CN218700297U

CN218700297U - Silicon rod installation mechanism for cutting TTV control

Info

Publication number: CN218700297U
Application number: CN202222876285.8U
Authority: CN
Inventors: 姚小威; 吴福文; 刘毅; 温德星
Original assignee: Wuxi Lianqiang Intelligent Equipment Co ltd
Current assignee: Wuxi Lianqiang Intelligent Equipment Co ltd
Priority date: 2022-10-31
Filing date: 2022-10-31
Publication date: 2023-03-24
Anticipated expiration: 2032-10-31

Abstract

The utility model discloses a silicon rod installation mechanism for cutting TTV control belongs to the semiconductor technology field, comprises a workbench, the clearance fit is provided with brilliant the support and is used for holding in the palm the retaining member that goes on fixing to the brilliant, the lower surface that the brilliant held in the palm is provided with the bonding board, it has the crystal to bond on the bonding board, the fixed gib block that is provided with in bottom of crystal. Therefore, the silicon material can be guided to accurately enter the cutter during cutting, so that the thickness of the silicon wafer is more uniform, and the purpose of controlling TTV of the cut wafer is achieved.

Description

Silicon rod installation mechanism for cutting TTV control

Technical Field

The utility model relates to an installation mechanism especially relates to a silicon rod installation mechanism for cutting TTV control, belongs to the semiconductor technology field.

Background

With the rapid development of the semiconductor industry, the traditional mortar cutting wafer slicing technology cannot meet the development requirements of the industry and is gradually eliminated by diamond wire cutting. Diamond wire slicing has absolute advantages in both efficiency and cost. Therefore, diamond wire slicing machines are becoming the mainstream of the semiconductor industry, but there are many problems to be solved in diamond wire slicing, which require technicians to perform a compromise, for example, TTV control of cutting a crystal made of a silicon material, when the crystal is cut, and when the crystal is fed into a knife, because the crystal is of a cylindrical structure, when the diamond wire is guided, the diamond wire is prone to shift on an arc surface, so that the cutting thickness is not uniform, and the purpose of controlling the TTV of the cut wafer cannot be achieved.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a silicon rod installation mechanism for cutting TTV control, this installation mechanism can guide accurate sword of going into when silicon material cutting to make the thickness of silicon chip more even, reach control cutting wafer TTV's purpose.

In order to solve the problems, the following technical scheme is provided:

the utility model provides a silicon rod installation mechanism for cutting TTV control, includes the workstation, the movable fit is provided with brilliant support and is used for holding in the palm the retaining member that carries out the fixing to the brilliant, the lower surface that the brilliant held in the palm is provided with the bonding board, it has the crystal to bond on the bonding board, the fixed gib block that is provided with in bottom of crystal.

Furthermore, the guide strip is a resin strip with hardness close to that of the silicon material, and the length of the guide strip is greater than that of the crystal.

Furthermore, the guide strip comprises a first part and a second part, the second part is arranged below the first part, the top of the first part is attached to the crystal and is of an arc structure, and the cross section of the second part is of a triangular structure.

Further, the crystal support comprises a plate body, the lower surface of the plate body is bonded with a bonding plate, handles are fixedly arranged on the front side and the rear side of the plate body, a U-shaped connecting strip is fixedly arranged in the middle of the upper surface of the plate body, connecting plates are symmetrically and fixedly arranged at the tops of the U-shaped connecting strip, a first sliding groove is formed between the connecting plates and the inner wall of the U-shaped connecting strip, and a second sliding groove is formed between the lower surface of the connecting plates and the upper surface of the plate body and symmetrically arranged between the lower surface of the connecting plates and the upper surface of the plate body.

