 24 of motor 26 to drive the hold-in range 21 that is connected between left idler 23 and the right idler 25 and move together the transmission activity, so that drive transmission box microscope carrier 3 synchronous motion, it is more convenient quick to carry.
In this embodiment, the left and right sides of the upper end surface of the transmission box stage 3 are provided with the positioning columns 30, the bottom of the transmission box stage 3 is provided with the lower connecting seat 31, the left and right sides of the lower part of the lower connecting seat 31 are provided with the sleeve plates 32, and the sleeve plates 32 are sleeved on the timing belt 21.
As an embodiment of preferred, the utility model provides a transmission box microscope carrier 3 can bear the weight of ten kilograms above, and transmission box microscope carrier 3's independent transport does not set up the slide rail structure, helps improving the cleanliness factor that transmission box microscope carrier 3 used.
The utility model discloses can effectively solve the contrast file though can carry multiunit wafer simultaneously and store the box, but change transport structure and adopt the slide rail structure to remove the activity more, store up the ash easily, not only can influence the sensitivity that the slider removed, also the dust is difficult clean in the track moreover, uses the inconvenient problem of saving trouble, the utility model discloses usable hold-in range drives the nimble removal of wafer storage box microscope carrier, not only conveniently carries the wafer storage box, does not adopt the slide rail structure moreover, uses safe and reliable, also helps improve equipment's cleanliness factor.
The above embodiments are provided to explain the present invention rather than to limit the invention, and all modifications and changes made by the invention within the spirit and scope of the claims should be embraced by the scope of the invention.
Claims (7)
1. The utility model provides a delivery wagon for storage of wafer transfer box is founded storehouse, includes delivery wagon (1), side plate piece (2), transmission box microscope carrier (3) and goes up plate (4), its characterized in that: the conveying device is characterized in that side plate blocks (2) are arranged on the left side and the right side of the conveying vehicle (1), an upper plate block (4) is arranged at the upper end of the conveying vehicle (1), a conveying box carrying platform (3) is arranged above the upper plate block (4), and the conveying box carrying platform (3) moves back and forth in the horizontal direction.
2. The transport cart for the foup storage silo according to claim 1, wherein the left and right ends of the lower end surface of the transport cart (1) are provided with a first lower transverse steel plate (10), the left and right ends of the upper end of the transport cart (1) are provided with a set of second lower transverse steel plates (11), and the front and rear ends of the second lower transverse steel plates (11) are provided with a set of first vertical steel plates (13).
3. The transport cart for the foup storage silo according to claim 2, wherein a first upper transverse steel plate (14) is disposed between the upper ends of two sets of first vertical steel plates (13) on the second lower transverse steel plate (11), a side moving plate (12) is disposed between the second lower transverse steel plate (11) and the first upper transverse steel plate (14) on the same side, and the second lower transverse steel plate (11), the first vertical steel plate (13) and the first upper transverse steel plate (14) on the same side are all located on the side plate block (2).
4. The transport cart for the foup storage, according to claim 3, wherein the upper portion of the side moving plate (12) is mounted with a left idle wheel (23) and a right idle wheel (25), and the left idle wheel (23) and the right idle wheel (25) are arranged in left and right alignment, and the lower portion of the side moving plate (12) is mounted with a motor (26), and the front end of the motor (26) is mounted with a synchronous wheel (24), and a synchronous belt (21) is drivingly connected among the left idle wheel (23), the synchronous wheel (24) and the right idle wheel (25).
5. The transport cart for the foup storage bay as claimed in claim 1, wherein the front part of the upper side of the side plate block (2) is installed with a front sleeve seat (20) of a timing belt, the rear part of the upper side of the side plate block (2) is installed with a rear sleeve seat (22) of the timing belt, and the front and rear ends of the timing belt (21) are respectively sleeved between the front sleeve seat (20) of the timing belt and the rear sleeve seat (22) of the timing belt.
6. The conveying cart for the storage of wafer transfer boxes according to claim 1, wherein the left and right ends of the upper end surface of the conveying box carrying platform (3) are provided with positioning posts (30), the bottom of the conveying box carrying platform (3) is provided with a lower connecting seat (31), the left and right ends of the lower part of the lower connecting seat (31) are provided with sleeve plates (32), and the sleeve plates (32) are sleeved on the synchronous belt (21).
7. The transport cart for the foup storage column according to claim 1, wherein the upper plate (4) has magnetic grids (40) on both sides of the front of the upper end surface, and a magnetic grid ruler (41) is connected between the two sets of magnetic grids (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222819436.6U CN218752809U (en) | 2022-10-25 | 2022-10-25 | Conveying vehicle for wafer transfer box storage vertical warehouse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222819436.6U CN218752809U (en) | 2022-10-25 | 2022-10-25 | Conveying vehicle for wafer transfer box storage vertical warehouse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218752809U true CN218752809U (en) | 2023-03-28 |
Family
ID=85701005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222819436.6U Active CN218752809U (en) | 2022-10-25 | 2022-10-25 | Conveying vehicle for wafer transfer box storage vertical warehouse |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218752809U (en) |
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2022
- 2022-10-25 CN CN202222819436.6U patent/CN218752809U/en active Active
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