CN218743553U

CN218743553U - 12 very little throwing motive and construct

Info

Publication number: CN218743553U
Application number: CN202223382547.1U
Authority: CN
Inventors: 李勇刚; 周浩; 刘凯; 张萍; 李玉萍
Original assignee: Hebei Guangchuang Electronic Technology Co ltd
Current assignee: Hebei Guangchuang Electronic Technology Co ltd
Priority date: 2022-12-16
Filing date: 2022-12-16
Publication date: 2023-03-28
Anticipated expiration: 2032-12-16

Abstract

The utility model discloses a 12 cun throw motive and construct relates to semiconductor chip processing equipment technical field, throw motive to current lift and construct and use the cleaning process of 12 cun wafers, because the chip of 12 cun wafers and piece basket quality are great, lead to edge to have great shake and slope when wasing, the edge corrosion of 12 cun wafers is inhomogeneous, and its homogeneity of product after the corruption or wasing can't satisfy operation requirement's problem, proposes following scheme now, and it includes motor power, one side of motor power is provided with a pair of base plate, just one side swing joint of base plate has the bed frame, install piece basket support between the bed frame. The utility model discloses can realize the synchronous throwing of two side supports and move, edge can produce great shake and slope when having avoided wasing, and the edge corrosion is inhomogeneous, only can go up and down to throw and move, and planar shake can not appear, has ensured the effect of corruption, is convenient for transport and installation.

Description

12 very little throwing motive and construct

Technical Field

The utility model relates to a semiconductor chip processing equipment technical field especially relates to a 12 cun casting mechanism.

Background

The yield of a product manufactured by the method is unstable, the corrosive liquid is easy to splash out, the safety is low, the product is influenced by factors such as large size of a 12-inch wafer, large size of a wafer box, heavy weight and the like, the domestic cleaning equipment technology is difficult to clean the 12-inch wafer efficiently, the traditional single-bearing lifting and throwing of 6-inch and below wafers cannot meet the requirement of uniform up-and-down throwing of the 12-inch wafer, the weight of a chip of 6-inch and below and the weight of a corresponding wafer basket are small, and the edge of the single-bearing lifting and throwing mechanism cannot shake or incline too much when driving the chip to throw up and down, so the uniformity of a product after corrosion or cleaning can meet the use requirement.

SUMMERY OF THE UTILITY MODEL

The utility model provides a 12 cun throw motive and construct has solved current lift and has thrown the motive and construct and using the cleaning process of 12 cun wafers, because the chip and the piece basket quality of 12 cun wafers are great, lead to the edge to have great shake and slope when wasing, the inhomogeneous problem of edge corrosion of 12 cun wafers.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a very little actuating mechanism of throwing, includes motor power, the coupling is installed to motor power's output, just the transmission shaft is installed to the other end of coupling, the axle body of transmission shaft is provided with two pairs of fixed disks, motor power's one side is provided with a pair of base plate, through the fixed centre gripping of screw with the base plate between a pair of fixed disk, just one side of base plate is provided with the eccentric wheel, one side swing joint of base plate has the bed frame, just install piece basket support between the bed frame.

Preferably, the eccentric wheel is fixedly installed in the shaft body of the transmission shaft, a first limiting groove is formed in the arc surface of the eccentric wheel, and the fixed disc is connected with the transmission shaft in a bearing mode.

Preferably, two pairs of stop blocks and a pair of limiting strips are fixedly mounted on the surface of one side of the substrate, and a second limiting groove is formed in one side of each limiting strip.

Preferably, the base frame comprises a transverse plate, frame strips are fixedly mounted on the surfaces of two ends of the transverse plate, and the top ends of the frame strips are fixedly mounted with the throwing plates.

Preferably, the one end bottom of diaphragm is provided with the mounting groove, just the surface mounting of mounting groove has the mounting panel, the round wheel is installed to one side of mounting panel, just the round wheel is installed in the mounting groove.

Preferably, the piece basket support comprises a plurality of cross bars, and the surface of cross bar is provided with the flexible glue protective sheath, the top four corners fixed mounting of piece basket support has the connecting block.

The utility model has the advantages that:

1. the utility model discloses a set up the eccentric wheel in one side of base plate for this device has a pair of the same eccentric wheel and goes up and down to throw in the both sides of piece basket simultaneously and moves, and the rotation of a motor supporting double eccentric wheel drives piece basket both sides and throws the synchronous throwing motion that realizes two side support from top to bottom, and edge has great shake and slope when having avoided wasing, and the edge corrosion is inhomogeneous.

2. The utility model discloses a spacing has been set up for this device can ensure that the piece basket only can go up and down to throw when using, and the plane shake can not appear, has ensured the corrosion effect.

3. The utility model discloses simple structure is practical, is convenient for transport and installation.

In conclusion, the synchronous throwing motion of two side supports can be realized to this device, and the edge has great shake and slope when having avoided wasing, and edge corrosion is inhomogeneous, only can go up and down to throw and move, can not appear the plane shake, has ensured corrosion effect, is convenient for transport and installation.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural view of the present invention except for the sheet basket support.

Fig. 3 is a schematic side view of the structure of fig. 2 according to the present invention.

Fig. 4 is a schematic structural view of the sheet basket support of the present invention.

Fig. 5 is an enlarged view of a portion a in fig. 2 according to the present invention.

Fig. 6 is an enlarged view of the point B in fig. 2 according to the present invention.

