CN218710957U - Cathode conductive mechanism adaptive to different film widths and electroplating equipment - Google Patents
Cathode conductive mechanism adaptive to different film widths and electroplating equipment Download PDFInfo
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- CN218710957U CN218710957U CN202222409740.3U CN202222409740U CN218710957U CN 218710957 U CN218710957 U CN 218710957U CN 202222409740 U CN202222409740 U CN 202222409740U CN 218710957 U CN218710957 U CN 218710957U
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Abstract
The utility model provides a negative pole electrically conducts mechanism and electroplating device of different film width of adaptation, it includes: first and second conductive parts provided on both sides in the film width direction, each including: the device comprises a first support frame, a second support frame, an upper conductive belt component, a lower conductive belt component, support lugs and upper and lower cross beams; the upper conductive belt component is arranged at the upper end of the first support frame; the upper part of the lower conductive belt component is arranged at the lower end of the first support frame, and the lower part of the lower conductive belt component is arranged on the second support frame; the upper and lower beams are respectively arranged at the front and rear ends of the frame of the electroplating equipment along the length direction of the film; the support lugs are respectively arranged at two ends of the first support frame and the second support frame, and the first conductive part and the second conductive part are respectively arranged on the upper cross beam and the lower cross beam through the support lugs. The utility model discloses can adjust the position adjustment first conductive part of journal stirrup on upper and lower crossbeam length direction with distance between the second conductive part to adapt to the film of different breadth.
Description
Technical Field
The utility model relates to a film electroplating technology field, concretely relates to negative pole electrically conducts mechanism and electroplating device of different film width of adaptation.
Background
In the existing production process of thin film plating, the thin film is usually conducted through a conductive roller, and a layer of plating solution is attached to the surface of the thin film to contact the conductive roller when the thin film passes through the plating solution, so that the surface of the conductive roller is crystallized and plated with copper, and the surface of the thin film is damaged. This is unacceptable for production lines where film quality requirements are high.
At present, a scheme is that a conductive belt is adopted to replace a conductive roller to serve as a cathode for conducting, the conductive belt conducts electricity by contacting two edges of an electroplating film through a certain motion structure, and the situation that the conductive belt is not contacted at other positions except edge positions is achieved, so that the problem that the surface of a metal belt is crystallized or damaged by copper plating is solved.
The existing cathode conductive mechanisms are fixedly arranged on the machine frames at the left side and the right side of the film moving direction, and the conductive belts clamp two edges of the film, namely the conductive belts clamp two ends of the film in the width direction. However, the distances between the cathode conductive mechanisms at the two ends of the film are fixed and cannot be adjusted, and the film electroplating device is only suitable for electroplating films with one width and cannot be adapted to films with different widths.
SUMMERY OF THE UTILITY MODEL
In view of this, an object of the embodiments of the present invention is to provide a cathode conductive mechanism and an electroplating apparatus adapted to different widths of films, so as to solve the technical problem that the distance between the cathode conductive mechanisms on the left and right sides of the electroplating bath is not adjustable, resulting in being applicable to only one width of film.
To achieve the above object, in a first aspect, the present invention provides a cathode conductive mechanism adapted to different film widths, comprising: a first conductive part and a second conductive part disposed on both sides in a film width direction, the first conductive part and the second conductive part each including: the device comprises a first support frame, a second support frame, an upper conductive belt component, a lower conductive belt component, support lugs and upper and lower cross beams;
the upper conductive belt assembly is arranged at the upper end of the first support frame;
the upper part of the lower conductive belt assembly is arranged at the lower end of the first support frame, and the lower part of the lower conductive belt assembly is arranged on the second support frame;
the upper and lower beams are respectively arranged at the front end and the rear end of a frame of the electroplating equipment along the length direction of the film, and the length direction of the upper and lower beams is the same as the width direction of the film;
the support lugs are respectively arranged at two ends of the first support frame and the second support frame, the first conductive part and the second conductive part are respectively arranged on the upper cross beam and the lower cross beam through the support lugs, and the positions of the support lugs in the length direction of the upper cross beam and the lower cross beam are adjusted to adjust the distance between the first conductive part and the second conductive part so as to adapt to films with different widths.