Further, the retaining member includes direction slide rail and grafting slide rail, the direction slide rail sets up in the front side of grafting slide rail, the direction slide rail is corresponding with first spout, the grafting slide rail is corresponding with two second spouts, the left and right sides of grafting slide rail is all fixed and is provided with the mount, the mount all rotates and is connected with the transfer line, the transfer line is all fixed and is provided with tight arm of clamp, the workstation is all run through to the one end of transfer line, the fixed drive division that is used for carrying out the drive to the transfer line that is provided with in rear side of workstation.

Furthermore, the driving portion comprises an air cylinder connected with the workbench, a connecting seat is fixedly arranged at the output end of the air cylinder, connecting arms are fixedly arranged at the end portions, extending out of the workbench, of the transmission rods, and connecting pieces are rotatably connected between the connecting seat and the connecting arms.

Furthermore, the connecting piece includes two U-shaped connecting seats, two one side that the U-shaped connecting seat is relative all fixedly is provided with the internal thread sleeve, two internal thread sleeve threaded connection has double thread post, the fixed adjusting disk that is provided with in middle part of double thread post.

Compared with the prior art, the beneficial effects of the utility model reside in that:

1. the bottom of the crystal is provided with the guide strip, when the crystal is cut, the diamond wire net is guided by the guide strip firstly, and is cut into the crystal after being fixed, so that the accuracy of lifting is improved, the thickness of the silicon wafer is more uniform, the purpose of controlling the TTV of the cut silicon wafer is achieved, the cost is lower, the phenomenon of deviation of cutting caused by vibration when the crystal is cut can be effectively avoided by arranging the locking piece, and the accuracy of cutting is further improved;

2. the top of the first part of the guide strip is arranged to be of an arc-shaped structure, so that the attaching area of the guide strip and the crystal can be increased, the connecting strength between the guide strip and the crystal is ensured, the cross section of the second part is arranged to be of a triangular structure, the diamond wire is favorably inserted into a cutter, and the phenomenon of deviation cannot occur during the cutter insertion;

3. through setting up the clamping piece, can effectually press from both sides tight the brilliant support, also can adjust respectively the initial angle that presss from both sides tight arm simultaneously to can also carry out effectual clamp to the brilliant support when the brilliant support appears wearing and tearing.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a perspective view of a preferred embodiment according to the present invention;

fig. 2 is a cross-sectional view of a preferred embodiment in accordance with the present invention;

fig. 3 is a perspective view of a crystal support according to a preferred embodiment of the present invention;

FIG. 4 is a perspective view of a retaining member in accordance with a preferred embodiment of the present invention;

fig. 5 is a disassembled view of a connector according to a preferred embodiment of the present invention.

In the figure: 1. a work table; 2. crystal support; 3. a material sticking plate; 4. a crystal; 5. a guide strip; 6. a plate body; 7. a handle; 8. a U-shaped connecting strip; 9. a connecting plate; 10. a guide slide rail; 11. inserting a slide rail; 12. a fixed mount; 13. a transmission rod; 14. a clamp arm; 15. a cylinder; 16. a connecting seat; 17. a connecting arm; 18. a U-shaped connecting seat; 19. an internally threaded sleeve; 20. a double threaded post; 21. and (4) adjusting a disc.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

As shown in fig. 1-5, the silicon rod mounting mechanism for controlling cutting of a TTV provided in this embodiment includes a workbench 1, a crystal support 2 and a locking member for fixing the crystal support 2 are movably fitted on the workbench 1, a material adhering plate 3 is provided on a lower surface of the crystal support 2, a crystal 4 is adhered on the material adhering plate 3, a guide strip 5 is fixedly provided at a bottom of the crystal 4, when the crystal 4 is cut, a diamond wire net is firstly guided by the guide strip 5, and is cut into the crystal 4 after being fixed, so as to improve accuracy of entering, so that the thickness of the wafer is more uniform, the purpose of controlling cutting of the wafer TTV is achieved, and the cost is lower.

The guide strip 5 is a resin strip with the hardness close to that of the silicon material, the length of the guide strip 5 is larger than that of the crystal 4, and the guide strip 5 is adhered to the crystal 4 by using environment-friendly quick glue.