The reference numbers in the figures: 1. a power motor; 101. a coupling; 102. a drive shaft; 103. fixing the disc; 104. an eccentric wheel; 105. a first limit groove; 2. a substrate; 201. a stopper; 202. a limiting strip; 203. a second limit groove; 3. a base frame; 301. a transverse plate; 302. a frame strip; 303. throwing the plate; 304. mounting grooves; 305. mounting a plate; 306. a round wheel; 4. a wafer basket support; 401. a cross bar; 402. a soft rubber protective sleeve; 403. and (4) connecting the blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-6, a 12-inch throwing mechanism comprises a power motor 1, a coupling 101 is mounted at an output end of the power motor 1 and used for connecting the output end of the power motor 1 with a transmission shaft 102, the other end of the coupling 101 is provided with the transmission shaft 102, a shaft body of the transmission shaft 102 is provided with two pairs of fixed disks 103 used for mounting a substrate 2, one side of the power motor 1 is provided with a pair of substrates 2, the substrates 2 are fixedly clamped between the pairs of fixed disks 103 through screws, one side of each substrate 2 is provided with an eccentric wheel 104, the eccentric wheel 104 rotates to drive a sheet basket support 4 to perform lifting throwing, one side of each substrate 2 is movably connected with a base frame 3, and the sheet basket support 4 is mounted between the base frames 3.

As shown in fig. 2, 5, and 6, the eccentric wheel 104 is fixedly mounted in the shaft body of the transmission shaft 102 and rotates along with the rotation of the transmission shaft 102, the arc surface of the eccentric wheel 104 is provided with a first limiting groove 105, the fixed disk 103 is connected with the transmission shaft 102 in a bearing manner, so that the transmission shaft 102 rotates and the fixed disk 103 does not rotate, one surface of one side of the base plate 2 is fixedly mounted with two pairs of stoppers 201 and one pair of limiting bars 202, the distance between the upper and lower stoppers 201 is the lifting height difference of the sheet basket support 4, one side of the limiting bars 202 is provided with a second limiting groove 203, and the second limiting groove 203 is engaged with a small limiting block arranged on the inner side of the horizontal plate 301, so that the base frame 3 can only be lifted and thrown under the limiting effect of the two limiting grooves.

As shown in fig. 2, 3, 4 and 5, the base frame 3 includes a transverse plate 301, a pair of limiting blocks is disposed on the inner side surface of the transverse plate 301 and is engaged with the second limiting groove 203, a frame bar 302 is fixedly mounted on the two end surfaces of the transverse plate 301 and supports the throwing plate 303, the top end of the frame bar 302 is fixedly mounted with the throwing plate 303, a mounting groove 304 is disposed at the bottom of one end of the transverse plate 301, a mounting plate 305 is mounted on the outer surface of the mounting groove 304, a round wheel 306 is mounted on one side of the mounting plate 305 and is mounted in the mounting groove 304, the arc shape of the round wheel 306 is engaged with the first limiting groove 105, so that a certain limiting effect is formed between the eccentric wheel 104 and the base frame 3, the sheet basket support 4 is composed of a plurality of cross bars 401, a soft rubber protective sleeve 402 is disposed on the surface of the cross bar 401, connecting blocks 403 are fixedly mounted at the four corners of the top end of the sheet basket support 4, and the sheet basket support 4 can be mounted on the surface of the throwing plate 303 by using screws.

The working principle is as follows: when the device is used, firstly, a container filled with 12 inches of wafers and corrosive liquid is placed in the wafer basket support 4, the wafer basket support 4 is installed on the surface of the throwing plate 303, the power motor 1 is started, the transmission shaft 102 rotates to drive the two eccentric wheels 104 to rotate, so that the base frame 3 starts to perform continuous lifting motion, the transverse plate 301 performs reciprocating motion between the stop blocks 201, and meanwhile, the throwing effect is achieved on the corrosion of the wafers, so that the wafers can be corroded uniformly.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a 12 cun throw motive and construct, includes motor power (1), its characterized in that, coupling (101) are installed to the output of motor power (1), just transmission shaft (102) are installed to the other end of coupling (101), the axle body of transmission shaft (102) is provided with two pairs of fixed disks (103), one side of motor power (1) is provided with a pair of base plate (2), through the fixed centre gripping of screw with base plate (2) between a pair of fixed disk (103), just one side of base plate (2) is provided with eccentric wheel (104), one side swing joint of base plate (2) has bed frame (3), just install piece basket support (4) between bed frame (3).

2. A 12 inch throwing mechanism according to claim 1, wherein the eccentric wheel (104) is fixedly mounted in the shaft body of the transmission shaft (102), the cambered surface of the eccentric wheel (104) is provided with a first limiting groove (105), and the fixed disk (103) is in bearing connection with the transmission shaft (102).

3. A 12 inch throwing mechanism according to claim 1, wherein two pairs of stoppers (201) and a pair of limiting bars (202) are fixedly mounted on one side surface of the base plate (2), and a second limiting groove (203) is formed on one side of the limiting bars (202).

4. The 12-inch throwing mechanism is characterized in that the base frame (3) comprises a transverse plate (301), frame strips (302) are fixedly mounted on the two end surfaces of the transverse plate (301), and a throwing plate (303) is fixedly mounted at the top ends of the frame strips (302).

5. The 12-inch throwing mechanism according to claim 4, wherein a mounting groove (304) is formed in the bottom of one end of the transverse plate (301), a mounting plate (305) is mounted on the outer surface of the mounting groove (304), a round wheel (306) is mounted on one side of the mounting plate (305), and the round wheel (306) is mounted in the mounting groove (304).

6. The 12-inch throwing mechanism according to claim 1, wherein the piece basket support (4) is composed of a plurality of cross bars (401), soft rubber protective sleeves (402) are arranged on the surfaces of the cross bars (401), and connecting blocks (403) are fixedly mounted at four corners of the top end of the piece basket support (4).