In some possible embodiments, a plurality of limiting holes are respectively formed in two sides of the upper and lower beams along the width direction of the film, a plurality of through holes are formed in the support lug, and the through holes are fixed by screws after being closed with any one of the limiting holes, so that the distance between the first conductive part and the second conductive part is adjusted.
In some possible embodiments, the support lug is a metal support lug, a plastic block is arranged between the support lug and the upper and lower beams, and a hole communicated with the plurality of through holes on the support lug is arranged on the plastic block.
In some possible embodiments, the through holes are strip-shaped holes, and the length direction of the strip-shaped holes is consistent with the width direction of the film.
In some possible embodiments, the limiting hole is circular, and the width of the strip-shaped hole is greater than the diameter of the limiting hole, so as to adjust the position of the lug on the upper and lower beams, so that the first conductive portion and the second conductive portion form a splayed shape.
In some possible embodiments, the upper and lower beams are further provided with fine adjustment blocks respectively arranged at the outer sides of the support lugs, the fine adjustment blocks are provided with threaded holes, and the threaded holes are internally provided with adjusting screws which are abutted against the outer side faces of the support lugs.
In some possible embodiments, scales are further arranged on the upper and lower beams, and pointers are arranged on the support lugs and point to the scales.
In some possible embodiments, a limiting rod is further disposed on the upper and lower cross beams, and the limiting rod is used for limiting the plastic block.
In some possible embodiments, the upper conductive belt assembly comprises:
the device comprises an upper conductive belt, upper conductive belt pulleys in upper and lower rows and an upper driving motor, wherein the upper conductive belt is wrapped outside the upper conductive belt pulleys in the upper and lower rows, and the upper driving motor is connected with any one upper conductive belt pulley;
the lower conductive belt assembly includes: the conductive belt comprises a lower conductive belt, upper and lower rows of lower conductive belt pulleys and a lower driving motor, wherein the lower conductive belt is wrapped outside the upper and lower rows of lower conductive belt pulleys, and the lower driving motor is connected with any one lower conductive belt pulley;
a plurality of first pressing wheels are arranged between the upper conductive belt pulleys at the lower row, and a plurality of second pressing wheels are arranged between the lower conductive belt pulleys at the upper row;
each of the first plurality of wheels is in rolling contact with each of the second plurality of wheels.
In a second aspect, the present invention provides an electroplating apparatus adapted to different film widths, the electroplating apparatus includes a frame, an electroplating bath disposed on the frame, and any one of the above cathode conductive mechanisms, the cathode conductive mechanism is disposed on the frame through an upper cross beam and a lower cross beam, and an electroplating anode mechanism is disposed in the electroplating bath;
the electroplating anode mechanism is a plurality of titanium blues arranged side by side.
The beneficial technical effects of the technical scheme are as follows:
the embodiment of the utility model provides a pair of negative pole electrically conductive mechanism of different film width of adaptation, it includes: first and second conductive parts provided on both sides in a film width direction, each of the first and second conductive parts including: the device comprises a first support frame, a second support frame, an upper conductive belt component, a lower conductive belt component, support lugs and upper and lower cross beams; the upper conductive belt component is arranged at the upper end of the first support frame; the upper part of the lower conductive belt component is arranged at the lower end of the first support frame, and the lower part of the lower conductive belt component is arranged on the second support frame; the upper and lower beams are respectively arranged at the front end and the rear end of a frame of the electroplating equipment along the length direction of the film, and the length direction of the upper and lower beams is the same as the width direction of the film; the journal stirrup is installed respectively at the both ends of first support frame and second support frame, and first conductive part and second conductive part are installed on the crossbeam from top to bottom through the journal stirrup respectively, the utility model discloses can adjust the position adjustment first conductive part of journal stirrup on crossbeam length direction with distance between the second conductive part to adapt to the film of different breadth.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic overall structure diagram of a cathode conductive mechanism according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a cathode conductive mechanism installed in an electroplating apparatus according to an embodiment of the present invention;
fig. 3 is a partial enlarged view of a support lug mounting structure according to an embodiment of the present invention;
fig. 4 is a schematic view of the first conductive part and the second conductive part arranged in a splayed shape according to an embodiment of the present invention;
fig. 5 is a schematic view of the overall structure of an electroplating apparatus according to an embodiment of the present invention.