The guide strip 5 comprises a first part and a second part, the second part is arranged below the first part, the top of the first part is attached to the crystal 4 and is of an arc-shaped structure, the attachment area of the guide strip 5 and the crystal 4 can be increased, the connection strength between the guide strip 5 and the crystal 4 is guaranteed, the cross section of the second part is of a triangular structure, the diamond wire entering knife is facilitated, and the phenomenon of deviation cannot occur when the diamond wire enters the knife.

The crystal support 2 comprises a plate body 6, the lower surface of the plate body 6 is bonded with the material bonding plate 3, handles 7 are fixedly arranged on the front side and the rear side of the plate body 6, a U-shaped connecting strip 8 is fixedly arranged in the middle of the upper surface of the plate body 6, connecting plates 9 are symmetrically and fixedly arranged at the tops of the U-shaped connecting strips 8, a first sliding groove is formed between the two connecting plates 9 and the inner wall of the U-shaped connecting strip 8, and a second sliding groove is formed between the lower surfaces of the two connecting plates 9 and the upper surface of the plate body 6 and symmetrically arranged.

The retaining member includes direction slide rail 10 and grafting slide rail 11, direction slide rail 10 sets up in the front side of grafting slide rail 11, direction slide rail 10 is corresponding with first spout, grafting slide rail 11 is corresponding with two second spouts, the left and right sides of grafting slide rail 11 is all fixed and is provided with mount 12, mount 12 all rotates and is connected with transfer line 13, transfer line 13 is all fixed and is provided with clamping arm 14, workstation 1 is all run through to the one end of transfer line 13, the fixed drive division that is used for carrying out the drive to transfer line 13 that is provided with in rear side of workstation 1.

The driving part comprises a cylinder 15 connected with the workbench 1, a connecting seat 16 is fixedly arranged at the output end of the cylinder 15, a connecting arm 17 is fixedly arranged at the end part of the transmission rod 13 extending out of the workbench 1, and a connecting piece is rotatably connected between the connecting seat 16 and the connecting arm 17.

The connecting piece includes two U-shaped connecting seats 18, and two U-shaped connecting seats 18 one side relative all are fixed and are provided with internal thread sleeve 19, and two internal thread sleeve 19 threaded connection have double thread post 20, and the fixed adjusting disk 21 that is provided with in middle part of double thread post 20 can adjust respectively the initial angle of pressing from both sides tight arm 14 to can also carry out effectual clamp to brilliant support 2 when the brilliant support 2 appears wearing and tearing.

It should be noted that, a touch sensor and a controller are installed on the worktable 1, the touch sensor is electrically connected with the controller, when the handle 7 is in contact with the touch sensor, the touch sensor sends out a signal, and the controller receives the signal and controls the driving part to start to work.

In the silicon rod installation mechanism for cutting TTV control proposed in this embodiment, when in use, the material sticking plate 3 is fixed on the crystal support 2, then the crystal 4 is stuck on the material sticking plate 3, the crystal support 2 is lifted by using a mechanical and manual matching method, the first sliding groove on the crystal support 2 is inserted on the guide sliding rail 10, the crystal support 2 is continuously pushed to be inserted on the insertion sliding rail 11 under the guide of the guide sliding rail 10, when the handle 7 is contacted with the touch sensor, the air cylinder 15 starts to work to drive the connecting seat 16 to move, the connecting arm 17 drives the transmission rod 13 and the clamping arm 14 to start rotating under the transmission of the connecting piece until the crystal support 2 is clamped, and the guide bar 5 is processed by using a numerical control machine according to the size of the crystal 4, until the required size is obtained, the processed guide strip 4 is bonded under the crystal 4 through environment-friendly quick glue, when the diamond wire net is used for cutting the crystal 4, firstly, the guide strip 5 guides the crystal, the diamond wire net cuts the part of the guide strip 5, after the position of the diamond wire net is fixed after the groove to be cut is finished, the diamond wire net is cut into the crystal 4 until the cutting of the material sticking plate 3 is finished, when the crystal support 2 is worn, the adjusting disc 21 rotating in the corresponding direction is that the double-thread column 20 starts to rotate, the internal thread sleeve 19 drives the U-shaped connecting seat 18 to start to move under the action of threads, and the initial angle of the clamping arm 14 is adjusted.