The reference numbers indicate:
1. a cathode conductive mechanism; 11. a first support frame; 12. a second support frame; 13. an upper conductive belt assembly; 131. an upper conductive belt; 132. an upper conductive pulley; 133. a first pinch roller; 14. a lower conductive belt assembly; 141. a lower conductive belt; 142. a lower conductive pulley; 143. a second pinch roller; 15. supporting a lug; 151. a through hole; 152. a pointer; 16. an upper cross beam and a lower cross beam; 161. a limiting hole; 162. a graduated scale; 163. a limiting rod; 17. a plastic block; 18. fine tuning blocks; 181. a threaded hole;
2. electroplating equipment; 21. an electroplating bath; 22. electroplating positive pole mechanism.
Detailed Description
Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the invention by illustrating examples thereof. In the drawings and the following description, at least some well-known structures and techniques have not been shown in detail in order to avoid unnecessarily obscuring the present invention; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Fig. 1 is a schematic overall structure diagram of a cathode conductive mechanism according to an embodiment of the present invention. As shown in fig. 1, the cathode conductive mechanism 1 includes: first and second conductive parts A and B provided on both sides in the film width direction, each of the first and second conductive parts A and B including: the device comprises a first support frame 11, a second support frame 12, an upper conductive belt assembly 13, a lower conductive belt assembly 14, support lugs 15 and upper and lower cross beams 16; wherein, the upper conductive belt assembly 13 is arranged at the upper end of the first support frame 11; the upper part of the lower conductive belt assembly 14 is arranged at the lower end of the first support frame 11, and the lower part is arranged on the second support frame 12; the upper and lower beams 16 are respectively arranged at the front and rear ends of a frame of the electroplating equipment along the length direction of the film, the length direction of the upper and lower beams 16 is the same as the width direction of the film, the support lugs 15 are respectively arranged at the two ends of the first support frame 11 and the second support frame 12, and the first conductive part A and the second conductive part B are respectively arranged on the upper and lower beams 16 through the support lugs 15; specifically, an upper cross beam 16 and a lower cross beam 16 are respectively arranged at the front end and the rear end of the electroplating device, namely, an upper cross beam and a lower cross beam are arranged at the front end of the electroplating device, an upper cross beam and a lower cross beam are respectively arranged at the rear end of the electroplating device, a first conductive part a and a second conductive part B are respectively movably arranged on the upper cross beam 16 and the lower cross beam 16 through support lugs 15 at the two ends of a first support frame 11 and a second support frame 12, namely, the support lugs 15 at the two ends of the first support frame 11 are arranged on the upper cross beam at the front end and the rear end of the electroplating device, and the support lugs 15 at the two ends of the second support frame 12 are arranged on the lower cross beams at the front end and the rear end of the electroplating device.
The embodiment of the utility model provides a can adjust the distance between first conductive part A and the second conductive part B through adjusting the position of journal stirrup 15 on the length direction of upper and lower crossbeam 16 to adapt to the film of different breadth.
Fig. 2 is a cross-sectional view of a cathode conductive mechanism installed in an electroplating apparatus according to an embodiment of the present invention, and fig. 3 is a partial enlarged view of a support lug installation structure according to an embodiment of the present invention. As shown in fig. 2 and 3, the upper and lower beams 16 are respectively provided with a plurality of limiting holes 161 at two sides along the film width direction, the support lug 15 is provided with a plurality of through holes 151, and the through holes 151 are fixed by screws after being involuted with any one of the limiting holes 161 so as to adjust the distance between the first conductive part a and the second conductive part B.
As shown in fig. 2 and 3, in some embodiments, the support lug 15 may be a metal support lug, a plastic block 17 is disposed between the support lug 15 and the upper and lower cross beams 16, and a hole communicated with a plurality of through holes 151 on the support lug 15 is disposed on the plastic block 17. The embodiment of the utility model provides a carry on spacingly to journal stirrup 15 through plastic block 17, avoid journal stirrup 15 to rock, influence the coating quality.
As shown in fig. 2 and 3, in some embodiments, the through holes 151 are strip-shaped holes, and the length direction of the strip-shaped holes is consistent with the width direction of the film. The embodiment of the utility model provides a through setting up through-hole 151 into the bar hole to can finely tune the mounted position of journal stirrup 15 after the journal stirrup 15 is fixed, with finely tune the distance between first conductive part A and the second conductive part B.
Fig. 4 is a schematic diagram of the first conductive portion and the second conductive portion being disposed in a splayed shape according to an embodiment of the present invention. As shown in fig. 4, in some embodiments, the limiting hole 161 is circular, and the width of the strip-shaped hole is larger than the diameter of the limiting hole 161, so as to adjust the position of the lug 15 on the upper and lower beams 16, so that the first conductive part a and the second conductive part B are in a splayed shape.
The embodiment of the utility model provides an in, because the width in bar hole is greater than the diameter of spacing hole 161, so be located the journal stirrup 15 of electroplating the front end (leaning on the end of unreeling) and can move to the inboard, be located the journal stirrup 15 of electroplating the rear end (leaning on the rolling end) and can pay out to the outside, make the conductive band in the last conductive belt subassembly 13 of first conductive part A splayed. Thus, when the film at the front end of the electroplating is wrinkled in the width direction, the splayed upper conductive belt assembly 13 and the splayed lower conductive belt assembly 14 can be used for driving and stretching, so that the film can be unfolded at the rear end of the electroplating, and the production quality of the film is improved.
As shown in fig. 3, in some embodiments, fine adjustment blocks 18 are further disposed on the upper and lower cross beams 16, and are respectively disposed on the outer side of each support lug 15, a threaded hole 181 is disposed on each fine adjustment block 18, and an adjustment screw is disposed in the threaded hole 181 and abuts against the outer side surface of each support lug 15. The embodiment of the utility model provides an in, through adjusting screw and the lateral surface butt of journal stirrup 15, can finely tune journal stirrup 15, and then finely tune the distance between first conductive part A and the second conductive part B.
As shown in fig. 3, in some embodiments, a scale 162 is further disposed on the upper and lower beams 16, and the pointer 152 is disposed on the support lug 15, and the pointer 152 points to the scale 162. The embodiment of the utility model provides an in, through setting up scale 162 and pointer 152, can the position of accurate regulation journal stirrup 15 on upper and lower crossbeam 16.
In some embodiments, as shown in fig. 3, a limiting rod 163 is further disposed on the upper and lower cross beams 16, and the limiting rod 163 is used for limiting the plastic block 17.
As shown in fig. 1, in some embodiments, the upper conductive belt assembly 13 includes: the electric belt comprises an upper conductive belt 131, upper conductive belt pulleys 132 in upper and lower rows and an upper driving motor, wherein the upper conductive belt 131 is wrapped outside the upper conductive belt pulleys 132 in the upper and lower rows, and the upper driving motor is connected with any one upper conductive belt pulley 132; the lower conductive belt assembly 14 includes: the conductive belt comprises a lower conductive belt 141, upper and lower rows of lower conductive belt pulleys 142 and a lower driving motor, wherein the lower conductive belt 141 is wrapped outside the upper and lower rows of lower conductive belt pulleys 142, and the lower driving motor is connected with any one of the lower conductive belt pulleys 142; a plurality of first pressing wheels 133 are arranged between the upper conductive belt pulleys 132 on the lower row, and a plurality of second pressing wheels 143 are arranged between the lower conductive belt pulleys 142 on the upper row; each of the first plurality of rollers 133 is in rolling contact with each of the second plurality of rollers 143.