In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, unless otherwise specified and limited, it is to be noted that the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, mechanically or electrically connected, or may be connected between two elements through an intermediate medium, or may be directly connected or indirectly connected, and specific meanings of the terms may be understood by those skilled in the art according to specific situations.

The above is merely a preferred embodiment of the present invention, and not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a silicon rod installation mechanism for cutting TTV control, includes workstation (1), its characterized in that, movable fit is provided with brilliant support (2) and is used for holding in the palm the retaining member that (2) go on fixing to the brilliant, the lower surface that the brilliant held in the palm (2) is provided with bonding board (3), it has crystal (4) to bond on bonding board (3), the fixed gib block (5) that is provided with in bottom of crystal (4).

2. The silicon rod mounting mechanism for cutting TTV control as recited in claim 1, wherein the guide strip (5) is a resin strip with a hardness close to that of silicon material, and the length of the guide strip (5) is longer than that of the crystal (4).

3. The mechanism as recited in claim 2, wherein the guide strip (5) comprises a first portion and a second portion, the second portion is disposed below the first portion, the top of the first portion is in an arc shape and is attached to the crystal (4), and the cross section of the second portion is in a triangular shape.

4. The silicon rod mounting mechanism for cutting TTV control as claimed in claim 1, wherein the crystal support (2) comprises a plate body (6), the lower surface of the plate body (6) is bonded with the material bonding plate (3), handles (7) are fixedly arranged on the front side and the rear side of the plate body (6), a U-shaped connecting strip (8) is fixedly arranged in the middle of the upper surface of the plate body (6), connecting plates (9) are symmetrically and fixedly arranged on the top of the U-shaped connecting strip (8), a first sliding groove is formed between the two connecting plates (9) and the inner wall of the U-shaped connecting strip (8), and a second sliding groove is formed between the lower surface of the two connecting plates (9) and the upper surface of the plate body (6).

5. The silicon rod installation mechanism for cutting TTV control as claimed in claim 4, characterized in that the locking member comprises a guide slide rail (10) and an insertion slide rail (11), the guide slide rail (10) is arranged at the front side of the insertion slide rail (11), the guide slide rail (10) corresponds to a first sliding chute, the insertion slide rail (11) corresponds to two second sliding chutes, fixing frames (12) are fixedly arranged at the left and right sides of the insertion slide rail (11), the fixing frames (12) are rotatably connected with transmission rods (13), the transmission rods (13) are fixedly provided with clamping arms (14), one ends of the transmission rods (13) penetrate through the workbench (1), and a driving part for driving the transmission rods (13) is fixedly arranged at the rear side of the workbench (1).

6. The silicon rod mounting mechanism for cutting TTV control as claimed in claim 5, wherein the driving part comprises a cylinder (15) connected with the workbench (1), the output end of the cylinder (15) is fixedly provided with a connecting base (16), the end of the transmission rod (13) extending out of the workbench (1) is fixedly provided with a connecting arm (17), and a connecting piece is rotatably connected between the connecting base (16) and the connecting arm (17).

7. The silicon rod mounting mechanism for cutting TTV control as claimed in claim 6, wherein the connecting member comprises two U-shaped connecting seats (18), an internal threaded sleeve (19) is fixedly arranged on one side of each of the two U-shaped connecting seats (18), a double-threaded column (20) is connected with the two internal threaded sleeves (19) in a threaded manner, and an adjusting disc (21) is fixedly arranged in the middle of the double-threaded column (20).