Fig. 5 is a schematic view of the overall structure of an electroplating apparatus according to an embodiment of the present invention. As shown in fig. 5, the embodiment of the present invention further provides an electroplating apparatus 2 adapted to different film widths, where the electroplating apparatus 2 includes a frame C, and an electroplating bath 21 and a cathode conductive mechanism 1 disposed on the frame C, the cathode conductive mechanism 1 is disposed on the frame C through an upper cross beam and a lower cross beam 16, an electroplating anode mechanism 22 is disposed in the electroplating bath 21, and the electroplating anode mechanism 22 is a plurality of titanium blues disposed side by side.
In the embodiment of the utility model, because the cathode conductive mechanism 1 is used, the electroplating device 2 can adapt to films with different widths, and the practicability of the electroplating device 2 is improved.
The embodiment of the utility model provides a beneficial effect as follows:
in the embodiment of the present invention, the distance between the first conductive part a and the second conductive part B can be adjusted by adjusting the position of the support lug 15 in the length direction of the upper and lower beams 16, so as to adapt to films with different widths;
in the embodiment of the present invention, the through hole 151 is configured as a strip-shaped hole, so that the mounting position of the support lug 15 can be finely adjusted after the support lug 15 is fixed, so as to finely adjust the distance between the first conductive part a and the second conductive part B;
the embodiment of the utility model provides an in, because the width in bar hole is greater than the diameter of spacing hole 161, so be located the journal stirrup 15 of electroplating the front end (leaning on the end of unreeling) and can move to the inboard, be located the journal stirrup 15 of electroplating the rear end (leaning on the rolling end) and can pay out to the outside, make the conductive band in the last conductive belt subassembly 13 of first conductive part A splayed. Therefore, when the film at the front end of the electroplating is wrinkled in the width direction, the film can be driven and stretched by the splayed upper conductive belt assembly 13 and the splayed lower conductive belt assembly 14, so that the film can be unfolded at the rear end of the electroplating, and the production quality of the film is improved;
the embodiment of the utility model provides an in, through adjusting screw and the lateral surface butt of journal stirrup 15, can finely tune journal stirrup 15, and then finely tune the distance between first conductive part A and the second conductive part B.
In the description of the embodiments of the present invention, it should be noted that the terms "upper, lower, inner and outer" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms first, second, or third are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the embodiments of the present invention, unless explicitly stated or limited otherwise, the terms "mounted, connected" or "connected" should be interpreted broadly, for example: can be fixedly connected, detachably connected or integrally connected; they may be mechanically, electrically, or directly connected, or indirectly connected through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present invention is not intended to be limited to the particular embodiments disclosed herein, but rather to include all embodiments falling within the scope of the appended claims.
Claims (10)
1. A cathode conductor (1) adapted to different film widths, comprising: a first conductive part (A) and a second conductive part (B) provided on both sides in a film width direction, each of the first conductive part (A) and the second conductive part (B) including: the device comprises a first support frame (11), a second support frame (12), an upper conductive belt assembly (13), a lower conductive belt assembly (14), support lugs (15) and upper and lower cross beams (16);
the upper conductive belt assembly (13) is arranged at the upper end of the first support frame (11);
the upper part of the lower conductive belt assembly (14) is arranged at the lower end of the first support frame (11), and the lower part of the lower conductive belt assembly is arranged on the second support frame (12);
the upper and lower beams (16) are respectively arranged at the front end and the rear end of a frame of the electroplating equipment along the length direction of the film, and the length direction of the upper and lower beams (16) is the same as the width direction of the film;
the support lugs (15) are respectively installed at two ends of the first support frame (11) and the second support frame (12), the first conductive part (A) and the second conductive part (B) are respectively installed on the upper cross beam and the lower cross beam (16) through the support lugs (15), and the positions of the support lugs (15) in the length direction of the upper cross beam and the lower cross beam (16) are adjusted to adjust the distance between the first conductive part (A) and the second conductive part (B) so as to adapt to films with different widths.
2. The cathode conductive mechanism (1) adapted to different film widths according to claim 1, wherein a plurality of limiting holes (161) are respectively formed in two sides of the upper and lower beams (16) along the film width direction, a plurality of through holes (151) are formed in the support lug (15), and the through holes (151) are fixed by screws after being abutted with any one of the limiting holes (161) so as to adjust the distance between the first conductive part (a) and the second conductive part (B).
3. The cathode conducting mechanism (1) adapting to different film widths according to claim 1 or 2, wherein the support lug (15) is a metal support lug, a plastic block (17) is arranged between the support lug (15) and the upper and lower cross beams (16), and holes communicated with a plurality of through holes (151) in the support lug (15) are formed in the plastic block (17).
4. The cathode conductive mechanism (1) adapting to different film widths according to claim 2, wherein the through holes (151) are strip-shaped holes, and the length direction of the strip-shaped holes is consistent with the width direction of the films.
5. The cathode conducting mechanism (1) adapting to different film widths according to claim 4, wherein the limiting holes (161) are circular, and the width of the strip-shaped holes is larger than the diameter of the limiting holes (161) so as to adjust the positions of the support lugs (15) on the upper and lower beams (16) to form a splay between the first conducting portion (A) and the second conducting portion (B).
6. The cathode conductive mechanism (1) adapting to different film widths according to claim 1, wherein fine adjustment blocks (18) are further arranged on the upper and lower cross beams (16) and respectively arranged on the outer sides of the support lugs (15), threaded holes (181) are formed in the fine adjustment blocks (18), adjusting screws are arranged in the threaded holes (181), and the adjusting screws are abutted to the outer side faces of the support lugs (15).
7. The cathode conducting mechanism (1) adapting to different film widths according to claim 3, wherein a graduated scale (162) is further arranged on the upper and lower cross beams (16), a pointer (152) is arranged on the support lug (15), and the pointer (152) points to the graduated scale (162).
8. The cathode conducting mechanism (1) adapting to different film widths as recited in claim 3, characterized in that limiting rods (163) are further arranged on the upper and lower beams (16), and the limiting rods (163) are used for limiting the plastic blocks (17).
9. A cathode conductor (1) adapted to different film widths according to claim 1, wherein said upper conductor belt assembly (13) comprises:
the device comprises an upper conductive belt (131), upper conductive belt pulleys (132) in upper and lower rows and an upper driving motor, wherein the upper conductive belt (131) is wrapped outside the upper conductive belt pulleys (132) in the upper and lower rows, and the upper driving motor is connected with any one of the upper conductive belt pulleys (132);
the lower conductive belt assembly (14) includes: the conductive belt comprises a lower conductive belt (141), upper and lower rows of lower conductive belt pulleys (142) and a lower driving motor, wherein the lower conductive belt (141) is wrapped outside the upper and lower rows of lower conductive belt pulleys (142), and the lower driving motor is connected with any one of the lower conductive belt pulleys (142);
a plurality of first pressing wheels (133) are arranged between the upper conductive belt pulleys (132) at the lower row, and a plurality of second pressing wheels (143) are arranged between the lower conductive belt pulleys (142) at the upper row;
each of the first plurality of pressure rollers (133) is in rolling contact with each of the second plurality of pressure rollers (143).
10. An electroplating device (2) adapted to different film widths, wherein the electroplating device (2) comprises a frame (C), an electroplating bath (21) arranged on the frame (C), and a cathode conductive mechanism (1) according to any one of claims 1 to 9, the cathode conductive mechanism (1) is arranged on the frame (C) through an upper cross beam (16) and a lower cross beam (16), and an electroplating anode mechanism (22) is arranged in the electroplating bath (21);
the electroplating anode mechanism (22) is a plurality of titanium blues arranged side by side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222409740.3U CN218710957U (en) | 2022-09-09 | 2022-09-09 | Cathode conductive mechanism adaptive to different film widths and electroplating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222409740.3U CN218710957U (en) | 2022-09-09 | 2022-09-09 | Cathode conductive mechanism adaptive to different film widths and electroplating equipment |
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| Publication Number | Publication Date |
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| CN218710957U true CN218710957U (en) | 2023-03-24 |
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| CN202222409740.3U Active CN218710957U (en) | 2022-09-09 | 2022-09-09 | Cathode conductive mechanism adaptive to different film widths and electroplating equipment |
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| CN (1) | CN218710957U (en) |
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- 2022-09-09 CN CN202222409740.3U patent/CN218710957U/en active Active
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